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公开(公告)号:US10483456B2
公开(公告)日:2019-11-19
申请号:US16191727
申请日:2018-11-15
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Sang Hwan Park , Whankyun Kim , Keewon Kim , Youngman Jang
Abstract: A semiconductor memory device includes free magnetic pattern on a substrate, a reference magnetic pattern on the free magnetic pattern, the reference magnetic pattern including a first pinned pattern, a second pinned pattern, and an exchange coupling pattern between the first and second pinned patterns, a tunnel barrier pattern between the reference magnetic pattern and the free magnetic pattern, a polarization enhancement magnetic pattern between the tunnel barrier pattern and the first pinned pattern, and an intervening pattern between the polarization enhancement magnetic pattern and the first pinned pattern, wherein the first pinned pattern includes first ferromagnetic patterns and anti-ferromagnetic exchange coupling patterns which are alternately stacked.
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公开(公告)号:US20190013462A1
公开(公告)日:2019-01-10
申请号:US16114964
申请日:2018-08-28
Applicant: Samsung Electronics Co., Ltd.
Inventor: Sung Chul Lee , Ki Woong Kim , Sang Hwan Park , Sechung Oh
CPC classification number: H01L43/08 , H01F10/12 , H01F10/3204 , H01F10/3272 , H01L27/222 , H01L43/10 , H01L43/12
Abstract: A magnetic memory device includes a reference magnetic structure, a free magnetic structure, and a tunnel barrier pattern between the reference magnetic structure and the free magnetic structure. The reference magnetic structure includes a first pinned pattern, a second pinned pattern between the first pinned pattern and the tunnel barrier pattern, and an exchange coupling pattern between the first and the second pinned pattern. The second pinned pattern includes a first magnetic pattern adjacent the exchange coupling pattern, a second magnetic pattern adjacent the tunnel barrier pattern, a third magnetic pattern between the first and the second magnetic pattern, a first non-magnetic pattern between the first and the third magnetic pattern, and a second non-magnetic pattern between the second and the third magnetic pattern. The first non-magnetic pattern has a different crystal structure from the second non-magnetic pattern, and at least a portion of the third magnetic pattern is amorphous.
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公开(公告)号:US09184376B2
公开(公告)日:2015-11-10
申请号:US14315610
申请日:2014-06-26
Applicant: Samsung Electronics Co., Ltd.
Inventor: Sang Hwan Park , Soonoh Park , Sangyong Kim , Joonmyoung Lee
CPC classification number: H01L43/10 , G11C11/161 , H01L43/08
Abstract: A magnetic memory device may include a substrate and a magnetic tunnel junction memory element on the substrate. The magnetic tunnel junction memory element may include a reference magnetic layer, a tunnel barrier layer, and a free magnetic layer. The reference magnetic layer may include a first pinned layer, an exchange coupling layer, and a second pinned layer. The exchange coupling layer may be between the first and second pinned layers, and the second pinned layer may include a ferromagnetic layer and a non-magnetic layer. The second pinned layer may be between the first pinned layer and the tunnel barrier layer, and the tunnel barrier layer may be between the reference magnetic layer and the free magnetic layer.
Abstract translation: 磁存储器件可以在衬底上包括衬底和磁性隧道结存储元件。 磁性隧道结存储元件可以包括参考磁性层,隧道势垒层和自由磁性层。 参考磁性层可以包括第一固定层,交换耦合层和第二固定层。 交换耦合层可以在第一和第二被钉扎层之间,并且第二被钉扎层可以包括铁磁层和非磁性层。 第二被钉扎层可以在第一被钉扎层和隧道势垒层之间,并且隧道势垒层可以在参考磁性层和自由磁性层之间。
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公开(公告)号:US09825216B2
公开(公告)日:2017-11-21
申请号:US15244498
申请日:2016-08-23
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Sang Hwan Park , Whankyun Kim , Keewon Kim , Youngman Jang
CPC classification number: H01L43/02 , H01F10/3254 , H01F10/3272 , H01L27/222 , H01L27/228 , H01L43/08 , H01L43/10 , H01L43/12
Abstract: A semiconductor memory device includes free magnetic pattern on a substrate, a reference magnetic pattern on the free magnetic pattern, the reference magnetic pattern including a first pinned pattern, a second pinned pattern, and an exchange coupling pattern between the first and second pinned patterns, a tunnel barrier pattern between the reference magnetic pattern and the free magnetic pattern, a polarization enhancement magnetic pattern between the tunnel barrier pattern and the first pinned pattern, and an intervening pattern between the polarization enhancement magnetic pattern and the first pinned pattern, wherein the first pinned pattern includes first ferromagnetic patterns and anti-ferromagnetic exchange coupling patterns which are alternately stacked.
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公开(公告)号:US10153422B2
公开(公告)日:2018-12-11
申请号:US15814588
申请日:2017-11-16
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Sang Hwan Park , Whankyun Kim , Keewon Kim , Youngman Jang
Abstract: A semiconductor memory device includes free magnetic pattern on a substrate, a reference magnetic pattern on the free magnetic pattern, the reference magnetic pattern including a first pinned pattern, a second pinned pattern, and an exchange coupling pattern between the first and second pinned patterns, a tunnel barrier pattern between the reference magnetic pattern and the free magnetic pattern, a polarization enhancement magnetic pattern between the tunnel barrier pattern and the first pinned pattern, and an intervening pattern between the polarization enhancement magnetic pattern and the first pinned pattern, wherein the first pinned pattern includes first ferromagnetic patterns and anti-ferromagnetic exchange coupling patterns which are alternately stacked.
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公开(公告)号:US11735241B2
公开(公告)日:2023-08-22
申请号:US17202648
申请日:2021-03-16
Applicant: Samsung Electronics Co., Ltd.
Inventor: Hee Ju Shin , Sang Hwan Park , Se Chung Oh , Ki Woong Kim , Hyeon Woo Seo
CPC classification number: G11C11/161 , H01F10/3286 , H10N50/01 , H10N50/10 , H10N50/80 , H10N50/85
Abstract: A magnetic memory device includes a pinned layer, a free layer, a tunnel barrier layer between the pinned layer and the free layer, a first oxide layer spaced apart from the tunnel barrier layer with the free layer therebetween, and a second oxide layer spaced apart from the free layer with the first oxide layer therebetween. The first oxide layer includes an oxide of a first material and may have a thickness of 0.3 Å to 2.0 Å. The second oxide layer may include an oxide of a second material and may have a thickness of 0.1 Å to 5.0 Å. A first oxygen affinity of the first material may be greater than a second oxygen affinity of the second material.
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公开(公告)号:US11706931B2
公开(公告)日:2023-07-18
申请号:US17230029
申请日:2021-04-14
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Jae Hoon Kim , Sang Hwan Park , Yong-Sung Park , Hyeonwoo Seo , Se Chung Oh , Hyun Cho
CPC classification number: H10B61/22 , H10B63/34 , H10B63/845
Abstract: A variable resistance memory device including a substrate; horizontal structures spaced apart from each other in a first direction perpendicular to a top surface of the substrate; variable resistance patterns on the horizontal structures, respectively; and conductive lines on the variable resistance patterns, respectively, wherein each of the horizontal structures includes a first electrode pattern, a semiconductor pattern, and a second electrode pattern arranged along a second direction parallel to the top surface of the substrate, and each of the variable resistance patterns is between one of the second electrode patterns and a corresponding one of the conductive lines.
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公开(公告)号:US11672183B2
公开(公告)日:2023-06-06
申请号:US16803051
申请日:2020-02-27
Applicant: Samsung Electronics Co., Ltd.
Inventor: Sang Hwan Park , Jae Hoon Kim , Younghyun Kim
CPC classification number: H01L43/02 , H01F10/329 , H01F10/3254 , H01F10/3268 , H01F10/3286 , H01L27/228 , G11C11/161 , G11C11/1659 , H01L43/10 , H01L43/12
Abstract: A magnetic memory device includes a reference magnetic structure, a free magnetic structure, and a tunnel barrier pattern therebetween. The reference magnetic structure includes a first pinned pattern, a second pinned pattern between the first pinned pattern and the tunnel barrier pattern, and an exchange coupling pattern between the first pinned pattern and the second pinned pattern. The second pinned pattern includes magnetic patterns and non-magnetic patterns, which are alternately stacked. The first pinned pattern is a ferromagnetic pattern consisted of a ferromagnetic element.
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公开(公告)号:US20210020829A1
公开(公告)日:2021-01-21
申请号:US16803051
申请日:2020-02-27
Applicant: Samsung Electronics Co., Ltd.
Inventor: Sang Hwan Park , Jae Hoon Kim , Younghyun Kim
Abstract: A magnetic memory device includes a reference magnetic structure, a free magnetic structure, and a tunnel barrier pattern therebetween. The reference magnetic structure includes a first pinned pattern, a second pinned pattern between the first pinned pattern and the tunnel barrier pattern, and an exchange coupling pattern between the first pinned pattern and the second pinned pattern. The second pinned pattern includes magnetic patterns and non-magnetic patterns, which are alternately stacked. The first pinned pattern is a ferromagnetic pattern consisted of a ferromagnetic element.
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公开(公告)号:US10403812B2
公开(公告)日:2019-09-03
申请号:US16114964
申请日:2018-08-28
Applicant: Samsung Electronics Co., Ltd.
Inventor: Sung Chul Lee , Ki Woong Kim , Sang Hwan Park , Sechung Oh
Abstract: A magnetic memory device includes a reference magnetic structure, a free magnetic structure, and a tunnel barrier pattern between the reference magnetic structure and the free magnetic structure. The reference magnetic structure includes a first pinned pattern, a second pinned pattern between the first pinned pattern and the tunnel barrier pattern, and an exchange coupling pattern between the first and the second pinned pattern. The second pinned pattern includes a first magnetic pattern adjacent the exchange coupling pattern, a second magnetic pattern adjacent the tunnel barrier pattern, a third magnetic pattern between the first and the second magnetic pattern, a first non-magnetic pattern between the first and the third magnetic pattern, and a second non-magnetic pattern between the second and the third magnetic pattern. The first non-magnetic pattern has a different crystal structure from the second non-magnetic pattern, and at least a portion of the third magnetic pattern is amorphous.
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