公开(公告)号：US3523039A

公开(公告)日：1970-08-04

申请号：US3523039D

申请日：1968-07-29

Applicant: TEXAS INSTRUMENTS INC

Inventor： RAMSEY THOMAS H JR

IPC: C23C18/16 ,  C23C18/18 ,  G03C1/705 ,  H01L21/60 ,  H01L49/02 ,  H05K3/10 ,  H05K1/16

CPC classification number: H05K3/105 ,  C23C18/1608 ,  C23C18/1612 ,  C23C18/1868 ,  G03C1/705 ,  H01L24/81 ,  H01L49/02 ,  H01L2224/81801 ,  H01L2924/01005 ,  H01L2924/01006 ,  H01L2924/01013 ,  H01L2924/01021 ,  H01L2924/01023 ,  H01L2924/01024 ,  H01L2924/01029 ,  H01L2924/0103 ,  H01L2924/01033 ,  H01L2924/01082 ,  H01L2924/01322 ,  H01L2924/014 ,  H01L2924/12042 ,  H05K2203/092 ,  H05K2203/1105 ,  H05K2203/125 ,  Y10S428/901 ,  Y10T29/49155 ,  Y10T428/24942 ,  H01L2924/00

公开(公告)号：US3634203A

公开(公告)日：1972-01-11

申请号：US3634203D

申请日：1969-07-22

Applicant: TEXAS INSTRUMENTS INC

Inventor： MCMAHON WILLIAM R ,  RAMSEY THOMAS H JR

IPC: H01L21/768 ,  H01L23/29 ,  H01L23/522 ,  H01L49/02 ,  C23B5/48 ,  H01L11/00

CPC classification number: H01L23/522 ,  H01L21/7684 ,  H01L21/76888 ,  H01L23/291 ,  H01L49/02 ,  H01L2924/0002 ,  Y10S148/043 ,  Y10S148/106 ,  Y10S148/117 ,  H01L2924/00

Abstract: Selective anodic oxidation is employed to pattern thin metallic films in the fabrication of printed circuit boards and integrated microcircuits to provide ''''inlaid'''' metallization geometry and thereby eliminate the need for selective etching of metal films. The total anodic conversion of metallic thin films to the corresponding oxide is demonstrated. Standard photolithographic masking techniques are employed to achieve selective anodic oxidation in the delineation of a single metal film, and also for each successive metallization layer in the fabrication of integrated microcircuits having multilevel, insulated, interconnecting metallization patterns.

Abstract translation: 在印刷电路板和集成微电路的制造中采用选择性阳极氧化来形成薄金属膜，以提供“嵌入”金属化几何形状，从而消除对金属膜的选择性蚀刻的需要。 证明了金属薄膜对相应氧化物的总阳极转化率。 采用标准光刻掩模技术来实现在单金属膜的描绘中的选择性阳极氧化，以及制造具有多层，绝缘，互连的金属化图案的集成微电路中的每个连续的金属化层。

公开(公告)号：US3501342A

公开(公告)日：1970-03-17

申请号：US3501342D

申请日：1965-02-26

Applicant: TEXAS INSTRUMENTS INC

Inventor： HABERECHT ROLF R ,  RAMSEY THOMAS H JR

IPC: H01L21/768 ,  H01L23/48 ,  B44D1/18

CPC classification number: H01L21/76898 ,  H01L21/768 ,  H01L23/481 ,  H01L2924/0002 ,  Y10S148/023 ,  Y10S428/901 ,  Y10T428/24802 ,  Y10T428/24917 ,  H01L2924/00

公开(公告)号：US3453722A

公开(公告)日：1969-07-08

申请号：US3453722D

申请日：1965-12-28

Applicant: TEXAS INSTRUMENTS INC

Inventor： RAMSEY THOMAS H JR ,  TASSEL JAMES H VAN ,  ABRAHAM RICHARD P

IPC: H01L21/762 ,  H01L27/06 ,  H01L1/16

CPC classification number: H01L21/76297 ,  H01L27/0652