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    Optical probe for detecting or irradiating light and near-field optical microscope having such probe and manufacturing method of such probe
    1.
    发明授权
    Optical probe for detecting or irradiating light and near-field optical microscope having such probe and manufacturing method of such probe 失效
    用于检测或照射光的光学探针和具有这种探针的近场光学显微镜及其制造方法

    公开(公告)号：US06215114B1

    公开(公告)日：2001-04-10

    申请号：US09158494

    申请日：1998-09-23

    申请人： Takayuki Yagi ,  Tsutomu Ikeda ,  Ryo Kuroda ,  Yasuhiro Shimada

    发明人： Takayuki Yagi ,  Tsutomu Ikeda ,  Ryo Kuroda ,  Yasuhiro Shimada

    IPC分类号： H01L2100

    CPC分类号： G01Q60/22 ,  Y10S977/862

    摘要： An optical prove for detecting or irradiating evanescent light is manufactured by forming a film having a regulated film thickness on a substrate, then forming a recess from the rear surface of the substrate, and forming a through hole in the film from the side of the recess by etching. The obtained optical probe has a micro-aperture at the tip of the through hole and usually, a plurality of optical probes each having a micro-aperture of uniform profile are formed on a single substrate. In the recess, light-receiving or light-irradiating means may be provided.

    摘要翻译： 用于检测或照射ev逝光的光学证明是通过在基片上形成具有调节膜厚的膜，然后从基片的后表面形成一个凹槽，并从该凹部的一侧形成一个通孔 通过蚀刻。 获得的光学探针在通孔的尖端处具有微孔，并且通常在单个衬底上形成各自具有均匀轮廓的微孔的多个光学探针。 在凹部中，可以设置光接收或光照射装置。

    Probe having micro-projection and manufacturing method thereof
    2.
    发明授权
    Probe having micro-projection and manufacturing method thereof 失效
    探头具有微投影及其制造方法

    公开(公告)号：US06337477B1

    公开(公告)日：2002-01-08

    申请号：US09353153

    申请日：1999-07-14

    申请人： Yasuhiro Shimada ,  Takayuki Yagi ,  Ryo Kuroda

    发明人： Yasuhiro Shimada ,  Takayuki Yagi ,  Ryo Kuroda

    IPC分类号： G12B2100

    CPC分类号： G01Q60/22 ,  Y10S977/875 ,  Y10S977/879

    摘要： A probe with a micro-projection for a near-field scanning optical microscope (NSOM) which comprises a substrate, first and second junction layers which are arranged on the substrate and electrically isolated from each other and which are made of an electroconductive material, and a micro-projection bonded to the substrate by way of the first and second junction layers and having a cavity in the inside. The micro-projection has first and second material layer made of different respective materials and laid one on the other to form a junction interlayer therebetween. The first and second material layers are electrically connected to the first and second junction layers respectively and independently.

    摘要翻译： 一种具有用于近场扫描光学显微镜（NSOM）的微投影的探针，其包括衬底，布置在衬底上并彼此电隔离并且由导电材料制成的第一和第二接合层，以及 微突起通过第一和第二接合层接合到衬底并且在内部具有空腔。 微型突起具有由不同的材料制成的第一和第二材料层，并在另一个之间铺设，以在它们之间形成连接中间层。 第一和第二材料层分别和独立地电连接到第一和第二结层。

    Optical deflector and method of producing same
    7.
    发明授权
    Optical deflector and method of producing same 失效
    光偏转器及其制作方法

    公开(公告)号：US07038834B2

    公开(公告)日：2006-05-02

    申请号：US11101515

    申请日：2005-04-08

    申请人： Takahisa Kato ,  Takayuki Yagi ,  Yasuhiro Shimada

    发明人： Takahisa Kato ,  Takayuki Yagi ,  Yasuhiro Shimada

    IPC分类号： G02B26/08

    CPC分类号： G02B26/085 ,  G02B26/105 ,  H04N5/7441

    摘要： There are provided a small optical deflector that can be driven at a high speed with a low voltage, provides a large angle of deflection, has a low distortion even in high speed operation and has a high static flatness of a reflective surface, and a method of producing the optical deflector. The optical deflector drives a movable plate relative to a supporting substrate to deflect a light incident on a reflective surface and has a configuration in which at least two recesses are formed in a surface of the movable plate on which the reflective surface is not formed, and a magnetic material is provided in the recesses.

    摘要翻译： 提供了能够以低电压高速驱动的小型光学偏转器，提供大的偏转角度，即使在高速运转中也具有低的变形，并且具有反射表面的高静态平坦度， 制造光学偏转器。 光学偏转器相对于支撑基板驱动可移动板以使入射在反射表面上的光偏转，并且具有在其上未形成反射表面的可动板的表面中形成至少两个凹部的构造，以及 在凹部中设置磁性材料。