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1.发明授权
公开(公告)号：US4666314A
公开(公告)日：1987-05-19
申请号：US873452
申请日：1986-06-06
申请人： Shigeki Tojyo , Tatsuo Uesaka , Yoshio Kawate , Masayoshi Iwaskai , Takefumi Horiuchi , Masato Moritoki , Takeshi Kanda , Takao Fujikawa , Shigeo Kofune
发明人： Shigeki Tojyo , Tatsuo Uesaka , Yoshio Kawate , Masayoshi Iwaskai , Takefumi Horiuchi , Masato Moritoki , Takeshi Kanda , Takao Fujikawa , Shigeo Kofune
CPC分类号： G01J5/08 , B30B11/002 , B30B11/005 , G01J5/0044 , G01J5/041 , G01J5/06 , G01J5/0806 , G01J5/0818 , G01J5/0821 , G01J5/0834 , G01J5/0896 , G01J2005/0048 , G01J5/045 , G01J5/52
摘要： A method of measuring the temperature in a high pressure furnace of a hot isostatic pressing apparatus, wherein a closed-end pipe having its inside communicated with the inside of the high pressure furnace and enabling a pressure medium to pass therethrough is disposed in the furnace, an incident top end of an optical fiber, a bundle of optical fibers or like other equivalent optical rod-like memeber is disposed to the open end of the closed-end pipe so as to be capable of receiving thermally radiated light from the inside of the closed-ended pipe and an exit rear end thereof is led out through a cover and to the outside of said high pressure vessel and a measuring system is connected to said exit rear end to detect heat radiation power from the top end of the closed-end pipe to thereby measure the temperature inside of the furnace.
摘要翻译： 一种在等压压制装置的高压炉中测定温度的方法，其特征在于，在所述炉内设置封闭式管，其内部与高压炉内部连通，压力介质通过， 光纤的入射顶端，一束光纤或类似的其他等效的光棒状元件设置在封闭端管的开口端，以便能够从内侧接受热辐射光 封闭管及其出口后端通过盖引出并且到达所述高压容器的外部，并且测量系统连接到所述出口后端以检测来自封闭端的顶端的热辐射功率 从而测量炉内的温度。
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2.发明授权
公开(公告)号：US5092938A
公开(公告)日：1992-03-03
申请号：US258113
申请日：1988-10-14
申请人： Takeshi Kanda , Takao Fujikawa , Shigeo Kofune
发明人： Takeshi Kanda , Takao Fujikawa , Shigeo Kofune
CPC分类号： G01K1/08 , B30B11/002 , G01K7/04
摘要： A temperature detector for use in a high temperature and high pressure furnace, including thermocouple wires received in a tubular protective sheath for protection against the furnace atmosphere, and characterized by the provision of a pair of rod members of a large diameter serving as a thermocouple pair for the positive and negative sides thereof, a protective sheath having a rod suspending holder portion in an upper portion thereof for supporting the thermocouple rod members therein in a vertically suspended state and arranged to hold the rod members out of contact with each other except at a temperature measuring point and to contact the rod members with the protective sheath only in a region other than a high temperature region of the furnace.
摘要翻译： 一种在高温高压炉中使用的温度检测器，包括容纳在管状保护套中的热电偶线，用于保护炉气氛，并且特征在于提供一对大直径的杆构件作为热电偶对 对于其正面和负面，具有在其上部具有杆悬挂保持器部分的保护护套，用于将垂直悬挂状态的热电偶杆构件支撑在其中，并且布置成保持杆构件彼此不接触，除了在 温度测量点，并且仅在除了炉的高温区域之外的区域中将杆构件与保护护套接触。
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3.再颁专利
公开(公告)号：USRE33245E
公开(公告)日：1990-06-26
申请号：US209954
申请日：1988-06-22
申请人： Shigeki Tojyo , Tatsuo Uesaka, deceased , Yoshio Kawate , Masayoshi Iwasaki , Takefumi Horiuchi , Masato Moritoki , Takeshi Kanda , Takao Fujikawa , Shigeo Kofune
发明人： Shigeki Tojyo , Tatsuo Uesaka, deceased , Yoshio Kawate , Masayoshi Iwasaki , Takefumi Horiuchi , Masato Moritoki , Takeshi Kanda , Takao Fujikawa , Shigeo Kofune
CPC分类号： G01J5/08 , B30B11/002 , B30B11/005 , G01J5/0044 , G01J5/041 , G01J5/06 , G01J5/0806 , G01J5/0818 , G01J5/0821 , G01J5/0834 , G01J5/0896 , G01J2005/0048 , G01J5/045 , G01J5/52
摘要： A method of measuring the temperature in a high pressure furnace of a hot isostatic pressing apparatus, wherein a closed-end pipe having its inside communicated with the inside of the high pressure furnace and enabling a pressure medium to pass therethrough is disposed in the furnace, an incident top end of an optical fiber, a bundle of optical fibers or like other equivalent optical rod-like memeber is disposed to the open end of the closed-end pipe so as to be capable of receiving thermally radiated light from the inside of the closed-ended pipe and an exit rear end thereof is led out through a cover and to the outside of said high pressure vessel and a measuring system is connected to said exit rear end to detect heat radiation power from the top end of the closed-end pipe to thereby measure the temperature inside of the furnace.
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4.发明授权公开(公告)号：US06991370B2
公开(公告)日：2006-01-31
申请号：US10623521
申请日：2003-07-22
申请人： Shigeo Kofune , Takao Fujikawa
发明人： Shigeo Kofune , Takao Fujikawa
CPC分类号： G01K7/02
摘要： The temperature measuring apparatus according to the present invention is of the high melting point metal carbide—carbon system material thermocouple type. According to this temperature measuring apparatus, it is possible to measure temperatures from a room temperature range to a high temperature range in excess of 2000° C. continuously, stably and with good accuracy. A constitution is preferable wherein a rod-like member formed of high melting point metal carbide is inserted into a pipe-like member with a bottom formed of carbon system material, and connected at the bottom to serve as a temperature measuring portion.
摘要翻译： 根据本发明的温度测量装置是高熔点金属碳化物 - 碳系材料热电偶类型。 根据该温度测量装置，可以连续，稳定地并且以高精度测量从室温到超过2000℃的高温范围的温度。 优选其中将由高熔点金属碳化物形成的棒状构件插入由碳系材料形成的底部的管状构件中，并且在底部连接以用作温度测量部分。
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公开(公告)号：US08652370B2
公开(公告)日：2014-02-18
申请号：US11671109
申请日：2007-02-05
申请人： Takao Fujikawa , Tomomitsu Nakai , Makoto Yoneda , Shigeo Kofune , Yoshihiko Sakashita , Masahiko Mitsuda
发明人： Takao Fujikawa , Tomomitsu Nakai , Makoto Yoneda , Shigeo Kofune , Yoshihiko Sakashita , Masahiko Mitsuda
CPC分类号： B30B11/002 , B28B11/24
摘要： A hot isostatic pressing method is disclosed wherein workpieces are accommodated within a high pressure vessel and the interior of the high pressure vessel is filled with an inert gas of a high temperature and a high pressure to treat the workpieces. The method includes a cooling step which is performed after maintaining the interior of the high pressure vessel at a high temperature and a high pressure for a predetermined time and in which a liquid inert gas is fed into the high pressure vessel. According to this method it is possible to shorten the cycle time of an HIP apparatus.
摘要翻译： 公开了一种热等静压法，其中将工件容纳在高压容器内，高压容器的内部填充有高温高压惰性气体，以处理工件。 该方法包括冷却步骤，其在将高压容器的内部保持在高温和高压预定时间之后进行，并且将液体惰性气体供给到高压容器中。 根据该方法，可以缩短HIP装置的循环时间。
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公开(公告)号：US07011510B2
公开(公告)日：2006-03-14
申请号：US10388665
申请日：2003-03-17
申请人： Tomomitsu Nakai , Makoto Yoneda , Shigeo Kofune , Takao Fujikawa
发明人： Tomomitsu Nakai , Makoto Yoneda , Shigeo Kofune , Takao Fujikawa
CPC分类号： B30B11/002 , B22F3/15 , B22F2999/00 , B29C43/006 , B29C43/10 , B29C43/52 , B29C43/58 , F27B5/04 , F27B5/14 , F27B2005/162 , F27B2005/167 , Y10S425/815 , B22F3/003
摘要： A hot isostatic pressing apparatus (HIP apparatus) comprises a vertically cylindrical high-pressure vessel comprising a high-pressure cylinder 1 and upper and lower lids 2 and 3; a bottomed cylindrical casing 6 capable of housing workpieces 9 and a resistance-wire heater 11, a heat insulating structure 16 equipped with a gas flow regulating valve 15 and formed in a bottomed cylindrical shape on the outside of the casing 6 so as to cover the casing 6, and a heat sink 17 having a water cooling mechanism provided in the space defined by the heat insulating structure 16 and the inner surface of the high-pressure cylinder 1, which are provided within the high-pressure vessel; and a pressure medium gas stirring fan 12 for promoting the temperature uniformity of the space of the treatment chamber 7 for housing the workpieces 9, the stirring fan being arranged on the lower lid 3 side within the casing 6, whereby the cooling to a temperature range of 100° C. or lower which allows a quenching treatment and the safe manual handling of workpieces can be efficiently performed.
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公开(公告)号：US07008210B2
公开(公告)日：2006-03-07
申请号：US10437061
申请日：2003-05-14
申请人： Yasuo Manabe , Shigeo Kofune , Makoto Yoneda , Takao Fujikawa
发明人： Yasuo Manabe , Shigeo Kofune , Makoto Yoneda , Takao Fujikawa
CPC分类号： F27B5/06 , B22F3/003 , B22F3/15 , B29K2105/251 , B29K2303/06 , B30B11/002 , F27B5/04 , F27B5/14 , F27B2005/162 , F27B2005/167 , F27D7/04 , F27D7/06 , F27D9/00 , F27D2009/0075 , Y10S425/815
摘要： A treatment chamber for heating and pressing workpieces and a heat insulating structure which covers the treatment chamber sideways and from above are provided within a high-pressure vessel. Below the treatment chamber are disposed a base heater for heating a pressure medium gas and a fan for supplying the pressure medium gas in a heated state into the treatment chamber and stirring the heated gas. The workpieces can be held on the heat insulating structure side, and the heat insulating structure and the workpieces can be taken out from the interior of the high-pressure vessel and can be conveyed together separately from a lower lid of the high-pressure vessel. A hot isostatic pressing apparatus is provided less expensively which can heat and press workpieces at a relatively low temperature of not higher than 600° C. Besides, it is possible to shorten the cycle time in HIP.
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公开(公告)号：US06837086B2
公开(公告)日：2005-01-04
申请号：US10446671
申请日：2003-05-29
申请人： Yasuo Manabe , Shigeo Kofune , Makoto Yoneda , Takao Fujikawa
发明人： Yasuo Manabe , Shigeo Kofune , Makoto Yoneda , Takao Fujikawa
CPC分类号： B30B11/002 , C21D2241/02 , C22F1/04 , C22F1/06
摘要： While a workpiece is heated and pressed by one of a pair of high-pressure vessels, a workpiece being pressed by the other high-pressure vessel is placed in a heated state. In the reducing process after termination of heating and pressing treatment of the workpiece by one high-pressure vessel, both the high-pressure vessels are placed in communication, and the pressure medium gas released from one high-pressure vessel is poured into the other high-pressure vessel. After pressures of both the high-pressure vessels have assumed a nearly balanced state, the pressure medium gas is sucked out of one high-pressure vessel by a compressor and pressed, and is poured into the other high-pressure vessel, and the workpiece is heated and pressed by the other high-pressure vessel. By the method as described, considerable shortening of cycle time of HIP treatment is achieved, and the HIP treatment can be carried out with high efficiency.
摘要翻译： 当工件被一对高压容器中的一个加热和加压时，由另一个高压容器压制的工件被置于加热状态。 在通过一个高压容器对工件进行加热和加压处理终止之后的还原过程中，两个高压容器相互连通，将从一个高压容器释放的压力介质气体倒入另一个高压容器 -压力容器。 在两个高压容器的压力都呈现接近平衡的状态之后，通过压缩机将压力介质气体从一个高压容器中吸出并被压制，并且被倒入另一个高压容器中，并且工件是 被另一个高压容器加热和压制。 通过所述方法，实现了HIP处理循环时间的缩短，HIP处理能够高效率地进行。
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公开(公告)号：US20070228596A1
公开(公告)日：2007-10-04
申请号：US11671109
申请日：2007-02-05
申请人： Takao Fujikawa , Tomomitsu Nakai , Makoto Yoneda , Shigeo Kofune , Yoshihiko Sakashita , Masahiko Mitsuda
发明人： Takao Fujikawa , Tomomitsu Nakai , Makoto Yoneda , Shigeo Kofune , Yoshihiko Sakashita , Masahiko Mitsuda
CPC分类号： B30B11/002 , B28B11/24
摘要： A hot isostatic pressing method is disclosed wherein workpieces are accommodated within a high pressure vessel and the interior of the high pressure vessel is filled with an inert gas of a high temperature and a high pressure to treat the workpieces. The method includes a cooling step which is performed after maintaining the interior of the high pressure vessel at a high temperature and a high pressure for a predetermined time and in which a liquid inert gas is fed into the high pressure vessel. According to this method it is possible to shorten the cycle time of an HIP apparatus.
摘要翻译： 公开了一种热等静压法，其中将工件容纳在高压容器内，高压容器的内部填充有高温高压惰性气体，以处理工件。 该方法包括冷却步骤，其在将高压容器的内部保持在高温和高压预定时间之后进行，并且将液体惰性气体供给到高压容器中。 根据该方法，可以缩短HIP装置的循环时间。
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10.发明授权公开(公告)号：US06790774B2
公开(公告)日：2004-09-14
申请号：US10314990
申请日：2002-12-10
申请人： Takao Fujikawa , Makoto Kadoguchi , Kohei Suzuki , Takuya Masui
发明人： Takao Fujikawa , Makoto Kadoguchi , Kohei Suzuki , Takuya Masui
IPC分类号： H01L2144
CPC分类号： H01L21/2855 , H01L21/76882 , H01L21/76886
摘要： A wiring film, which can be formed into wiring for ULSI semiconductor circuits, is formed by first forming holes in an insulating film on a substrate; then depositing a metallic material of copper, copper alloy, silver or silver alloy into the holes under an atmosphere including hydrogen; and finally annealing the deposited metallic material. The metallic material can be deposited by a sputtering process in which the atmosphere includes an inert gas in addition to the hydrogen. Hydrogen doped in the metallic material during the sputtering process promotes diffusion of atoms in the metallic material. The diffusion eliminates voids in the deposited metallic material.
摘要翻译： 可以形成为ULSI半导体电路的布线的布线膜通过在基板上的绝缘膜中首先形成孔而形成; 然后在包含氢气的气氛下将铜，铜合金，银或银合金的金属材料沉积到孔中; 最后退火沉积的金属材料。 金属材料可以通过溅射工艺沉积，其中除了氢气之外，气氛中还包括惰性气体。 在溅射过程中在金属材料中掺杂的氢促进金属材料中原子的扩散。 扩散消除沉积的金属材料中的空隙。
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