Method of preparing porous metal oxide structure
    2.
    发明授权
    Method of preparing porous metal oxide structure 有权
    制备多孔金属氧化物结构的方法

    公开(公告)号:US09138941B2

    公开(公告)日:2015-09-22

    申请号:US14456405

    申请日:2014-08-11

    摘要: Provided is an example method of preparing a porous metal oxide structure, the method including adsorbing a metal oxide precursor onto a template having a networked structure of branched polynucleotides, decomposing and converting the adsorbed metal oxide precursor into a metal oxide, and removing the template. The networked structure of branched polynucleotides may be used as a template so as to facilitate control of the pore structure of a porous metal oxide structure.

    摘要翻译: 提供了制备多孔金属氧化物结构的实例方法,该方法包括将金属氧化物前体吸附到具有支链多核苷酸网络结构的模板上,将吸附的金属氧化物前体分解并转化为金属氧化物,并除去模板。 支链多核苷酸的网络结构可以用作模板,以便于控制多孔金属氧化物结构的孔结构。

    JIG AND PLASMA ETCHING APPARATUS INCLUDING THE SAME
    3.
    发明申请
    JIG AND PLASMA ETCHING APPARATUS INCLUDING THE SAME 审中-公开
    JIG和等离子体蚀刻装置,包括它们

    公开(公告)号:US20150357162A1

    公开(公告)日:2015-12-10

    申请号:US14730460

    申请日:2015-06-04

    摘要: A jig comprises a base constructed and arranged to be exposed to plasma for etching a native oxide layer on electronic devices. A pocket structure is on an upper surface of the base. The pocket structure includes pockets constructed and arranged to receive the electronic devices, The pocket structure has at least one passageway through which the plasma is moved in a horizontal direction between the pockets.

    摘要翻译: 夹具包括构造和布置为暴露于等离子体的基底,用于蚀刻电子器件上的自然氧化物层。 口袋结构位于基座的上表面上。 口袋结构包括构造和布置成容纳电子装置的口袋。口袋结构具有至少一个通道,等离子体通过该通道沿水平方向在口袋之间移动。