Hybrid bonding structures, semiconductor devices having the same, and methods of manufacturing the semiconductor devices

    公开(公告)号:US12288765B2

    公开(公告)日:2025-04-29

    申请号:US17477806

    申请日:2021-09-17

    Abstract: Provided are a hybrid bonding structure, a solder paste composition, a semiconductor device, and a method of manufacturing the semiconductor device. The hybrid bonding structure includes a solder ball and a solder paste bonded to the solder ball. The solder paste includes a transient liquid phase. The transient liquid phase includes a core and a shell on a surface of the core. A melting point of the shell may be lower than a melting point of the core. The core and the shell are configured to form an intermetallic compound in response to the transient liquid phase at least partially being at a temperature that is within a temperature range of about 20° C. to about 190° C.

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