公开(公告)号：US06953939B2

公开(公告)日：2005-10-11

申请号：US10472312

申请日：2003-01-21

申请人： Tetsuo Abe ,  Kouki Okawauchi ,  Tadashi Hattori ,  Hironori Fujita ,  Minoru Takeda ,  Yuichi Aki ,  Naoki Date ,  Setsuo Norioka ,  Toshiaki Miyokawa ,  Seiichi Nakagawa

发明人： Tetsuo Abe ,  Kouki Okawauchi ,  Tadashi Hattori ,  Hironori Fujita ,  Minoru Takeda ,  Yuichi Aki ,  Naoki Date ,  Setsuo Norioka ,  Toshiaki Miyokawa ,  Seiichi Nakagawa

IPC分类号： G01N23/225 ,  G01Q30/02 ,  G01Q30/16 ,  H01J37/18 ,  H01J37/20 ,  H01J37/28 ,  G01K5/10 ,  G21K5/10 ,  G21K7/00

CPC分类号： H01J37/20 ,  G01N23/225 ,  H01J37/18 ,  H01J2237/188 ,  H01J2237/2817

摘要： A testing apparatus using a scanning electron microscope for enabling tests and measurements on any part of a test subject in a nondestructive way without being limited by a size of the test subject, which is, a testing apparatus 1 using a scanning electron microscope for performing tests and measurements on any part of a test subject in a nondestructive way by using a scanning electron microscope 6a, comprising a local vacuum formation portion 9 for forming a local vacuum region by blocking around a part to be tested of the test subject from the outside air, wherein the local vacuum formation portion comprises an exhaust portion for exhausting to form a partial vacuum region, a float means 14 for floating the whole local vacuum formation portion above the test subject by emitting a compressed gas to an outer circumference portion of the local vacuum formation portion and a length measuring means 16 for measuring a distance between the test subject and the local vacuum formation portion for controlling floating of the local vacuum formation portion by the float means.

摘要翻译： 一种使用扫描电子显微镜的测试装置，用于以非破坏性方式对测试对象的任何部分进行测试和测量，而不受被测对象的尺寸的限制，即使用扫描电子显微镜进行测试的测试装置1 以及通过使用扫描电子显微镜6a以非破坏性方式对测试对象的任何部分进行测量，该扫描电子显微镜包括用于通过从外部阻挡测试对象的被测试部分而形成局部真空区域的局部真空形成部分9 空气，其中所述局部真空形成部分包括用于排出以形成部分真空区域的排气部分，浮子装置14，用于通过将压缩气体发射到所述局部真空部分的外圆周部分来使所述局部真空形成部分上方的整个局部真空形成部分 真空形成部分和用于测量测试对象与局部真空形成口之间的距离的长度测量装置16 用于通过浮动装置控制局部真空形成部分的浮动。

公开(公告)号：US06933185B2

公开(公告)日：2005-08-23

申请号：US10394223

申请日：2003-03-24

申请人： Hiroyuki Wada ,  Yoshimi Hirata ,  Ayumu Taguchi ,  Koichi Tatsuki ,  Nobuhiko Umezu ,  Shigeo Kubota ,  Tetsuo Abe ,  Akifumi Ooshima ,  Tadashi Hattori ,  Makoto Takatoku ,  Yukiyasu Sugano

发明人： Hiroyuki Wada ,  Yoshimi Hirata ,  Ayumu Taguchi ,  Koichi Tatsuki ,  Nobuhiko Umezu ,  Shigeo Kubota ,  Tetsuo Abe ,  Akifumi Ooshima ,  Tadashi Hattori ,  Makoto Takatoku ,  Yukiyasu Sugano

IPC分类号： H01L21/263 ,  H01L21/66 ,  C30B28/02 ,  H01L21/786

CPC分类号： H01L22/12

摘要： The state of a polysilicon film formed by excimer laser annealing an amorphous silicon film is to be evaluated. When the amorphous silicon film is annealed to form a polysilicon film, linearity or periodicity presents itself in the spatial structure of the film surface of the polysilicon film formed depending on the energy applied to the amorphous silicon during annealing. This linearity or periodicity is processed as an image and represented numerically from the image by exploiting the linearity or periodicity. The state of the polysilicon film is checked based on the numerical results.

摘要翻译： 对通过非晶硅膜的准分子激光退火而形成的多晶硅膜的状态进行评价。 当非晶硅膜退火以形成多晶硅膜时，线性或周期性本身就取决于退火期间施加到非晶硅的能量而形成的多晶硅膜的膜表面的空间结构。 该线性或周期性被处理为图像并且通过利用线性或周期性从图像数字地表示。 基于数值结果检查多晶硅膜的状态。

公开(公告)号：US06798498B2

公开(公告)日：2004-09-28

申请号：US10050542

申请日：2002-01-18

申请人： Hiroyuki Wada ,  Koichi Tatsuki ,  Nobuhiko Umezu ,  Eiji Isomura ,  Tetsuo Abe ,  Tadashi Hattori ,  Akifumi Ooshima ,  Makoto Uragaki ,  Yoshiyuki Noguchi ,  Hiroyuki Tamaki ,  Masataka Ebe ,  Tomohiro Ishiguro ,  Yasuyuki Kato

发明人： Hiroyuki Wada ,  Koichi Tatsuki ,  Nobuhiko Umezu ,  Eiji Isomura ,  Tetsuo Abe ,  Tadashi Hattori ,  Akifumi Ooshima ,  Makoto Uragaki ,  Yoshiyuki Noguchi ,  Hiroyuki Tamaki ,  Masataka Ebe ,  Tomohiro Ishiguro ,  Yasuyuki Kato

IPC分类号： G01N2100

CPC分类号： G01N21/956

摘要： A polysilicon film evaluation apparatus is provided which enables objective automatic evaluation of the status of a polysilicon film, as formed to a high accuracy in a contact-free fashion. To this end, there is provided a polysilicon film evaluation apparatus 1 including a stage 25 on which to set a substrate W carrying a polysilicon film, an optical system for observation with the visible light 4, 8, 12, 40a for illuminating the visible light on a substrate W on the stage to photograph a surface image of the polysilicon film on the substrate W to effect auto-focusing, an optical system for observation with UV light 6, 10, 40b for illuminating the UV light on the substrate on the stage to acquire a surface image of the polysilicon film of the substrate, auto-focused using the optical system for observation with the visible light, and an evaluating unit 51 for evaluating the linearity and periodicity of a spatial structure of the film surface of the polysilicon film, from a surface image of the polysilicon film obtained by the optical system for observation with UV light, to evaluate the status of the polysilicon film based on the results of evaluation of the linearity and periodicity.

摘要翻译： 提供了一种多晶硅膜评价装置，其能够以无接触的方式高精度地形成，从而能够客观地自动评估多晶硅膜的状态。 为此，提供了一种多晶硅膜评价装置1，其包括载置多晶硅膜的基板W，载置多晶硅膜的基板W的阶段25，用于照射可见光的可见光4,8,12,4a的观察用光学系统 在台面上的基板W上拍摄基板W上的多晶硅膜的表面图像以实现自动聚焦，用于用紫外光6,10,40b观察的光学系统用于照射台上的基板上的UV光 获取使用可见光观察用光学系统自动聚焦的基板的多晶硅膜的表面像，以及用于评价多晶硅膜的膜表面的空间结构的线性和周期性的评估单元51 从由用于用UV光观察的光学系统获得的多晶硅膜的表面图像，基于线性度的评估结果来评估多晶硅膜的状态a 周期性

公开(公告)号：US06217425B1

公开(公告)日：2001-04-17

申请号：US09327710

申请日：1999-06-08

申请人： Hiroshi Shindou ,  Tetsuo Abe ,  Akio Ogawa ,  Tsugihiro Hasebe

发明人： Hiroshi Shindou ,  Tetsuo Abe ,  Akio Ogawa ,  Tsugihiro Hasebe

IPC分类号： B24B722

CPC分类号： B24B37/048 ,  B24B37/00 ,  G11B5/1871 ,  G11B5/3103 ,  G11B5/3116 ,  G11B5/3169 ,  G11B5/3173 ,  Y10T29/49048 ,  Y10T29/4905

摘要： An apparatus for lapping a workpiece including a plurality of magnetic heads supported by a tool is disclosed. The lapping apparatus comprises a rotary lapping table, a lapping head attachment frame, an adjuster ring resiliently supported by the frame, a lapping head attached to the adjuster ring, a tilting assembly attached to the lapping head, and an up and down movable back plate pivotally attached to the lapping head. The apparatus further comprises first actuators or cylinders for correcting balance by applying forces on right and left sides of the pivotal point of the back plate, and second actuators or cylinders for correcting bow of the workpiece by applying operating forces on a plurality of predetermined locations of the tool so that the moving directions of movable parts of the second actuator means are substantially parallel with the directions of the operating forces.

摘要翻译： 公开了一种用于研磨包括由工具支撑的多个磁头的工件的装置。 研磨装置包括旋转研磨台，研磨头附接框架，由框架弹性支撑的调节环，附接到调节环的研磨头，附接到研磨头的倾斜组件，以及上下可动背板 枢转地附接到研磨头。 该装置还包括用于通过在后板的枢转点的右侧和左侧施加力来校正平衡的第一致动器或气缸，以及用于通过在多个预定位置上施加操作力来校正工件的弓形的第二致动器或气缸 使得第二致动器装置的可移动部件的移动方向基本上与操作力的方向平行的工具。

公开(公告)号：US5509264A

公开(公告)日：1996-04-23

申请号：US224323

申请日：1994-04-07

申请人： Seiya Ito ,  Motoaki Hirao ,  Michihiro Shiraha ,  Shunpei Nozoe ,  Kazuyoshi Kawamura ,  Kenichi Fujii ,  Eiichi Harada ,  Tatsuo Ino ,  Masahiro Uozumi ,  Tetsuo Abe

发明人： Seiya Ito ,  Motoaki Hirao ,  Michihiro Shiraha ,  Shunpei Nozoe ,  Kazuyoshi Kawamura ,  Kenichi Fujii ,  Eiichi Harada ,  Tatsuo Ino ,  Masahiro Uozumi ,  Tetsuo Abe

IPC分类号： C10J3/46 ,  F01K23/06 ,  F01K23/10 ,  F02C3/28 ,  F02C6/18

CPC分类号： F01K23/067 ,  F02C3/28 ,  Y02E20/18

摘要： A direct coal fired type gas turbine combined power generation system comprises a pressurized gasifier provided with a gas outlet, a gas cooling unit provided for the gas outlet of the pressurized gasifier, a high temperature dust collector unit connected through a line to a gas cooling unit, a gas turbine combustor connected through a line to the dust collector unit, a gas turbine connected through a line to the gas turbine combustor, a gas turbine generator connected through an output shaft to the gas turbine, a heat recovery boiler connected to the gas turbine, a gas refining unit disposed in association with the heat recovery boiler and connected through a line at an upstream side thereof to the gas cooling unit, a steam turbine connected through a line to a downstream side of the heat recovery boiler and the gas cooling unit through a line and a steam turbine generator connected through an output shaft to the steam turbine.

摘要翻译： 直接燃煤型燃气轮机组合发电系统包括设置有气体出口的加压气化器，为加压气化器的气体出口设置的气体冷却单元，通过管线连接到气体冷却单元的高温集尘单元 通过管线连接到集尘单元的燃气轮机燃烧器，通过管线连接到燃气轮机燃烧器的燃气轮机，通过输出轴连接到燃气轮机的燃气轮机发电机，连接到气体的热回收锅炉 涡轮机，气体精炼单元，其与热回收锅炉相关联地设置并通过其上游侧的管路连接到气体冷却单元;蒸汽涡轮机，其通过管线连接到热回收锅炉的下游侧，并且气体冷却 通过一根管线和一个通过输出轴连接到蒸汽轮机的汽轮机发电机。

公开(公告)号：USRE41329E1

公开(公告)日：2010-05-11

申请号：US11493942

申请日：2006-07-27

申请人： Hiroshi Shindou ,  Masahiro Sasaki ,  Akio Ogawa ,  Tetsuo Abe ,  Masaki Kouzu ,  Masao Yamaguchi

发明人： Hiroshi Shindou ,  Masahiro Sasaki ,  Akio Ogawa ,  Tetsuo Abe ,  Masaki Kouzu ,  Masao Yamaguchi

IPC分类号： B24B9/00 ,  B24B7/00

CPC分类号： G11B5/3103 ,  B24B37/048 ,  B24B49/16 ,  G11B5/3116 ,  G11B5/3163 ,  G11B5/3169 ,  G11B5/3173 ,  G11B5/3967

摘要： To provide an apparatus that may impart a complicated bend deformation to an object to be machined such as a ceramic bar elongated in one direction or the like, and may reduce the non-uniformity in machining amount of the object to be machined upon the machining work of the object to be machined, specifically a correcting mechanism for deforming the object to be machined together with a jig holding the object to be machined is provided in a machining apparatus. The correcting mechanism includes a base, a plurality of levers provided at first ends with pins, a shaft fixed to the base for rotatably supporting the levers, and a plurality of correcting drive means coupled to second ends of said levers for pivoting the levers to the shaft to thereby pivoting the pins. The jig includes a plurality of load receiving portions arranged in a holding portion elongated on one direction for holding the object to be machined whereby portions corresponding to the load receiving portion in the holding portion are deformed together with the object to be machined in accordance with pivoting of each pin.

摘要翻译： 为了提供一种能够对诸如在一个方向等上延伸的陶瓷棒等被加工物体施加复杂的弯曲变形的装置，并且可以减少加工时加工对象物的加工量的不均匀性 具体地说，一种用于使待加工物体与夹具被加工物的夹具一起使其变形的校正机构设置在加工装置中。 校正机构包括基座，多个杆，其在第一端设置有销，固定到基座的轴可旋转地支撑杠杆;以及多个校正驱动装置，联接到所述杠杆的第二端，用于将杠杆转动到 从而枢转销。 夹具包括多个负载接收部，其布置在沿一个方向伸长的保持部分中，用于保持待加工物体，从而与保持部分中的负载接收部分相对应的部分与待加工物体一起根据枢转 的每个引脚。

公开(公告)号：US5575851A

公开(公告)日：1996-11-19

申请号：US141638

申请日：1993-10-27

申请人： Tetsuo Abe ,  Hitoshi Hatashima ,  Kunihiko Ichikawa ,  Takefumi Yoshikawa

发明人： Tetsuo Abe ,  Hitoshi Hatashima ,  Kunihiko Ichikawa ,  Takefumi Yoshikawa

IPC分类号： B05C5/02 ,  B29C47/16 ,  B05C3/18

CPC分类号： B29C47/16 ,  B05C5/0266 ,  B29C47/0019 ,  B29C47/003 ,  B29C47/0033

摘要： Disclosed herein is a die coater comprising a die composed of upper and lower mold-pieces which form a manifold and a slit extending from the manifold, an inner deckle shaft disposed in the manifold, a deckle disposed in the slit in a fluid-tight state, and a deckle guide; the inner deckle shaft having a fluid-tight portion near an end thereof and capable of moving with its fluid-tight state kept, the deckle and the deckle guide being secured to the inner deckle shaft, and the deckle being connected with the fluid-tight portion of the inner deckle shaft.

摘要翻译： 本文公开了一种模具涂布机，其包括由上模具和下模具构成的模具，所述模具形成歧管和从歧管延伸的狭缝，设置在歧管中的内层板轴，以流体密封状态设置在狭缝中的板 ，和一个甲板导轨; 内层板轴在其端部附近具有流体密封部分，并且能够保持其流体密封状态移动，甲板和甲板导向件固定到内板轴上，并且该盖板与流体密封连接 内板轴的一部分。

公开(公告)号：US4074425A

公开(公告)日：1978-02-21

申请号：US779836

申请日：1977-03-21

申请人： Hiroshi Hashimoto ,  Tetsuo Abe ,  Akira Kato

发明人： Hiroshi Hashimoto ,  Tetsuo Abe ,  Akira Kato

IPC分类号： B23P19/00 ,  B25B23/04 ,  B23P19/06

CPC分类号： B25B23/04 ,  B23P19/002 ,  Y10T29/535

摘要： An apparatus for automatically feeding and setting stud bolts. The apparatus comprises a parts feeder unit for axially arranging stud bolts having threaded portions of different lengths on the opposite ends thereof in a low, a bolt orienting unit for directing stud bolts in one direction, an escapement unit for correctly feeding stud bolts one by one, an impact wrench unit for screwing stud bolts into intended work to set them in position, a pneumatic pressure control unit for feeding compressed air produced by a compressor into the escapement unit and impact wrench unit, and an electric control unit for electrically controlling the units, the arrangement being such that all operations which end up with screwing stud bolts into intended work to set them in position are carried out mechanically.

摘要翻译： 一种用于自动进给和设置双头螺栓的装置。 该装置包括一个零件供给单元，用于在一个低的螺栓定向单元中轴向地布置具有不同长度的螺纹部分的双头螺栓，该螺栓定向单元用于在一个方向上引导双头螺栓，用于一个接一个地正确地供给双头螺栓的擒纵单元 用于将双螺柱螺栓拧入预定的工作以将它们置于适当位置的冲击扳手单元，用于将由压缩机产生的压缩空气供给到擒纵单元和冲击扳手单元的气动压力控制单元，以及用于电气控制单元的电气控制单元 这种布置使得结束螺栓螺栓的所有操作进入预期的工作以将它们设置在适当位置。

公开(公告)号：US07959422B2

公开(公告)日：2011-06-14

申请号：US11954910

申请日：2007-12-12

申请人： Yasuhito Nakakuki ,  Kaname Kidokoro ,  Tetsuo Abe ,  Toshimitsu Sakaki ,  Mitsuo Sasaki ,  Masakazu Kurata

发明人： Yasuhito Nakakuki ,  Kaname Kidokoro ,  Tetsuo Abe ,  Toshimitsu Sakaki ,  Mitsuo Sasaki ,  Masakazu Kurata

IPC分类号： F03C2/00 ,  F03C4/00 ,  F04C2/00 ,  F04C18/00 ,  B23P15/00 ,  B23Q3/00

CPC分类号： F04C2/102 ,  F04C2/086 ,  F04C2230/60 ,  Y10T29/49236 ,  Y10T29/49895

摘要： An oil pump including a first housing having a rotation shaft insertion hole, a cam ring, a pump element, a rotation shaft rotatably extending through the rotation shaft insertion hole, a second housing disposed on the cam ring, wherein the cam ring is placed in a position relative to the rotation shaft insertion hole of the first housing by using a jig, and the cam ring includes a clamped portion that is clamped by a cam ring holding device, while the first housing and the second housing are fixed to each other after placing the cam ring in the position relative to the rotation shaft insertion hole by using the jig. Alternatively, the oil pump including a fixing means for fixing the cam ring to the pump body instead of the clamped portion.

摘要翻译： 一种油泵，包括具有旋转轴插入孔的第一壳体，凸轮环，泵元件，可旋转地延伸穿过旋转轴插入孔的旋转轴，设置在凸轮环上的第二壳体，其中， 通过使用夹具相对于第一壳体的旋转轴插入孔的位置，并且凸轮环包括被凸轮环保持装置夹紧的夹持部，同时第一壳体和第二壳体彼此固定，之后，第一壳体和第二壳体彼此固定， 通过使用夹具将凸轮环相对于旋转轴插入孔放置在相对位置。 或者，油泵包括用于将凸轮环固定到泵体而不是夹紧部分的固定装置。

公开(公告)号：US06767275B2

公开(公告)日：2004-07-27

申请号：US09789547

申请日：2001-02-22

申请人： Hiroshi Shindou ,  Masahiro Sasaki ,  Akio Ogawa ,  Tetsuo Abe ,  Masaki Kouzu ,  Masao Yamaguchi

发明人： Hiroshi Shindou ,  Masahiro Sasaki ,  Akio Ogawa ,  Tetsuo Abe ,  Masaki Kouzu ,  Masao Yamaguchi

IPC分类号： B24B900

CPC分类号： G11B5/3103 ,  B24B37/048 ,  B24B49/16 ,  G11B5/3116 ,  G11B5/3163 ,  G11B5/3169 ,  G11B5/3173 ,  G11B5/3967

摘要： To provide an apparatus that may impart a complicated bend deformation to an object to be machined such as a ceramic bar elongated in one direction or the like, and may reduce the non-uniformity in machining amount of the object to be machined upon the machining work of the object to be machined, specifically a correcting mechanism for deforming the object to be machined together with a jig holding the object to be machined is provided in a machining apparatus. The correcting mechanism includes a base, a plurality of levers provided at first ends with pins, a shaft fixed to the base for rotatably supporting the levers, and a plurality of correcting drive means coupled to second ends of said levers for pivoting the levers to the shaft to thereby pivoting the pins. The jig includes a plurality of load receiving portions arranged in a holding portion elongated on one direction for holding the object to be machined whereby portions corresponding to the load receiving portion in the holding portion are deformed together with the object to be machined in accordance with pivoting of each pin.

摘要翻译： 为了提供一种能够对诸如在一个方向等上延伸的陶瓷棒等被加工物体施加复杂的弯曲变形的装置，并且可以减少加工时加工对象物的加工量的不均匀性 具体地说，一种用于使待加工物体与夹具被加工物的夹具一起变形的校正机构设置在加工装置中。 校正机构包括基座，多个杆，其在第一端设置有销，固定到基座的轴可旋转地支撑杠杆;以及多个校正驱动装置，联接到所述杠杆的第二端，用于将杠杆转动到 从而枢转销。 夹具包括多个负载接收部，其布置在沿一个方向伸长的保持部分中，用于保持待加工物体，从而与保持部分中的负载接收部分相对应的部分与待加工物体一起根据枢转 的每个引脚。