摘要:
Method for manufacturing microelectromechanical mirror and mirror array. Control electrodes and addressing circuitry are etched from a metallic layer deposited onto a reference layer substrate. Standoff-posts are etched from a subsequently deposited polyimide layer. A freely movable plate flexibly suspended from a plurality of electrostatic actuators that are flexibly suspended from a support frame is etched from an actuation layer substrate using a high aspect ratio etch. A mirror support post and surface are etched from a mirror substrate using a high aspect ratio etch. The mirror and actuation layer substrates are fusion bonded together. The reference and actuation layer substrates are bonded together and held apart by the standoff posts. A reflective metallic layer is deposited onto the mirror surface and polished. The mirror is etched from the mirror surface to free the microelectromechanical mirror. Mirror arrays are made by performing the aforementioned steps using standard IC processing techniques.
摘要:
A pressure control system for a sealed enclosure may include opposing one-way valves to limit the differential pressure between the atmospheres internal and external to the sealed enclosure. The pressure control system may allow the internal atmosphere to vent out of a first one-way valve if the internal pressure exceeds the external pressure by a first predetermined pressure. The pressure control system may allow the external atmosphere to be drawn in through a second one-way valve if the external pressure exceeds the internal pressure by a second predetermined pressure. By allowing the exchange of gasses only when the differential pressure falls outside of a predetermined range, overall contamination may be reduced. By reducing the ingress of contaminants, such as dust, water, smog, and outgassed substances, performance may be improved and service life of components housed within the sealed enclosure may be extended.
摘要:
Microfluidic devices are disclosed which can be manufactured using surface-micromachining. These devices utilize an electroosmotic force or an electromagnetic field to generate a flow of a fluid in a microchannel that is lined, at least in part, with silicon nitride. Additional electrodes can be provided within or about the microchannel for separating particular constituents in the fluid during the flow based on charge state or magnetic moment. The fluid can also be pressurized in the channel. The present invention has many different applications including electrokinetic pumping, chemical and biochemical analysis (e.g. based on electrophoresis or chromatography), conducting chemical reactions on a microscopic scale, and forming hydraulic actuators.
摘要:
An inking device for record media includes a self-contained ink reservoir bordered by a holder portion as one wall of the reservoir, and a backing plate as another wall adjacent a porous rubber electro pad. The backing plate includes a plurality of chamfered apertures therethrough which are circumscribed by a like number of slotted tubes which tubes separate the backing plate and the holder portion. A steel ball is positioned within each tube and controls the flow of ink from the ink reservoir to the electro pad by reason of swinging movement of the device wherein the ball is unseated from the chamfered aperture in the downward direction of movement upon the electro pad striking the record media to permit flow of ink to the pad, and the ball is reseated on the aperture during return movement of the device to stop the flow of ink to the pad. A low hydraulic pressure occurs during the striking action to unseat the ball and a suction occurs on the return movement to reseat the ball.
摘要:
A humidity control method and apparatus that can be utilized to provide humidity control within an enclosed assembly such as a disc drive. The apparatus includes a container that is at least partially formed of a material through which water vapor can freely move. The apparatus also includes a humidity-controlling mixture that comprises at least one salt and a superabsorbent polymer. The humidity-controlling mixture is enclosed within the container.
摘要:
A humidity control method and apparatus that can be utilized to provide humidity control within an enclosed assembly such as a disc drive. The apparatus includes a container that is at least partially formed of a material through which water vapor can freely move. The apparatus also includes a humidity-controlling mixture that comprises at least one salt and a superabsorbent polymer. The humidity-controlling mixture is enclosed within the container.
摘要:
Method and apparatus for protecting a data storage device from fluid-borne contaminants. The device includes a housing in which a rotatable disc is supported, the disc having a data recording surface and an outermost perimeter. A filter assembly includes a first filter adjacent to the data recording surface and a second filter disposed beyond the outermost perimeter of the disc. During disc rotation, fluidic currents are generated and impinge a leading edge guide surface of the first filter. A first portion of the currents passes into a gap between the first filter and the data recording surface. A second portion of the currents passes along the leading edge guide surface to the second filter. The first filter is preferably characterized as a chemical adsorbent filter which adsorbs vapor phase (gaseous) contaminants, and the second filter is preferably characterized as a pass-through recirculation filter which captures particulate contaminants.
摘要:
Apparatus and method for adjusting an actuator mechanical response characteristic in a data handling system, such as a disc drive. An actuator rotates about a pivot system to move a read/write head adjacent a recording surface, the pivot system comprising a stationary shaft and a bearing asesmbly comprising a stationary inner race coupled to the shaft and a rotatable outer race coupled to the actuator. A fastener is provided to engage the shaft and apply an initial amount of axially directed force on the inner race. A broad spectrum excitation is applied to the actuator and a mechanical response characteristic of the actuator is measured. The fastener is repetitively adjusted to increase the amount of axially directed force until the measured mechanical response characteristic of the actuator reaches a desired level.
摘要:
A method for preventing micromechanical structures from adhering to another object includes the step of immersing a micromechanical structure and its associated substrate in a chemical species that does not stick to itself. The method can be employed during the manufacture of micromechanical structures to prevent micromechanical parts from sticking or adhering to one another and their associated substrate surface.