METHOD OF FORMING PATTERNS FOR SEMICONDUCTOR DEVICE
    2.
    发明申请
    METHOD OF FORMING PATTERNS FOR SEMICONDUCTOR DEVICE 审中-公开
    形成半导体器件的图案的方法

    公开(公告)号:US20150104944A1

    公开(公告)日:2015-04-16

    申请号:US14276502

    申请日:2014-05-13

    CPC classification number: H01L21/0331 H01L33/10 H01L2933/0016

    Abstract: There is provided a method of forming patterns for a semiconductor device. The method sequentially forming a first mask layer and a second mask layer on a substrate. The method also includes forming a second mask pattern layer by patterning the second mask layer. The method further includes forming a first mask pattern layer having a negative slope portion, by etching the first mask layer exposed through the second mask pattern layer. The method also includes forming a thin film layer on the substrate exposed through the first mask pattern layer.

    Abstract translation: 提供了一种形成半导体器件的图案的方法。 该方法在衬底上依次形成第一掩模层和第二掩模层。 该方法还包括通过图案化第二掩模层来形成第二掩模图案层。 该方法还包括通过蚀刻通过第二掩模图案层暴露的第一掩模层来形成具有负斜率部分的第一掩模图案层。 该方法还包括在通过第一掩模图案层暴露的衬底上形成薄膜层。

Patent Agency Ranking