PRESSURE SENSOR AND PRESSURE SENSING METHOD
    8.
    发明申请
    PRESSURE SENSOR AND PRESSURE SENSING METHOD 有权
    压力传感器和压力传感方法

    公开(公告)号:US20140060210A1

    公开(公告)日:2014-03-06

    申请号:US14018505

    申请日:2013-09-05

    CPC classification number: G01L1/16 H01L29/84

    Abstract: A pressure sensor and a pressure sensing method are provided. The pressure sensor includes a substrate; a sensor thin film transistor (TFT) disposed on the substrate and including a gate insulating layer, wherein the gate insulating layer includes an organic matrix in which piezoelectric inorganic nano-particles are dispersed; a power unit configured to apply an alternating current (AC) signal to a gate of the sensor TFT; and a pressure sensing unit configured to obtain a remnant polarization value based on a drain current which is generated in response to the AC signal and detected by the sensor TFT, and to sense a pressure based on the remnant polarization value.

    Abstract translation: 提供压力传感器和压力感测方法。 压力传感器包括基板; 设置在所述基板上并且包括栅极绝缘层的传感器薄膜晶体管(TFT),其中所述栅极绝缘层包括其中分散有压电无机纳米颗粒的有机基质; 功率单元,配置为向传感器TFT的栅极施加交流(AC)信号; 以及压力感测单元,被配置为基于根据所述AC信号产生并由所述传感器TFT检测的漏极电流获得残留极化值,并且基于所述剩余极化值感测压力。

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