公开(公告)号：US20180245919A1

公开(公告)日：2018-08-30

申请号：US15752915

申请日：2016-08-08

申请人： DENSO CORPORATION ,  SEIKO EPSON CORPORATION

发明人： Naoki YOSHIDA ,  Tsugio IDE

IPC分类号： G01C19/5621 ,  B81B3/00 ,  G01C19/5628 ,  G01P15/125 ,  H01L29/84 ,  H01L41/113

CPC分类号： G01C19/5621 ,  B81B3/00 ,  B81B7/0064 ,  B81B7/02 ,  B81B2201/0235 ,  B81B2201/0242 ,  G01C19/5628 ,  G01C19/5783 ,  G01P1/023 ,  G01P15/125 ,  H01L29/84 ,  H01L41/113 ,  H01L41/1134

摘要： A composite sensor includes a first shield pattern that functions as a noise shield of a circuit board, a second shield pattern that functions as a noise shield of a first sensor, and a third shield pattern that functions as a noise shield of a second sensor. The first shield pattern has an impedance lower than the second shield pattern and the third shield pattern. The second shield pattern and the third shield pattern are electrically connected to each other through the first shield pattern. Accordingly, deterioration of detection accuracy caused by electrical noise is restricted.

公开(公告)号：US20180278235A1

公开(公告)日：2018-09-27

申请号：US15926571

申请日：2018-03-20

申请人： Seiko Epson Corporation

发明人： Tetsuya OTSUKI ,  Tsugio IDE

IPC分类号： H03H9/215 ,  H03B5/32 ,  H03H3/007 ,  B81B3/00 ,  H03L1/02 ,  G01C19/56

CPC分类号： H03H9/215 ,  B81B3/0072 ,  B81B7/0048 ,  G01C19/56 ,  G01C19/5621 ,  H03B5/32 ,  H03H3/0076 ,  H03H9/02023 ,  H03H9/02102 ,  H03H9/02157 ,  H03H9/0509 ,  H03H9/0542 ,  H03H9/0547 ,  H03H9/1021 ,  H03H9/177 ,  H03H9/19 ,  H03L1/028 ,  H03L1/04

摘要： A vibrator device includes a vibration element including a vibration portion and a fixed portion, a supporting member to which the fixed portion is attached to support the vibration element, and a first substrate to which the supporting member is attached, the supporting member includes a attaching portion attached to the first substrate, and A1≥A2 is satisfied in a case where an area of a rectangular region including the fixed portion is A1 and an area of a rectangular region including the attaching portion is A2 in a plan view seen from a thickness direction of the vibration element.

公开(公告)号：US20180275160A1

公开(公告)日：2018-09-27

申请号：US15927466

申请日：2018-03-21

申请人： Seiko Epson Corporation

发明人： Tetsuya OTSUKI ,  Tsugio IDE

IPC分类号： G01P15/12 ,  G01P1/02 ,  G01P1/00 ,  G01P15/08 ,  G01L19/14

CPC分类号： G01P15/123 ,  G01C19/5607 ,  G01L19/147 ,  G01P1/006 ,  G01P1/023 ,  G01P15/0802 ,  G01P2015/0828

摘要： A physical quantity sensor includes an acceleration sensor having an acceleration sensor element and a package accommodating the acceleration sensor element, a support member having a first surface and supporting the acceleration sensor on the first surface, and an IC chip to which a second surface facing the first surface of the support member is attached, in which, in a plan view from a stacking direction of the acceleration sensor and the support member, in a case where an area of a region surrounded by an outer edge of the package is S1 and an area of the first surface is S2, S1≥S2 is satisfied.

公开(公告)号：US20230040197A1

公开(公告)日：2023-02-09

申请号：US17967927

申请日：2022-10-18

申请人： SEIKO EPSON CORPORATION

发明人： Tetsuya OTSUKI ,  Tsugio IDE

IPC分类号： H03H9/215 ,  H03H9/05 ,  H03H9/17 ,  B81B3/00 ,  H03H9/02 ,  H03H3/007 ,  H03L1/04 ,  H03L1/02 ,  G01C19/5621 ,  G01C19/56 ,  H03B5/32 ,  H03H9/10 ,  H03H9/19 ,  B81B7/00

摘要： A vibrator device includes a vibration element including a vibration portion and a fixed portion, a supporting member to which the fixed portion is attached to support the vibration element, and a first substrate to which the supporting member is attached, the supporting member includes a attaching portion attached to the first substrate, and A1≥A2 is satisfied in a case where an area of a rectangular region including the fixed portion is A1 and an area of a rectangular region including the attaching portion is A2 in a plan view seen from a thickness direction of the vibration element.

公开(公告)号：US20200235717A1

公开(公告)日：2020-07-23

申请号：US16839125

申请日：2020-04-03

申请人： Seiko Epson Corporation

发明人： Tetsuya OTSUKI ,  Tsugio IDE

IPC分类号： H03H9/215 ,  H03L1/04 ,  B81B7/00 ,  H03H9/10 ,  H03H9/05 ,  G01C19/5621 ,  H03H9/19 ,  H03H9/02 ,  H03H9/17 ,  H03H3/007 ,  H03L1/02 ,  B81B3/00 ,  G01C19/56 ,  H03B5/32

摘要： A vibrator device includes a vibration element including a vibration portion and a fixed portion, a supporting member to which the fixed portion is attached to support the vibration element, and a first substrate to which the supporting member is attached, the supporting member includes a attaching portion attached to the first substrate, and A1≥A2 is satisfied in a case where an area of a rectangular region including the fixed portion is A1 and an area of a rectangular region including the attaching portion is A2 in a plan view seen from a thickness direction of the vibration element.

公开(公告)号：US20160298964A1

公开(公告)日：2016-10-13

申请号：US15086231

申请日：2016-03-31

申请人： Seiko Epson Corporation

发明人： Tsugio IDE

IPC分类号： G01C19/5635

摘要： A physical quantity sensor includes: an angular velocity detection element; an acceleration detection element; a bonding wire through which a detection signal of the acceleration detection element propagates; and a shield unit that is located between the angular velocity detection element and the bonding wire and is connected to a fixed potential. The angular velocity detection element and the acceleration detection element are disposed to be deviated in a height direction. At least a part of the shield unit is disposed between the angular velocity detection element and the acceleration detection element.

摘要翻译： 物理量传感器包括：角速度检测元件; 加速度检测元件; 通过加速度检测元件的检测信号传播的接合线; 以及位于角速度检测元件和接合线之间并连接到固定电位的屏蔽单元。 角速度检测元件和加速度检测元件被设置为在高度方向上偏离。 屏蔽单元的至少一部分设置在角速度检测元件和加速度检测元件之间。