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公开(公告)号：US20110094861A1
公开(公告)日：2011-04-28
申请号：US11985338
申请日：2007-11-14
IPC分类号： H01H59/00
CPC分类号： H01H1/0094 , H01H59/0009 , H01H2001/0078 , H01H2057/006
摘要： NEMS (Nano-Electro-Mechanical Systems) apparatuses are described. By applying a static electric field, an arm or beam in a NEMS apparatus is made to bend so that one electrical conductor is made to contact another electrical conductor, thereby closing the NEMS apparatus. Some apparatus embodiments make use of electrostatic coupling to cause the arm or beam to bend, and some apparatus embodiments make use of piezoelectric materials to cause the arm or beam to bend. Other embodiments are described and claimed.
摘要翻译： 描述了NEMS（纳米机电系统）装置。 通过施加静电场，使NEMS装置中的臂或梁弯曲，使得一个电导体与另一个电导体接触，从而闭合NEMS装置。 一些设备实施例利用静电耦合来使臂或梁弯曲，并且一些设备实施例利用压电材料来使臂或梁弯曲。 描述和要求保护其他实施例。
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公开(公告)号：US08258899B2
公开(公告)日：2012-09-04
申请号：US11985338
申请日：2007-11-14
IPC分类号： H01H51/22
CPC分类号： H01H1/0094 , H01H59/0009 , H01H2001/0078 , H01H2057/006
摘要： NEMS (Nano-Electro-Mechanical Systems) apparatuses are described. By applying a static electric field, an arm or beam in a NEMS apparatus is made to bend so that one electrical conductor is made to contact another electrical conductor, thereby closing the NEMS apparatus. Some apparatus embodiments make use of electrostatic coupling to cause the arm or beam to bend, and some apparatus embodiments make use of piezoelectric materials to cause the arm or beam to bend. Other embodiments are described and claimed.
摘要翻译： 描述了NEMS（纳米机电系统）装置。 通过施加静电场，使NEMS装置中的臂或梁弯曲，使得一个电导体与另一个电导体接触，从而闭合NEMS装置。 一些设备实施例利用静电耦合来使臂或梁弯曲，并且一些设备实施例利用压电材料来使臂或梁弯曲。 描述和要求保护其他实施例。
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公开(公告)号：US07555938B2
公开(公告)日：2009-07-07
申请号：US11857615
申请日：2007-09-19
申请人： Igor Bargatin , Jessica L. Arlett , Michael L. Roukes , Inna Kozinsky , John Sequoyah Aldridge , Edward B. Myers
发明人： Igor Bargatin , Jessica L. Arlett , Michael L. Roukes , Inna Kozinsky , John Sequoyah Aldridge , Edward B. Myers
CPC分类号： G01N29/036 , G01N2291/0256 , Y10T29/41
摘要： Systems and methods for thermally actuating piezoresistive cantilevers are described. One embodiment includes a nanoelectromechanical resonator connected in at least one location to a substrate, an electrically conductive path formed on the resonator and a signal source connected to the electrically conductive path and configured to provide an oscillating actuation signal capable of exciting a resonant mode in the resonator.
摘要翻译： 描述了用于热致压压阻悬臂的系统和方法。 一个实施例包括在至少一个位置连接到衬底的纳米机电谐振器，形成在谐振器上的导电路径和连接到导电路径的信号源，并且被配置为提供能够激励谐振模式的振荡致动信号 谐振器。
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4.发明授权公开(公告)号：US07724103B2
公开(公告)日：2010-05-25
申请号：US12030815
申请日：2008-02-13
摘要： A self-sustaining ultra-high frequency oscillator and method enable the ability to oscillate and output a signal. A balanced bridge circuit is utilized to null an embedding background response. A first vibrating nanoelectromechanical (NEMS) beam resonator is part of one of the branches of the balanced bridge circuit and determines the frequency of the oscillator's output signal. A feedback loop establishes and sets oscillation conditions of the oscillator's signal. Further, the feedback loop connects an output of the first resonator to an input of the balanced bridge circuit.
摘要翻译： 自持式超高频振荡器和方法能够振荡和输出信号。 使用平衡桥电路来消除嵌入背景响应。 第一个振动纳米机电（NEMS）光束谐振器是平衡桥接电路的一个分支的一部分，并确定振荡器输出信号的频率。 反馈回路建立并设置振荡器信号的振荡条件。 此外，反馈环路将第一谐振器的输出连接到平衡桥式电路的输入端。
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5.发明授权Polymer NEMs for cell physiology and microfabricated cell positioning system for micro-biocalorimeter 有权用于微生物量热计的细胞生理学和微生物细胞定位系统的聚合物NEM公开(公告)号：US08827548B2
公开(公告)日：2014-09-09
申请号：US13110684
申请日：2011-05-18
申请人： Michael L. Roukes , Chung-Wah Fon , Wonhee Lee , Hongxing Tang , Blake Waters Axelrod , John Liang Tan
发明人： Michael L. Roukes , Chung-Wah Fon , Wonhee Lee , Hongxing Tang , Blake Waters Axelrod , John Liang Tan
CPC分类号： G01N33/54373 , B82Y35/00 , G01L1/044 , G01N33/5026 , G01N33/5029 , G01N33/5032 , Y10S977/724 , Y10S977/956 , Y10S977/958
摘要： A microfluidic embedded nanoelectromechanical system (NEMs) force sensor provides an electrical readout. The force sensor contains a deformable member that is integrated with a strain sensor. The strain sensor converts a deformation of the deformable member into an electrical signal. A microfluidic channel encapsulates the force sensor, controls a fluidic environment around the force sensor, and improves the read out. In addition, a microfluidic embedded vacuum insulated biocalorimeter is provided. A calorimeter chamber contains a parylene membrane. Both sides of the chamber are under vacuum during measurement of a sample. A microfluidic cannel (built from parylene) is used to deliver a sample to the chamber. A thermopile, used as a thermometer is located between two layers of parylene.
摘要翻译： 微流体嵌入式纳米机电系统（NEM）力传感器提供电子读数。 力传感器包含与应变传感器集成的可变形构件。 应变传感器将可变形部件的变形转换为电信号。 微流体通道封装力传感器，控制力传感器周围的流体环境，并改善读数。 此外，还提供了微流体嵌入式真空绝缘生物量热计。 量热器室包含聚对二甲苯膜。 在测量样品期间，室的两侧都处于真空状态。 使用微流控管（由聚对二甲苯构建）将样品输送到室中。 用作温度计的热电堆位于两层聚对二甲苯之间。
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公开(公告)号：US08476005B2
公开(公告)日：2013-07-02
申请号：US12364666
申请日：2009-02-03
CPC分类号： C12Q1/02 , G01N33/502 , G01N2500/10
摘要： A method of screening one or more cells is described; the method includes: (i) providing one or more cells to a nanoelectromechanical system (NEMS) force sensor; (ii) applying at least one reagent to the one or more cells; and (iii) observing a response of the one or more cells to the reagent with the force sensor, thereby screening the one or more cells.
摘要翻译： 描述了筛选一个或多个细胞的方法; 该方法包括：（i）向纳米机电系统（NEMS）力传感器提供一个或多个单元; （ii）向所述一个或多个细胞施加至少一种试剂; 和（iii）用力传感器观察一个或多个细胞对试剂的反应，从而筛选该一个或多个细胞。
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公开(公告)号：US20130133439A1
公开(公告)日：2013-05-30
申请号：US13460969
申请日：2012-05-01
IPC分类号： G01L1/22
CPC分类号： G01L1/22 , G01L5/0033 , G01L5/0038 , G01N33/502 , G01N33/5073 , Y10S977/724 , Y10S977/956 , Y10S977/958
摘要： An apparatus, system, device, and method provide the ability to measure forces a cell exerts on its surroundings. A platform is suspended across an opening using support legs. The platform is able to move horizontally in a plane of the opening. A piezoresistive strain sensor is integrated into the platform and measures strain induced in the support legs when the platform moves horizontally thereby measuring displacement of the platform.
摘要翻译： 装置，系统，装置和方法提供了测量细胞对其周围环境的作用力的能力。 平台通过支撑腿悬挂在开口处。 平台能够在开口的平面内水平移动。 压平应变传感器集成在平台上，当平台水平移动时，测量支撑腿中产生的应变，从而测量平台的位移。
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公开(公告)号：US08378758B2
公开(公告)日：2013-02-19
申请号：US13095692
申请日：2011-04-27
申请人： Luis Guillermo Villanueva Torrijo , Rassul Karabalin , Matthew Matheny , Philip X.-L. Feng , Michael C. Cross , Michael L. Roukes
发明人： Luis Guillermo Villanueva Torrijo , Rassul Karabalin , Matthew Matheny , Philip X.-L. Feng , Michael C. Cross , Michael L. Roukes
IPC分类号： H03B5/36
CPC分类号： H03B5/326
摘要： A parametric feedback oscillator includes a resonator which has at least one transduction element and at least one electromechanical resonating element. The resonator is configured to accept as input a parametric excitation signal at a frequency 2ω0 and to provide a resonating output signal at a frequency ω0. A cascaded feedback path in any electrically coupled cascade order includes at least one non-linear element, at least one phase shifter electrically, and at least one amplifier. The cascade feedback path is configured to receive as input the resonating output signal at a frequency ω0 and configured to provide as output a feedback path signal as the parametric excitation signal at a frequency 2ω0 to the resonator. A parametric feedback oscillator output terminal is configured to provide the resonating output signal at the frequency ω0 as an output signal. A method of causing a parametric feedback oscillation is also described.
摘要翻译： 参数反馈振荡器包括具有至少一个换能元件和至少一个机电谐振元件的谐振器。 谐振器被配置为接受频率为2ω0的参量激励信号作为输入，并且以频率ω0提供谐振输出信号。 任何电耦合级联阶段中的级联反馈路径包括至少一个非线性元件，至少一个移相器和至少一个放大器。 级联反馈路径被配置为接收频率为ω0的谐振输出信号作为输入，并且被配置为向谐振器提供作为频率为2ω0的参量激励信号作为输出的反馈路径信号。 参数反馈振荡器输出端子被配置为以频率ω0提供作为输出信号的谐振输出信号。 还描述了引起参数反馈振荡的方法。
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公开(公告)号：US07762719B2
公开(公告)日：2010-07-27
申请号：US11578675
申请日：2005-04-20
申请人： Chung-Wah Fon , Michael L. Roukes , Wonhee Lee , Hongxing Tang
发明人： Chung-Wah Fon , Michael L. Roukes , Wonhee Lee , Hongxing Tang
IPC分类号： G01K17/00
CPC分类号： G01K17/006 , B01L3/5027
摘要： Microcalorimeters having low addendum heat capacities and attojoule/Kscale resolutions are provided. These microcalorimeters make use of very small calorimeter bodies composed of materials with very low heat capacities. Also provided are polymer-based microcalorimeters with thermally isolated reagent chambers. These microcalorimeters use a multi-layered polymer membrane structure to provide improved thermal isolation of a reagent chamber.
摘要翻译： 提供了具有低附加热容量和attojoule / Kscale分辨率的微量热计。 这些微量热计使用非常小的由热容量非常低的材料组成的量热仪。 还提供了具有热分离的试剂室的基于聚合物的微量热计。 这些微量热计使用多层聚合物膜结构来提供试剂室的改进的热隔离。
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10.发明申请VERY LOW VOLTAGE, ULTRAFAST NANOELECTROMECHANICAL SWITCHES AND RESONANT SWITCHES 有权非常低电压，超高频纳米电子开关和谐波开关公开(公告)号：US20100140066A1
公开(公告)日：2010-06-10
申请号：US12546485
申请日：2009-08-24
IPC分类号： H01H59/00
CPC分类号： H01H1/0094 , H01H59/0009 , H01H2001/0078 , Y10T307/74
摘要： The invention provides lateral nanoelectromechanical switches useful for integration into circuitry fabricated using standard semiconductor processing methods, or using techniques compatible with the mainstream semiconductor processing technologies. Methods of fabricating the switches are described. Some exemplary designs for two and three terminal switches are provided. Descriptions of structural features and the operating parameters for some exemplary switches are given. The switches are expected to be compatible with circuitry that is operable in computer-based systems.
摘要翻译： 本发明提供了侧向纳米机电开关，其用于集成到使用标准半导体处理方法制造的电路中，或者使用与主流半导体处理技术兼容的技术。 描述制造开关的方法。 提供了两个和三个端子开关的一些示例性设计。 给出了一些示例性开关的结构特征和操作参数的描述。 这些开关预期与在基于计算机的系统中可操作的电路兼容。
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