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1.发明授权Temperature detecting apparatus, substrate processing apparatus and method of manufacturing semiconductor device 有权温度检测装置，基板处理装置及半导体装置的制造方法公开(公告)号：US08822240B2
公开(公告)日：2014-09-02
申请号：US13536418
申请日：2012-06-28
申请人： Tetsuya Kosugi , Masaaki Ueno , Hideto Yamaguchi
发明人： Tetsuya Kosugi , Masaaki Ueno , Hideto Yamaguchi
CPC分类号： H01L22/10 , C23C16/0209 , G01K1/12 , G01K7/026 , G01K7/04 , G01K13/02 , G01K2013/024 , H01L21/67248 , H01L22/30 , H01L2924/0002 , H01L2924/00
摘要： A temperature detecting apparatus is provided which is capable of suppressing disconnection of a thermocouple wire or positional deviation of a thermocouple junction portion caused by change over time. The temperature detecting apparatus includes: an insulation rod installed to extend in a vertical direction and including a through-hole in vertical direction; a thermocouple wire inserted in the through-hole of the insulation rod, the thermocouple wire including a thermocouple junction portion at an upper end thereof and an angled portion at a lower end of the insulation rod; and a buffer area installed below the insulation rod and configured to suppress a restriction of a horizontal portion of the angled portion upon heat expansion, wherein an upper portion of the thermocouple wire or a middle portion in the vertical direction are supported by the insulation rod.
摘要翻译： 提供一种温度检测装置，其能够抑制由于随时间的变化而导致的热电偶线的断开或热电偶接合部的位置偏离。 温度检测装置包括：安装成沿垂直方向延伸并且在垂直方向上包括通孔的绝缘杆; 插入所述绝缘棒的通孔中的热电偶线，所述热电偶线在其上端包括热电偶接合部分和所述绝缘棒的下端处的倾斜部分; 以及安装在所述绝缘杆下方的缓冲区，并且被构造成在热膨胀时抑制所述成角度部分的水平部分的限制，其中所述热电偶线的上部或所述垂直方向上的中间部分由所述绝缘杆支撑。
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2.发明授权Temperature controlling method, thermal treating apparatus, and method of manufacturing semiconductor device 有权温度控制方法，热处理装置以及半导体装置的制造方法公开(公告)号：US06746908B2
公开(公告)日：2004-06-08
申请号：US09964863
申请日：2001-09-28
申请人： Kazuo Tanaka , Masaaki Ueno , Minoru Nakano , Hideto Yamaguchi
发明人： Kazuo Tanaka , Masaaki Ueno , Minoru Nakano , Hideto Yamaguchi
IPC分类号： H01L218238
CPC分类号： H01L21/67248 , C23C16/46 , C30B25/16 , C30B31/18 , F27D19/00 , F27D2019/0018 , F27D2019/0028
摘要： A temperature control method is provided which is capable of performing quick, accurate, and error-free soaking control over all wafer areas to be thermally treated at a target temperature without requiring any skilled operator and which can be automated by using a computer. In the temperature control method of controlling a heating apparatus having at least two heating zones in such a manner that temperatures detected at predetermined locations equal a target temperature therefor, temperatures are detected at predetermined locations the number of which is larger than the number of the heating zones, and the heating apparatus is controlled in such a manner that the target temperature falls between a maximum value and a minimum value of a plurality of detected temperatures.
摘要翻译： 提供一种温度控制方法，其能够对目标温度下热处理的所有晶片区域执行快速，准确和无错误的均热控制，而不需要任何熟练的操作者并且可以通过使用计算机自动化。 在控制具有至少两个加热区域的加热装置的温度控制方法中，使得在预定位置处检测的温度等于目标温度，在预定位置检测温度，其数量大于加热次数 区域，并且加热装置以使得目标温度落在多个检测温度的最大值和最小值之间的方式被控制。
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3.发明授权公开(公告)号：US09418881B2
公开(公告)日：2016-08-16
申请号：US13192784
申请日：2011-07-28
申请人： Shinobu Sugiura , Masaaki Ueno , Kazuo Tanaka , Masashi Sugishita , Hideto Yamaguchi , Kenji Shirako
发明人： Shinobu Sugiura , Masaaki Ueno , Kazuo Tanaka , Masashi Sugishita , Hideto Yamaguchi , Kenji Shirako
CPC分类号： H01L21/67248 , C23C14/541 , C23C16/4584 , C23C16/52 , G05D23/1931 , G05D23/22 , H01L21/67109
摘要： Provided is a substrate processing apparatus capable of suppressing inferiority when heat treatment is controlled using a temperature sensor. The substrate processing apparatus includes a heating means configured to heat a process chamber wherein a substrate is accommodated; a first temperature detection means configured to detect a temperature about the substrate using a first thermocouple; a second temperature detection means configured to detect a temperature about the heating means using a second thermocouple; a control unit configured to control the heating means based on the temperature detected by the first temperature detection means and the temperature detected by the second temperature detection means; and a control switching means configured to control the control unit based on the temperatures detected by the first temperature detection means and the second temperature detection means such that the control unit is switched between a first control mode and a second control mode, wherein a heat resistance of the first thermocouple is greater than that of the second thermocouple, and a temperature detection performance of the second thermocouple is higher than that of the first thermocouple.
摘要翻译： 提供一种当使用温度传感器控制热处理时能够抑制劣化的基板处理装置。 基板处理装置包括加热装置，其构造成加热容纳基板的处理室; 第一温度检测装置，被配置为使用第一热电偶检测关于所述基板的温度; 第二温度检测装置，被配置为使用第二热电偶检测关于加热装置的温度; 控制单元，被配置为基于由第一温度检测装置检测的温度和由第二温度检测装置检测的温度来控制加热装置; 以及控制切换装置，被配置为基于由第一温度检测装置和第二温度检测装置检测到的温度来控制控制单元，使得控制单元在第一控制模式和第二控制模式之间切换，其中耐热性 的第一热电偶的温度检测性能高于第一热电偶的温度检测性能。
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公开(公告)号：US07277271B2
公开(公告)日：2007-10-02
申请号：US11488780
申请日：2006-07-19
IPC分类号： H01G9/00
摘要： A solid electrolytic capacitor includes a capacitor unit having a cathode frame coupled to a cathode part of a capacitor element, and anode frames formed at the opposite sides of the capacitor unit sandwiching a cathode frame, and coupled to an anode part of the capacitor element. Flat parts provided at the opposite ends of anode terminals are coupled to the anode frames. A flat part provided in the center of a cathode terminal is coupled to the cathode frame. The capacitor unit is covered with coating resin. The solid electrolytic capacitor has a simplified structure and a lower ESL.
摘要翻译： 固体电解电容器包括电容器单元，其具有耦合到电容器元件的阴极部分的阴极框架，以及形成在电容器单元的相对侧并夹持阴极框架并且耦合到电容器元件的阳极部分的阳极框架。 设置在阳极端子的相对端的平坦部分耦合到阳极框架。 设置在阴极端子的中心的平坦部分耦合到阴极框架。 电容器单元被涂覆树脂覆盖。 固体电解电容器结构简单，ESL较低。
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公开(公告)号：US20070019366A1
公开(公告)日：2007-01-25
申请号：US11488780
申请日：2006-07-19
摘要： A solid electrolytic capacitor including capacitor unit having cathode frame coupled to cathode part of capacitor element, and anode frames formed at the opposite sides of capacitor unit sandwiching cathode frame, and coupled to anode part of capacitor element. Flat parts provided at the opposite ends of anode terminals are coupled to anode frames. Flat part provided in the center of cathode terminal is coupled to cathode frame. Capacitor unit is covered with coating resin. The solid electrolytic capacitor has simplified structure and a lower ESL.
摘要翻译： 一种固体电解电容器，包括具有耦合到电容器元件的阴极部分的阴极框架的电容器单元，以及形成在电容器单元夹持阴极框架的相对侧的阳极框架，并且耦合到电容器元件的阳极部分。 设置在阳极端子的相对端的平坦部分耦合到阳极框架。 设置在阴极端子中心的平坦部分耦合到阴极框架。 电容器单元覆盖有涂层树脂。 固体电解电容器结构简单，ESL较低。
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公开(公告)号：US20060262486A1
公开(公告)日：2006-11-23
申请号：US11415077
申请日：2006-05-02
申请人： Kazuo Tadanobu , Hideto Yamaguchi , Kazuyo Nishida
发明人： Kazuo Tadanobu , Hideto Yamaguchi , Kazuyo Nishida
IPC分类号： H01G9/00
摘要： A solid electrolytic capacitor includes a plurality of laminated capacitor elements; an anode terminal connected to an anode portion where anode exposed portions of the capacitor elements are connected together; and a cathode terminal connected to a cathode portion where cathode layers of the capacitor elements are bonded together. Between lamination planes of the cathode layers of the capacitor elements, a conductive sheet is disposed. The capacitor elements are coated with a packaging resin layer in such a manner that a part of the anode terminal and a part of the cathode terminal are exposed.
摘要翻译： 固体电解电容器包括多个叠层电容器元件; 连接到阳极部分的阳极端子，其中电容器元件的阳极暴露部分连接在一起; 以及连接到阴极部分的阴极端子，其中电容器元件的阴极层结合在一起。 在电容器元件的阴极层的层叠平面之间设置导电片。 电容器元件以阳极端子的一部分和阴极端子的一部分露出的方式涂覆有封装树脂层。
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公开(公告)号：US20060040557A1
公开(公告)日：2006-02-23
申请号：US11196423
申请日：2005-08-04
申请人： Hideto Yamaguchi
发明人： Hideto Yamaguchi
IPC分类号： H01R13/648
CPC分类号： H01R13/6583 , H01R13/6594
摘要： A shielding member (30) of the receptacle connector (A) has a fully shielding structure that surrounds the connector fitting section (2), and the shielding member (80) of the plug connector (B) has a fully shielding structure that surrounds the connector fitting section (54).
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公开(公告)号：US08266095B2
公开(公告)日：2012-09-11
申请号：US12225390
申请日：2007-06-18
CPC分类号： G05B19/4184 , G05B23/0235 , G05B2219/32196 , G05B2219/45031 , H01L21/67276 , Y02P90/14 , Y02P90/18 , Y02P90/22
摘要： There is provided a substrate processing system that can automatically inspect the operation of various kinds of parts of a semiconductor manufacturing apparatus without increasing the load of a main controller in the semiconductor manufacturing apparatus. In the substrate processing system of the present invention, inspection data of the semiconductor manufacturing apparatus 1 under operation are shared and collected online by a main controller 5, a data collection auxiliary computer 2 and a data collecting computer 3 through a network 6, and the operation state is collectively inspected by an inspecting computer 4.
摘要翻译： 提供了一种可以自动检查半导体制造装置的各种部件的操作而不增加半导体制造装置中的主控制器的负载的基板处理系统。 在本发明的基板处理系统中，正在运行的半导体制造装置1的检查数据由主控制器5，数据采集辅助计算机2和数据采集计算机3通过网络6在线共享和收集，并且 操作状态由检查计算机4统一检查。
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9.发明申请公开(公告)号：US20090105867A1
公开(公告)日：2009-04-23
申请号：US12232007
申请日：2008-09-09
申请人： Hideto Yamaguchi
发明人： Hideto Yamaguchi
CPC分类号： H01L21/67248 , C23C16/46 , G05D23/1931 , G05D23/22 , H01L21/67109
摘要： In a temperature control method in which a target temperature is given in a thermal treatment furnace and plural heaters are controlled according to the target temperature, the correlation of the each heater and plural profile temperature sensors provided in the thermal treatment furnace is determined, a virtual temperature is calculated on the basis of the detection temperature of each profile temperature sensor and a weighting factor calculated from the correlation, and the each heater is controlled so that the virtual temperature is coincident with the target temperature.
摘要翻译： 在热处理炉中给出目标温度并根据目标温度控制多个加热器的温度控制方法中，确定设置在热处理炉中的每个加热器和多个轮廓温度传感器的相关性，虚拟 基于每个轮廓温度传感器的检测温度和从相关性计算的加权因子来计算温度，并且控制每个加热器，使得虚拟温度与目标温度一致。
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公开(公告)号：US06671509B1
公开(公告)日：2003-12-30
申请号：US09339835
申请日：1999-06-25
申请人： Masaki Tanaka , Kenzo Urabe , Seigo Miyoshi , Yoshikuni Itoh , Hideto Yamaguchi
发明人： Masaki Tanaka , Kenzo Urabe , Seigo Miyoshi , Yoshikuni Itoh , Hideto Yamaguchi
IPC分类号： H04Q732
摘要： A mobile station (mobile communication unit) receives system software from a base station via an antenna and a transmitter/receiver, and stores the received system software in a memory. A digital signal processor in the mobile station then performs communication processing according to the system software stored in the memory. By transmitting various system software from the base station, the single mobile station can easily be adapted to different communication principles. The base station also receives system software from a center via a public exchange network, and stores the received system software in a memory. A digital signal processor in the base station then performs communication processing according to the system software stored in the memory.
摘要翻译： 移动站（移动通信单元）经由天线和发射机/接收机从基站接收系统软件，并将接收到的系统软件存储在存储器中。 然后，移动站中的数字信号处理器根据存储在存储器中的系统软件执行通信处理。 通过从基站发送各种系统软件，单个移动台可以容易地适应不同的通信原理。 基站还通过公共交换网从中心接收系统软件，并将接收到的系统软件存储在存储器中。 然后，基站中的数字信号处理器根据存储在存储器中的系统软件执行通信处理。
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