Heat treatment apparatus which emits flash of light
    1.
    发明授权
    Heat treatment apparatus which emits flash of light 有权
    发出闪光的热处理设备

    公开(公告)号:US07973266B2

    公开(公告)日:2011-07-05

    申请号:US11938876

    申请日:2007-11-13

    IPC分类号: H05B3/06 A21B2/00

    CPC分类号: H05B3/0047 H01L21/67115

    摘要: In a heat treatment apparatus, a reflector is provided to cover a plurality of flash lamps arranged in an array for emitting a flash of light, and a cooling box is provided over the reflector. The cooling box has a buffer space incorporated therein, and a plurality of jet openings in communication with the buffer space are formed through a bottom surface of the cooling box and the reflector. The plurality of jet openings are positioned just over gaps between the plurality of flash lamps in the lamp array. Nitrogen gas ejected from the plurality of jet openings passes through the gaps between adjacent ones of the flash lamps in the lamp array, and is then blown against a lamp light radiation window. The flash lamps are effectively cooled down by the direct cooling using the nitrogen gas and the decrease in temperature of the lamp light radiation window.

    摘要翻译: 在热处理设备中,设置反射器以覆盖排列成阵列的多个闪光灯,以发射闪光,并且在反射器上设置冷却箱。 冷却箱内装有缓冲空间,并且通过冷却箱和反射器的底面形成与缓冲空间连通的多个喷射开口。 多个喷射开口恰好位于灯阵列中的多个闪光灯之间的间隙之上。 从多个喷射开口排出的氮气通过灯阵列中相邻的闪光灯之间的间隙,然后吹向灯光辐射窗。 通过使用氮气的直接冷却和灯光辐射窗的温度降低,闪光灯被有效地冷却。

    Optical transmission path formation technique

    公开(公告)号:US07116884B2

    公开(公告)日:2006-10-03

    申请号:US10440254

    申请日:2003-05-19

    IPC分类号: G02B6/00

    摘要: A holder for holding optical fibers has pin inserting holes to which corresponding positioning pins are pierced from one end to another. An optical fiber fixing plate has fixing holes corresponding to the optical fibers and pin inserting holes corresponding to the positioning pins. On an equipping surface of the fixing plate is formed a reinforcement layer having piercing holes corresponding to the fixing holes and pin piercing holes corresponding to the pin inserting holes. Each optical fiber is fixed and adhered by inserting to each fixing hole while the pins are inserted to the pin inserting holes of the holder, pin piercing holes of the reinforcement layer and the pin inserting holes of the fixing plate. A front surface of the fixing plate is planarized by polishing the surface. Positions of the optical fibers are easily defined at an end surface of the optical fiber holder with high precision.

    Mouse CXC chemokine receptor
    3.
    发明授权
    Mouse CXC chemokine receptor 失效
    小鼠CXC趋化因子受体

    公开(公告)号:US07074616B1

    公开(公告)日:2006-07-11

    申请号:US09367052

    申请日:1997-02-07

    CPC分类号: C07K14/7158 A61K38/00

    摘要: The present invention pertains to a DNA encoding a polypeptide comprising an entire sequence of the amino acid sequence as shown by SEQ ID NO:2 of Sequence Listing or a partial sequence thereof, or a polypeptide comprising the polypeptide described above, wherein any of the polypeptides has an activity of a receptor capable of binding to a murine PBSF/SDF-1; a polypeptide encoded by the DNA described above, wherein the polypeptide has an activity of a receptor capable of binding to a murine PBSF/SDF-1; cells expressing the polypeptide described above and a human CD4 protein; and a method of screening an AIDS onset inhibitor or an HIV-1 infection inhibitor, characterized by the use of the cells described above. According to the present invention, there can be provided a novel murine CXC chemokine receptor gene, a method of screening an HIV-1 infection inhibitor, and the like, each of which is useful in studies of a therapeutic agent for AIDS and the functional mechanism of HIV-1 infection.

    摘要翻译: 本发明涉及编码多肽的DNA,其包含序列表的SEQ ID NO:2所示的氨基酸序列的整个序列或其部分序列,或包含上述多肽的多肽,其中任何多肽 具有能够结合小鼠PBSF / SDF-1的受体的活性; 由上述DNA编码的多肽,其中所述多肽具有能够结合小鼠PBSF / SDF-1的受体的活性; 表达上述多肽的细胞和人CD4蛋白; 以及筛选艾滋病起病抑制剂或HIV-1感染抑制剂的方法,其特征在于使用上述细胞。 根据本发明,可以提供新的鼠CXC趋化因子受体基因,筛选HIV-1感染抑制剂的方法等,其可用于AIDS治疗剂的研究和功能机制 的HIV-1感染。

    Anisotropic light diffusion adhesive layer, anisotropic light diffusion adhesive laminate, and illuminating device having anisotropic light diffusion adhesive laminate
    4.
    发明申请
    Anisotropic light diffusion adhesive layer, anisotropic light diffusion adhesive laminate, and illuminating device having anisotropic light diffusion adhesive laminate 审中-公开
    各向异性光扩散粘合剂层,各向异性光扩散粘合剂层压体,以及具有各向异性光散射粘合剂层压体的照明装置

    公开(公告)号:US20060014085A1

    公开(公告)日:2006-01-19

    申请号:US10534581

    申请日:2003-11-13

    IPC分类号: G03F1/00

    摘要: An anisotropic light diffusion adhesive layer includes an adhesive material, and an acicular filler whose refractive index is different from that of the adhesive material, wherein the acicular filler is dispersed as oriented substantially in the same direction. It is desirable for the acicular filler to be colorless or white colored. An anisotropic light diffusion adhesive laminated assembly may also be manufactured by adhering together several such anisotropic light diffusion adhesive layers. This anisotropic light diffusion adhesive layer and anisotropic light diffusion adhesive laminated assembly may suitably be employed as an illumination device such as a backlight for a liquid crystal display device or the like.

    摘要翻译: 各向异性光扩散粘合剂层包括粘合剂材料和折射率不同于粘合剂材料的针状填料,其中针状填料基本上沿相同方向分散。 针状填料最好是无色或白色。 各向异性光扩散粘合剂层叠组件也可以通过将几个这样的各向异性光扩散粘合剂层粘合在一起来制造。 这种各向异性光扩散粘合剂层和各向异性光扩散粘合剂层压组件可以适当地用作诸如液晶显示装置等的背光源的照明装置。

    Method of manufacturing microlens array
    5.
    发明申请
    Method of manufacturing microlens array 失效
    微透镜阵列的制造方法

    公开(公告)号:US20050181311A1

    公开(公告)日:2005-08-18

    申请号:US11036105

    申请日:2005-01-18

    IPC分类号: G03F7/40 G02B3/00 G03F7/207

    摘要: A positive resist layer formed on a translucent substrate is subjected to exposure and development to form circular resist patterns disposed near each other at a predetermined distance. The exposure pattern has an opening of a plurality of circular ring shape surrounding the plurality of resist patterns. The opening may have a width equal to the predetermined distance. Since the width of the opening is constant over the whole outer periphery of each resist pattern, uniform exposure can be realized at all positions along the periphery to form a perfect circle shape. After a convex lens shape is given to each resist pattern by heating and reflow process, the convex lens shape is transferred to the substrate by dry etching process using the resist patterns as a mask to form a microlens array with convex lenses.

    摘要翻译: 形成在透光性基板上的正性抗蚀剂层经受曝光和显影以形成以预定距离彼此靠近设置的圆形抗蚀剂图案。 曝光图案具有围绕多个抗蚀剂图案的多个圆环形状的开口。 开口可以具有等于预定距离的宽度。 由于开口的宽度在每个抗蚀剂图案的整个外周上是恒定的,所以可以在沿着周边的所有位置上实现均匀的曝光以形成正圆形状。 在通过加热和回流处理对每个抗蚀剂图案赋予凸透镜形状之后,通过使用抗蚀剂图案作为掩模的干蚀刻工艺将凸透镜形状转印到基板,以形成具有凸透镜的微透镜阵列。

    Substrate processing unit, method for detecting the position of a substrate and substrate processing apparatus
    6.
    发明申请
    Substrate processing unit, method for detecting the position of a substrate and substrate processing apparatus 有权
    基板处理单元,检测基板和基板处理装置的位置的方法

    公开(公告)号:US20050065634A1

    公开(公告)日:2005-03-24

    申请号:US10941785

    申请日:2004-09-15

    摘要: A thermal processing unit is connected to a substrate position detector, which is in turn connected to a bake unit controller. The thermal processing unit includes a temperature control plate and a lifting device. The temperature control plate and lifting device are connected to the bake unit controller. The operations of the temperature control plate and lifting device are controlled by the bake unit controller. A pressure measuring pipe is provided at a lower part of at least one of a plurality of pin inserting holes in the temperature control plate. The pressure measuring pipe is connected to a low differential pressure sensor. The low differential pressure sensor detects the pressure in an airflow exhausted from a space surrounded by a substrate and an upper face of the temperature control plate via the pressure measuring pipe.

    摘要翻译: 热处理单元连接到基板位置检测器,基板位置检测器又连接到烘烤单元控制器。 热处理单元包括温度控制板和提升装置。 温控板和提升装置连接到烘烤单元控制器。 温控板和提升装置的操作由烘烤单元控制器控制。 压力测量管设置在温度控制板中的多个销插入孔中的至少一个的下部。 压力测量管连接到低压差传感器。 低压差传感器通过压力测量管检测由基板和温度控制板的上表面围绕的空间排出的气流中的压力。

    Substrate heat treatment apparatus
    7.
    发明授权
    Substrate heat treatment apparatus 失效
    基板热处理装置

    公开(公告)号:US5611685A

    公开(公告)日:1997-03-18

    申请号:US450758

    申请日:1995-05-25

    摘要: A substrate heat treatment apparatus includes a heat treatment furnace of a flat configuration, and having a cavity in which a substrate is accommodated. The heat treatment furnace includes a gas supply unit at one side end face, an opening for communication between the cavity and the outside world, and a gas discharge unit in the vicinity of the opening for discharging gas from the cavity at the other side end face. The heat treatment furnace further includes a cover for shutting the opening allowing opening/closing thereof. In the gas exhaust unit, an exhaust chamber is formed on the other side end face along the opening with a partition wall between the opening and the exhaust chamber. An exhaust portion is formed in communication with the outside world in the exhaust chamber. The partition wall is formed so that the edge of the partition wall is displaced away from the inside surface of the cover, whereby a slit-like vent passage extending in the direction of the width of the cavity is formed between the cover and the edge of the partition wall when the opening is shut. The gas flow is uniform in the vicinity of the vent passage when a substrate is loaded/unloaded into and/from the heat treatment furnace, and also during heat treatment. The outside air will not enter the furnace, and no stagnation of the process gas occurs in the furnace.

    摘要翻译: 基板热处理装置包括平坦构造的热处理炉,并且具有容纳基板的空腔。 所述热处理炉包括在一侧端面处的气体供给单元,所述空腔与所述外界之间连通的开口以及所述开口附近的气体排出单元,用于从所述另一侧端面处的所述空腔排出气体 。 热处理炉还包括用于关闭允许其打开/关闭的开口的盖。 在排气单元中,在开口与排气室之间具有分隔壁的沿着开口的另一侧端面形成有排气室。 在排气室中形成与外界连通的排气部。 分隔壁形成为使得隔壁的边缘远离盖的内表面移开,从而在盖和盖的边缘之间形成沿空腔宽度方向延伸的狭缝状通气通道 打开关闭时的隔墙。 当将基板装载/卸载到热处理炉中时,以及在热处理期间,气流在通气通道附近均匀。 外部空气不会进入炉内,炉内不会发生停滞。

    Light-emitting heat treatment apparatus
    8.
    发明授权
    Light-emitting heat treatment apparatus 有权
    发光热处理装置

    公开(公告)号:US08238731B2

    公开(公告)日:2012-08-07

    申请号:US12395940

    申请日:2009-03-02

    IPC分类号: A21B2/00

    摘要: Annular reflecting rings are removably mounted on the upper and lower sides of a chamber side portion of a chamber. An annular recessed portion is formed sandwiched between the lower end face of the upper reflecting ring and the upper end face of the lower reflecting ring to surround a holding part for holding a semiconductor wafer. The outer peripheral surface of the recessed portion communicates with a transport opening. The formation of the recessed portion prevents the light emitted from halogen lamps and flash lamps from being non-uniformly reflected around the holding part to enter a semiconductor wafer, thus improving the uniformity of the in-plane temperature distribution in the semiconductor wafer during heat treatment.

    摘要翻译: 环形反射环可移除地安装在室的室侧部分的上侧和下侧。 在上反射环的下端面和下反射环的上端面之间形成环状的凹部,以包围保持半导体晶片的保持部。 凹部的外周面与输送口连通。 凹陷部分的形成防止卤素灯和闪光灯发出的光在保持部分周围不均匀地反射进入半导体晶片,从而提高了热处理期间半导体晶片内的面内温度分布的均匀性 。

    Micro lens array with guide pin insertion holes and its manufacture method
    9.
    发明授权
    Micro lens array with guide pin insertion holes and its manufacture method 失效
    微透镜阵列带导销插孔及其制造方法

    公开(公告)号:US07553088B2

    公开(公告)日:2009-06-30

    申请号:US11219743

    申请日:2005-09-07

    IPC分类号: G02B6/38 G02B6/40 H01R13/642

    摘要: A micro lens array has a translucent substrate of glass or the like and convex lenses formed on a principal surface of the substrate. Guide pin insertion holes are formed through the substrate 30 on opposite sides of a line of lenses. A metal layer 38 with at least three metal projections is formed only in an inner wall section of each of the holes by a plating process so as to gradually increase an opening size of the hole at higher positions. The inner wall section has a depth of about 50 to 100 μm from the opening end on the guide pin insertion side. The metal layer may be omitted. Instead of the metal projections, a metal layer forming the hole having a polygonal shape may be used.

    摘要翻译: 微透镜阵列具有形成在基板的主表面上的玻璃等的半透明基板和凸透镜。 在一行透镜的相对侧上通过基板30形成引导销插入孔。 具有至少三个金属突起的金属层38仅通过电镀工艺形成在每个孔的内壁部分中,以便在较高位置逐渐增加孔的开口尺寸。 内壁部的导向插入侧的开口端的深度为50〜100μm左右。 金属层可以省略。 代替金属突起,可以使用形成具有多边形形状的孔的金属层。