Nb3Sn superconducting wire and precursor therefor
    1.
    发明授权
    Nb3Sn superconducting wire and precursor therefor 有权
    Nb3Sn超导线及其前驱体

    公开(公告)号:US07985714B2

    公开(公告)日:2011-07-26

    申请号:US11902471

    申请日:2007-09-21

    IPC分类号: H01B12/00 H01L39/24

    摘要: A precursor for fabricating a Nb3Sn superconducting wire by an internal Sn process includes one or a plurality of stabilizing copper portions collectively disposed in the center, each stabilizing copper portion being provided with a diffusion barrier layer in the periphery thereof, and a superconducting matrix portion disposed so as to surround the one or the plurality of stabilizing copper portions, the superconducting matrix portion including a Nb or Nb-based alloy core and a Sn or Sn-based alloy core embedded in a Cu or Cu-based alloy matrix.

    摘要翻译: 通过内部Sn工艺制造Nb 3 Sn超导线的前体包括一个或多个稳定的铜部分,其集中设置在中心,每个稳定的铜部分在其周边设置有扩散阻挡层,并且设置超导矩阵部分 围绕一个或多个稳定化铜部分,超导矩阵部分包括Nb或Nb基合金芯和嵌入Cu或Cu基合金基体中的Sn或Sn基合金芯。

    SEMICONDUCTOR DEVICE AND MANUFACTURING PROCESS THEREFOR
    3.
    发明申请
    SEMICONDUCTOR DEVICE AND MANUFACTURING PROCESS THEREFOR 有权
    半导体器件及其制造工艺

    公开(公告)号:US20090267158A1

    公开(公告)日:2009-10-29

    申请号:US12094755

    申请日:2006-11-21

    申请人: Takashi Hase

    发明人: Takashi Hase

    IPC分类号: H01L27/092 H01L21/8238

    摘要: There is provided a semiconductor device in which deviation in a work function is prevented by a gate electrode having a uniform composition and which has excellent operation properties by effectively controlling a Vth. The semiconductor device comprises an NMOS transistor and a PMOS transistor with a common line electrode, characterized in that the line electrode comprise an electrode section (A), an electrode section (B) and a diffusion barrier region formed in a part over an isolation region so that the electrode sections (A) and (B) are kept out of contact and the diffusion barrier region meets at least one of the following conditions (1) and (2). (1) The diffusion coefficient D1 in the above diffusion barrier region of the constituent element A′ of the above electrode section (A) is lower than the interdiffusion coefficient D2 of the constituent element A′ between electrode section (A) materials. (2) The diffusion coefficient D3 in the above diffusion barrier region of the constituent element B′ of the above electrode section (B) is lower than the interdiffusion coefficient D4 of the constituent element B′ between electrode section (B) materials.

    摘要翻译: 提供了一种半导体器件,通过有效地控制Vth,通过具有均匀组成的栅电极防止功函中的偏差,并且具有优异的操作特性。 半导体器件包括NMOS晶体管和具有公共线电极的PMOS晶体管,其特征在于,线电极包括电极部分(A),电极部分(B)和形成在隔离区域上的部分中的扩散阻挡区域 使得电极部分(A)和(B)保持不接触,并且扩散阻挡区域满足以下条件(1)和(2)中的至少一个。 (1)上述电极部(A)的构成元素A'的扩散阻挡区域的扩散系数D1低于电极部(A)材料之间的构成元素A'的相互扩散系数D2。 (2)上述电极部(B)的构成元件B'的扩散阻挡区域的扩散系数D3低于电极部(B)材料之间的构成元件B'的相互扩散系数D4。

    Method of manufacturing thin film and thin film capacitor
    4.
    发明授权
    Method of manufacturing thin film and thin film capacitor 有权
    制造薄膜和薄膜电容器的方法

    公开(公告)号:US06440751B1

    公开(公告)日:2002-08-27

    申请号:US09653141

    申请日:2000-08-31

    申请人: Takashi Hase

    发明人: Takashi Hase

    IPC分类号: H01L2100

    摘要: In a method of manufacturing a thin film, a buffer layer is formed a substrate. Thereafter, a ferroelectric thin film material is applied thereto before thermally decomposing the buffer layer. Subsequently, the buffer layer and the ferroelectric thin film are decomposed together. Finally, a crystallized thermal process is performed.

    摘要翻译: 在制造薄膜的方法中,缓冲层形成为基板。 此后,在热分解缓冲层之前施加铁电薄膜材料。 随后,缓冲层和铁电薄膜一起分解。 最后,进行结晶热处理。

    Method of producing a bismuth layer structured ferroelectric thin film
    5.
    发明授权
    Method of producing a bismuth layer structured ferroelectric thin film 有权
    生产铋层结构铁电薄膜的方法

    公开(公告)号:US06194227B1

    公开(公告)日:2001-02-27

    申请号:US09174393

    申请日:1998-10-14

    申请人: Takashi Hase

    发明人: Takashi Hase

    IPC分类号: H01L2100

    CPC分类号: H01L21/31691 H01L28/56

    摘要: The surface of a Si substrate is coated with a lower electrode of precious metal (Pt), then a buffer layer comprising an oxide thin film containing Bi is deposited. On the surface of the buffer layer, a thin film of a Bi layer structured ferroelectric substance is formed. Thus, reaction of the Bi layer structured ferroelectric substance with the precious metal coating the Si substrate is avoided during crystallization carried out at a low temperature. Therefore, deviation in composition of the thin film thus formed is suppressed to provide the thin film with a high density. When the thickness of the buffer layer is not greater than five percent of that of the Bi layer structured ferroelectric thin film, electrical characteristics of a capacitor are not deteriorated. When electrical connection is conducted by polycrystalline Si, production of oxide can be avoided by deposition at 650° C.

    摘要翻译: Si衬底的表面涂覆有贵金属(Pt)的下电极,然后沉积包含含有Bi的氧化物薄膜的缓冲层。 在缓冲层的表面形成有Bi层结构的铁电体的薄膜。 因此,在低温下进行结晶时避免了Bi层结构的铁电体与覆盖Si衬底的贵金属的反应。 因此,抑制如此形成的薄膜的组成偏差,从而提供高密度的薄膜。 当缓冲层的厚度不大于Bi层结构的铁电薄膜的厚度的5%时,电容器的电特性不会劣化。 当通过多晶硅进行电连接时,可以通过在650℃下沉积来避免生成氧化物。

    Apparatus for producing oxide thin film
    6.
    发明授权
    Apparatus for producing oxide thin film 失效
    氧化物薄膜的制造装置

    公开(公告)号:US5421890A

    公开(公告)日:1995-06-06

    申请号:US98903

    申请日:1993-07-29

    摘要: Disclosed is an oxide thin film producing method and apparatus for producing an oxide thin film having excellent crystallinity and purity with high productivity while correctly controlling the composition of the oxide thin film. After reducing the pressure inside a vacuum chamber to 1.times.10.sup.-9 Torr or less, a metal thin film is formed by evaporating a specified metal element and depositing vapor of the metal element on a substrate in the vacuum chamber. Then a cover member is moved upward to closely abut to a cover receiving member to thereby form an airtight chamber for enclosing the substrate airtightly in the vacuum chamber. With the degree of vacuum around the airtight chamber maintained, O.sub.2 gas is directly introduced into the airtight chamber through a gas piping to oxidize the metal thin film and thereby form an oxide thin film. At the same time, the gas inside the airtight chamber is discharged directly out of the vacuum chamber through a gas piping.

    摘要翻译: 公开了一种用于在正确控制氧化物薄膜的组成的同时以高生产率制造具有优异的结晶度和纯度的氧化物薄膜的氧化物薄膜制造方法和装置。 在将真空室内的压力降低到1×10 -9 Torr或更小之后,通过蒸发特定的金属元素并将金属元素的蒸气沉积在真空室中的基底上来形成金属薄膜。 然后,盖构件向上移动以紧密地邻接到盖接收构件,从而形成用于将基底气密地封闭在真空室中的气密室。 随着保持气密室周围的真空度,通过气体管道将O2气体直接引入气密室,以氧化金属薄膜,从而形成氧化物薄膜。 同时,气密室内的气体通过气体管道直接排出真空室外。

    Phosphor and ultraviolet ray excited fluorescent tube employing it
    7.
    发明授权
    Phosphor and ultraviolet ray excited fluorescent tube employing it 失效
    使用荧光粉和紫外线激发荧光灯管

    公开(公告)号:US5231328A

    公开(公告)日:1993-07-27

    申请号:US899157

    申请日:1992-06-15

    IPC分类号: C09K11/77 H01J61/44

    CPC分类号: H01J61/44 C09K11/774

    摘要: A bivalent europium-activated alkaline earth haloborate phosphor which contains lithium as coactivator, a process for its production, and an ultraviolet ray excited fluorescent tube such as a fluorescent lamp having a fluorescent layer containing such a phosphor as the blue-emitting component.

    摘要翻译: 含有锂作为共激活剂的二价铕活化碱土金属卤硼酸盐荧光体,其制造方法,以及荧光灯等紫外线激发荧光管,其荧光层含有蓝色发光成分的荧光体。