公开(公告)号：US07796662B2

公开(公告)日：2010-09-14

申请号：US12209250

申请日：2008-09-12

Applicant: Takeshi Uchida ,  Tetsuya Takeuchi

Inventor： Takeshi Uchida ,  Tetsuya Takeuchi

IPC: H01S5/00

CPC classification number: H01S5/18313 ,  B41J2/435 ,  H01S5/18333 ,  H01S2301/166

Abstract: Provided is a laser having a multilayer reflector that suppresses the multimode operation. A vertical cavity surface emitting laser includes a first mirror, a cavity having an active layer, and a second mirror that are laminated. The second mirror is a multilayer reflector comprised of a first layer and a second layer that are alternately plurally laminated, the second layer having a refractive index higher than that of the first layer. At least one of the plural second layers has an oxidized confinement structure having an oxidized region and a non-oxidized region.

Abstract translation: 提供了具有抑制多模操作的多层反射器的激光器。 垂直腔表面发射激光器包括第一反射镜，具有有源层的空腔和层叠的第二反射镜。 第二反射镜是由交替多层叠的第一层和第二层构成的多层反射体，第二层的折射率高于第一层的折射率。 多个第二层中的至少一个具有氧化区域和非氧化区域的氧化限制结构。

公开(公告)号：US20090080489A1

公开(公告)日：2009-03-26

申请号：US12209250

申请日：2008-09-12

Applicant: Takeshi Uchida ,  Tetsuya Takeuchi

Inventor： Takeshi Uchida ,  Tetsuya Takeuchi

IPC: H01S5/183 ,  H01S3/08

CPC classification number: H01S5/18313 ,  B41J2/435 ,  H01S5/18333 ,  H01S2301/166

Abstract: Provided is a laser having a multilayer reflector that suppresses the multimode operation. A vertical cavity surface emitting laser includes a first mirror, a cavity having an active layer, and a second mirror that are laminated. The second mirror is a multilayer reflector comprised of a first layer and a second layer that are alternately plurally laminated, the second layer having a refractive index higher than that of the first layer. At least one of the plural second layers has an oxidized confinement structure having an oxidized region and a non-oxidized region.

Abstract translation: 提供了具有抑制多模操作的多层反射器的激光器。 垂直腔表面发射激光器包括第一反射镜，具有有源层的空腔和层叠的第二反射镜。 第二反射镜是由交替多层叠的第一层和第二层构成的多层反射体，第二层的折射率高于第一层的折射率。 多个第二层中的至少一个具有氧化区域和非氧化区域的氧化限制结构。

公开(公告)号：US07839913B2

公开(公告)日：2010-11-23

申请号：US12272033

申请日：2008-11-17

Applicant: Takeshi Uchida ,  Tetsuya Takeuchi

Inventor： Takeshi Uchida ,  Tetsuya Takeuchi

IPC: H01S5/00

CPC classification number: G03G15/326 ,  G03G15/04072 ,  G03G2215/0404 ,  H01S5/024 ,  H01S5/02461 ,  H01S5/18313 ,  H01S5/18358 ,  H01S5/423 ,  H01S2301/166 ,  H01S2301/173

Abstract: A surface emitting laser that oscillates at a wavelength λ includes an upper reflector, a lower reflector, an active layer, and a spacer layer. The spacer layer is a laminated structure that includes a first semiconductor sublayer having a composition of AlxGa1-xAs (1≧x>0) and a second semiconductor sublayer having a composition of AlyGa1-yAs (1>y>0 and x>y).

Abstract translation: 以波长λ振荡的表面发射激光器包括上反射器，下反射器，有源层和间隔层。 间隔层是包括具有Al x Ga 1-x As（1≥x> 0）的组成的第一半导体子层和具有Al y Ga 1-y As（1> y> 0和x> y）的组成的第二半导体子层的层叠结构， 。

公开(公告)号：US07830944B2

公开(公告)日：2010-11-09

申请号：US12275389

申请日：2008-11-21

Applicant: Tetsuya Takeuchi ,  Takeshi Uchida

Inventor： Tetsuya Takeuchi ,  Takeshi Uchida

IPC: H01S3/08

CPC classification number: H01S5/18358 ,  B82Y20/00 ,  H01S5/1039 ,  H01S5/34326 ,  H01S2301/163

Abstract: A surface-emitting laser has an active layer between a first distributed Bragg reflector and a second distributed Bragg reflector. The first distributed Bragg reflector is formed so as to have a resonant mode and a first longitudinal mode different from the resonant mode included in the reflectivity stop band and a second longitudinal mode different from the resonant mode and the first longitudinal mode excluded from the reflectivity stop band. Oscillation is suppressed in the first longitudinal mode and in the second longitudinal mode. As a result, the surface-emitting laser can oscillate in a single longitudinal mode, suppressing longitudinal mode hopping.

Abstract translation: 表面发射激光器在第一分布布拉格反射器和第二分布布拉格反射器之间具有有源层。 第一分布布拉格反射器被形成为具有不同于反射阻挡带中包括的谐振模式的谐振模式和第一纵向模式，以及不同于反射阻挡区域的谐振模式和第一纵向模式的第二纵向模式 带。 在第一纵向模式和第二纵向模式中抑制振荡。 结果，表面发射激光器可以以单一纵向模式振荡，抑制纵向模式跳跃。

公开(公告)号：US20090135876A1

公开(公告)日：2009-05-28

申请号：US12275389

申请日：2008-11-21

Applicant: Tetsuya Takeuchi ,  Takeshi Uchida

Inventor： Tetsuya Takeuchi ,  Takeshi Uchida

IPC: H01S5/187 ,  H01S5/183

CPC classification number: H01S5/18358 ,  B82Y20/00 ,  H01S5/1039 ,  H01S5/34326 ,  H01S2301/163

Abstract: A surface-emitting laser has an active layer between a first distributed Bragg reflector and a second distributed Bragg reflector. The first distributed Bragg reflector is formed so as to have a resonant mode and a first longitudinal mode different from the resonant mode included in the reflectivity stop band and a second longitudinal mode different from the resonant mode and the first longitudinal mode excluded from the reflectivity stop band. Oscillation is suppressed in the first longitudinal mode and in the second longitudinal mode. As a result, the surface-emitting laser can oscillate in a single longitudinal mode, suppressing longitudinal mode hopping.

Abstract translation: 表面发射激光器在第一分布布拉格反射器和第二分布布拉格反射器之间具有有源层。 第一分布布拉格反射器被形成为具有不同于反射阻挡带中包括的谐振模式的谐振模式和第一纵向模式，以及不同于反射阻挡区域的谐振模式和第一纵向模式的第二纵向模式 带。 在第一纵向模式和第二纵向模式中抑制振荡。 结果，表面发射激光器可以以单一纵向模式振荡，抑制纵向模式跳跃。

公开(公告)号：US20090135872A1

公开(公告)日：2009-05-28

申请号：US12272033

申请日：2008-11-17

Applicant: Takeshi Uchida ,  Tetsuya Takeuchi

Inventor： Takeshi Uchida ,  Tetsuya Takeuchi

IPC: H01S5/18

CPC classification number: G03G15/326 ,  G03G15/04072 ,  G03G2215/0404 ,  H01S5/024 ,  H01S5/02461 ,  H01S5/18313 ,  H01S5/18358 ,  H01S5/423 ,  H01S2301/166 ,  H01S2301/173

Abstract: A surface emitting laser that oscillates at a wavelength λ includes an upper reflector, a lower reflector, an active layer, and a spacer layer. The spacer layer is a laminated structure that includes a first semiconductor sublayer having a composition of AlxGa—−xAs (1≧x≧0) and a second semiconductor sublayer having a composition of AlyGa—−yAs (1>y>0 and x>y).

Abstract translation: 以波长λ振荡的表面发射激光器包括上反射器，下反射器，有源层和间隔层。 间隔层是包括具有Al x Ga-x As（1 = x> = 0）的组成的第一半导体子层和具有AlyGa-yAs（1> y> 0的组成的第二半导体子层）和 x> y）。

公开(公告)号：US08116344B2

公开(公告)日：2012-02-14

申请号：US12487619

申请日：2009-06-18

Applicant: Tetsuya Takeuchi ,  Mamoru Uchida ,  Tomoyuki Miyamoto ,  Fumio Koyama

Inventor： Tetsuya Takeuchi ,  Mamoru Uchida ,  Tomoyuki Miyamoto ,  Fumio Koyama

IPC: H01S5/183

CPC classification number: H01S5/34326 ,  B82Y20/00 ,  H01S5/021 ,  H01S5/1039 ,  H01S5/18313 ,  H01S5/18358 ,  H01S5/2009 ,  H01S5/2013 ,  H01S5/2201 ,  H01S5/3072 ,  H01S5/3213 ,  H01S5/3436

Abstract: A red surface emitting laser element includes a first reflector, a second reflector including a p-type semiconductor multilayer film, an active layer between the first reflector and the second reflector, and a p-type semiconductor spacer layer between the active layer and the second reflector, the p-type semiconductor spacer layer having a thickness of 100 nm or more and 350 nm or less.

Abstract translation: 红色表面发射激光元件包括第一反射器，包括p型半导体多层膜的第二反射器，第一反射器和第二反射器之间的有源层，以及在有源层和第二反射器之间的p型半导体间隔层 反射器，p型半导体间隔层的厚度为100nm以上且350nm以下。

公开(公告)号：US07924900B2

公开(公告)日：2011-04-12

申请号：US12509632

申请日：2009-07-27

Applicant: Tetsuya Takeuchi

Inventor： Tetsuya Takeuchi

IPC: H01L21/00 ,  H01S5/00 ,  H01S3/097

CPC classification number: H01S5/18391 ,  B82Y20/00 ,  H01S5/0421 ,  H01S5/18311 ,  H01S5/18358 ,  H01S5/18372 ,  H01S5/2022 ,  H01S5/34326

Abstract: A surface emitting laser which is configured by laminating on a substrate a lower reflection mirror, an active layer, and an upper reflection mirror, which includes, in a light emitting section of the upper reflection mirror, a structure for controlling reflectance that is configured by a low reflectance region and a concave high reflectance region formed in the central portion of the low reflectance region, and which oscillates at a wavelength of λ, wherein the upper reflection mirror is configured by a multilayer film reflection mirror based on a laminated structure formed by laminating a plurality of layers, the multilayer film reflection mirror includes a phase adjusting layer which has an optical thickness in the range of λ/8 to 3λ/8 inclusive in a light emitting peripheral portion on the multilayer film reflection mirror, and an absorption layer causing band-to-band absorption is provided in the phase adjusting layer.

Abstract translation: 一种表面发射激光器，其通过在基板上层叠下反射镜，有源层和上反射镜而构成，其包括在上反射镜的发光部中，用于控制由 低反射率区域和凹入的高反射率区域，形成在低反射率区域的中心部分，并且以波长λ振荡，其中上反射镜由多层膜反射镜构成，基于由 层叠多个层，多层膜反射镜包括在多层膜反射镜的发光周边部分中具有λ/ 8〜3λ/ 8范围内的光学厚度的相位调整层，以及吸收层 在相位调整层中提供带 - 带吸收。

公开(公告)号：US20100252809A1

公开(公告)日：2010-10-07

申请号：US12820460

申请日：2010-06-22

Applicant: Tetsuya Takeuchi

Inventor： Tetsuya Takeuchi

IPC: H01L31/12 ,  H01L33/04

CPC classification number: H01L27/153 ,  B41J2/45 ,  H01L33/145 ,  H01L2924/0002 ,  Y10S257/918 ,  H01L2924/00

Abstract: A light emitting element array including an active layer commonly used for light emitting element regions, carrier injection layers which are electrically isolated from each other and which are provided in the respective light emitting element regions, and a resistive layer which has a resistance higher than that of the carrier injection layers and which is provided between the active layer and the carrier injection layers.

Abstract translation: 包括通常用于发光元件区域的有源层的发光元件阵列，彼此电隔离并设置在各个发光元件区域中的并且设置在各个发光元件区域中的载流子注入层以及电阻高于其的电阻层。 并且设置在有源层和载流子注入层之间。

公开(公告)号：US07807485B2

公开(公告)日：2010-10-05

申请号：US12509551

申请日：2009-07-27

Applicant: Tatsuro Uchida ,  Mitsuhiro Ikuta ,  Tetsuya Takeuchi

Inventor： Tatsuro Uchida ,  Mitsuhiro Ikuta ,  Tetsuya Takeuchi

IPC: H01L21/00 ,  H01S5/00

CPC classification number: H01S5/423 ,  H01S5/18311 ,  H01S5/18369 ,  H01S5/18377 ,  H01S5/18391 ,  H01S5/209 ,  H01S5/34326 ,  H01S2301/166

Abstract: Provided is a process for producing a surface emitting laser including a surface relief structure provided on laminated semiconductor layers, including the steps of transferring, to a first dielectric film, a first pattern for defining a mesa structure and a second pattern for defining the surface relief structure in the same process; and forming a second dielectric film on the first dielectric film and a surface of the laminated semiconductor layers to which the first pattern and the second pattern have been transferred. Accordingly, a center position of the surface relief structure can be aligned with a center position of a current confinement structure at high precision.

Abstract translation: 提供一种制造表面发射激光器的方法，该表面发射激光器包括设置在层叠半导体层上的表面浮雕结构，包括以下步骤：向第一电介质膜转移用于限定台面结构的第一图案和用于限定表面浮雕的第二图案 结构在同一过程中; 以及在所述第一电介质膜上形成第二电介质膜和在所述第一图案和所述第二图案转印到所述层叠半导体层的表面上。 因此，表面浮雕结构的中心位置可以高精度地与电流限制结构的中心位置对准。