公开(公告)号：US20140011340A1

公开(公告)日：2014-01-09

申请号：US13541957

申请日：2012-07-05

申请人： Seung-Chul Song ,  Amitabh Jain ,  Deborah J. Riley

发明人： Seung-Chul Song ,  Amitabh Jain ,  Deborah J. Riley

IPC分类号： H01L21/20

CPC分类号： H01L21/823807 ,  H01L21/823814 ,  H01L21/823857 ,  H01L27/092 ,  H01L29/6653 ,  H01L29/6656 ,  H01L29/66636 ,  H01L29/7833 ,  H01L29/7834 ,  H01L29/7847 ,  H01L29/7848

摘要： A method of forming stressed-channel NMOS transistors and strained-channel PMOS transistors forms p-type source and drain regions before an n-type source and drain dopant is implanted and a stress memorization layer is formed, thereby reducing the stress imparted to the n-channel of the PMOS transistors. In addition, a non-conductive layer is formed after the p-type source and drain regions are formed, but before the n-type dopant is implanted. The non-conductive layer allows shallower n-type implants to be realized, and also serves as a buffer layer for the stress memorization layer.

摘要翻译： 形成应力通道NMOS晶体管和应变通道PMOS晶体管的方法在植入n型源极和漏极掺杂剂之前形成p型源极和漏极区，并且形成应力记忆层，由此减小施加到n - 沟道的PMOS晶体管。 此外，在形成p型源极和漏极区之后，但在植入n型掺杂剂之前，形成非导电层。 不导电层允许实现较浅的n型植入物，并且还用作应力记忆层的缓冲层。

公开(公告)号：US08691644B2

公开(公告)日：2014-04-08

申请号：US13541957

申请日：2012-07-05

申请人： Seung-Chul Song ,  Amitabh Jain ,  Deborah J. Riley

发明人： Seung-Chul Song ,  Amitabh Jain ,  Deborah J. Riley

IPC分类号： H01L21/8238 ,  H01L21/336 ,  H01L21/3205 ,  H01L21/4763 ,  H01L21/8234

CPC分类号： H01L21/823807 ,  H01L21/823814 ,  H01L21/823857 ,  H01L27/092 ,  H01L29/6653 ,  H01L29/6656 ,  H01L29/66636 ,  H01L29/7833 ,  H01L29/7834 ,  H01L29/7847 ,  H01L29/7848

摘要： A method of forming stressed-channel NMOS transistors and strained-channel PMOS transistors forms p-type source and drain regions before an n-type source and drain dopant is implanted and a stress memorization layer is formed, thereby reducing the stress imparted to the n-channel of the PMOS transistors. In addition, a non-conductive layer is formed after the p-type source and drain regions are formed, but before the n-type dopant is implanted. The non-conductive layer allows shallower n-type implants to be realized, and also serves as a buffer layer for the stress memorization layer.

摘要翻译： 形成应力通道NMOS晶体管和应变通道PMOS晶体管的方法在植入n型源极和漏极掺杂剂之前形成p型源极和漏极区，并且形成应力记忆层，由此减小施加到n - 沟道的PMOS晶体管。 此外，在形成p型源极和漏极区之后，但在植入n型掺杂剂之前，形成非导电层。 不导电层允许实现较浅的n型植入物，并且还用作应力记忆层的缓冲层。

公开(公告)号：US08877581B2

公开(公告)日：2014-11-04

申请号：US12855736

申请日：2010-08-13

申请人： Amitabh Jain ,  Deborah J. Riley

发明人： Amitabh Jain ,  Deborah J. Riley

IPC分类号： H01L29/78 ,  H01L21/8238

CPC分类号： H01L21/823814 ,  H01L21/823807 ,  H01L29/7848

摘要： An integrated circuit (IC) includes a plurality of strained metal oxide semiconductor (MOS) devices that include a semiconductor surface having a first doping type, a gate electrode stack over a portion of the semiconductor surface, and source/drain recesses that extend into the semiconductor surface and are framed by semiconductor surface interface regions on opposing sides of the gate stack. A first epitaxial strained alloy layer (rim) is on the semiconductor surface interface regions, and is doped with the first doping type. A second epitaxial strained alloy layer is on the rim and is doped with a second doping type that is opposite to the first doping type that is used to form source/drain regions.

摘要翻译： 集成电路（IC）包括多个应变金属氧化物半导体（MOS）器件，其包括具有第一掺杂类型的半导体表面，半导体表面的一部分上的栅极电极堆叠以及延伸到 半导体表面并且由栅堆叠的相对侧上的半导体表面界面区域构成。 第一外延应变合金层（边缘）在半导体表面界面区域上，并掺杂有第一掺杂型。 第二外延应变合金层位于边缘上并且掺杂有与用于形成源极/漏极区的第一掺杂类型相反的第二掺杂类型。

公开(公告)号：US20110042753A1

公开(公告)日：2011-02-24

申请号：US12855736

申请日：2010-08-13

申请人： Amitabh Jain ,  Deborah J. Riley

发明人： Amitabh Jain ,  Deborah J. Riley

IPC分类号： H01L27/092 ,  H01L21/8238

CPC分类号： H01L21/823814 ,  H01L21/823807 ,  H01L29/7848

摘要： An integrated circuit (IC) includes a plurality of strained metal oxide semiconductor (MOS) devices that include a semiconductor surface having a first doping type, a gate electrode stack over a portion of the semiconductor surface, and source/drain recesses that extend into the semiconductor surface and are framed by semiconductor surface interface regions on opposing sides of the gate stack. A first epitaxial strained alloy layer (rim) is on the semiconductor surface interface regions, and is doped with the first doping type. A second epitaxial strained alloy layer is on the rim and is doped with a second doping type that is opposite to the first doping type that is used to form source/drain regions.

摘要翻译： 集成电路（IC）包括多个应变金属氧化物半导体（MOS）器件，其包括具有第一掺杂类型的半导体表面，半导体表面的一部分上的栅极电极堆叠以及延伸到 半导体表面并且由栅堆叠的相对侧上的半导体表面界面区域构成。 第一外延应变合金层（边缘）在半导体表面界面区域上，并掺杂有第一掺杂型。 第二外延应变合金层位于边缘上并且掺杂有与用于形成源极/漏极区的第一掺杂类型相反的第二掺杂类型。

公开(公告)号：US08580663B2

公开(公告)日：2013-11-12

申请号：US13217577

申请日：2011-08-25

申请人： Amitabh Jain

发明人： Amitabh Jain

IPC分类号： H01L21/426

CPC分类号： H01L21/823814 ,  H01L21/2251 ,  H01L21/2255 ,  H01L21/26566 ,  H01L21/823807 ,  H01L21/823842 ,  H01L21/84 ,  H01L29/6659 ,  H01L29/7833

摘要： A process for forming diffused region less than 20 nanometers deep with an average doping dose above 1014 cm−2 in an IC substrate, particularly LDD region in an MOS transistor, is disclosed. Dopants are implanted into a source dielectric layer using gas cluster ion beam (GCIB) implantation, molecular ion implantation or atomic ion implantation resulting in negligible damage in the IC substrate. A spike anneal or a laser anneal diffuses the implanted dopants into the IC substrate. The inventive process may also be applied to forming source and drain (S/D) regions. One source dielectric layer may be used for forming both NLDD and PLDD regions.

摘要翻译： 公开了一种用于在IC衬底，特别是MOS晶体管中的LDD区域形成平均掺杂剂量高于1014cm -2的深度小于20nm的扩散区域的工艺。 使用气体簇离子束（GCIB）注入，分子离子注入或原子离子注入将掺杂剂注入到源电介质层中，导致IC衬底中的可忽略的损伤。 尖峰退火或激光退火将注入的掺杂剂扩散到IC衬底中。 本发明的方法也可以应用于形成源极和漏极（S / D）区域。 一个源介质层可用于形成NLDD和PLDD区域。

公开(公告)号：US08252609B2

公开(公告)日：2012-08-28

申请号：US12757704

申请日：2010-04-09

申请人： Brian K. Kirkpatrick ,  Steven L. Prins ,  Amitabh Jain

发明人： Brian K. Kirkpatrick ,  Steven L. Prins ,  Amitabh Jain

IPC分类号： H01L21/26 ,  H01L21/66

CPC分类号： H01L21/26506 ,  H01L21/02532 ,  H01L21/02658 ,  H01L21/02667 ,  H01L22/12 ,  H01L22/20

摘要： A method for reducing curvature of a wafer having a semiconductor surface. One or more process steps are identified at which wafers exhibit the largest curvature, and/or wafer curvature that may reduce die yield. A crystal damaging process converts at least a portion of the semiconductor surface into at least one amorphous surface region After or contemporaneously with the crystal damaging, the amorphous surface region is recrystallized by recrystallization annealing that anneals the wafer for a time ≦5 seconds at a temperature sufficient for recrystallization of the amorphous surface region. A subsequent photolithography step is facilitated due to the reduction in average wafer curvature provided by the recrystallization.

摘要翻译： 一种用于减小具有半导体表面的晶片的曲率的方法。 识别一个或多个工艺步骤，在该处理步骤中，晶片呈现最大的曲率，和/或晶片曲率，其可以降低模具的产量。 晶体损伤过程将半导体表面的至少一部分转化成至少一个非晶表面区域在晶体损坏之后或同时与晶体有害的同时，非晶表面区域通过重结晶退火重结晶，使晶片退火一段时间， 足以使非晶表面区域再结晶的温度。 由于再结晶提供的平均晶片曲率的减小，随后的光刻步骤变得容易。

公开(公告)号：US07883573B2

公开(公告)日：2011-02-08

申请号：US11697790

申请日：2007-04-09

申请人： Amitabh Jain

发明人： Amitabh Jain

IPC分类号： C09D201/00

CPC分类号： H01J37/08 ,  H01J2237/31701 ,  H01L21/26513 ,  H01L21/823418 ,  H01L29/6659 ,  Y10S252/95

摘要： The present invention provides, for use in a semiconductor manufacturing process, a method (100) of preparing an ion-implantation source material. The method includes providing (110) a deliquescent ion implantation source material and mixing (110) the deliquescent ion implantation source material with an organic liquid to form a paste.

摘要翻译： 为了在半导体制造工艺中使用本发明，提供了制备离子注入源材料的方法（100）。 该方法包括提供（110）潮解离子注入源材料，并将潮解离子注入源材料与有机液体混合（110）以形成糊状物。

公开(公告)号：US07678637B2

公开(公告)日：2010-03-16

申请号：US12209270

申请日：2008-09-12

申请人： Mahalingam Nandakumar ,  Song Zhao ,  Amitabh Jain

发明人： Mahalingam Nandakumar ,  Song Zhao ,  Amitabh Jain

IPC分类号： H01L21/8238

CPC分类号： H01L21/823807 ,  H01L21/26506 ,  H01L21/26513 ,  H01L21/26586 ,  H01L21/823814 ,  H01L29/1087 ,  H01L29/7847

摘要： Ultra high temperature (UHT) anneals above 1200 C for less than 100 milliseconds for PMOS transistors reduce end of range dislocations, but are incompatible with stress memorization technique (SMT) layers used to enhance NMOS on-state current. This invention reverses the conventional order of forming the NMOS first by forming PSD using carbon co-implants and UHT annealing them before implanting the NSD and depositing the SMT layer. End of range dislocation densities in the PSD space charge region below 100 cm−2 are achieved. Tensile stress in the PMOS from the SMT layer is significantly reduced. The PLDD may also be UHT annealed to reduce end of range dislocations close to the PMOS channel.

摘要翻译： 对于PMOS晶体管，超高温（UHT）超过1200℃退火少于100毫秒会减少范围位错的终止，但与用于增强NMOS导通电流的应力记忆技术（SMT）层不兼容。 本发明首先通过使用碳共注入形成PSD并且在植入NSD并沉积SMT层之前对其进行UHT退火来逆转形成NMOS的常规顺序。 实现了低于100cm-2的PSD空间电荷区域的范围位错密度的结束。 来自SMT层的PMOS中的拉伸应力显着降低。 PLDD还可以进行UHT退火以减少靠近PMOS沟道的范围位错的结束。

公开(公告)号：US07670917B2

公开(公告)日：2010-03-02

申请号：US11853328

申请日：2007-09-11

申请人： Amitabh Jain ,  Manoj Mehrotra

发明人： Amitabh Jain ,  Manoj Mehrotra

IPC分类号： H01L21/336 ,  H01L21/31 ,  H01L21/469

CPC分类号： H01L21/823807 ,  H01L21/26506 ,  H01L21/268 ,  H01L21/28044 ,  H01L29/6656 ,  H01L29/7843 ,  H01L29/7845

摘要： In one aspect there is provided a method of manufacturing a semiconductor device comprising forming gate electrodes over a semiconductor substrate, forming source/drains adjacent the gate electrodes, depositing a stress inducing layer over the gate electrodes. A laser anneal is conducted on at least the gate electrodes subsequent to depositing the stress inducing layer at a temperature of at least about 1100° C. for a period of time of at least about 300 microseconds, and the semiconductor device is subjected to a thermal anneal subsequent to conducting the laser anneal.

摘要翻译： 在一个方面，提供一种制造半导体器件的方法，包括在半导体衬底上形成栅电极，在栅电极附近形成源极/漏极，在栅电极上沉积应力诱导层。 在至少约1100℃的温度下沉积应力诱导层至少约300微秒的时间之后，至少在栅电极上进行激光退火，并且半导体器件经受热 在进行激光退火之后退火。

公开(公告)号：US20070293012A1

公开(公告)日：2007-12-20

申请号：US11762905

申请日：2007-06-14

申请人： Amitabh Jain

发明人： Amitabh Jain

IPC分类号： H01L21/336

CPC分类号： H01L21/324 ,  H01L21/268 ,  H01L29/6659 ,  H01L29/7833

摘要： Exemplary embodiments provide methods for reducing and/or removing slip and plastic deformations in semiconductor materials by use of one or more ultra-fast thermal spike anneals. The ultra-fast thermal spike anneal can be an ultra-high temperature (UHT) anneal having an ultra-short annealing time. During the ultra-fast thermal spike anneal, an increased annealing power density can be used to achieve a desired annealing temperature required by manufacturing processes. In an exemplary embodiment, the annealing temperature can be in the range of about 1150° C. to about 1390° C. and the annealing dwell time can be on the order of less than about 0.8 milliseconds. In various embodiments, the disclosed spike-annealing processes can be used to fabrication structures and regions of MOS transistor devices, for example, drain and source extension regions and/or drain and source regions.

摘要翻译： 示例性实施例提供了通过使用一个或多个超快速热穗退火来减少和/或去除半导体材料中的滑移和塑性变形的方法。 超快速热尖峰退火可以是具有超短退火时间的超高温（UHT）退火。 在超快速热穗退火期间，可以使用增加的退火功率密度来实现制造工艺所需的期望的退火温度。 在示例性实施例中，退火温度可以在约1150℃至约1390℃的范围内，并且退火停留时间可以在小于约0.8毫秒的数量级。 在各种实施例中，所公开的尖峰退火工艺可用于制造MOS晶体管器件的结构和区域，例如漏极和源极延伸区域和/或漏极和源极区域。