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公开(公告)号：US07141355B2
公开(公告)日：2006-11-28
申请号：US10477207
申请日：2002-12-13
摘要： A radiation-sensitive resin composition comprising (A) an alkali-soluble resin having an unsaturated group, (B) a compound having at least one ethylenically unsaturated double bond, and (C) a radiation-induced radical polymerization initiator, wherein: the alkali-soluble resin having an unsaturated group (A) is obtained by reacting: 100 parts by weight of a copolymer comprising 1 to 40 wt % structural units derived from (a) a radically polymerizable compound having a carboxyl group; 1 to 50 wt % structural units having a phenolic hydroxyl group which are derived from (b-1) a radically polymerizable compound having a phenolic hydroxyl group or (b-2) a radically polymerizable compound having a functional group convertible into a phenolic hydroxyl group after the copolymerization, other structural units of said copolymer being derived from (c) another radically polymerizable compound; with 0.1 to 20 parts by weight of (d) a radically polymerizable compound having an epoxy group. The resin composition can form a radiation-sensitive film in a thickness greater than a deposit thickness and has a high resolution.
摘要翻译： 一种辐射敏感性树脂组合物，其包含（A）具有不饱和基团的碱溶性树脂，（B）具有至少一个烯键式不饱和双键的化合物和（C）辐射诱导的自由基聚合引发剂，其中：所述碱 通过使100重量份的由（a）具有羧基的自由基聚合性化合物衍生的1〜40重量％结构单元的共聚物反应得到具有不饱和基团（A）的可溶性树脂; （b-1）具有酚羟基的自由基聚合性化合物或（b-2）具有可转化为酚羟基的官能团的自由基聚合性化合物的酚羟基的1〜50重量％结构单元 共聚后，所述共聚物的其它结构单元衍生自（c）另一种可自由基聚合的化合物; （d）具有环氧基的自由基聚合性化合物为0.1〜20重量份。 树脂组合物可以形成厚度大于沉积物厚度的辐射敏感膜并具有高分辨率。
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公开(公告)号：US08427188B2
公开(公告)日：2013-04-23
申请号：US12838428
申请日：2010-07-16
申请人： Satoshi Iwamoto
发明人： Satoshi Iwamoto
IPC分类号： G01R31/26
CPC分类号： G01R31/31932
摘要： There is provided a test apparatus for testing a device under test, including a signal supply section that supplies a test signal to the device under test via a transmission line, and a comparing and judging section that receives a response signal from the device under test via the transmission line shared with the signal supply section, and judges whether the device under test is acceptable by referring to a comparison result obtained by comparing a signal level of the response signal with a reference level corresponding to a logic pattern of the test signal.
摘要翻译： 提供了一种用于测试被测设备的测试装置，包括：通过传输线向被测设备提供测试信号的信号提供部分;以及比较判断部分，其从被测设备接收响应信号， 传输线路与信号提供部分共用，并且通过参考通过将响应信号的信号电平与对应于测试信号的逻辑模式的参考电平进行比较而获得的比较结果来判断被测设备是否可接受。
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公开(公告)号：US20090317955A1
公开(公告)日：2009-12-24
申请号：US12551848
申请日：2009-09-01
IPC分类号： H01L21/336
CPC分类号： H01L27/11568 , H01L21/823878 , H01L27/105 , H01L27/1052 , H01L27/11573 , H01L29/792 , Y10S438/954
摘要： A semiconductor device includes a memory section formed at a semiconductor substrate and including a first transistor having an ONO film that can store charges between the semiconductor substrate and a memory electrode and a first STI region for isolating the first transistor, and a CMOS section formed at the semiconductor substrate and including a second transistor having a CMOS electrode and a gate dielectric and a second STI region for isolating the second transistor. The height of the top surface of the first STI region is set equal to or smaller than the height of the top surface of the second STI region.
摘要翻译： 一种半导体器件包括形成在半导体衬底上的存储器部分，并且包括具有可存储半导体衬底和存储电极之间的电荷的ONO膜的第一晶体管和用于隔离第一晶体管的第一STI区域和形成在 半导体衬底并且包括具有CMOS电极和栅极电介质的第二晶体管和用于隔离第二晶体管的第二STI区域。 第一STI区域的顶表面的高度被设定为等于或小于第二STI区域的顶表面的高度。
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公开(公告)号：US07598589B2
公开(公告)日：2009-10-06
申请号：US11152114
申请日：2005-06-15
IPC分类号： H01L27/105
CPC分类号： H01L27/11568 , H01L21/823878 , H01L27/105 , H01L27/1052 , H01L27/11573 , H01L29/792 , Y10S438/954
摘要： A semiconductor device includes a memory section formed at a semiconductor substrate and including a first transistor having an ONO film that can store charges between the semiconductor substrate and a memory electrode and a first STI region for isolating the first transistor, and a CMOS section formed at the semiconductor substrate and including a second transistor having a CMOS electrode and a gate dielectric and a second STI region for isolating the second transistor. The height of the top surface of the first STI region is set equal to or smaller than the height of the top surface of the second STI region.
摘要翻译： 一种半导体器件包括形成在半导体衬底上的存储器部分，并且包括具有可存储半导体衬底和存储电极之间的电荷的ONO膜的第一晶体管和用于隔离第一晶体管的第一STI区域和形成在 半导体衬底并且包括具有CMOS电极和栅极电介质的第二晶体管和用于隔离第二晶体管的第二STI区域。 第一STI区域的顶表面的高度被设定为等于或小于第二STI区域的顶表面的高度。
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公开(公告)号：US6094085A
公开(公告)日：2000-07-25
申请号：US121953
申请日：1998-07-24
申请人： Toshiyuki Okayasu , Satoshi Iwamoto
发明人： Toshiyuki Okayasu , Satoshi Iwamoto
IPC分类号： H03K17/14
CPC分类号： H03K17/14
摘要： A driver circuit having a temperature correction circuit for producing an output signal with high precision amplitude and timing by correcting the temperature changes in the amplitude and timing. The temperature correction circuit includes a temperature detector for detecting the temperature change in output elements, a timing adjustment circuit for correcting the timing of an output signal relative to an input signal upon receiving the temperature detection signal from the temperature detector, and a bias circuit for correcting the output amplitude and impedance of the output signal.
摘要翻译： 一种具有温度校正电路的驱动器电路，用于通过校正幅度和定时的温度变化来产生具有高精度振幅和定时的输出信号。 温度校正电路包括用于检测输出元件温度变化的温度检测器，用于在接收到来自温度检测器的温度检测信号时相对于输入信号校正输出信号的定时的定时调整电路，以及用于 校正输出信号的输出振幅和阻抗。
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公开(公告)号：US5973542A
公开(公告)日：1999-10-26
申请号：US913350
申请日：1998-02-09
申请人： Toshiyuki Okayasu , Satoshi Iwamoto
发明人： Toshiyuki Okayasu , Satoshi Iwamoto
IPC分类号： G01R31/319 , H03K5/00 , H03K5/003 , H03K17/14 , H03K17/687 , H03K19/003 , H03K19/0175
CPC分类号： G01R31/31924 , H03K19/00384
摘要： A driver circuit having a temperature correction circuit for providing a relatively stable output amplitude and timing by detecting electric consumption of an output stage of the driver circuit and correcting the changes in the amplitude and timing of an output signal therefrom. The temperature correction circuit includes a temperature detection part for detecting temperature change in a pair of output elements, an output timing temperature correction part for correcting the output timing of the output signal relative to an input signal upon receiving the temperature detection signal from the temperature detection part, and an output amplitude and impedance temperature correction part for correcting output amplitudes and output impedance of the output signal.
摘要翻译： PCT No.PCT / JP97 / 00103 Sec。 371日期：1998年2月9日 102（e）1998年2月9日PCT 1997年1月20日PCT PCT。 出版物WO97 / 33370 日期1997年9月12日具有温度校正电路的驱动器电路，用于通过检测驱动电路的输出级的电耗来校正输出信号的幅度和定时的变化来提供相对稳定的输出幅度和定时。 温度校正电路包括用于检测一对输出元件中的温度变化的温度检测部分，输出定时温度校正部分，用于在从温度检测器接收到温度检测信号时相对于输入信号校正输出信号的输出定时 输出幅度和阻抗温度校正部分，用于校正输出信号的输出幅度和输出阻抗。
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7.发明授权Test apparatus for testing device has synchronization module which synchronizes analog test module to digital test module based on synchronization signal received from digital test module 失效用于测试装置的测试装置具有同步模块，其基于从数字测试模块接收的同步信号，将模拟测试模块与数字测试模块同步公开(公告)号：US08261119B2
公开(公告)日：2012-09-04
申请号：US12557474
申请日：2009-09-10
申请人： Satoshi Iwamoto
发明人： Satoshi Iwamoto
IPC分类号： G06F1/12
CPC分类号： G01R31/31907
摘要： There is provided a test apparatus for testing a device under test, including a plurality of test modules that test the device under test, and a synchronization module that is connected to each of the plurality of test modules, where the synchronization module synchronizes together the plurality of test modules. Here, based on a synchronization signal received from a digital module, the synchronization module synchronizes an analog module to the digital module, and the digital module is one of the plurality of test modules that exchanges a digital signal with the device under test, and the analog module is one of the plurality of test modules that performs an analog test on the device under test.
摘要翻译： 提供了一种用于测试被测设备的测试设备，包括测试被测设备的多个测试模块和连接到多个测试模块中的每一个的同步模块，其中同步模块将多个测试模块 的测试模块。 这里，基于从数字模块接收到的同步信号，同步模块将模拟模块同步到数字模块，数字模块是与被测设备交换数字信号的多个测试模块之一， 模拟模块是对被测设备进行模拟测试的多个测试模块之一。
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公开(公告)号：US07781291B2
公开(公告)日：2010-08-24
申请号：US12551848
申请日：2009-09-01
IPC分类号： H01L21/336
CPC分类号： H01L27/11568 , H01L21/823878 , H01L27/105 , H01L27/1052 , H01L27/11573 , H01L29/792 , Y10S438/954
摘要： A semiconductor device includes a memory section formed at a semiconductor substrate and including a first transistor having an ONO film that can store charges between the semiconductor substrate and a memory electrode and a first STI region for isolating the first transistor, and a CMOS section formed at the semiconductor substrate and including a second transistor having a CMOS electrode and a gate dielectric and a second STI region for isolating the second transistor. The height of the top surface of the first STI region is set equal to or smaller than the height of the top surface of the second STI region.
摘要翻译： 一种半导体器件包括形成在半导体衬底上的存储器部分，并且包括具有可存储半导体衬底和存储电极之间的电荷的ONO膜的第一晶体管和用于隔离第一晶体管的第一STI区域和形成在 半导体衬底并且包括具有CMOS电极和栅极电介质的第二晶体管和用于隔离第二晶体管的第二STI区域。 第一STI区域的顶表面的高度被设定为等于或小于第二STI区域的顶表面的高度。
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公开(公告)号：US07610538B2
公开(公告)日：2009-10-27
申请号：US11734792
申请日：2007-04-13
申请人： Satoshi Iwamoto
发明人： Satoshi Iwamoto
CPC分类号： G06F11/273
摘要： A test apparatus being capable of replacing a test module with the other kind of test module that tests device under tests by using the test module is provided. The test apparatus includes a plurality of test modules that transmit/receive signals to/from the device under tests to test the device under test; and a performance board for diagnosis that diagnose the plurality of test modules. The performance board for diagnosis including: a motherboard provided common to the plurality of test, modules; a circuit for diagnosis that transmits/receives a signal to/from each test module to diagnose the test module; a plurality of inter-board to module connectors that connect between the corresponding test module and the circuit for diagnosis; and plurality of sub-boards each of which has at least one of the inter-board to module connectors and is fixed to the motherboard to fix the inter-board to module connectors to the motherboard.
摘要翻译： 提供了一种能够用另一种测试模块替换测试模块的测试设备，该测试模块通过使用测试模块来测试测试设备。 测试装置包括多个测试模块，用于向被测设备发送/接收信号以测试被测设备; 以及用于诊断多个测试模块的诊断性能板。 诊断性能板包括：为多个测试提供的主板，模块; 诊断电路，用于向/从每个测试模块发送/接收信号以诊断测试模块; 连接在相应的测试模块和用于诊断的电路之间的多个板间模块连接器; 以及多个子板，每个子板具有板间至模块连接器中的至少一个，并且固定到主板以将板间固定到模块连接器到主板。
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公开(公告)号：US20080129313A1
公开(公告)日：2008-06-05
申请号：US11607824
申请日：2006-12-01
申请人： Satoshi Iwamoto
发明人： Satoshi Iwamoto
CPC分类号： G01R31/31907
摘要： A test apparatus that tests a device under test is provided. The test apparatus includes a test module that provides a test signal to the device under test. The test apparatus includes: a test module that provides a test signal to the device under test; a measuring instrument that measures a reference parameter including at least one of a reference voltage, a reference resistance and a reference current included in the test module; and a control device that controls the test module and the measuring instrument. By executing a diagnostic program that diagnose the plurality of test modules by using the measuring instruments, the control device to function as: a target diagnostic section that diagnoses a target test module; an acquirement section that acquires measuring instrument identification information indicative of the kind of the measuring instrument provided in the test apparatus; a measurement processing section provided for each kind of the measuring instruments and executed on the control device that issues a command to cause the measuring instrument to measure the value of the reference parameter of the test module to the measuring instrument and receives a measurement result of the reference parameter from the measuring instrument; and a switching section that calls the measurement processing section corresponding to the measuring instrument identified by the measuring instrument identification information in response to receiving the call to instruct to measure the value of a reference parameter included in the test module, executes the same and returns the measurement result of the reference parameter to the target diagnostic section.
摘要翻译： 提供测试被测设备的测试设备。 测试装置包括向被测设备提供测试信号的测试模块。 该测试装置包括：向被测设备提供测试信号的测试模块; 测量仪器，其测量包括在所述测试模块中的参考电压，参考电阻和参考电流中的至少一个的参考参数; 以及控制测试模块和测量仪器的控制装置。 通过执行通过使用测量仪器诊断多个测试模块的诊断程序，控制装置用作诊断目标测试模块的目标诊断部分; 获取部，其获取表示设置在所述测试装置中的所述测量仪器的种类的测量仪器识别信息; 测量处理部分，用于各种测量仪器，并在控制装置上执行，该控制装置发出使测量仪器测量测试模块的参考参数的值的指令，并接收测量仪器的测量结果 来自测量仪器的参考参数; 以及切换部，其响应于接收到用于指示测量包括在所述测试模块中的参考参数的值的呼叫的呼叫，调用与由所述测量仪器识别信息识别的所述测量仪器相对应的所述测量处理部分，执行所述测量处理部分，并执行所述切换部分 参考参数的测量结果到目标诊断部分。
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