Adaptive pulse compressor
    1.
    发明授权
    Adaptive pulse compressor 失效
    自适应脉冲压缩机

    公开(公告)号:US06327068B1

    公开(公告)日:2001-12-04

    申请号:US09085293

    申请日:1998-05-27

    IPC分类号: G02B2600

    CPC分类号: H01S3/0057 H01S3/10053

    摘要: An adaptive pulse compressor is described, especially for use with ultrashort pulses, wherein the input pulses are modified in an iterative fashion, according to a feedback signal obtained from measurement of the output pulses. The feedback signal is programmed, by means of a programmable spatial light modulator, to allow for independent control of the individual spectral components of the incoming pulses, such that almost arbitrary phase functions can be realized to accomplish efficient compression. One of the main disadvantages associated with prior art pulse compressors, namely, the need for characterization of the uncompressed pulses, is thus eliminated. The compressor is thus capable of handling completely uncharacterized or from time varying sources.

    摘要翻译: 描述了自适应脉冲压缩器,特别是用于与超短脉冲一起使用的输入脉冲,其中根据从输出脉冲的测量获得的反馈信号,以迭代方式修改输入脉冲。 通过可编程空间光调制器对反馈信号进行编程,以允许对输入脉冲的各个频谱分量的独立控制,使得可以实现几乎任意的相位函数以实现有效的压缩。 因此,消除了与现有技术的脉冲压缩机相关的主要缺点之一,即对未压缩脉冲进行表征的需要。 因此,压缩机能够完全处理不具体的或来自时变的源。

    Adaptive pulse compressor
    2.
    发明授权

    公开(公告)号:US06621613B2

    公开(公告)日:2003-09-16

    申请号:US10002016

    申请日:2001-11-15

    IPC分类号: G02F101

    CPC分类号: H01S3/0057 H01S3/10053

    摘要: An adaptive pulse compressor is described, especially for use with ultrashort pulses, wherein the input pulses are modified in an iterative fashion, according to a feedback signal obtained from measurement of the output pulses. The feedback signal is programmed, by means of a programmable spatial light modulator, to allow for independent control of the individual spectral components of the incoming pulses, such that almost arbitrary phase functions can be realized to accomplish efficient compression. One of the main disadvantages associated with prior art pulse compressors, namely, the need for characterization of the uncompressed pulses, is thus eliminated. The compressor is thus capable of handling completely uncharacterized or partially characterized input pulses, or pulses from time varying sources.

    OPTICAL SYSTEM AND METHOD FOR INSPECTION OF PATTERNED SAMPLES
    3.
    发明申请
    OPTICAL SYSTEM AND METHOD FOR INSPECTION OF PATTERNED SAMPLES 审中-公开
    用于检验样本的光学系统和方法

    公开(公告)号:US20130148115A1

    公开(公告)日:2013-06-13

    申请号:US13323671

    申请日:2011-12-12

    IPC分类号: G01N21/956

    摘要: An optical inspection system for inspecting a patterned sample located in an inspection plane includes an illumination unit defining an illumination channel of a predetermined numerical aperture and first predetermined angular orientation with respect to the inspection plane, and a light collection unit defining a collection channel of second predetermined angular orientation with respect to the inspection plane. The illumination unit comprises an illumination mask located in a first spectral plane with respect to the inspection plane and defining an illumination pupil comprising a first pattern formed by at least one elongated light transmitting region having a physical dimension along one axis larger than along a perpendicular axis. The light collection unit comprises a collection mask located in a second spectral plane with respect to the inspection plane being conjugate to the first spectral plane, the collection mask comprising a second predetermined pattern of spaced-apart light blocking regions.

    摘要翻译: 用于检查位于检查平面中的图案样品的光学检查系统包括限定相对于检查平面的预定数值孔径和第一预定角度取向的照明通道的照明单元,以及限定第二 相对于检查平面的预定角度取向。 照明单元包括位于相对于检查平面的第一光谱平面中的照明掩模,并且限定包括由至少一个细长光透射区域形成的第一图案的照明光瞳,所述第一图案具有沿着垂直轴线的一个轴线的物理尺寸 。 所述光收集单元包括位于相对于与所述第一光谱平面共轭的所述检查平面的第二光谱平面中的收集掩模,所述收集掩模包括间隔开的遮光区域的第二预定图案。

    High resolution printer and a method for high resolution printing
    4.
    发明授权
    High resolution printer and a method for high resolution printing 失效
    高分辨率打印机和高分辨率打印方法

    公开(公告)号:US07846649B2

    公开(公告)日:2010-12-07

    申请号:US10940347

    申请日:2004-09-13

    IPC分类号: G03C5/04

    CPC分类号: G03F7/70291 G03F7/70408

    摘要: The invention provides a method and printer for printing an image that comprises at least one group of highly dense shapes, the method including: (i) determining multiple intermediate schemes such as to allow printing corresponding intermediate images on an object; wherein at least one intermediate scheme comprises directing at least one interference pattern toward at least one location corresponding to at least one group of highly dense shapes; (ii) generating an array of light entities in response to an intermediate scheme; (iii) directing the array of light entities towards the object to form the intermediate image; and (iv) moving the object relative to the light entities while repeating the steps of generating and directing to expose the object with the image.The invention provides a system that includes: (i) means for determining multiple intermediate schemes such as to allow printing corresponding intermediate images on an object; wherein at least one intermediate scheme comprises directing at least one interference pattern towards at least one location corresponding to at least one group of highly dense shapes; (ii) a programmable optical radiation source for generating an array of light entities in response to an intermediate scheme; (iii) optics for directing the array of light entities towards the object to form the intermediate image; and (iv) a translator for moving the object relative to the light entities while repeating the steps of generating and directing to expose the object with the image.

    摘要翻译: 本发明提供了一种用于打印包括至少一组高密度形状的图像的方法和打印机,所述方法包括:(i)确定多个中间方案,以允许在对象上打印相应的中间图像; 其中至少一个中间方案包括将至少一个干涉图案引导至对应于至少一组高密度形状的至少一个位置; (ii)响应于中间方案产生光实体阵列; (iii)将光实体阵列引向物体以形成中间图像; 以及(iv)相对于光实体移动对象,同时重复生成并指示以图像曝光对象的步骤。 本发明提供了一种系统,其包括:(i)用于确定多个中间方案的装置,例如允许在对象上打印对应的中间图像; 其中至少一个中间方案包括将至少一个干涉图案引导到对应于至少一组高度致密形状的至少一个位置; (ii)可编程光辐射源,用于响应于中间方案产生光实体阵列; (iii)用于将光实体阵列引向物体以形成中间图像的光学器件; 以及(iv)用于相对于光实体移动物体的翻译器,同时重复生成并指示以图像曝光对象的步骤。

    Scanning microscopy
    9.
    发明授权
    Scanning microscopy 有权
    扫描显微镜

    公开(公告)号:US07684048B2

    公开(公告)日:2010-03-23

    申请号:US11559741

    申请日:2006-11-14

    IPC分类号: G01B11/02

    摘要: Apparatus for imaging a surface, including scanning optics, which are configured to scan and focus one or more traveling beams onto the surface so as to form one or more traveling spots thereon. The apparatus also includes collection optics, which are arranged to collect radiation scattered from the one or more traveling spots and to focus the radiation to form one or more image spots traveling along a line. The apparatus also has a detecting assembly, which consists of a detector which is configured to generate a signal in response to the one or more traveling image spots, and a detector entry port interposed between the collection optics and the detector, which is coincident with the line. The apparatus also includes phase and/or polarization altering elements for the traveling beams.

    摘要翻译: 用于对包括扫描光学元件在内的表面进行成像的装置,其被配置为将一个或多个行进光束扫描并聚焦到所述表面上,以便在其上形成一个或多个行进光点。 该装置还包括收集光学器件,其被布置成收集从一个或多个行进点散射的辐射并且聚焦辐射以形成沿着一行行进的一个或多个图像斑点。 该装置还具有检测组件,该检测组件由检测器构成,该检测器被配置为响应于一个或多个行进图像点产生信号,以及插入在收集光学器件和检测器之间的检测器入口,其与 线。 该装置还包括用于行进梁的相位和/或极化改变元件。

    SCANNING MICROSCOPY USING INHOMOGENEOUS POLARIZATION
    10.
    发明申请
    SCANNING MICROSCOPY USING INHOMOGENEOUS POLARIZATION 有权
    扫描显微镜使用非均匀偏振

    公开(公告)号:US20090284835A1

    公开(公告)日:2009-11-19

    申请号:US12464761

    申请日:2009-05-12

    IPC分类号: G02B27/28

    CPC分类号: G02B21/0092 G02B21/0068

    摘要: Apparatus for imaging a surface, including an acousto-optic (AO) system. The AO system includes an AO element having a radiation input surface and a radiation output surface. The element is configured to receive radio-frequency (RF) pulses and a radiation input at the radiation input surface and to generate traveling beams from the radiation output surface. The AO system also includes an inhomogeneous polarization generator, positioned relative to the AO element so that the AO system outputs traveling inhomogeneously polarized beams. The apparatus includes objective optics which are configured to focus the inhomogeneously polarized beams onto the surface so as to form respective traveling spots thereon; collection optics, which are configured to collect scattered radiation from the traveling spots and to focus the scattered radiation to form respective image spots; and a detector which is arranged to receive the respective image spots and to generate a signal in response thereto.

    摘要翻译: 用于对表面进行成像的装置,包括声光(AO)系统。 AO系统包括具有辐射输入表面和辐射输出表面的AO元件。 该元件被配置为在辐射输入表面处接收射频(RF)脉冲和辐射输入并且产生来自辐射输出表面的行进光束。 AO系统还包括相对于AO元件定位的不均匀偏振发生器,使得AO系统输出行进的非均匀偏振光束。 该装置包括被配置为将不均匀偏振光束聚焦到表面上以在其上形成相应的行进点的物镜光学元件; 收集光学器件,其被配置为从所述行进点收集散射的辐射并且聚焦所述散射的辐射以形成相应的图像斑点; 以及检测器,其被布置成接收相应的图像点并响应于此产生信号。