Integrated circuit manufacturing method
    1.
    发明授权
    Integrated circuit manufacturing method 有权
    集成电路制造方法

    公开(公告)号:US08772073B2

    公开(公告)日:2014-07-08

    申请号:US12988110

    申请日:2009-04-14

    摘要: A method of providing a dielectric material (18) having regions (18′, 18″) with a varying thickness in an IC manufacturing process is disclosed. The method comprises forming a plurality of patterns in respective regions (20′, 20″) of the dielectric material (18), each pattern increasing the susceptibility of the dielectric material (18) to a dielectric material removal step by a predefined amount and exposing the dielectric material (18) to the dielectric material removal step. In an embodiment, the IC comprises a plurality of pixilated elements (12) and a plurality of light interference elements (24), each comprising a first mirror element (16) and a second mirror element (22), a region of the dielectric material (18) separating the first mirror element (16) and the second element (22), and each being arranged over one of said pixilated elements (12), the method further comprising forming the respective first mirror elements (16) in a dielectric layer (14) over a substrate (10) comprising the plurality of pixilated elements; depositing the dielectric material over the dielectric layer; and forming the respective second mirror elements such that each second mirror element is separated from a respective first mirror element by a region of the exposed dielectric material. Hence, an IC having a layer of a dielectric material (18) comprising regions of different thicknesses can be obtained requiring only a few process steps.

    摘要翻译: 公开了一种在IC制造过程中提供具有变化厚度的区域(18',18“)的介电材料(18)的方法。 该方法包括在介电材料(18)的相应区域(20',20“)中形成多个图案,每个图案将电介质材料(18)的敏感性增加到电介质材料去除步骤预定量并暴露 介电材料(18)到介电材料去除步骤。 在一个实施例中,IC包括多个像素化元件(12)和多个光干涉元件(24),每个元件包括第一镜元件(16)和第二镜元件(22),介电材料的区域 (18)分离第一镜元件(16)和第二元件(22),并且每个被布置在一个所述像素化元件(12)上,所述方法还包括在电介质层中形成相应的第一镜元件(16) (14)包括多个像素化元件的衬底(10)上; 在电介质层上沉积电介质材料; 以及形成各个第二反射镜元件,使得每个第二反射镜元件通过暴露的电介质材料的区域与相应的第一反射镜元件分离。 因此,可以获得具有包括不同厚度的区域的电介质材料层(18)的IC,只需要几个工艺步骤。

    Method of controlling an LED, and an LED controller
    2.
    发明授权
    Method of controlling an LED, and an LED controller 有权
    控制LED的方法和LED控制器

    公开(公告)号:US08723443B2

    公开(公告)日:2014-05-13

    申请号:US13257266

    申请日:2010-02-25

    IPC分类号: H05B33/00

    摘要: A method is disclosed of controlling a LED, comprising driving the LED with a DC current for a first time, interrupting the DC current for a second time such that the first time and the second time sum to a period, determining at least one characteristic of the LED while the DC current is interrupted, and controlling the DC current during a subsequent period in dependence on the at least one characteristic. The invention thus benefits from the simplicity of DC operation. By operating at the LED in a DC mode, rather than say in a PWM mode, the requirement to be able to adjust the duty cycle is avoided. By including interruptions to the DC current, it is possible to utilize the LED itself to act as a sensor in order to determine a characteristic of the LED. The need for additional sensors is thereby avoided.

    摘要翻译: 公开了一种控制LED的方法,包括第一次用DC电流驱动LED,第二次中断DC电流,使得第一时间和第二时间总和到一个周期,确定至少一个特性 所述LED在DC电流中断期间,并且根据所述至少一个特性在随后的时段期间控制所述DC电流。 因此,本发明由于DC操作的简单性而受益。 通过在DC模式下操作LED,而不是在PWM模式下说明,可以避免能够调整占空比的要求。 通过包含直流电流的中断,可以利用LED本身作为传感器,以便确定LED的特性。 从而避免了对附加传感器的需要。

    Manufacturing method and integrated circuit having a light path to a pixilated element
    3.
    发明授权
    Manufacturing method and integrated circuit having a light path to a pixilated element 有权
    具有到像素化元件的光路的制造方法和集成电路

    公开(公告)号:US08368105B2

    公开(公告)日:2013-02-05

    申请号:US12922072

    申请日:2009-03-09

    IPC分类号: H01L33/00

    摘要: The present invention relates to a manufacturing method of an integrated circuit (IC) comprising a substrate (10) comprising a pixelated element (12) and a light path (38) to the pixelated element (12). The IC comprises a first dielectric layer (14) covering the substrate (10) but not the pixilated element (12), a first metal layer (16) covering a part of the first dielectric layer (14), a second dielectric layer (18) covering a further part of first dielectric layer (14), a second metal layer (20) covering a part of the second dielectric layer (18) and extending over the pixelated element (12) and a part of the first metal layer (16), the first metal layer (16) and the second metal layer (20) forming an air-filled light path (38) to the pixelated element (12). The air-filled light path (38) is formed by creation of holes in the first dielectric layer (14) and the second dielectric layer (18), filling the holes with sacrificial materials, and removal of the sacrificial materials after deposition and patterning of the second metal layer (20). This yields an IC having a low-loss light path to the pixelated element (12). The light path may act as a color filter, e.g. a Fabry-Perot color filter.

    摘要翻译: 本发明涉及一种集成电路(IC)的制造方法,该集成电路(IC)包括基板(10),该基板(10)包括像素化元件(12)和到像素化元件(12)的光路(38)。 所述IC包括覆盖所述衬底(10)而不是所述像素化元件(12)的第一介电层(14),覆盖所述第一介电层(14)的一部分的第一金属层(16),第二介电层(18) )覆盖第一介电层(14)的另一部分,覆盖第二介电层(18)的一部分并在像素化元件(12)上延伸的第二金属层(20)和第一金属层(16)的一部分 ),第一金属层(16)和第二金属层(20)形成到像素化元件(12)的充气光路(38)。 充气光路(38)通过在第一电介质层(14)和第二电介质层(18)中产生孔而形成,用牺牲材料填充孔,并且在沉积和图案化之后去除牺牲材料 第二金属层(20)。 这产生具有到像素化元件(12)的低损耗光路的IC。 光路可以用作滤色器,例如, 法布里 - 珀罗滤镜。

    INTEGRATED CIRCUIT MANUFACTURING METHOD
    4.
    发明申请
    INTEGRATED CIRCUIT MANUFACTURING METHOD 有权
    集成电路制造方法

    公开(公告)号:US20110037135A1

    公开(公告)日:2011-02-17

    申请号:US12988110

    申请日:2009-04-14

    IPC分类号: H01L31/0232 H01L31/18

    摘要: A method of providing a dielectric material (18) having regions (18′, 18″) with a varying thickness in an IC manufacturing process is disclosed. The method comprises forming a plurality of patterns in respective regions (20′, 20″) of the dielectric material (18), each pattern increasing the susceptibility of the dielectric material (18) to a dielectric material removal step by a predefined amount and exposing the dielectric material (18) to the dielectric material removal step. In an embodiment, the IC comprises a plurality of pixilated elements (12) and a plurality of light interference elements (24), each comprising a first mirror element (16) and a second mirror element (22), a region of the dielectric material (18) separating the first mirror element (16) and the second element (22), and each being arranged over one of said pixilated elements (12), the method further comprising forming the respective first mirror elements (16) in a dielectric layer (14) over a substrate (10) comprising the plurality of pixilated elements; depositing the dielectric material over the dielectric layer; and forming the respective second mirror elements such that each second mirror element is separated from a respective first mirror element by a region of the exposed dielectric material. Hence, an IC having a layer of a dielectric material (18) comprising regions of different thicknesses can be obtained requiring only a few process steps.

    摘要翻译: 公开了一种在IC制造过程中提供具有变化厚度的区域(18',18“)的介电材料(18)的方法。 该方法包括在介电材料(18)的相应区域(20',20“)中形成多个图案,每个图案将电介质材料(18)的敏感性增加到电介质材料去除步骤预定量并暴露 电介质材料(18)到介电材料去除步骤。 在一个实施例中,IC包括多个像素化元件(12)和多个光干涉元件(24),每个元件包括第一镜元件(16)和第二镜元件(22),介电材料的区域 (18)分离第一镜元件(16)和第二元件(22),并且每个被布置在一个所述像素化元件(12)上,所述方法还包括在电介质层中形成相应的第一镜元件(16) (14)包括多个像素化元件的衬底(10)上; 在电介质层上沉积电介质材料; 以及形成各个第二反射镜元件,使得每个第二反射镜元件通过暴露的电介质材料的区域与相应的第一反射镜元件分离。 因此,可以获得具有包括不同厚度的区域的电介质材料层(18)的IC,只需要几个工艺步骤。

    METHOD OF CONTROLLING AN LED, AND AN LED CONTROLLER
    8.
    发明申请
    METHOD OF CONTROLLING AN LED, AND AN LED CONTROLLER 有权
    控制LED的方法和LED控制器

    公开(公告)号:US20120001570A1

    公开(公告)日:2012-01-05

    申请号:US13257266

    申请日:2010-02-25

    IPC分类号: H05B37/02

    摘要: A method is disclosed of controlling a LED, comprising driving the LED with a DC current for a first time, interrupting the DC current for a second time such that the first time and the second time sum to a period, determining at least one characteristic of the LED whilst the DC current is interrupted, and controlling the DC current during a subsequent period in dependence on the at least one characteristic. The invention thus benefits from the simplicity of DC operation. By operating at the LED in a DC mode, rather than say in a PWM mode, the requirement to be able to adjust the duty cycle is avoided. By including interruptions to the DC current, it is possible to utilise the LED itself to act as a sensor in order to determine a characteristic of the LED. The need for additional sensors is thereby avoided.

    摘要翻译: 公开了一种控制LED的方法,包括第一次用DC电流驱动LED,第二次中断DC电流,使得第一时间和第二时间总和到一个周期,确定至少一个特性 所述LED在DC电流中断期间,并且根据所述至少一个特性在随后的时段期间控制所述DC电流。 因此,本发明由于DC操作的简单性而受益。 通过在DC模式下操作LED,而不是在PWM模式下说明,可以避免能够调整占空比的要求。 通过包含直流电流的中断,可以利用LED本身作为传感器,以便确定LED的特性。 从而避免了对附加传感器的需要。