摘要:
An apparatus and method for maintaining or adjusting the orientation of a large area substrate is disclosed by using multiple support plates disposed below a susceptor adapted to support the large area substrate. The multiple support plates are supported by a plurality of support shafts that are coupled to at least one actuator. The apparatus is designed to selectively adjust the horizontal cross-sectional profile of the susceptor to promote even and uniform processing. The horizontal profile may be one of planar, concave, or convex. The apparatus allows any adjustment to be made before, during, or after processing.
摘要:
The present invention provides an apparatus and method for substrate transport. In systems according to the invention, at least a first and second chamber are provided. The first chamber may be a load lock and the second chamber a processing chamber. A substrate transfer shuttle is provided and is moveable along a linear path defined by guide rollers between one position in the first chamber and another position in the second chamber. In this way, the substrate may be transferred, in both a forward and a reverse direction, between the first chamber and the second chamber. The substrate transfer shuttle is structured so that a substrate may be removed therefrom by moving a support in one of the chambers from a lowered position to an intermediate position, after which the substrate transfer shuttle may be removed from the chamber.
摘要:
The present invention provides an apparatus and method for substrate transport. In systems according to the invention, at least a first and second chamber are provided. The first chamber may be a load lock and the second chamber a processing chamber. A substrate transfer shuttle is provided and is moveable along a linear path defined by guide rollers between one position in the first chamber and another position in the second chamber. In this way, the substrate may be transferred, in both a forward and a reverse direction, between the first chamber and the second chamber. The substrate transfer shuttle is structured so that a substrate may be removed therefrom by moving a support in one of the chambers from a lowered position to an intermediate position, after which the substrate transfer shuttle may be removed from the chamber.
摘要:
In a first aspect, a first apparatus is provided for inkjet printing. The first apparatus includes an inkjet head support that includes a plurality of inkjet heads. A first inkjet head of the plurality of inkjet heads is adapted to be independently moveable in both directions along a lateral axis relative to a second inkjet head of the plurality of inkjet heads. The first apparatus also includes a system controller adapted to control an independent lateral movement of the first inkjet head relative to the second inkjet head. Numerous other aspects are provided.
摘要:
In a first aspect, a system is provided. The system includes (1) a stage adapted to move a substrate relative to print heads during printing; (2) at least one print head suspended from a support above the stage and adapted to be moveable in a plane above the stage; (3) a controller operable to rotate the print head about a center of the print head; and (4) an imaging system adapted to capture an image of the print head and to determine a center point of the print head based upon images of the print head captured as the print head is rotated. Numerous other aspects are provided.
摘要:
Embodiments of a gas diffuser plate for distributing gas in a processing chamber are provided. The gas distribution plate includes a diffuser plate having an upstream side and a downstream side, and a plurality of gas passages passing between the upstream and downstream sides of the diffuser plate. The gas passages include hollow cathode cavities at the downstream side to enhance plasma ionization. The depths, the diameters, the surface area and density of hollow cathode cavities of the gas passages that extend to the downstream end can be gradually increased from the center to the edge of the diffuser plate to improve the film thickness and property uniformity across the substrate. The increasing diameters, depths and surface areas from the center to the edge of the diffuser plate can be created by bending the diffuser plate toward downstream side, followed by machining out the convex downstream side. Bending the diffuser plate can be accomplished by a thermal process or a vacuum process. The increasing diameters, depths and surface areas from the center to the edge of the diffuser plate can also be created computer numerically controlled machining. Diffuser plates with gradually increasing diameters, depths and surface areas of the hollow cathode cavities from the center to the edge of the diffuser plate have been shown to produce improved uniformities of film thickness and film properties.
摘要:
The invention provides methods, systems, and drivers for controlling an inkjet printing system and manufacturing display objects. The system may include a print controller including one or more drivers, at least one print head coupled to the drivers, a stage controller coupled to the print controller, one or more motors coupled to the stage controller, encoders coupled to the motors and the stage controller, and a host coupled to the stage controller and the print controller. The host is adapted to transfer pattern parameter data to the print controller, and the print controller is adapted to use the pattern parameter data to trigger the at least one print head to deposit ink into pixel wells on a substrate as the substrate is moved in a print direction by the at least one motor under the direction of the stage controller in response to a command from the host.
摘要:
The invention provides methods, systems, and drivers for controlling an inkjet printing system. The driver may include logic including a processor, memory coupled to the logic, and a fire pulse generator circuit coupled to the logic. The fire pulse generator may include a connector to facilitate coupling the driver to a print head. The fire pulse generator circuit may also include a fixed current source circuit adapted to generate a fire pulse with a constant slew rate that facilitates easy adjustment of ink drop size. The logic is adapted to receive an image and to convert the image to an image data file. The image data file is adapted to be used by the driver to trigger the print head to deposit ink into pixel wells on a substrate as the substrate is moved in a print direction. Numerous other aspects are disclosed.
摘要:
In a first aspect, a system is provided for inkjet printing. The system includes (1) at least one apparatus for inkjet printing having (a) a first inkjet print head including a first plurality of nozzles adapted to selectively dispense a first ink; (b) a second inkjet print head including a second plurality of nozzles adapted to selectively dispense a second ink; and (c) a set including the first and second print heads arranged such that the set is adapted to dispense the first and second inks into respective adjacent color wells of a display pixel on a substrate during a printing pass; and (2) a stage adapted to support the substrate and transport the substrate below the at least one apparatus for inkjet printing during the printing pass. Numerous other aspects are provided.
摘要:
Methods and apparatus for cleaning a nozzle plate of an inkjet print head are provided. A first method includes positioning a cleaning medium proximate the inkjet print head, determining a pressure for an inflatable bladder to apply against the cleaning medium, contacting the cleaning medium with the bladder with the determined pressure, and moving the cleaning medium relative to the inkjet print head so as to clean the inkjet print head. The method also includes purging ink from the inkjet print head prior to the bladder contacting the cleaning medium and pre-jetting ink from the inkjet print head after moving the cleaning medium. Numerous other aspects are provided.