摘要:
Disclosed herein is a method for manufacturing a transistor in a semiconductor device, which can improve the refresh characteristics of the device. The method comprises the steps of: providing a silicon substrate having active and field regions defined thereon; performing a first channel ion implantation process into the silicon substrate; sequentially forming a hard mask film and a photoresist pattern exposing a gate formation region on the substrate into which the first channel ion implantation process has been performed; performing a second channel ion implantation process into the substrate at a higher concentration than that of the first ion implantation process using the photoresist pattern as an ion implantation mask, so as to form doped regions in the substrate at the gate formation region and both sides adjacent thereto; etching a hard mask film using the photoresist pattern as an etch barrier; removing the photoresist pattern; etching the substrate using a portion of the hard mask film remaining after the etching as an etch barrier, so as to form a groove; removing the hard mask film remaining after the etching; forming a gate in the groove of the substrate from which the hard mask film has been removed; and forming source and drain regions on the substrate at both sides of the gate.
摘要:
Disclosed is a method for fabricating a transistor of a memory device capable of preventing voids from being created when forming a low-resistant gate electrode. The method includes the steps of forming an active area by etching a semiconductor substrate, forming a field oxide layer in the semiconductor substrate and forming a recess by etching the field oxide layer. A gate insulation layer is formed along an upper surface of the active area and an exposed portion of the active area. A gate electrode is formed on the field oxide layer such that the gate electrode extends across an upper portion of the active area while being overlapped with a channel area and the recess. The first conductive layer to be patterned has the same thickness, so the low-resistant gate electrode is easily fabricated without forming the voids.
摘要:
A memory device includes an active area protruding from a semiconductor substrate. A recess is formed in the active area. A field oxide layer is formed on the semiconductor substrate. A gate electrode extends across the active area while being overlapped with the recess. A gate insulation layer is interposed between the gate electrode and the active area. Source and drain areas are formed in the active area. The transistor structure above defines a recessed transistor structure if it is sectioned along a source-drain line and defines a Fin transistor structure if it is sectioned along a gate line. The transistor structure ensures sufficient data retention time and improves the current drivability while lowering the back bias dependency of a threshold voltage.
摘要:
A method for forming a pattern and a method for fabricating an LCD device using the same is disclosed, wherein a photoresist layer is removed from a substrate without using a photoresist stripper, so that the pattern is formed with a low fabrication costs. The method comprising sequentially forming a pattern material layer, a transformed material layer and a photoresist layer on a substrate; patterning the photoresist layer by exposure and development using a mask; selectively etching the transformed material layer and the pattern material layer by using the patterned photoresist layer as a mask; and removing the transformed material layer and the patterned photoresist layer in a lift-off method by applying light.
摘要:
Disclosed is an electrolyte comprising a eutectic mixture formed of: (a) an amide group-containing compound; and (b) a lithum-free ionizable salt. An electrochemical device comprising the electrolyte is also disclosed. The electrolyte improves the quality of and electrochemical device due to the excellent conductivity of the metal cation contained in the eutectic mixture, a broad electrochemical window and low viscosity. Additionally, since the eutectic mixture has excellent thermal and chemical stability, it is possible to solve the problems of evaporation, exhaustion and ignition of electrolytes, to minimize side reactions between constitutional elements of the device and the electrolyte, and to improve the safety of the electrochemical device.
摘要:
A thin film transistor device for a liquid crystal display, as embodied, includes a gate electrode on a transparent insulating substrate; a gate insulating film formed of a first glass composition covering the gate electrode; a semiconductor layer on the gate insulating film; and a source electrode and a drain electrode on the semiconductor layer.
摘要:
A flat panel display includes a substrate, an array on the substrate, and a glass film formed by depositing glass powder over the substrate, including the array, melting the deposited glass powder over the array and hardening the deposited glass powder over the array.
摘要:
Disclosed is an electrolyte for electrochromic devices, which includes a eutectic mixture comprising: (a) a compound having an acidic functional group and basic functional group; and (b) an ionizable lithium salt. An electrochromic device using the same electrolyte is also disclosed. Because the electrochromic device uses the electrolyte comprising the eutectic mixture, which is cost-efficient and has excellent thermal and chemical stability, there are no problems related with evaporation and exhaustion as well as flammability of electrolyte. Additionally, it is possible to minimize side reactions with constitutional elements of an electrochromic device and electrolyte, thereby improving the safety. Further, it is also possible to improve the quality of an electrochromic device by virtue of a broad electrochemical window and high electroconductivity of the eutectic mixture.
摘要:
A sensorless motor drive apparatus and a method for protecting and controlling the same. The sensorless motor drive apparatus includes a unit for determining the presence or absence of a position estimation error of a rotor contained in a motor using a current value applied to the motor and a position estimation angle of the rotor. Therefore, the sensorless motor drive apparatus determines the presence or absence of the position estimation error of the rotor without using a sensor, so that it reduces production costs, prevents the motor from generating a faulty operation, and prevents a compressor including the motor from being damaged.
摘要:
A liquid crystal display device includes a data line, a source electrode, a drain electrode, and a pixel electrode disposed on a lower substrate, an island-shaped semiconductor layer overlapping the source and drain electrodes, a gate insulating layer along an entire surface of the lower substrate including the semiconductor layer, a gate line and a gate electrode on the gate insulating layer, a passivation layer along an entire surface of the lower substrate including the gate line, an upper substrate facing the lower substrate, and a liquid crystal layer between the lower and upper substrates.