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公开(公告)号:US11682648B2
公开(公告)日:2023-06-20
申请号:US17070540
申请日:2020-10-14
Applicant: Samsung Electronics Co., Ltd.
Inventor: Changbo Lee , Kwanhoo Son , Joon Seok Oh
IPC: H01L23/00 , H01L23/522 , H01L21/768 , H01L23/31 , H01L21/56 , H01L21/683 , H01L23/528
CPC classification number: H01L24/20 , H01L21/566 , H01L21/6835 , H01L21/76871 , H01L23/315 , H01L23/5226 , H01L23/5283 , H01L24/11 , H01L24/13 , H01L24/19 , H01L2221/68359 , H01L2224/214
Abstract: Disclosed are semiconductor devices and methods of fabricating the same. The method comprises providing a carrier substrate that includes a conductive layer, placing a semiconductor die on the carrier substrate, forming an insulating layer to cover the semiconductor die on the carrier substrate, forming a via hole to penetrate the insulating layer at a side of the semiconductor die and to expose the conductive layer of the carrier substrate, performing a plating process in which the conductive layer of the carrier substrate is used as a seed to form a via filling the via hole, forming a first redistribution layer on a first surface of the semiconductor die and the insulating layer, removing the carrier substrate, and forming a second redistribution layer on a second surface of the semiconductor die and the insulating layer, the first surface and the second surface being located opposite each other.
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公开(公告)号:US20240194577A1
公开(公告)日:2024-06-13
申请号:US18239167
申请日:2023-08-29
Applicant: Samsung Electronics Co., Ltd.
Inventor: Yoonyoung Jeon , Youngmin Kim , Joonseok Oh , Woongkeon Lee , Changbo Lee
IPC: H01L23/498 , H01L23/31
CPC classification number: H01L23/49838 , H01L23/3107 , H01L23/49822 , H01L23/49866 , H01L24/08
Abstract: A semiconductor package includes a first redistribution structure having at least one first redistribution layer and at least one first insulating layer that are alternately stacked, a semiconductor chip electrically connected to the first redistribution structure, a second insulating layer disposed above the semiconductor chip and having an opening, a pad electrically connected to the first redistribution structure, disposed on the second insulating layer, and overlapping the opening, a pad surface layer disposed on a first region of an upper surface of the pad to overlap the opening, the pad surface layer formed of a first conductive material different from a second conductive material forming the pad. The pad has an anchor portion protruding from a second region of the upper surface of the pad. The anchor portion protrudes to a position higher than that of a lower surface of the pad surface layer.
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公开(公告)号:US11694965B2
公开(公告)日:2023-07-04
申请号:US17406517
申请日:2021-08-19
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Changbo Lee , Joonseok Oh , Byunglyul Park
IPC: H01L23/538 , H01L23/31 , H01L23/00 , H01L21/48 , H01L21/56
CPC classification number: H01L23/5389 , H01L21/4853 , H01L21/4857 , H01L21/565 , H01L23/3128 , H01L23/3135 , H01L23/5383 , H01L23/5386 , H01L24/19 , H01L24/20 , H01L2224/214
Abstract: This invention provides a fan-out semiconductor package, the fan-out semiconductor package includes a frame including one or more insulating layers and having a penetration portion, a semiconductor chip disposed in the penetration portion of the frame and having a connection pad, a connection structure disposed on a lower side of the frame and the semiconductor chip and including a redistribution layer, a first encapsulant covering a back surface of the semiconductor chip and a first region of a top surface of an uppermost insulating layer among the one or more insulating layers of the frame and extending between a sidewall of the penetration portion and a side surface of the semiconductor chip, and a second encapsulant covering a second region of the top surface of the uppermost insulating layer among the one or more insulating layers of the frame and being in contact with a side surface of the first encapsulant on the frame.
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公开(公告)号:US20210118792A1
公开(公告)日:2021-04-22
申请号:US16891663
申请日:2020-06-03
Applicant: Samsung Electronics Co., Ltd.
Inventor: Changbo Lee , Joonseok Oh
IPC: H01L23/498 , H01L23/31 , H01L21/56 , H01L21/311 , H01L23/00 , H01L25/065 , H01L21/48
Abstract: A fan-out type semiconductor package may include a frame, a semiconductor chip, a lower photoimageable dielectric (PID), a lower redistribution layer (RDL), a molding member, a first upper RDL, an upper PID and a second upper RDL. The frame may include an insulation substrate having a cavity and a middle RDL formed through the insulation substrate, with the semiconductor chip arranged in the cavity. The first upper RDL may be arranged on an upper surface of the insulation substrate. The first upper RDL may be connected to an upper end of the middle RDL. The upper PID may be formed on upper surfaces of the frame, the semiconductor chip and the molding member. The second upper RDL may be formed in the upper PID. A photolithography process may be applied to the upper PID so that the second upper RDL formed on the upper PID may have a fine pattern.
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公开(公告)号:US12237252B2
公开(公告)日:2025-02-25
申请号:US17672092
申请日:2022-02-15
Applicant: Samsung Electronics Co., Ltd.
Inventor: Yoonyoung Jeon , Joonseok Oh , Youngmin Kim , Dongheon Kang , Changbo Lee
IPC: H01L23/498 , H01L23/00 , H01L25/065 , H01L25/10
Abstract: A semiconductor package may include at least one first rewiring structure, the at least one first rewiring structure including a plurality of first insulating layers vertically stacked and a plurality of first rewiring patterns included in the plurality of first insulating layers, at least one semiconductor chip on the at least one first rewiring structure, and at least one molding layer covering the at least one semiconductor chip, wherein each of the plurality of first rewiring patterns includes, a first conductive pattern, the first conductive pattern including a curved upper surface, and a first seed pattern covering a side surface and a lower surface of the first conductive pattern, and each of the first seed patterns of the plurality of first rewiring patterns having a same shape.
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公开(公告)号:US20240038740A1
公开(公告)日:2024-02-01
申请号:US18329530
申请日:2023-06-05
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Hyundong Lee , Youngmin Kim , Joonseok Oh , Sangyun Lee , Changbo Lee
IPC: H01L25/10 , H01L23/498 , H01L23/31 , H01L23/00
CPC classification number: H01L25/105 , H01L23/49822 , H01L23/49838 , H01L23/49866 , H01L23/3107 , H01L24/16 , H01L2225/1041 , H01L2225/1058 , H01L2224/16227 , H01L2224/16235 , H01L2924/15174
Abstract: A semiconductor package includes a first wiring structure including a plurality of first redistribution patterns having a plurality of first bottom connection pads and a plurality of first top connection pads and a plurality of first redistribution insulating layers surrounding the plurality of first redistribution patterns, a second wiring structure including a plurality of second redistribution patterns having a plurality of second bottom connection pads and a plurality of second top connection pads and a plurality of second redistribution insulating layers surrounding the plurality of second redistribution patterns, a semiconductor chip interposed between the first wiring structure and the second wiring structure, an encapsulant filling a space between the first wiring structure and the second wiring structure, and a plurality of connection structures passing through the encapsulant and connecting the plurality of first top connection pads to the plurality of second bottom connection pads and arranged around the semiconductor chip.
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公开(公告)号:US11462466B2
公开(公告)日:2022-10-04
申请号:US16891663
申请日:2020-06-03
Applicant: Samsung Electronics Co., Ltd.
Inventor: Changbo Lee , Joonseok Oh
IPC: H01L23/498 , H01L23/31 , H01L21/56 , H01L23/00 , H01L25/065 , H01L21/48 , H01L21/311
Abstract: A fan-out type semiconductor package may include a frame, a semiconductor chip, a lower photoimageable dielectric (PID), a lower redistribution layer (RDL), a molding member, a first upper RDL, an upper PID and a second upper RDL. The frame may include an insulation substrate having a cavity and a middle RDL formed through the insulation substrate, with the semiconductor chip arranged in the cavity. The first upper RDL may be arranged on an upper surface of the insulation substrate. The first upper RDL may be connected to an upper end of the middle RDL. The upper PID may be formed on upper surfaces of the frame, the semiconductor chip and the molding member. The second upper RDL may be formed in the upper PID. A photolithography process may be applied to the upper PID so that the second upper RDL formed on the upper PID may have a fine pattern.
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公开(公告)号:US20240297122A1
公开(公告)日:2024-09-05
申请号:US18592829
申请日:2024-03-01
Applicant: Samsung Electronics Co., Ltd.
Inventor: Hyundong Lee , Youngmin Kim , Minji Kim , Joonseok Oh , Changbo Lee
IPC: H01L23/538 , H01L23/00 , H01L23/31 , H01L23/498 , H01L25/10 , H10B80/00
CPC classification number: H01L23/5386 , H01L23/3128 , H01L23/49811 , H01L23/5385 , H01L24/08 , H01L25/105 , H10B80/00 , H01L24/16 , H01L2224/08225 , H01L2224/16227
Abstract: Provided is a semiconductor package including a first chip, a first chip pad on an upper surface of the first chip, an upper redistribution structure above the first chip, a lowermost via pattern within the upper redistribution structure and non-overlapping with the first chip pad in a vertical direction, and a connection pattern electrically connecting the first chip pad to the lowermost via pattern, wherein the connection pattern overlaps each of the first chip pad and the lowermost via pattern in a vertical direction.
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公开(公告)号:US12199060B2
公开(公告)日:2025-01-14
申请号:US18143983
申请日:2023-05-05
Applicant: Samsung Electronics Co., Ltd.
Inventor: Changbo Lee , Kwanhoo Son , Joon Seok Oh
IPC: H01L23/522 , H01L21/56 , H01L21/683 , H01L21/768 , H01L23/00 , H01L23/31 , H01L23/528
Abstract: Disclosed are semiconductor devices and methods of fabricating the same. The method comprises providing a carrier substrate that includes a conductive layer, placing a semiconductor die on the carrier substrate, forming an insulating layer to cover the semiconductor die on the carrier substrate, forming a via hole to penetrate the insulating layer at a side of the semiconductor die and to expose the conductive layer of the carrier substrate, performing a plating process in which the conductive layer of the carrier substrate is used as a seed to form a via filling the via hole, forming a first redistribution layer on a first surface of the semiconductor die and the insulating layer, removing the carrier substrate, and forming a second redistribution layer on a second surface of the semiconductor die and the insulating layer, the first surface and the second surface being located opposite each other.
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公开(公告)号:US20240047357A1
公开(公告)日:2024-02-08
申请号:US18307109
申请日:2023-04-26
Applicant: Samsung Electronics Co., Ltd.
Inventor: Yoonyoung Jeon , Youngmin Kim , Joon Seok Oh , Changbo Lee
IPC: H01L23/532 , H01L23/528 , H01L21/768
CPC classification number: H01L23/53238 , H01L23/528 , H01L21/76843 , H01L21/76802 , H01L21/76877
Abstract: An interconnection structure includes a first dielectric layer, a second dielectric layer, first wiring patterns, and a first conductive pattern. The first wiring patterns respectively include a first penetration part that extends into a surface of the first dielectric layer, a first intervention part on the first penetration part and in the second dielectric layer, and a first connection part on the first intervention part and in the second dielectric layer. A top surface of the first intervention part is at a same level as a top surface of the first conductive pattern relative to the surface of the first dielectric layer. An angle between a sidewall of the first connection part and the top surface of the first intervention part is greater than that between a sidewall of the first penetration part and a bottom surface of the first dielectric layer.
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