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公开(公告)号：US4727004A
公开(公告)日：1988-02-23
申请号：US932034
申请日：1986-11-18
CPC分类号： H05B33/20 , C09K11/7731 , H05B33/14
摘要： A thin film EL device having a double-insulated structure and comprising an emitting layer made of an alkaline-earth sulfide as its host material and doped with Eu.sup.2+ for providing luminescent centers. The emitting layer has a Eu concentration of 0.15 to 0.75 atm. % and a controlled thickness of at least 1.3 .mu.m to impart hysteresis to the brightness vs. applied voltage characteristics of the device.
摘要翻译： 一种具有双重绝缘结构的薄膜EL器件，包括由碱土金属硫化物作为其主体材料并且掺杂有用于提供发光中心的Eu 2+的发射层。 发光层的Eu浓度为0.15〜0.75atm。 ％和可控厚度至少为1.3μm，以对器件的亮度与施加的电压特性产生迟滞。
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公开(公告)号：US4707419A
公开(公告)日：1987-11-17
申请号：US867814
申请日：1986-05-27
CPC分类号： H05B33/18 , Y10S428/917
摘要： The present invention provides a thin film EL device comprising an electrode layer, an emitting layer and an electrode layer formed on a substrate one over another, and an insulating layer interposed between the three layers, the emitting layer containing atoms of a rare-earth element and fluorine atoms in its host material, the atom ratio (F/RE) of the fluorine atoms (F) to the rare-earth atoms (RE) being adjusted to the range of 0.5 to 2.5, and a process for producing the EL device being characterized in that the emitting layer is prepared by forming a film under a condition substantially free from oxygen gas and/or moisture and subjecting the film to a heat treatment at a temperature of 200.degree. C. to 700.degree. C. so that the host material of the emitting layer contains atoms of a rare-earth element (RE) and fluorine atoms (F) in an adjusted atom ratio (F/RE) in the range of 0.5 to 2.5.The present invention affords a thin film EL device which emits, for example, a green luminescence with a high brightness.
摘要翻译： 本发明提供了一种薄膜EL器件，其包括电极层，发光层和形成在衬底上的电极层，以及介于三层之间的绝缘层，所述发射层含有稀土元素的原子 和氟原子在其主体材料中，氟原子（F）与稀土原子（RE）的原子比（F / RE）被调整到0.5至2.5的范围，以及制造EL器件的方法 其特征在于，通过在基本上不含氧气和/或水分的条件下形成膜并在200℃至700℃的温度下对膜进行热处理来制备发光层，使得主体 发光层的材料在0.5〜2.5的范围内含有稀土元素（RE）的原子和调整原子比（F / RE）的氟原子（F）。 本发明提供了例如以高亮度发出绿色发光的薄膜EL器件。
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公开(公告)号：US5334250A
公开(公告)日：1994-08-02
申请号：US22742
申请日：1993-02-17
申请人： Akiyoshi Mikami , Takashi Ogura , Kousuke Terada , Masaru Yoshida , Takuo Yamashita , Koichi Tanaka , Katsushi Okibayashi , Shigeo Nakajima , Hiroaki Nakaya , Kouji Taniguchi
发明人： Akiyoshi Mikami , Takashi Ogura , Kousuke Terada , Masaru Yoshida , Takuo Yamashita , Koichi Tanaka , Katsushi Okibayashi , Shigeo Nakajima , Hiroaki Nakaya , Kouji Taniguchi
IPC分类号： H05B33/10 , C23C16/44 , C23C16/455 , C30B25/08 , H01L21/205
CPC分类号： C23C16/455 , C23C16/45591
摘要： A vapor deposition apparatus for depositing thin film on substrates in which solid starting materials are used. In this apparatus, a carrier gas flows up and down in the same direction as gas convection, such that the effect of gas convection is minimized and film thickness and impurity concentration are uniform over the substrate surface. This uniformity is achieved by orienting a main reaction tube in a vertical direction, attaching two branch reaction tubes at the top of the main reaction tube, and venting carrier gas out the bottom of the main reaction tube. Alternately, the main reaction tube can be oriented horizontally, with the substrates being carried on a holder within a container having pores on its top and bottom.
摘要翻译： 一种用于在其中使用固体起始材料的基底上沉积薄膜的气相沉积设备。 在该装置中，载流气体沿与气体对流相同的方向上下流动，使得气体对流的作用最小化，并且膜厚度和杂质浓度在基板表面上是均匀的。 通过使主反应管在垂直方向取向，在主反应管的顶部安装两个分支反应管，并将载气从主反应管的底部排出，实现均匀性。 或者，主反应管可以水平取向，衬底被承载在具有其顶部和底部上的孔的容器内的保持器上。
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公开(公告)号：US4717858A
公开(公告)日：1988-01-05
申请号：US819217
申请日：1986-01-15
CPC分类号： C09K11/7731 , H05B33/14 , H05B33/22
摘要： A thin film electroluminescence device comprising an electrode layer, an emitting layer and an electrode layer formed on a substrate one over another, and an insulating layer optionally interposed between the three layers, the emitting layer being made of CaS serving as a host material and doped with Eu.sup.2+ providing luminescent centers.The emitting layer comprising a novel combination of host material and luminescent center produces a red electroluminescence with a high brightness.
摘要翻译： 一种薄膜电致发光器件，包括电极层，发光层和形成在基板上的电极层，以及可选地插入在三层之间的绝缘层，发光层由作为主体材料的CaS制成，掺杂 Eu2 +提供发光中心。 包含主体材料和发光中心的新型组合的发光层产生具有高亮度的红色电致发光。
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公开(公告)号：US5147683A
公开(公告)日：1992-09-15
申请号：US638841
申请日：1991-01-08
申请人： Koichi Tanaka , Akiyoshi Mikami , Kouji Taniguchi , Katsushi Okibayashi , Kousuke Terada , Takuo Yamashita , Takashi Ogura , Hiroaki Nakaya , Masaru Yoshida , Shigeo Nakajima
发明人： Koichi Tanaka , Akiyoshi Mikami , Kouji Taniguchi , Katsushi Okibayashi , Kousuke Terada , Takuo Yamashita , Takashi Ogura , Hiroaki Nakaya , Masaru Yoshida , Shigeo Nakajima
IPC分类号： H05B33/10 , C23C16/30 , C23C16/44 , C23C16/455 , C23C16/458 , H01L21/365 , H05B33/12 , H05B33/14
CPC分类号： C23C16/45502 , C23C16/306 , C23C16/45512 , C23C16/45559 , C23C16/45582 , C23C16/458
摘要： Disclosed is an improvement of the chemical vapor deposition (CVD) process for preparing an electroluminescent device having a large area and a large size. The process includes forming a luminescent layer on a substrate by a reduced-pressure chemical vapor deposition method wherein a source material gas is introduced into a reaction chamber. The reaction chamber includes a screening means which screens the source material gas flow in the chamber to form a first area in which the gas is flowing and a second area in which the gas substantially does not flow. The screening means has apertures for connecting the first area and second area. the substrate is placed in the second area, to which the source material is supplied by means of gas diffusion.
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公开(公告)号：US5116640A
公开(公告)日：1992-05-26
申请号：US594139
申请日：1990-10-10
申请人： Akiyoshi Mikami , Takashi Ogura , Kousuke Terada , Masaru Yoshida , Takuo Yamashita , Koichi Tanaka , Katsushi Okibayashi , Shigeo Nakajima , Hiroaki Nakaya , Kouji Taniguchi
发明人： Akiyoshi Mikami , Takashi Ogura , Kousuke Terada , Masaru Yoshida , Takuo Yamashita , Koichi Tanaka , Katsushi Okibayashi , Shigeo Nakajima , Hiroaki Nakaya , Kouji Taniguchi
CPC分类号： H05B33/10 , C23C16/306 , C23C16/345 , C23C16/402 , C23C16/54
摘要： A process for preparing an electroluminescent device includes the steps of forming an insulating layer and a luminescent layer on a substrate, wherein the insulating and luminescent layers are respectively formed at different forming areas in the same deposition chamber.
摘要翻译： 制备电致发光器件的方法包括在衬底上形成绝缘层和发光层的步骤，其中绝缘层和发光层分别形成在同一淀积室中的不同形成区域。
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公开(公告)号：US5372839A
公开(公告)日：1994-12-13
申请号：US789818
申请日：1991-11-12
CPC分类号： C23C16/306 , C09K11/612 , C09K11/613 , C09K11/7702 , C09K11/7703 , C09K11/883 , C09K11/885 , C09K11/886 , H05B33/10 , H05B33/14
摘要： A process for preparing an electroluminescent film which comprises causing a substrate held at a high temperature to simultaneous contact two kinds of vapors of (a) Group II element and a Group VI element or a compound thereof, capable of forming a Group II-VI compound semiconductor, and (b) a halide of an element capable of acting as luminescent centers in the Group II-VI compound semiconductor, in the presence of flowing hydrogen or an inert gas, whereby a thin electroluminescent film comprising the Group II-VI compound semiconductor and containing the element forming the luminescent centers is formed on the surface of the substrate.
摘要翻译： 一种制备电致发光膜的方法，其包括使保持在高温下的基板同时接触能够形成II-VI族化合物的（a）II族元素和VI族元素或其化合物的两种蒸气 半导体，和（b）在流动的氢气或惰性气体的存在下，能够作为II-VI族化合物半导体中的发光中心的元素的卤化物，由此得到包含II-VI族化合物半导体 并且在衬底的表面上形成含有形成发光中心的元件。
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公开(公告)号：US5223305A
公开(公告)日：1993-06-29
申请号：US698797
申请日：1991-05-13
申请人： Koichi Tanaka , Kousuke Terada , Katsushi Okibayashi , Akiyoshi Mikami , Masaru Yoshida , Shigeo Nakajima
发明人： Koichi Tanaka , Kousuke Terada , Katsushi Okibayashi , Akiyoshi Mikami , Masaru Yoshida , Shigeo Nakajima
IPC分类号： H05B33/10 , C23C16/18 , C23C16/44 , C23C16/448 , C23C16/455 , C23C16/46 , H01L21/205
CPC分类号： C23C16/46 , C23C16/455
摘要： An apparatus for vapor deposition including a vapor deposition section to which at least one semiconductor material supply passage and at least one alkoxide material supply passage are connected, first heating means provided for the vapor deposition section and capable of maintaining the temperature thereof higher than that of the alkoxide supply passage, second heating means provided for the semiconductor material supply passage and capable of maintaining the temperature thereof higher than that of the vapor deposition section, and third heating means provided for the alkoxide material supply passage and capable of maintaining the temperature thereof constant, and a process for continuously forming a multilayered film on a substrate.
摘要翻译： 一种用于气相沉积的装置，包括连接至少一个半导体材料供应通道和至少一个醇盐材料供应通道的气相沉积部分，为蒸镀部设置的第一加热装置，并且能够将其温度保持在高于 所述醇盐供给路径，为半导体材料供给路设置的第二加热单元，其温度保持为高于蒸镀部的温度;以及第三加热单元，设置在所述醇盐材料供给路径上，能够保持其温度恒定 ，以及在基板上连续形成多层膜的工序。
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公开(公告)号：US5185181A
公开(公告)日：1993-02-09
申请号：US721711
申请日：1991-06-26
申请人： Akiyoshi Mikami , Kousuke Terada , Katsushi Okibayashi , Koichi Tanaka , Masaru Yoshida , Shigeo Nakajima
发明人： Akiyoshi Mikami , Kousuke Terada , Katsushi Okibayashi , Koichi Tanaka , Masaru Yoshida , Shigeo Nakajima
CPC分类号： C23C16/45591 , C23C16/306 , C23C16/455
摘要： A process is provided for preparing uniform and homogeneous thin films such as ZnS:M film on the substrates having a large area by CVD under a reduced pressure, wherein as many plural substrates as possible can be subjected to the CVD treatment in the same apparatus without decreasing a growth rate of the film. Accordingly, EL displays having a large area which possess a high quality and can be manufactured efficiently.
摘要翻译： 提供了一种通过CVD在减压下在具有大面积的基板上制备均匀且均匀的薄膜如ZnS：M膜的方法，其中尽可能多的多个基板可以在相同的装置中进行CVD处理而没有 降低电影的增长率。 因此，EL显示器具有高质量的大面积并且可以有效地制造。
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公开(公告)号：US5087531A
公开(公告)日：1992-02-11
申请号：US442634
申请日：1989-11-29
申请人： Kousuke Terada , Akiyoshi Mikami , Kouji Taniguchi , Koichi Tanaka , Masaru Yoshida , Shigeo Nakajima
发明人： Kousuke Terada , Akiyoshi Mikami , Kouji Taniguchi , Koichi Tanaka , Masaru Yoshida , Shigeo Nakajima
CPC分类号： H05B33/14 , C09K11/574 , C09K11/883 , H05B33/10 , Y10S428/917
摘要： Disclosed is an electroluminescent device including a substrate and an electroluminescent film on the substrate wherein the electroluminescent film is composed of a II-VI group compound semiconductor matrix and an electroluminescent center element; the improvement being present in that the electroluminescent film has a crystal structure of a hexagonal system, and contains the electroluminescent center element in a concentration (Ci) of 0.5 to 4 at. % within a thickness of 0.2 micrometer from the side of the substrate and in a concentration (Cr) of 0.15 to 0.7 at. % at the residual portion, and Ci is larger than Cr, and the process for preparing the same.
摘要翻译： 公开了一种电致发光器件，其在衬底上包括衬底和电致发光膜，其中电致发光膜由II-VI族化合物半导体衬底和电致发光中心元件构成; 存在的改进在于电致发光膜具有六方晶系的晶体结构，并且含有浓度（Ci）为0.5-4atm的电致发光中心元件。 的厚度为0.2微米，并且浓度（Cr）为0.15〜0.7at。 ％，并且C 1大于Cr，以及其制备方法。
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