Capacitor and method for fabricating the same

    公开(公告)号:US10115786B2

    公开(公告)日:2018-10-30

    申请号:US15352551

    申请日:2016-11-15

    Abstract: A capacitor includes: a bottom electrode; a middle electrode on the bottom electrode; a top electrode on the middle electrode; a first dielectric layer between the bottom electrode and the middle electrode; and a second dielectric layer between the middle electrode and the top electrode. Preferably, the second dielectric layer is disposed on at least a sidewall of the middle electrode to physically contact the first dielectrically, and the middle electrode includes a H-shape.

    OPERATING METHOD OF IMAGE SENSOR
    3.
    发明申请

    公开(公告)号:US20170155861A1

    公开(公告)日:2017-06-01

    申请号:US14953411

    申请日:2015-11-29

    Abstract: An operating method of an image sensor includes the following steps. The image sensor includes at least one pixel unit. The pixel unit includes a photoelectric conversion unit, a first control unit, a capacitor unit, and a sensing unit. The photoelectric conversion unit includes a quantum film photoelectric conversion unit, and the first control unit includes an oxide semiconductor transistor. The capacitor unit is coupled to the first control unit, and the sensing unit is configured to sense signals at a sense point coupled between the first control unit and the sensing unit. The pixel unit is discharged before a readout operation. The capacitor unit is charged by electrons emitted from the photoelectric conversion unit when the photoelectric conversion unit is excited by light. Signals at the sense point are then sensed by the sensing unit.

    Capacitor and method for fabricating the same
    6.
    发明授权
    Capacitor and method for fabricating the same 有权
    电容器及其制造方法

    公开(公告)号:US09530834B1

    公开(公告)日:2016-12-27

    申请号:US14967344

    申请日:2015-12-13

    CPC classification number: H01L28/91 H01L28/92

    Abstract: A method for fabricating capacitor is disclosed. The method includes the steps of: providing a material layer; forming a patterned first conductive layer on the material layer, forming a first dielectric layer on the patterned first conductive layer; forming a second conductive layer and a cap layer on the first dielectric layer; removing part of the cap layer to form a spacer on the second conductive layer; and using the spacer to remove part of the second conductive layer for forming a trench above the patterned first conductive layer and fin-shaped structures adjacent to the trench.

    Abstract translation: 公开了制造电容器的方法。 该方法包括以下步骤:提供材料层; 在所述材料层上形成图案化的第一导电层,在所述图案化的第一导电层上形成第一介电层; 在所述第一介电层上形成第二导电层和盖层; 去除所述盖层的一部分以在所述第二导电层上形成间隔物; 以及使用间隔件去除用于在图案化的第一导电层上方形成沟槽的第二导电层的一部分和与沟槽相邻的鳍状结构。

    Capacitor and fabrication method thereof

    公开(公告)号:US09966428B2

    公开(公告)日:2018-05-08

    申请号:US14996244

    申请日:2016-01-15

    CPC classification number: H01L28/91

    Abstract: A method for fabricating capacitor is disclosed. The method includes the steps of: providing a material layer; forming a first conductive layer, a first dielectric layer, and a second conductive layer on the material layer; patterning the first dielectric layer and the second conductive layer to form a patterned first dielectric layer and a middle electrode; forming a second dielectric layer on the first conductive layer and the middle electrode; removing part of the second dielectric layer to form a patterned second dielectric layer; forming a third conductive layer on the first conductive layer and the patterned second dielectric layer, wherein the third conductive layer contacts the first conductive layer directly; and removing part of the third conductive layer to expose part of the patterned second dielectric layer.

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