摘要:
As the size of the semiconductor devices decreases, the relative positional difference between a circuit at an exposure area and an alignment mark due to the aberrations and distortions of lenses and the reticle writing error can not be neglected. Images of circuit patterns having a very small size which are laminated are detected using lights having two different wavelengths. Alignment error is calculated from the relationship between the phase difference of images and the alignment error at each wavelength. The alignment error which affects the yield can be detected by directly measuring the alignment error of the circuit in the exposure area including the influence of the aberrations and distortions of lenses and the reticle writing error. Proper correction and improvement of the exposure apparatus can be achieved at early phase prior to electrical test.
摘要:
An exposure mask includes an optically transparent substrate, a device area constituted with a pattern formed on the substrate, and alignment marks formed on the substrate. Further measurement data for relative positional displacement between the device area and the alignment marks on the substrate is appended together with information for identifying the substrate to the substrate.
摘要:
A relative positional error is caused between an alignment mark and a device area on a mask due to an error inherent to the mask drawing apparatus, which causes an alignment error in the device area even when alignment upon exposure has no problem. Then, according to this invention, a relative positional error between the alignment mark and the device area on the mask is measured in an off line manner, the result of measurement is set upon exposure as a correction value to an exposure device thereby correcting the mask drawing error to reduce alignment errors in the device area.
摘要:
Pieces of working information on workloads, positions of the workloads, pieces of environmental information on cooling facilities, and positions of the cooling facilities are stored as arrangement information. The pieces of working information on the workloads are estimated, and allocation of tentative workloads is deduced for fear the pieces of working information may exceed the performances of a group of information processing devices. Tentative power consumptions and arrangement information resulting from the allocation of the tentative workloads, and tentative power consumptions and arrangement information necessary for the allocation of the tentative workloads are calculated. Tentative cooling powers required to control the cooling facilities are calculated. Allocation of the tentative workloads minimizing the sum total of the tentative power consumptions of the information processing devices and the tentative cooling powers of the cooling facilities is searched. Based on the searched allocation, the workloads are allocated to the information processing devices.
摘要:
A data processor for a display device that includes a plurality of pixels, each of which includes red, first green, blue, and second green sub-pixels, may include an input gamma processor for processing image data including red, green, and blue grayscale data into linearized image data by applying a gamma function to the image data, a first sub-pixel rendering unit for rendering the linearized image data according to layout of a plurality of sub-pixels included in the plurality of pixels using a 3×1 rendering filter to output linearized second sub-pixel data, and an output gamma processor for processing the linearized second sub-pixel data into non-linearized second sub-pixel data by applying an inverse gamma function to the linearized second sub-pixel data.
摘要:
Total power consumption of information-processing devices and power supply/cooling facilities is reduced to realize energy saving operation of information-processing system. The information-processing system includes information-processing devices, power supply facilities, cooling facilities and an operations management device. The operations management device is connected to the devices and the facilities and includes layout information constituted of locations and operating information of the devices and locations and environmental information of the facilities. Also, the operations management device obtains the power consumption of the devices, the power supply loss of the power supply facilities and the cooling power of the cooling facilities by using the layout information, and then allocates the workloads to the devices so as to reduce the total sum of power consumption, supply loss and cooling power.
摘要:
There are provided a multi-layer piezoelectric element that is driven stably for a long period of time without developing cracks in a junction between a metallized layer and a lead member or a stacked body, and an injection device and a fuel injection system provided with the same. A multi-layer piezoelectric element includes a stacked body in which piezoelectric layers and internal electrodes are laminated; a metallized layer disposed on a side surface of the stacked body, the metalized layer being electrically connected to the internal electrodes; and an external electrode member disposed on the metallized layer, with an electrically-conductive adhesive layer interposed therebetween, wherein the electrically-conductive adhesive layer has a plurality of voids configured not to open on a surface thereof which surface is in contact with the metallized layer.
摘要:
Arrangements reducing power consumption of an air conditioner and a storage device. A control method with a management server apparatus for a plurality of storage devices and an air conditioner includes calculating plural combinations of allocating the work amount to the plurality of storage devices, calculating the heating value of each storage device included in the plurality of storage devices for each of the plural combinations, calculating the quantity of heat conducted to the air conditioner, based on the heating value and positional information of the plurality of storage devices and the air conditioner, calculating the power consumption to cool the quantity of heat conducted to the air conditioner, selecting a combination included in the plural combinations based on the power consumption of the air conditioner, and issuing a move of the data stored in a first storage device to a second storage device, based on the selected combination.
摘要:
There is provided an image processing apparatus having an image segmentation unit that divides image formation into image areas in a first direction, a random number memory that stores random numbers, a reference position determination unit that determines a reference position so as to vary in a second direction perpendicular to the first direction, a pixel determination unit that determines a pixel as a target to be subjected to correction processing of pixel insertion into or pixel reduction from each of the image areas, for the each of the image areas, according to the stored random numbers and the determined reference position, among pixels in the each of the image areas, and an image width change unit that performs the correction processing on the determined pixel to change an image width of the image information in the first direction.
摘要:
A load distribution of controllers is made possible in a combination of a switch and a controller which do not have a load distribution function independently, and in a combination of the switch and the controller that do not have a compatibility in the load distribution function due to a difference of makers. Specifically, in a system which controls a data flow flowing through the network by dynamically setting a delivery route of a packet to switches in the network by the controllers such as a server, the master controller is determined to the switch while notifying a connection from the switch to the plurality of controllers, by a proxy provided between the switch and the controller, and an inquiry message from the switch is transferred only to the master controller. A route data registration message is transmitted to the proxy from the master controller in response to the inquiry message from the switch. The route data registration message is transferred to all the switches which are dealt with the notice from the proxy.