公开(公告)号：US08444806B2

公开(公告)日：2013-05-21

申请号：US12836161

申请日：2010-07-14

申请人： Shoji Miyake ,  Akinori Ebe ,  Tatsuo Shoji ,  Yuichi Setsuhara

发明人： Shoji Miyake ,  Akinori Ebe ,  Tatsuo Shoji ,  Yuichi Setsuhara

IPC分类号： C23C16/00 ,  C23C15/00 ,  H01L21/306 ,  H05H1/24

CPC分类号： H01J37/321 ,  H05H1/46 ,  H05H2001/4667

摘要： The present invention aims to provide a plasma generator capable of creating a spatially uniform distribution of high-density plasma. This object is achieved by the following construction. Multiple antennas are located on the sidewall of a vacuum chamber, and a RF power source is connected to three or four antennas in parallel via a plate-shaped conductor. The length of the conductor of each antenna is shorter than the quarter wavelength of the induction electromagnetic wave generated within the vacuum chamber. Setting the length of the conductor of the antenna in such a manner prevents the occurrence of a standing wave and thereby maintains the uniformity of the plasma within the vacuum chamber. In addition, the plate-shaped conductor improves the heat-releasing efficiency, which also contributes to the suppression of the impedance.

摘要翻译： 本发明的目的在于提供能够产生高密度等离子体的空间均匀分布的等离子体发生器。 该目的通过以下结构实现。 多个天线位于真空室的侧壁上，RF电源经由板状导体并联连接到三个或四个天线。 每个天线的导体长度比真空室内产生的感应电磁波的四分之一波长短。 以这种方式设置天线的导体的长度防止驻波的发生，从而保持等离子体在真空室内的均匀性。 此外，板状导体提高了散热效率，这也有助于抑制阻抗。

公开(公告)号：US07785441B2

公开(公告)日：2010-08-31

申请号：US10539254

申请日：2003-12-12

申请人： Shoji Miyake ,  Akinori Ebe ,  Tatsuo Shoji ,  Yuichi Setsuhara

发明人： Shoji Miyake ,  Akinori Ebe ,  Tatsuo Shoji ,  Yuichi Setsuhara

IPC分类号： H01L21/00 ,  C23C16/00 ,  C23C14/00

CPC分类号： H01J37/321 ,  H05H1/46 ,  H05H2001/4667

摘要： The present invention aims to provide a plasma generator capable of creating a spatially uniform distribution of high-density plasma. This object is achieved by the following construction. Multiple antennas 16 are located on the sidewall of a vacuum chamber 11, and a RF power source is connected to three or four antennas 16 in parallel via a plate-shaped conductor 19. The length of the conductor of each antenna 16 is shorter than the quarter wavelength of the induction electromagnetic wave generated within the vacuum chamber. Setting the length of the conductor of the antenna in such a manner prevents the occurrence of a standing wave and thereby maintains the uniformity of the plasma within the vacuum chamber. In addition, the plate-shaped conductor 19 improves the heat-releasing efficiency, which also contributes to the suppression of the impedance.

摘要翻译： 本发明的目的在于提供能够产生高密度等离子体的空间均匀分布的等离子体发生器。 该目的通过以下结构实现。 多个天线16位于真空室11的侧壁上，RF电源通过板状导体19并联连接到三个或四个天线16.每个天线16的导体的长度比 在真空室内产生的感应电磁波的四分之一波长。 以这种方式设置天线的导体的长度防止驻波的发生，从而保持等离子体在真空室内的均匀性。 此外，板状导体19提高散热效率，这也有助于抑制阻抗。

公开(公告)号：US20100304046A1

公开(公告)日：2010-12-02

申请号：US12836161

申请日：2010-07-14

申请人： Shoji Miyake ,  Akinori Ebe ,  Tatsuo Shoji ,  Yuichi Setsuhara

发明人： Shoji Miyake ,  Akinori Ebe ,  Tatsuo Shoji ,  Yuichi Setsuhara

IPC分类号： C23C16/52 ,  C23C16/00 ,  C23C16/505

CPC分类号： H01J37/321 ,  H05H1/46 ,  H05H2001/4667

摘要： The present invention aims to provide a plasma generator capable of creating a spatially uniform distribution of high-density plasma. This object is achieved by the following construction. Multiple antennas are located on the sidewall of a vacuum chamber, and a RF power source is connected to three or four antennas in parallel via a plate-shaped conductor. The length of the conductor of each antenna is shorter than the quarter wavelength of the induction electromagnetic wave generated within the vacuum chamber. Setting the length of the conductor of the antenna in such a manner prevents the occurrence of a standing wave and thereby maintains the uniformity of the plasma within the vacuum chamber. In addition, the plate-shaped conductor improves the heat-releasing efficiency, which also contributes to the suppression of the impedance.

摘要翻译： 本发明的目的在于提供能够产生高密度等离子体的空间均匀分布的等离子体发生器。 该目的通过以下结构实现。 多个天线位于真空室的侧壁上，RF电源经由板状导体并联连接到三个或四个天线。 每个天线的导体长度比真空室内产生的感应电磁波的四分之一波长短。 以这种方式设置天线的导体的长度防止驻波的发生，从而保持等离子体在真空室内的均匀性。 此外，板状导体提高了散热效率，这也有助于抑制阻抗。

公开(公告)号：US20060049138A1

公开(公告)日：2006-03-09

申请号：US10539254

申请日：2003-12-12

申请人： Shoji Miyake ,  Akinori Ebe ,  Tatsuo Shoji ,  Yuichi Setsuhara

发明人： Shoji Miyake ,  Akinori Ebe ,  Tatsuo Shoji ,  Yuichi Setsuhara

IPC分类号： C23F1/00 ,  C23C16/00 ,  C03C25/68

CPC分类号： H01J37/321 ,  H05H1/46 ,  H05H2001/4667

摘要： The present invention aims to provide a plasma generator capable of creating a spatially uniform distribution of high-density plasma. This object is achieved by the following construction. Multiple antennas 16 are located on the sidewall of a vacuum chamber 11, and a RF power source is connected to three or four antennas 16 in parallel via a plate-shaped conductor 19. The length of the conductor of each antenna 16 is shorter than the quarter wavelength of the induction electromagnetic wave generated within the vacuum chamber. Setting the length of the conductor of the antenna in such a manner prevents the occurrence of a standing wave and thereby maintains the uniformity of the plasma within the vacuum chamber. In addition, the plate-shaped conductor 19 improves the heat-releasing efficiency, which also contributes to the suppression of the impedance.

摘要翻译： 本发明的目的在于提供能够产生高密度等离子体的空间均匀分布的等离子体发生器。 该目的通过以下结构实现。 多个天线16位于真空室11的侧壁上，RF电源通过板状导体19并联连接到三个或四个天线16。 每个天线16的导体的长度比真空室内产生的感应电磁波的四分之一波长短。 以这种方式设置天线的导体的长度防止驻波的发生，从而保持等离子体在真空室内的均匀性。 此外，板状导体19提高散热效率，这也有助于抑制阻抗。

公开(公告)号：US07098599B2

公开(公告)日：2006-08-29

申请号：US10250385

申请日：2000-12-27

申请人： Shoji Miyake ,  Tatsuo Shoji ,  Yuichi Setsuhara

发明人： Shoji Miyake ,  Tatsuo Shoji ,  Yuichi Setsuhara

IPC分类号： H01J7/24 ,  H01Q1/26

CPC分类号： H01J37/32174 ,  H01J37/321 ,  H05H1/46

摘要： The whole antenna conductor is housed in the interior of a vacuum container of a plasma generator thereby to eliminate the need for an insulating partition or a top plate so that the whole induction field radiated from the antenna can be effectively utilized. Furthermore, the occurrence of abnormal discharge is suppressed to stabilize a high-density plasma by reducing the inductance of the antenna and covering the antenna conductor with an insulator.

摘要翻译： 整个天线导体容纳在等离子体发生器的真空容器的内部，从而不需要绝缘隔板或顶板，从而能够有效地利用从天线辐射的整个感应场。 此外，通过减小天线的电感并用绝缘体覆盖天线导体，抑制异常放电的发生，从而稳定高密度等离子体。

公开(公告)号：US09078336B2

公开(公告)日：2015-07-07

申请号：US12921063

申请日：2009-03-03

申请人： Yuichi Setsuhara ,  Akinori Ebe

发明人： Yuichi Setsuhara ,  Akinori Ebe

IPC分类号： H01Q1/36 ,  H05H1/46 ,  H01J37/32

CPC分类号： H05H1/46 ,  H01J37/321 ,  H01J37/3211

摘要： The present invention aims at providing a radio-frequency antenna unit capable of generating a high-density discharge plasma in a vacuum chamber. The radio-frequency antenna unit according to the present invention includes: a radio-frequency antenna through which a radio-frequency electric current can flow; a protective tube made of an insulator provided around the portion of the radio-frequency antenna that is in the vacuum chamber; and a buffer area provided between the radio-frequency antenna and the protective tube. The “buffer area” refers to an area where an acceleration of electrons is suppressed, and it can be formed, for example, with a vacuum or an insulator. Such a configuration can suppress an occurrence of an electric discharge between the antenna and the protective tube, enabling the generation of a high-density discharge plasma in the vacuum chamber.

摘要翻译： 本发明旨在提供一种能够在真空室中产生高密度放电等离子体的射频天线单元。 根据本发明的射频天线单元包括：射频电天线可以流过的射频天线; 由位于真空室内的射频天线部分周围设置的保护管， 以及设置在射频天线与保护管之间的缓冲区。 “缓冲区”是指抑制电子加速的区域，例如可以用真空或绝缘体形成。 这样的结构可以抑制天线与保护管之间的放电的发生，能够在真空室中产生高密度放电等离子体。

公开(公告)号：US08916034B2

公开(公告)日：2014-12-23

申请号：US13059318

申请日：2009-08-25

申请人： Yuichi Setsuhara ,  Akinori Ebe ,  Jeon Geon Han

发明人： Yuichi Setsuhara ,  Akinori Ebe ,  Jeon Geon Han

IPC分类号： C23C14/35 ,  H01J37/34 ,  H01J37/32 ,  C23C14/34

CPC分类号： H01J37/3408 ,  C23C14/3407 ,  C23C14/358 ,  H01J37/321 ,  H01J37/3211 ,  H01J37/3411 ,  H01J37/3417

摘要： A thin-film forming sputtering system capable of a sputtering process at a high rate. A thin-film forming sputtering system includes: a vacuum container; a target holder located inside the vacuum container; a target holder located inside the vacuum container; a substrate holder opposed to the target holder; a power source for applying a voltage between the target holder and the substrate holder; a magnetron-sputtering magnet provided behind the target holder, for generating a magnetic field having a component parallel to a target; and radio-frequency antennae for generating radio-frequency inductively-coupled plasma within a space in the vicinity of the target where the magnetic field generated by the magnetron-sputtering magnet has a strength equal to or higher than a predetermined level. The radio-frequency inductively-coupled plasma generated by the radio-frequency antennae promotes the supply of electrons into the aforementioned magnetic field, so that the sputtering process can be performed at a high rate.

摘要翻译： 能够高速溅射工艺的薄膜形成溅射系统。 薄膜形成溅射系统包括：真空容器; 位于真空容器内的目标支架; 位于真空容器内的目标支架; 与靶保持器相对的衬底保持器; 用于在所述目标保持器和所述基板保持器之间施加电压的电源; 设置在目标支架后面的磁控溅射磁体，用于产生具有平行于目标的分量的磁场; 以及用于在由磁控溅射磁体产生的磁场具有等于或高于预定水平的强度的目标附近的空间内产生射频感应耦合等离子体的射频天线。 由射频天线产生的射频感应耦合等离子体促进电子向上述磁场的供给，从而可以高速率进行溅射处理。

公开(公告)号：US20120031562A1

公开(公告)日：2012-02-09

申请号：US13255200

申请日：2010-03-10

申请人： Yuichi Setsuhara ,  Akinori Ebe

发明人： Yuichi Setsuhara ,  Akinori Ebe

IPC分类号： C23F1/08

CPC分类号： H01J37/321 ,  H01J37/3211 ,  H01J37/32477 ,  H05H1/46 ,  H05H2001/4667

摘要： The present invention provides a plasma processing device capable of inducing a strong radio-frequency electric field within a vacuum container while preventing sputtering of the antenna conductor, an increase in the temperature of the antenna conductor and the formation of particles. A plasma processing device according to the present invention includes a vacuum container, a radio-frequency antenna placed between an inner surface and an outer surface of a wall of the vacuum container, and a dielectric separating member for separating the radio-frequency antenna from an internal space of the vacuum container. As compared to a device using an external antenna, the present device can induce a stronger magnetic field in the vacuum container. The separating member has the effects of preventing the radio-frequency antenna from undergoing sputtering by the plasma produced in the vacuum container, suppressing an increase in the temperature of the radio-frequency antenna, and preventing the formation of particles.

摘要翻译： 本发明提供一种等离子体处理装置，其能够在防止天线导体的溅射，天线导体的温度升高和颗粒的形成的同时在真空容器内产生强的射频电场。 根据本发明的等离子体处理装置包括真空容器，放置在真空容器的壁的内表面和外表面之间的射频天线以及用于将射频天线与 真空容器的内部空间。 与使用外部天线的装置相比，本装置可以在真空容器中引起更强的磁场。 分离部件具有防止射频天线由真空容器内产生的等离子体进行溅射，抑制高频天线的温度上升，防止形成粒子的效果。

公开(公告)号：US08931433B2

公开(公告)日：2015-01-13

申请号：US12742604

申请日：2008-11-12

申请人： Yuichi Setsuhara ,  Akinori Ebe ,  Eiji Ino ,  Shinichiro Ishihara ,  Hajime Ashida ,  Akira Watanabe

发明人： Yuichi Setsuhara ,  Akinori Ebe ,  Eiji Ino ,  Shinichiro Ishihara ,  Hajime Ashida ,  Akira Watanabe

IPC分类号： C23C16/505 ,  C23C16/503 ,  C03C17/22 ,  C23C16/24 ,  C23C16/509 ,  H01J37/32

CPC分类号： C23C16/503 ,  C03C17/22 ,  C03C2217/28 ,  C03C2218/153 ,  C23C16/24 ,  C23C16/509 ,  H01J37/321 ,  H01J37/3211 ,  H01J37/32715

摘要： The present invention aims at providing a plasma processing apparatus for performing a plasma processing on a planar substrate body to be processed, the apparatus being capable of generating the plasma with good uniformity and efficiently using the plasma, and having a high productivity. That is, the plasma processing apparatus according to the present invention includes: a vacuum chamber; one or plural antenna supporters (plasma generator supporters) projecting into the internal space of the vacuum chamber; radio-frequency antennas (plasma generators) attached to each antenna supporter; and a pair of substrate body holders provided across the antenna supporter in the vacuum chamber, for holding a planar substrate body to be processed.

摘要翻译： 本发明的目的在于提供一种等离子体处理装置，用于对待处理的平面基板主体进行等离子体处理，该装置能够产生均匀性均匀且有效地使用等离子体的等离子体，并且具有高生产率。 也就是说，根据本发明的等离子体处理装置包括：真空室; 一个或多个天线支撑器（等离子体发生器支撑器）突出到真空室的内部空间中; 连接到每个天线支架的射频天线（等离子体发生器）; 以及设置在真空室中的天线支撑体两侧的一对基板主体保持件，用于保持待处理的平面基板主体。

公开(公告)号：US20130220548A1

公开(公告)日：2013-08-29

申请号：US13821822

申请日：2011-09-09

申请人： Yuichi Setsuhara ,  Akinori Ebe

发明人： Yuichi Setsuhara ,  Akinori Ebe

IPC分类号： H05H1/46

CPC分类号： H05H1/46 ,  C23C16/507 ,  H01J37/321 ,  H01J37/3211 ,  H01J37/32119 ,  H01J37/32477 ,  H05H2001/4667

摘要： A plasma processing device has: a metallic vacuum chamber; an antenna-placing section in which a radio-frequency antenna is placed inside a through-hole (hollow space) provided in an upper wall of the vacuum chamber; and a dielectric separating plate covering the entire inner surface of the upper wall. In this plasma processing device, the entire inner surface side of the upper wall is covered with the separating plate so that surfaces in different level otherwise formed when a smaller separating plate is used is not formed between the inner surface and the separating plate. Therefore, the generation of particles caused by the formation of adhered materials on the surfaces in different level is prevented.

摘要翻译： 等离子体处理装置具有：金属真空室; 天线放置部分，其中射频天线放置在设置在真空室的上壁中的通孔（中空空间）内; 以及覆盖上壁的整个内表面的绝缘分离板。 在该等离子体处理装置中，上壁的整个内表面侧被分隔板覆盖，使得在内表面和分离板之间不形成使用较小分离板时形成的不同高度的表面。 因此，防止了由不同程度的表面形成粘附材料引起的颗粒的产生。