公开(公告)号：US09653650B2

公开(公告)日：2017-05-16

申请号：US14992939

申请日：2016-01-11

Applicant: SORAA, INC.

Inventor： Arpan Chakraborty ,  Michael Grundmann ,  Anurag Tyagi

IPC: H01L33/00 ,  H01L21/00 ,  H01L33/32 ,  H01L21/02 ,  H01L33/16 ,  H01L33/06 ,  H01L33/12

CPC classification number: H01L33/32 ,  H01L21/02389 ,  H01L21/0243 ,  H01L21/02433 ,  H01L21/02458 ,  H01L21/0254 ,  H01L33/0075 ,  H01L33/06 ,  H01L33/12 ,  H01L33/16

Abstract: A method for providing (Al,Ga,In)N thin films on Ga-face c-plane (Al,Ga,In)N substrates using c-plane surfaces with a miscut greater than at least 0.35 degrees toward the m-direction. Light emitting devices are formed on the smooth (Al,Ga,In)N thin films. Devices fabricated on the smooth surfaces exhibit improved performance.