Memory device and method of manufacturing the same
    1.
    发明授权
    Memory device and method of manufacturing the same 有权
    存储器件及其制造方法

    公开(公告)号:US09299826B2

    公开(公告)日:2016-03-29

    申请号:US14204441

    申请日:2014-03-11

    Abstract: A memory device includes a gate structure, a contact plug, and a spacer. The gate structure includes first and second conductive layer patterns sequentially stacked on a substrate. The contact plug passes through the second conductive layer pattern, and a sidewall of the contact plug directly contacts at least a portion of the second conductive layer pattern. The spacer surrounds a portion of the sidewall of the contact plug and contacting the gate structure.

    Abstract translation: 存储器件包括栅极结构,接触插塞和间隔物。 栅极结构包括顺序地堆叠在衬底上的第一和第二导电层图案。 接触插塞穿过第二导电层图案,并且接触插塞的侧壁直接接触第二导电层图案的至少一部分。 间隔件围绕接触塞的侧壁的一部分并接触门结构。

Patent Agency Ranking