公开(公告)号：US07022558B2

公开(公告)日：2006-04-04

申请号：US10712712

申请日：2003-11-14

申请人： Takeshi Sato ,  Kazuo Takeda ,  Masakazu Saito ,  Jun Goto ,  Makoto Ohkura

发明人： Takeshi Sato ,  Kazuo Takeda ,  Masakazu Saito ,  Jun Goto ,  Makoto Ohkura

IPC分类号： H01L21/00

CPC分类号： H01L21/0268 ,  B23K26/0622 ,  B23K26/066 ,  H01L21/02686 ,  H01L21/2026 ,  H01L21/268 ,  H01L27/1285 ,  H01L27/1296 ,  H01L27/3244 ,  H01L29/04 ,  H01L29/78645

摘要： The present invention provides a manufacturing method of a high performance active matrix substrate at a high throughput with a less expensive apparatus, and an image display device using the active matrix substrate. On a stage moving in the short axis direction X and long axis direction Y on a rail, a glass substrate is carried, which has an amorphous silicon semiconductor film formed. Polycrystallized and large grain silicon film may be obtained by intensity modulating the pulsed laser beam in a line beam shape by means of a phase shift mask with a periodicity in the long axis direction Y of the laser beam, moving the laser beam randomly in the modulation direction of the amorphous silicon semiconductor film formed on the glass substrate to expose to crystallize the film. The image display device may incorporate an active matrix substrate having active elements such as thin film transistors formed by this silicon film.

摘要翻译： 本发明以较低成本的装置提供高产量的高性能有源矩阵基板的制造方法以及使用有源矩阵基板的图像显示装置。 在轨道上沿短轴方向X和长轴方向Y移动的台架上，承载形成有非晶硅半导体膜的玻璃基板。 通过利用在激光束的长轴方向Y上具有周期性的相移掩模以线束形式对脉冲激光束进行强度调制，可以获得多晶硅和大晶粒硅膜，在激光束的随机调制 在玻璃基板上形成的非晶硅半导体膜的方向露出以使膜结晶。 该图像显示装置可以包括具有有源元件的有源矩阵基板，例如由该硅膜形成的薄膜晶体管。

公开(公告)号：US07655950B2

公开(公告)日：2010-02-02

申请号：US11341681

申请日：2006-01-30

申请人： Takeshi Sato ,  Kazuo Takeda ,  Masakazu Saito ,  Jun Goto ,  Makoto Ohkura

发明人： Takeshi Sato ,  Kazuo Takeda ,  Masakazu Saito ,  Jun Goto ,  Makoto Ohkura

IPC分类号： H01L29/04

CPC分类号： H01L21/0268 ,  B23K26/0622 ,  B23K26/066 ,  H01L21/02686 ,  H01L21/2026 ,  H01L21/268 ,  H01L27/1285 ,  H01L27/1296 ,  H01L27/3244 ,  H01L29/04 ,  H01L29/78645

摘要： The present invention provides a manufacturing method of a high performance active matrix substrate at a high throughput with a less expensive apparatus, and an image display device using the active matrix substrate. On a stage moving in the short axis direction X and long axis direction Y on a rail, a glass substrate is carried, which has an amorphous silicon semiconductor film formed. Polycrystallized and large grain silicon film may be obtained by intensity modulating the pulsed laser beam in a line beam shape by means of a phase shift mask with a periodicity in the long axis direction Y of the laser beam, moving the laser beam randomly in the modulation direction of the amorphous silicon semiconductor film formed on the glass substrate to expose to crystallize the film. The image display device may incorporate an active matrix substrate having active elements such as thin film transistors formed by this silicon film.

摘要翻译： 本发明以较低成本的装置提供高产量的高性能有源矩阵基板的制造方法以及使用有源矩阵基板的图像显示装置。 在轨道上沿短轴方向X和长轴方向Y移动的台架上，承载形成有非晶硅半导体膜的玻璃基板。 通过利用在激光束的长轴方向Y上具有周期性的相移掩模以线束形式对脉冲激光束进行强度调制，可以获得多晶硅和大晶粒硅膜，在激光束的随机调制 在玻璃基板上形成的非晶硅半导体膜的方向露出以使膜结晶。 该图像显示装置可以包括具有有源元件的有源矩阵基板，例如由该硅膜形成的薄膜晶体管。

公开(公告)号：US20060131587A1

公开(公告)日：2006-06-22

申请号：US11341681

申请日：2006-01-30

申请人： Takeshi Sato ,  Tazuo Takeda ,  Masakazu Saito ,  Jun Goto ,  Makoto Ohkura

发明人： Takeshi Sato ,  Tazuo Takeda ,  Masakazu Saito ,  Jun Goto ,  Makoto Ohkura

IPC分类号： H01L29/04

CPC分类号： H01L21/0268 ,  B23K26/0622 ,  B23K26/066 ,  H01L21/02686 ,  H01L21/2026 ,  H01L21/268 ,  H01L27/1285 ,  H01L27/1296 ,  H01L27/3244 ,  H01L29/04 ,  H01L29/78645

摘要： The present invention provides a manufacturing method of a high performance active matrix substrate at a high throughput with a less expensive apparatus, and an image display device using the active matrix substrate. On a stage moving in the short axis direction X and long axis direction Y on a rail, a glass substrate is carried, which has an amorphous silicon semiconductor film formed. Polycrystallized and large grain silicon film may be obtained by intensity modulating the pulsed laser beam in a line beam shape by means of a phase shift mask with a periodicity in the long axis direction Y of the laser beam, moving the laser beam randomly in the modulation direction of the amorphous silicon semiconductor film formed on the glass substrate to expose to crystallize the film. The image display device may incorporate an active matrix substrate having active elements such as thin film transistors formed by this silicon film.

公开(公告)号：US07151046B2

公开(公告)日：2006-12-19

申请号：US10900365

申请日：2004-07-28

申请人： Kazuo Takeda ,  Takeshi Sato ,  Masakazu Saito ,  Jun Gotoh

发明人： Kazuo Takeda ,  Takeshi Sato ,  Masakazu Saito ,  Jun Gotoh

IPC分类号： H01L21/20

CPC分类号： H01L21/02686 ,  B23K26/066 ,  B23K26/0738 ,  H01L21/02678 ,  H01L21/2026 ,  H01L27/1285 ,  H01L29/66757 ,  H01L29/78675

摘要： A surface roughness of a polycrystalline semiconductor film to be formed by a laser annealing method is reduced. A transmittance distribution filter is disposed at the optical system of a laser annealing apparatus. The transmittance distribution filter controls an irradiation light intensity distribution along a scanning direction of a substrate formed with an amorphous silicon semiconductor thin film to have a distribution having an energy part equal to or higher than a fine crystal threshold on a high energy light intensity side and an energy part for melting and combining only a surface layer. This transmittance distribution filter is applied to an excimer laser annealing method, a phase shift stripe method or an SLS method respectively using a general line beam to thereby reduce the height of protrusions on a polycrystalline surface.

摘要翻译： 通过激光退火法形成的多晶半导体膜的表面粗糙度降低。 透射率分布滤光器设置在激光退火装置的光学系统中。 透射率分布滤光器控制沿着形成有非晶硅半导体薄膜的基板的扫描方向的照射光强度分布，以具有在高能量光强度侧具有等于或高于精细晶体阈值的能量分布的分布，以及 用于熔化和组合仅表面层的能量部分。 该透射率分布滤波器分别应用于准分子激光退火方法，相移条纹法或SLS法，使用通用线束，从而降低多晶表面上的突起的高度。

公开(公告)号：US20050139830A1

公开(公告)日：2005-06-30

申请号：US10900365

申请日：2004-07-28

申请人： Kazuo Takeda ,  Takeshi Sato ,  Masakazu Saito ,  Jun Gotoh

发明人： Kazuo Takeda ,  Takeshi Sato ,  Masakazu Saito ,  Jun Gotoh

IPC分类号： G02F1/1368 ,  B23K26/06 ,  B23K26/073 ,  H01L21/20 ,  H01L21/268 ,  H01L21/324 ,  H01L21/336 ,  H01L21/77 ,  H01L27/12 ,  H01L29/786 ,  H01L29/10

CPC分类号： H01L21/02686 ,  B23K26/066 ,  B23K26/0738 ,  H01L21/02678 ,  H01L21/2026 ,  H01L27/1285 ,  H01L29/66757 ,  H01L29/78675

摘要： A surface roughness of a polycrystalline semiconductor film to be formed by a laser annealing method is reduced. A transmittance distribution filter is disposed at the optical system of a laser annealing apparatus. The transmittance distribution filter controls an irradiation light intensity distribution along a scanning direction of a substrate formed with an amorphous silicon semiconductor thin film to have a distribution having an energy part equal to or higher than a fine crystal threshold on a high energy light intensity side and an energy part for melting and combining only a surface layer. This transmittance distribution filter is applied to an excimer laser annealing method, a phase shift stripe method or an SLS method respectively using a general line beam to thereby reduce the height of protrusions on a polycrystalline surface.

摘要翻译： 通过激光退火法形成的多晶半导体膜的表面粗糙度降低。 透射率分布滤光器设置在激光退火装置的光学系统中。 透射率分布滤光器控制沿着形成有非晶硅半导体薄膜的基板的扫描方向的照射光强度分布，以具有在高能量光强度侧具有等于或高于精细晶体阈值的能量分布的分布，以及 用于熔化和组合仅表面层的能量部分。 该透射率分布滤波器分别应用于准分子激光退火方法，相移条纹法或SLS法，使用通用线束，从而降低多晶表面上的突起的高度。

公开(公告)号：US20060254497A1

公开(公告)日：2006-11-16

申请号：US11449664

申请日：2006-06-09

申请人： Kazuo Takeda ,  Takeshi Sato ,  Masakazu Saito ,  Jun Gotoh

发明人： Kazuo Takeda ,  Takeshi Sato ,  Masakazu Saito ,  Jun Gotoh

IPC分类号： C30B5/00

CPC分类号： H01L21/02686 ,  B23K26/066 ,  B23K26/0738 ,  H01L21/02678 ,  H01L21/2026 ,  H01L27/1285 ,  H01L29/66757 ,  H01L29/78675

摘要： A surface roughness of a polycrystalline semiconductor film to be formed by a laser annealing method is reduced. A transmittance distribution filter is disposed at the optical system of a laser annealing apparatus. The transmittance distribution filter controls an irradiation light intensity distribution along a scanning direction of a substrate formed with an amorphous silicon semiconductor thin film to have a distribution having an energy part equal to or higher than a fine crystal threshold on a high energy light intensity side and an energy part for melting and combining only a surface layer. This transmittance distribution filter is applied to an excimer laser annealing method, a phase shift stripe method or an SLS method respectively using a general line beam to thereby reduce the height of protrusions on a polycrystalline surface.

公开(公告)号：US20050215077A1

公开(公告)日：2005-09-29

申请号：US11028864

申请日：2005-01-05

申请人： Kazuo Takeda ,  Takeshi Sato ,  Jun Gotoh ,  Masakazu Saitou ,  Daisuke Mutou

发明人： Kazuo Takeda ,  Takeshi Sato ,  Jun Gotoh ,  Masakazu Saitou ,  Daisuke Mutou

IPC分类号： G02F1/1368 ,  G02F1/133 ,  G09F9/30 ,  G09G3/36 ,  G09G3/38 ,  H01L21/00 ,  H01L21/20 ,  H01L21/26 ,  H01L21/263 ,  H01L21/268 ,  H01L21/336 ,  H01L21/42 ,  H01L21/77 ,  H01L27/32 ,  H01L29/786

CPC分类号： H01L27/1285 ,  H01L27/1296 ,  H01L27/3244 ,  H01L29/66757 ,  H01L29/78675

摘要： The generation of a projecting intensity distribution in an irradiation laser beam used for forming a polycrystalline semiconductor film is prevented by irradiating the laser beam onto an amorphous semiconductor film to crystallize it while it is being scanned. A dog-ear removing filter for eliminating diffracted light that occurs at boundaries of lenses and acts as a cause of development of dog-ears in the light intensity distribution is disposed in an optical system to cause the light intensity distribution in the irradiation laser beam to be uniform. As a result, by removing the dog ear distributions, the necessity for making the light intensity distribution of the laser beam blur is eliminated, and, consequently, a distribution of high energy efficiency can be maintained and the throughput is improved.

摘要翻译： 用于形成多晶半导体膜的照射激光束中的突出强度分布的产生通过将激光束照射到非晶半导体膜上而在被扫描时使其结晶化而被防止。 用于消除在透镜边界处发生的衍射光并且作为光强度分布中的狗耳发展的原因的狗耳去除滤光器被设置在光学系统中，以使照射激光束中的光强度分布 统一 结果，通过去除狗耳分布，消除了激光束模糊的光强度分布的必要性，从而可以保持高能量效率的分布并提高吞吐量。

公开(公告)号：US11128228B2

公开(公告)日：2021-09-21

申请号：US16813465

申请日：2020-03-09

申请人： Takumi Hyugaji ,  Takeshi Sato ,  Minoru Kado

发明人： Takumi Hyugaji ,  Takeshi Sato ,  Minoru Kado

IPC分类号： H02M3/335

摘要： A switching power supply device includes a transformer for voltage conversion, a synchronous rectification MOS transistor, and a secondary side control circuit. The synchronous rectification MOS transistor is connected in series to a secondary side coil of the transformer. The secondary side control circuit performs on/off control of the synchronous rectification MOS transistor based on a drain voltage of the synchronous rectification MOS transistor. The secondary side control circuit includes a peak period detection circuit and a determination reference voltage generation circuit. The peak period detection circuit detects a peak period of the drain voltage. The determination reference voltage generation circuit generates a reference voltage to be used as a reference for determining the peak period based on a voltage in the peak period. The peak period detection circuit detects the peak period based on the drain voltage and on the reference voltage.

公开(公告)号：US09497859B2

公开(公告)日：2016-11-15

申请号：US13497555

申请日：2010-09-06

申请人： Mikiko Hojo ,  Shinya Yoneda ,  Naonobu Yoshi ,  Takeshi Sato ,  Kisei Matsumoto

发明人： Mikiko Hojo ,  Shinya Yoneda ,  Naonobu Yoshi ,  Takeshi Sato ,  Kisei Matsumoto

IPC分类号： H01B1/02 ,  H01B1/04 ,  H05K1/09 ,  H05K3/12 ,  B22F1/00 ,  B22F3/105 ,  B82Y30/00

CPC分类号： B22F1/0022 ,  B22F1/0074 ,  B22F3/1055 ,  B22F2003/1054 ,  B82Y30/00 ,  C23C16/455 ,  H05K1/097 ,  H05K3/125 ,  Y02P10/295

摘要： Provided is a metal microparticle dispersion including metal microparticles, a polymeric dispersant and a dispersion medium, wherein an average primary particle diameter of the metal microparticles is 0.001 to 0.5 μm; the polymeric dispersant has a polyester skeleton in at least one of a principal chain and a side chain thereof; or the polymeric dispersant has a polyether skeleton in at least one of a principal chain and a side chain thereof; and a content of the above polymeric dispersant is 0.1 to 100 parts by mass based on a content of 100 parts by mass of the metal microparticles. Further, provided is a production process for an electrically conductive substrate, and an electrically conductive substrate produced by the above production process is provided.

摘要翻译： 提供一种金属微粒分散体，其包含金属微粒，高分子分散剂和分散介质，其中金属微粒的平均一次粒径为0.001〜0.5μm; 聚合物分散剂在其主链和侧链中的至少一个中具有聚酯骨架; 或者聚合物分散剂在其主链和侧链中的至少一个中具有聚醚骨架; 上述聚合物分散剂的含量相对于100质量份金属微粒的含量为0.1〜100质量份。 此外，提供了导电基板的制造方法，并且提供了通过上述制造方法制造的导电基板。

公开(公告)号：US09335254B2

公开(公告)日：2016-05-10

申请号：US14240437

申请日：2012-08-27

申请人： Fumiaki Shimaoka ,  Takeshi Sato ,  Hiroshi Konishi ,  Takashi Inoue

发明人： Fumiaki Shimaoka ,  Takeshi Sato ,  Hiroshi Konishi ,  Takashi Inoue

IPC分类号： G06K9/74 ,  G01N21/25 ,  G07D7/12 ,  G01N21/21

CPC分类号： G01N21/25 ,  G01N21/21 ,  G07D7/1205 ,  G07D7/121

摘要： A paper sheet recognition apparatus that recognizes a paper sheet based on optical characteristics of the paper sheet is proposed. The paper sheet recognition apparatus includes at least one light source that emits a light toward the paper sheet; a light-guiding member that receives any of reflected lights reflected from plural regions on the paper sheet and transmitted lights that have passed through plural regions on the paper sheet because of emission of the light on the paper sheet from the light source, condenses the received lights, and outputs the condensed light from a light outputting section; an optical processing unit that generates spectral distribution from the condensed light output from the light outputting section of the light-guiding member; and a recognition processing unit that recognizes the paper sheet based on a feature of the spectral distribution generated by the optical processing unit.

摘要翻译： 提出了一种基于纸张的光学特性识别纸张的纸张识别装置。 纸张识别装置包括向纸张发射光的至少一个光源; 由于从光源发射纸张上的光，接收从纸张上的多个区域反射的任何反射光和已经通过纸张上的多个区域的透射光的导光部件， 点亮并输出来自光输出部的聚光; 光学处理单元，其从从所述导光构件的光输出部输出的凝结光产生光谱分布; 以及识别处理单元，其基于由所述光学处理单元生成的频谱分布的特征来识别所述纸张。