摘要:
One embodiment is directed to a gimbal mechanism for a MEMS mirror device having folded flexure hinges. Another embodiment is directed to a gimbal mechanism having a frame with through-holes or recesses distributed thereabout to reduce weight of said frame. Other embodiments are directed to improved electrode structures for electrostatically actuated MEMS devices. Other embodiments are directed to methods for fabricating electrodes for electrostatically actuated MEMS devices. Other embodiments are directed to methods of fabricating through-wafer interconnect devices. Other embodiments are directed to MEMS mirror array packaging. Other embodiments are directed to electrostatically actuated MEMS devices having driver circuits integrated therewith. Other embodiments are directed to methods of patterning wafers with a plurality of through-holes. Other embodiments are directed to methods of forming moveable structures in MEMS devices. Other embodiments are directed to methods of depositing a thin film on the back of a MEMS device.
摘要:
The invention provides systems and methods for exchanging gas in an oxygenator device, and methods for preparing and using such oxygenator devices. The systems and methods can be used to transfer oxygen to blood to assist lung function in a patient.
摘要:
Methods of fabricating microfluidic structures featuring substantially circular channels are provided. The methods involve (a) providing a patterned wafer comprising at least one exposed electrically conductive region and at least one exposed electrically insulating region; (b) electroplating an inverse channel portion with substantially semicircular cross section onto the wafer, thereby forming a first master mold; (c) employing the first master mold so as to emboss a channel portion in a first polymer sheet; and (d) aligning and bonding the first polymer sheet with a second polymer sheet having a corresponding channel portion such as to define a first channel with substantially circular cross section between the polymer sheets.
摘要:
The invention provides systems and methods for exchanging gas in an oxygenator device, and methods for preparing and using such oxygenator devices. The systems and methods can be used to transfer oxygen to blood to assist lung function in a patient.
摘要:
The invention provides microfluidic devices, methods for imaging cells, and methods for preparing such microfluidic devices. The microfluidic devices are contemplated to provide advantages for use in imaging of cells and subcellular compartments in an environment that mimics in vivo conditions. The microfluidic devices can used with a microscope equipped with an oil emersion objective lens.
摘要:
A microfluidic device is provided. The microfluidic device includes a first transparent, solid support layer. A first polymeric layer defining at least one chamber is attached to the first transparent, solid support layer. A semi-permeable membrane is attached to the first polymeric layer. A second polymeric layer is attached to the opposite side of the semi-permeable membrane from the first polymeric layer. The second polymeric layer has a thickness of less than 300 microns and defines at least one chamber positioned to overlap with at least one chamber in the first polymeric layer. A first manifold structure is attached to an input end of at least one chamber and a second manifold structure is attached to an output end of at least one chamber.