NONVOLATILE STORAGE ELEMENT AND METHOD FOR MANUFACTURING SAME
    2.
    发明申请
    NONVOLATILE STORAGE ELEMENT AND METHOD FOR MANUFACTURING SAME 有权
    非易失存储元件及其制造方法

    公开(公告)号:US20130119344A1

    公开(公告)日:2013-05-16

    申请号:US13810800

    申请日:2011-10-06

    IPC分类号: H01L45/00

    摘要: A variable resistance nonvolatile storage element includes: a first electrode; a second electrode; and a variable resistance layer having a resistance value that reversibly changes based on an electrical signal applied between the electrodes, wherein the variable resistance layer has a structure formed by stacking a first transition metal oxide layer, a second transition metal oxide layer, and a third transition metal oxide layer in this order, the first transition metal oxide layer having a composition expressed as MOx (where M is a transition metal and O is oxygen), the second transition metal oxide layer having a composition expressed as MOy (where x>y), and the third transition metal oxide layer having a composition expressed as MOz (where y>z).

    摘要翻译: 可变电阻非易失性存储元件包括:第一电极; 第二电极; 以及可变电阻层,其具有基于施加在所述电极之间的电信号而可逆地变化的电阻值,其中所述可变电阻层具有通过堆叠第一过渡金属氧化物层,第二过渡金属氧化物层和第三过渡金属氧化物层而形成的结构 过渡金属氧化物层,第一过渡金属氧化物层具有以MOx表示的组成(其中M是过渡金属,O是氧),第二过渡金属氧化物层具有以MOy表示的组成(其中x> y )和具有表示为MOz(其中y> z)的组成的第三过渡金属氧化物层。

    Nonvolatile storage element and method for manufacturing same
    3.
    发明授权
    Nonvolatile storage element and method for manufacturing same 有权
    非易失性存储元件及其制造方法

    公开(公告)号:US09184381B2

    公开(公告)日:2015-11-10

    申请号:US13810800

    申请日:2011-10-06

    IPC分类号: H01L47/00 H01L45/00 H01L27/10

    摘要: A variable resistance nonvolatile storage element includes: a first electrode; a second electrode; and a variable resistance layer having a resistance value that reversibly changes based on an electrical signal applied between the electrodes, wherein the variable resistance layer has a structure formed by stacking a first transition metal oxide layer, a second transition metal oxide layer, and a third transition metal oxide layer in this order, the first transition metal oxide layer having a composition expressed as MOx (where M is a transition metal and O is oxygen), the second transition metal oxide layer having a composition expressed as MOy (where x>y), and the third transition metal oxide layer having a composition expressed as MOz (where y>z).

    摘要翻译: 可变电阻非易失性存储元件包括:第一电极; 第二电极; 以及可变电阻层,其具有基于施加在所述电极之间的电信号而可逆地变化的电阻值,其中所述可变电阻层具有通过堆叠第一过渡金属氧化物层,第二过渡金属氧化物层和第三过渡金属氧化物层而形成的结构 过渡金属氧化物层,第一过渡金属氧化物层具有以MOx表示的组成(其中M是过渡金属,O是氧),第二过渡金属氧化物层具有以MOy表示的组成(其中x> y )和具有表示为MOz(其中y> z)的组成的第三过渡金属氧化物层。

    NON-VOLATILE MEMORY ELEMENT AND NON-VOLATILE MEMORY DEVICE EQUIPPED WITH SAME
    5.
    发明申请
    NON-VOLATILE MEMORY ELEMENT AND NON-VOLATILE MEMORY DEVICE EQUIPPED WITH SAME 审中-公开
    非易失性存储器元件和非易失性存储器件

    公开(公告)号:US20120326113A1

    公开(公告)日:2012-12-27

    申请号:US13582370

    申请日:2011-06-09

    IPC分类号: H01L45/00

    摘要: Provided are a non-volatile memory element which can reduce a voltage of an electric pulse required for initial breakdown, and can lessen non-uniformity of a resistance value of the non-volatile memory element, and a non-volatile memory device including the non-volatile memory element. A non-volatile memory element comprises a first electrode (103); a second electrode (105); and a variable resistance layer (104) interposed between the first electrode (103) and the second electrode (105), a resistance value of the variable resistance layer being changeable reversibly in response to an electric signal applied between the first electrode (103) and the second electrode (105); wherein the variable resistance layer (104) includes a first region (106) which is in contact with the first electrode (103) and comprises an oxygen-deficient transition metal oxide and a second region (107) which is in contact with the second electrode (105) and comprises a transition metal oxide having a smaller degree of oxygen deficiency than the first region (106); and wherein the second electrode (105) comprises an alloy including iridium and at least one precious metal having lower Young's modulus than iridium, and a content of iridium is not less than 50 atm %.

    摘要翻译: 提供了一种非易失性存储元件,其可以降低初始击穿所需的电脉冲的电压,并且可以减小非易失性存储元件的电阻值的不均匀性,以及包括非易失性存储元件的非易失性存储器件, 非易失存储元件。 非易失性存储元件包括第一电极(103); 第二电极(105); 以及插入在第一电极(103)和第二电极(105)之间的可变电阻层(104),可变电阻层的电阻值响应于施加在第一电极(103)和 第二电极(105); 其特征在于,所述可变电阻层(104)包括与所述第一电极(103)接触并且包含缺氧过渡金属氧化物的第一区域(106)和与所述第二电极(103)接触的第二区域 (105),并且包含与第一区域(106)相比氧缺乏程度较小的过渡金属氧化物; 并且其中所述第二电极(105)包括包含铱和至少一种具有比铱低的杨氏模量的贵金属的合金,并且铱的含量不小于50atm%。

    Variable resistance element and manufacturing method thereof
    7.
    发明授权
    Variable resistance element and manufacturing method thereof 有权
    可变电阻元件及其制造方法

    公开(公告)号:US08530321B2

    公开(公告)日:2013-09-10

    申请号:US13515761

    申请日:2010-12-14

    IPC分类号: H01L21/20

    摘要: A variable resistance element comprises, when M is a transition metal element, O is oxygen, and x and y are positive numbers satisfying y>x; a lower electrode; a first oxide layer formed on the lower electrode and comprising MOx when a content ratio of O with respect to M is x; a second oxide layer formed on the first oxide layer and comprising MOy when a content ratio of O with respect to M is y; an upper electrode formed on the second oxide layer; a protective layer formed on the upper electrode and comprising an electrically conductive material having a composition different from a composition of the upper electrode; an interlayer insulating layer formed to cover the protective layer; and an upper contact plug formed inside an upper contact hole penetrating the interlayer insulating layer.

    摘要翻译: 可变电阻元件包括当M是过渡金属元素时,O是氧,x和y是满足y> x的正数; 下电极 当相对于M的含量比为O时,形成在下电极上并包含MOx的第一氧化物层; 当相对于M的含量比为O时,形成在第一氧化物层上并包含MOy的第二氧化物层; 形成在所述第二氧化物层上的上电极; 形成在上电极上并具有不同于上电极的组成的组成的导电材料的保护层; 形成为覆盖保护层的层间绝缘层; 以及形成在贯穿层间绝缘层的上接触孔内部的上接触插塞。

    METHOD FOR MANUFACTURING VARIABLE RESISTANCE ELEMENT
    8.
    发明申请
    METHOD FOR MANUFACTURING VARIABLE RESISTANCE ELEMENT 有权
    制造可变电阻元件的方法

    公开(公告)号:US20130178042A1

    公开(公告)日:2013-07-11

    申请号:US13809473

    申请日:2012-01-30

    IPC分类号: H01L45/00

    摘要: Provided is a method for manufacturing a variable resistance element, the method including: forming a first electrode material layer above a substrate; forming a first tantalum oxide material layer; forming a second tantalum oxide material layer; forming a second electrode material layer; and annealing at least the first tantalum oxide material layer after forming the first tantalum oxide material layer and before forming the second electrode material layer, wherein an oxygen content percentage of one of the first tantalum oxide material layer and the second tantalum oxide material layer is higher than an oxygen content percentage of the other.

    摘要翻译: 提供一种制造可变电阻元件的方法,该方法包括:在衬底上形成第一电极材料层; 形成第一钽氧化物材料层; 形成第二钽氧化物材料层; 形成第二电极材料层; 以及在形成所述第一钽氧化物材料层之后并且在形成所述第二电极材料层之前至少退火所述第一钽氧化物材料层,其中所述第一钽氧化物材料层和所述第二氧化钽材料层中的一个的氧含量百分比较高 比另一个的氧含量百分比。

    Semiconductor device and control method therefor
    9.
    发明授权
    Semiconductor device and control method therefor 有权
    半导体装置及其控制方法

    公开(公告)号:US08369161B2

    公开(公告)日:2013-02-05

    申请号:US13026075

    申请日:2011-02-11

    申请人: Yukio Hayakawa

    发明人: Yukio Hayakawa

    IPC分类号: G11C16/02

    摘要: A semiconductor device includes an insulation layer (14) provided on a semiconductor substrate (12), a p-type semiconductor region (16) provided on the insulation layer, an isolation region (18) provided that surrounds the p-type semiconductor region to reach the insulation layer, an n-type source region (20) and an n-type drain region (22) provided on the p-type semiconductor region, a charge storage region (30) provided above the p-type semiconductor region between the n-type source region and the n-type drain region, and an voltage applying portion that applies a different voltage to the p-type semiconductor region while any of programming, erasing and reading a different data of a memory cell that has the charge storage region is being preformed.

    摘要翻译: 半导体器件包括设置在半导体衬底(12)上的绝缘层(14),设置在绝缘层上的p型半导体区域(16),设置在p型半导体区域周围的隔离区域(18) 到达绝缘层,设置在p型半导体区域上的n型源极区域(20)和n型漏极区域(22),设置在p型半导体区域之上的p型半导体区域上方的电荷存储区域(30) n型源极区域和n型漏极区域以及对p型半导体区域施加不同电压的电压施加部,同时对具有电荷存储器的存储单元的不同数据的编程,擦除和读取进行任何编程, 区域正在执行。

    Method to seperate storage regions in the mirror bit device
    10.
    发明授权
    Method to seperate storage regions in the mirror bit device 有权
    分离镜像位设备中存储区域的方法

    公开(公告)号:US08318566B2

    公开(公告)日:2012-11-27

    申请号:US13156122

    申请日:2011-06-08

    IPC分类号: H01L21/336

    摘要: Devices and methods for isolating adjacent charge accumulation layers in a semiconductor device are disclosed. In one embodiment, a semiconductor device comprises a bit line formed in a semiconductor substrate, a charge accumulation layer formed on the semiconductor substrate, a word line formed on the charge accumulation layer across the bit line, and a channel region formed in the semiconductor substrate below the word line and between the bit line and its adjacent bit line. For the semiconductor device, the charge accumulation layer is formed above the channel region in a widthwise direction of the word line, and a width of the word line is set to be narrower than a distance between an end of the channel region and a central part of the channel region in a lengthwise direction of the word line.

    摘要翻译: 公开了用于隔离半导体器件中的相邻电荷累积层的装置和方法。 在一个实施例中,半导体器件包括形成在半导体衬底中的位线,形成在半导体衬底上的电荷累积层,形成在位线上的电荷累积层上的字线和形成在半导体衬底中的沟道区 在字线之下以及位线和其相邻位线之间。 对于半导体器件,电荷累积层形成在字线的宽度方向上的沟道区上方,并且字线的宽度被设定为比沟道区的端部与中心部的距离更窄 在字线的长度方向上的通道区域。