POWER SWITCH FOR BACKSIDE POWER DISTRIBUTION

    公开(公告)号:US20240153939A1

    公开(公告)日:2024-05-09

    申请号:US18410199

    申请日:2024-01-11

    发明人: Jack Liu

    摘要: Disclosed embodiments herein relate to an integrated circuit including power switches with active regions connected to form a contiguous region. In one aspect, the integrated circuit includes a first layer including a first metal rail extending in a first direction. In one aspect, the integrated circuit includes a second layer above the first layer along a second direction perpendicular to the first direction. The second layer may include active regions for power switches. In one aspect, the active regions of the power switches are connected to form a contiguous region extending in the first direction. The first metal rail may be electrically coupled to the active regions through via contacts. In one aspect, the integrated circuit includes a third layer above the second layer along the second direction. The third layer may include a second metal rail electrically coupled to some of the power switches through additional via contacts.

    Method of manufacturing a semiconductor device

    公开(公告)号:US11127626B2

    公开(公告)日:2021-09-21

    申请号:US17033759

    申请日:2020-09-26

    摘要: A method of manufacturing a semiconductor device includes providing a wafer having a first surface, wherein the wafer includes a gate electrode having a top surface, and the top surface is leveled with the first surface; and forming an alignment structure on the top surface. The method further includes forming a photoresist on the alignment layer to cover a portion of the top surface; and removing portions of the alignment layer uncovered by the photoresist to form an alignment structure on the top surface. The method further includes forming a dielectric surrounding the alignment structure on the first surface and over the alignment structure, removing a portion of the dielectric to expose the alignment structure by CMP; removing the alignment structure to expose at least a portion of the top surface of the gate electrode, and forming a gate conductor over and in contact with the gate electrode.

    Power switch for backside power distribution

    公开(公告)号:US11887978B2

    公开(公告)日:2024-01-30

    申请号:US17871005

    申请日:2022-07-22

    发明人: Jack Liu

    摘要: Disclosed embodiments herein relate to an integrated circuit including power switches with active regions connected to form a contiguous region. In one aspect, the integrated circuit includes a first layer including a first metal rail extending in a first direction. In one aspect, the integrated circuit includes a second layer above the first layer along a second direction perpendicular to the first direction. The second layer may include active regions for power switches. In one aspect, the active regions of the power switches are connected to form a contiguous region extending in the first direction. The first metal rail may be electrically coupled to the active regions through via contacts. In one aspect, the integrated circuit includes a third layer above the second layer along the second direction. The third layer may include a second metal rail electrically coupled to some of the power switches through additional via contacts.

    POWER SWITCH FOR BACKSIDE POWER DISTRIBUTION

    公开(公告)号:US20220359492A1

    公开(公告)日:2022-11-10

    申请号:US17871005

    申请日:2022-07-22

    发明人: Jack Liu

    摘要: Disclosed embodiments herein relate to an integrated circuit including power switches with active regions connected to form a contiguous region. In one aspect, the integrated circuit includes a first layer including a first metal rail extending in a first direction. In one aspect, the integrated circuit includes a second layer above the first layer along a second direction perpendicular to the first direction. The second layer may include active regions for power switches. In one aspect, the active regions of the power switches are connected to form a contiguous region extending in the first direction. The first metal rail may be electrically coupled to the active regions through via contacts. In one aspect, the integrated circuit includes a third layer above the second layer along the second direction. The third layer may include a second metal rail electrically coupled to some of the power switches through additional via contacts.