摘要:
A method of forming a low temperature-grown buffer layer having the steps of: placing a Ga2O3 substrate in a MOCVD apparatus; providing a H2 atmosphere in the MOCVD apparatus and setting a buffer layer growth condition having an atmosphere temperature of 350° C. to 550° C.; and supplying a source gas having two or more of TMG, TMA and NH3 onto the Ga2O3 substrate in the buffer layer growth condition to form the low temperature-grown buffer layer on the Ga2O3 substrate.
摘要翻译:一种形成低温生长缓冲层的方法,具有以下步骤:将Ga 2 O 3衬底放置在MOCVD装置中; 在MOCVD装置中提供H 2气氛,并设定气氛温度为350℃至550℃的缓冲层生长条件。 并在缓冲层生长条件下将具有TMG,TMA和NH3两种以上的源气体供给到Ga 2 O 3衬底上,以在Ga 2 O 3衬底上形成低温生长缓冲层。
摘要:
A method of forming a low temperature-grown buffer layer having the steps of: placing a Ga2O3 substrate in a MOCVD apparatus; providing a H2 atmosphere in the MOCVD apparatus and setting a buffer layer growth condition having an atmosphere temperature of 350° C. to 550° C.; and supplying a source gas having two or more of TMG, TMA and NH3 onto the Ga2O3 substrate in the buffer layer growth condition to form the low temperature-grown buffer layer on the Ga2O3 substrate.
摘要翻译:一种形成低温生长缓冲层的方法,其具有以下步骤:将Ga 2 N 3 O 3衬底放置在MOCVD装置中; 在MOCVD装置中提供H 2 O 2气氛,并设定气氛温度为350℃至550℃的缓冲层生长条件。 并在缓冲层生长条件下将具有TMG,TMA和NH 3的两种或多种的源气体供应到Ga 2 O 3 N 3衬底上 以在Ga 2 N 3 O 3衬底上形成低温生长的缓冲层。
摘要:
A method for producing a Group III nitride semiconductor light-emitting device includes an n-type layer, a light-emitting layer, and a p-type layer, each of the layers being formed of Group III nitride semiconductor, being sequentially deposited via a buffer layer on a textured sapphire substrate. A buried layer is formed of Group III nitride semiconductor on the buffer layer, at a temperature lower by 20° C. to 80° C. than the temperature of 1000° C. to 1200° C. when the n-type layer is deposited on the buried layer. The texture provided on the sapphire substrate may have a depth of 1 μm to 2 μm and a side surface inclined by 40° to 80°. A preventing layer may be formed of GaN at 600° C. to 1050° C. so as to cover the entire top surface of the buffer layer.
摘要:
Metal cell tanks including secondary cells respectively are connected to one another by connection members. For example, a connection member has: an insulation portion interposed between adjacent cell tanks for keeping the cell tanks electrically insulated from each other; an one-end holding portion extending from one end of the insulation portion for holding one end portion of one of the adjacent cell tanks; and an opposite-end holding portion extending from the other end of the insulation portion for holding the other end portion of the other of the adjacent cell tanks.
摘要:
A method for producing a Group III nitride semiconductor light-emitting device includes an n-type layer, a light-emitting layer, and a p-type layer, each of the layers being formed of Group III nitride semiconductor, being sequentially deposited via a buffer layer on a textured sapphire substrate. A buried layer is formed of Group III nitride semiconductor on the buffer layer, at a temperature lower by 20° C. to 80° C. than the temperature of 1000° C. to 1200° C. when the n-type layer is deposited on the buried layer. The texture provided on the sapphire substrate may have a depth of 1 μm to 2 μm and a side surface inclined by 40° to 80°. A preventing layer may be formed of GaN at 600° C. to 1050° C. so as to cover the entire top surface of the buffer layer.
摘要:
Metal cell tanks including secondary cells respectively are connected to one another by connection members. For example, a connection member has: an insulation portion interposed between adjacent cell tanks for keeping the cell tanks electrically insulated from each other; an one-end holding portion extending from one end of the insulation portion for holding one end portion of one of the adjacent cell tanks; and an opposite-end holding portion extending from the other end of the insulation portion for holding the other end portion of the other of the adjacent cell tanks.