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24 条记录 (耗时 0.026 秒)

    Method of linearizing a flow velocity sensor, a linearized flow velocity measurement apparatus and system
    6.
    发明授权
    Method of linearizing a flow velocity sensor, a linearized flow velocity measurement apparatus and system 失效
    线性化流速传感器，线性化流速测量装置和系统的方法

    公开(公告)号：US5750903A

    公开(公告)日：1998-05-12

    申请号：US576313

    申请日：1995-12-21

    申请人： Tapani Ryhanen

    发明人： Tapani Ryhanen

    IPC分类号： G01P5/14 ,  G01F1/38 ,  G01F1/50 ,  G01L9/12 ,  G01P5/16

    CPC分类号： G01F1/50 ,  G01F1/383 ,  G01P5/16

    摘要： The invention relates to a method and apparatus for linearizing a flow velocity sensor based on pressure difference measurement. According to the method, a difference of two pressure signals is measured from the flow under measurement and is proportional to the square of the flow velocity. The pressure difference is measured using a micromechanically manufactured symmetrical capacitive differential pressure sensor based on the force balance principle. The pressure-induced deviation from force balance is compensated for by inducing on the pressure-sensing diaphragm of the differential pressure sensor a force-balance-restoring electrostatic pressure. The amplitude of the force-balance-restoring electrical feedback control signal also acts as the system output signal and is directly proportional to the square root of the difference of the two pressure signals, and thus, a linear function of the flow velocity. According to the invention, the feedback control voltage is a function of the direction of the pressure difference and is applied only to one of the stationary electrodes so that the electrostatic force of attraction thus induced acts counter to the force generated by the pressure difference under measurement, whereby the polarity of the system output voltage signal is dependent on the direction of the flow.

    摘要翻译： 本发明涉及一种基于压力差测量线性化流速传感器的方法和装置。 根据该方法，从测量流量测量两个压力信号的差异，并且与流速的平方成比例。 使用基于力平衡原理的微机械制造的对称电容差压传感器测量压差。 通过在差压传感器的压力感测隔膜上诱导力平衡恢复静电压力来补偿压力引起的力平衡偏差。 力平衡恢复电反馈控制信号的振幅也作为系统输出信号，并与两个压力信号的差的平方根成正比，因此是流速的线性函数。 根据本发明，反馈控制电压是压差方向的函数，并且仅被施加到一个固定电极，使得这样引起的静电吸引力与测量时产生的压力相反 ，由此系统输出电压信号的极性取决于流的方向。

    Capacitive transducer feedback-controlled by means of electrostatic force and method for controlling the profile of the transducing element in the transducer
    9.
    发明授权
    Capacitive transducer feedback-controlled by means of electrostatic force and method for controlling the profile of the transducing element in the transducer 失效
    通过静电力反馈控制的电容式传感器和用于控制换能器中传感元件轮廓的方法

    公开(公告)号：US5531128A

    公开(公告)日：1996-07-02

    申请号：US293463

    申请日：1994-08-19

    申请人： Tapani Ryhanen

    发明人： Tapani Ryhanen

    IPC分类号： G01L9/12 ,  G01D5/241 ,  G01L9/00 ,  G01L11/00 ,  G01P15/13 ,  G05B6/02 ,  H01L41/09 ,  G01C1/00

    CPC分类号： G01L11/008 ,  G01D5/2417 ,  G01P15/131

    摘要： The invention is related to a capacitive transducer feedback-controlled by means of electrostatic force and a method for controlling said transducer. The transducer comprises a body part (8) supporting a dynamically moving transducing element sensitive to the variable being measured, said transducing element being, e.g., a diaphragm (9) or a reference mass (36) supported by a bending beam (37), said element further being at least on its surface electrically conductive to the end of forming a first electrode (9, 36) of the transducer, and the transducer further comprising at least two second, planar electrodes (5, 6) which are placed on the same side with regard to the transducing element (9, 37). According to the invention, the second electrodes (5, 6) have at least essentially equal effective areas to the end of measuring the profile of the transducing element (9, 37) and controlling the same to an exactly defined geometric state.

    摘要翻译： 本发明涉及通过静电力反馈控制的电容式换能器和一种用于控制所述换能器的方法。 换能器包括支撑对被测量的变量敏感的动态移动换能元件的主体部分（8），所述转换元件例如是由弯曲梁（37）支撑的隔膜（9）或参考质量（36） 所述元件至少在其表面上导电以形成换能器的第一电极（9,36）的端部，并且所述换能器还包括至少两个第二平面电极（5,6），所述至少两个平面电极（5,6） 相对于换能元件（9,37）的相同侧。 根据本发明，第二电极（5,6）在测量转换元件（9,37）的轮廓的结束时具有至少基本相等的有效区域，并将其控制到精确定义的几何状态。

    Sensing
    10.
    发明授权
    Sensing 有权
    感觉

    公开(公告)号：US09024909B2

    公开(公告)日：2015-05-05

    申请号：US13437276

    申请日：2012-04-02

    申请人： Richard White ,  Jani Kivioja ,  Darryl Cotton ,  Samiul Md Haque ,  Piers Andrew ,  Tapani Ryhanen

    发明人： Richard White ,  Jani Kivioja ,  Darryl Cotton ,  Samiul Md Haque ,  Piers Andrew ,  Tapani Ryhanen

    IPC分类号： G06F3/045 ,  G06F3/044 ,  G06F3/041

    CPC分类号： G06F3/044 ,  G06F3/0414 ,  G06F2203/04102

    摘要： An apparatus including a capacitance touch sensor arrangement configured to have a variable capacitance that varies when a user finger touches the capacitance touch sensor arrangement; and at least one variable resistor sensor integrated within the capacitance touch sensor arrangement wherein the variable resistor sensor has a variable resistance that varies with a sensed parameter; the apparatus including an input configured to receive an input signal including a time varying component and an output configured to provide an output signal that depends upon both the capacitance of the capacitance touch sensor arrangement and the resistance of the variable resistance sensor.

    摘要翻译： 一种包括电容式触摸传感器装置的装置，被配置为具有当用户手指触摸电容式触摸传感器装置时变化的可变电容; 以及集成在所述电容式触摸传感器装置内的至少一个可变电阻器传感器，其中所述可变电阻器传感器具有随感测参数而变化的可变电阻; 所述装置包括被配置为接收包括时变分量的输入信号和被配置为提供取决于电容式触摸传感器装置的电容和可变电阻传感器的电阻的输出信号的输出的输入。