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    Wire grid polarizer and method of fabricating the same
    4.
    发明授权
    Wire grid polarizer and method of fabricating the same 有权

    公开(公告)号：US09753201B2

    公开(公告)日：2017-09-05

    申请号：US14668617

    申请日：2015-03-25

    Applicant: Samsung Display Co. Ltd.

    Inventor： Su Mi Lee ,  Min Hyuck Kang

    IPC: G02B5/30 ,  G03F7/00 ,  B82Y40/00

    CPC classification number: G02B5/3058 ,  B82Y40/00 ,  G03F7/0002 ,  G03F7/0005

    Abstract: Provided is a method of fabricating a wire grid polarizer, the method comprising an organic light-emitting display panel. According to an aspect of the present disclosure, there is provided a method comprising sequentially stacking a conductive wire pattern layer, a first neutral layer, a guide pattern layer and a second neutral layer on a substrate, forming etch-stop patterns on the second neutral layer, forming second neutral layer patterns and guide patterns by patterning the second neutral layer and the guide pattern layer using the etch-stop patterns, coating a block copolymer of two types of monomer blocks having different etch rates on the first neutral layer and the second neutral layer patterns, aligning the block copolymer, removing one type of monomer blocks from the aligned block copolymer, and patterning the conductive wire pattern layer using the remaining monomer blocks, the second neutral layer patterns, and the guide patterns.

    Wire grid polarizer and method of fabricating the same
    5.
    发明授权
    Wire grid polarizer and method of fabricating the same 有权
    线栅偏振器及其制造方法

    公开(公告)号：US09488765B2

    公开(公告)日：2016-11-08

    申请号：US14924423

    申请日：2015-10-27

    Applicant: Samsung Display Co. Ltd.

    Inventor： Min Hyuck Kang ,  Hyeong Gyu Jang ,  Eun Ae Kwak ,  Moon Gyu Lee

    IPC: H01L27/14 ,  G02B5/30 ,  H01L27/12

    CPC classification number: G02B5/3058 ,  H01L27/124

    Abstract: A wire grid polarizer includes a substrate, and a plurality of wire patterns which is arranged on the substrate at periodic intervals, where the wire patterns include first wire patterns, which are disposed on the substrate, and one or more second wire patterns, which are disposed on one or more of the first wire patterns each of the second wire patterns including at least one of a neutral pattern, a surface treatment pattern and first and second monomer block patterns.

    Abstract translation: 线栅偏振器包括基板和以周期性间隔布置在基板上的多个线图案，其中布线图案包括设置在基板上的第一布线图案和一个或多个第二布线图案， 布置在一个或多个第一线图案中，每个第二线图包括中性图案，表面处理图案和第一和第二单体块图案中的至少一个。

    Wire grid polarizer and method of fabricating the same
    7.
    发明授权
    Wire grid polarizer and method of fabricating the same 有权

    公开(公告)号：US10509150B2

    公开(公告)日：2019-12-17

    申请号：US15871186

    申请日：2018-01-15

    Applicant: Samsung Display Co., Ltd.

    Inventor： Eun Ae Kwak ,  Min Hyuck Kang ,  Moon Gyu Lee

    IPC: G02F1/1335 ,  G02B5/30

    Abstract: A method of fabricating a wire grid polarizer includes sequentially depositing a conductive wire pattern layer, and a plurality of guide patterns which forms one or more trenches therebetween on the conductive wire pattern layer, hydrophobically treating surfaces of the conductive wire pattern layer exposed in the trenches, and the guide patterns, coating the hydrophobically treated conductive wire pattern layer in the trenches with a neutral layer to partially fill the trenches, filling a remainder of the trenches with a block copolymer of two monomers with different etching rates, aligning the block copolymer filled in the trenches, selectively removing blocks of one monomer among the two monomers from the aligned block copolymer, and patterning the conductive wire pattern layer by using blocks of the other monomer among the two monomers remaining in the trenches and the guide patterns as a mask.

    Patterning method and method of manufacturing wire grid polarizer using the same
    8.
    发明授权
    Patterning method and method of manufacturing wire grid polarizer using the same 有权

    公开(公告)号：US09952366B2

    公开(公告)日：2018-04-24

    申请号：US14628985

    申请日：2015-02-23

    Applicant: Samsung Display Co. Ltd.

    Inventor： Min Hyuck Kang ,  Eun Ae Kwak ,  Lei Xie ,  Moon Gyu Lee ,  Hyeong Gyu Jang

    IPC: G03F7/00 ,  G02B5/30

    CPC classification number: G02B5/3058 ,  G03F7/0002

    Abstract: A patterning method includes forming guide layer patterns, which are separated from each other, on a top surface of a base substrate, forming a neutral layer, which includes a random copolymer comprising first blocks or second blocks, on an entirety of the top surface of the base substrate exposed between the guide layer patterns, forming hydrophobic layer patterns which extend from top surfaces of the guide layer patterns to side surfaces of the guide layer patterns and are separated from each other, coating a block copolymer, which comprises the first blocks and the second blocks, on a top surface of the neutral layer exposed between the hydrophobic layer patterns, alternately arranging the first blocks and the second blocks by heat-treating or solvent-annealing the block copolymer, and forming block copolymer patterns by removing the first blocks or the second blocks.

    Method of forming structure including micropattern, method of forming nanopattern, and method of manufacturing display panel for liquid crystal display
    9.
    发明授权
    Method of forming structure including micropattern, method of forming nanopattern, and method of manufacturing display panel for liquid crystal display 有权
    形成结构的方法，包括微图案，形成纳米图案的方法，以及制造用于液晶显示的显示面板的方法

    公开(公告)号：US09140917B2

    公开(公告)日：2015-09-22

    申请号：US14108761

    申请日：2013-12-17

    Applicant: Samsung Display Co., Ltd.

    Inventor： Su Mi Lee ,  Min Hyuck Kang ,  Myung Im Kim ,  Tae Woo Kim ,  Seung-Won Park ,  Xie Lei ,  Moon Gyu Lee

    IPC: G02F1/155 ,  G02F1/1333 ,  G02F1/1335

    CPC classification number: G02F1/1333 ,  G02F1/133528 ,  G02F1/133536 ,  G02F1/133553 ,  G02F1/133555 ,  G02F1/155

    Abstract: A method of forming a micropattern structure includes: coating a structure including a plurality of guide blocks extending in a first direction on a substrate and disposed to be spaced apart from each other in a second direction, which is perpendicular to the first direction, with a sacrificial material; ashing a portion of the sacrificial material to expose upper portions of the plurality of guide blocks; coating the structure with a first material having a polarity that is contrary to a polarity of a filling material filling the structure; heat-treating the structure to chemically bond the first material to the upper portions of the plurality of guide blocks; removing the sacrificial material and excess first material to form a first material cap chemically bonded to the upper portions of the plurality of guide blocks; and filling the structure with the filling material.

    Abstract translation: 一种形成微图案结构的方法包括：涂覆包括在基板上沿第一方向延伸的多个引导块的结构，并且设置成在垂直于第一方向的第二方向上彼此间隔开， 牺牲材料; 灰化所述牺牲材料的一部分以暴露所述多个引导块的上部; 用具有与填充结构的填充材料的极性相反的极性的第一材料涂覆结构; 对所述结构进行热处理以将所述第一材料化学结合到所述多个引导块的上部; 去除牺牲材料和过量的第一材料，以形成化学键合到多个引导块的上部的第一材料帽; 并用填充材料填充结构。

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