公开(公告)号：US20210147220A1

公开(公告)日：2021-05-20

申请号：US17046918

申请日：2019-04-11

申请人： WiSys Technology Foundation, Inc. ,  Wisconsin Alumni Research Foundation

发明人： Gokul Gopalakrishnan ,  Paul Gregory Evans

IPC分类号： B81C1/00 ,  B81B3/00

摘要： Methods for forming stable, suspended nanomembranes are provided. Also provided are stable, suspended nanomembranes made using the methods and electronic devices that incorporate the stable, suspended nanomembranes as electronically active layers. The methods utilize stiction-aided nanomembrane flattening combined with ultraviolet (UV) radiation-induced adhesion enhancement.

公开(公告)号：US20190106805A1

公开(公告)日：2019-04-11

申请号：US15728595

申请日：2017-10-10

申请人： Wisconsin Alumni Research Foundation

发明人： Paul Gregory Evans ,  Thomas Francis Kuech ,  Susan Elizabeth Babcock ,  Mohammed Humed Yusuf ,  Yajin Chen

IPC分类号： C30B1/02 ,  C30B29/22

摘要： A method for crystallizing an amorphous multicomponent ionic compound comprises applying an external stimulus to a layer of an amorphous multicomponent ionic compound, the layer in contact with an amorphous surface of a deposition substrate at a first interface and optionally, the layer in contact with a crystalline surface at a second interface, wherein the external stimulus induces an amorphous-to-crystalline phase transformation, thereby crystallizing the layer to provide a crystalline multicomponent ionic compound, wherein the external stimulus and the crystallization are carried out at a temperature below the melting temperature of the amorphous multicomponent ionic compound. If the layer is in contact with the crystalline surface at the second interface, the temperature is further selected to achieve crystallization from the crystalline surface via solid phase epitaxial (SPE) growth without nucleation.

公开(公告)号：US20210025074A1

公开(公告)日：2021-01-28

申请号：US17060585

申请日：2020-10-01

申请人： Wisconsin Alumni Research Foundation

发明人： Paul Gregory Evans ,  Thomas Francis Kuech ,  Susan Elizabeth Babcock ,  Mohammed Humed Yusuf ,  Yajin Chen

IPC分类号： C30B1/02 ,  C30B29/22 ,  H01L21/02 ,  C30B29/32

摘要： A method for crystallizing an amorphous multicomponent ionic compound comprises applying an external stimulus to a layer of an amorphous multicomponent ionic compound, the layer in contact with an amorphous surface of a deposition substrate at a first interface and optionally, the layer in contact with a crystalline surface at a second interface, wherein the external stimulus induces an amorphous-to-crystalline phase transformation, thereby crystallizing the layer to provide a crystalline multicomponent ionic compound, wherein the external stimulus and the crystallization are carried out at a temperature below the melting temperature of the amorphous multicomponent ionic compound. If the layer is in contact with the crystalline surface at the second interface, the temperature is further selected to achieve crystallization from the crystalline surface via solid phase epitaxial (SPE) growth without nucleation.

公开(公告)号：US11591710B2

公开(公告)日：2023-02-28

申请号：US17060585

申请日：2020-10-01

申请人： Wisconsin Alumni Research Foundation

发明人： Paul Gregory Evans ,  Thomas Francis Kuech ,  Susan Elizabeth Babcock ,  Mohammed Humed Yusuf ,  Yajin Chen

IPC分类号： C30B1/02 ,  C30B29/22 ,  H01L21/02 ,  C30B29/32 ,  H01L29/66 ,  H01L21/28

摘要： A method for crystallizing an amorphous multicomponent ionic compound comprises applying an external stimulus to a layer of an amorphous multicomponent ionic compound, the layer in contact with an amorphous surface of a deposition substrate at a first interface and optionally, the layer in contact with a crystalline surface at a second interface, wherein the external stimulus induces an amorphous-to-crystalline phase transformation, thereby crystallizing the layer to provide a crystalline multicomponent ionic compound, wherein the external stimulus and the crystallization are carried out at a temperature below the melting temperature of the amorphous multicomponent ionic compound. If the layer is in contact with the crystalline surface at the second interface, the temperature is further selected to achieve crystallization from the crystalline surface via solid phase epitaxial (SPE) growth without nucleation.

公开(公告)号：US20210069999A1

公开(公告)日：2021-03-11

申请号：US17015428

申请日：2020-09-09

申请人： Wisconsin Alumni Research Foundation

发明人： Paul Gregory Evans ,  Thomas Francis Kuech ,  Donald E. Savage ,  Yajin Chen ,  Samuel Marks

IPC分类号： B29D11/00 ,  C01G31/02 ,  H01L31/08 ,  H01L31/0232

摘要： Transparent, electrically conductive vanadium oxide-based perovskite films and methods of making the vanadium oxide-based perovskite films are provided. Transparent conducting vanadate perovskites are made by forming a layer of amorphous vanadate perovskite precursor around a plurality of nanoscale, crystalline, perovskite oxide seeds and heating the layer of amorphous vanadate perovskite precursor at a temperature that favors lateral vanadate perovskite crystal growth from the perovskite oxide seeds over homogeneous crystal nucleation within the layer of amorphous vanadate perovskite precursor material. The crystallization processes can form the desired vanadate perovskite phase directly or via a transformation in a controlled gas environment from an initial crystallized vanadate perovskite phase that has a higher oxidation state.