Dry etching agent and dry etching method using the same
    3.
    发明授权
    Dry etching agent and dry etching method using the same 有权
    干蚀刻剂和干蚀刻法使用该方法

    公开(公告)号:US09093388B2

    公开(公告)日:2015-07-28

    申请号:US13576093

    申请日:2011-01-25

    摘要: A dry etching agent according to the present invention contains (A) a fluorinated propyne represented by the chemical formula: CF3C≡CX where X is H, F, Cl, Br, I, CH3, CFH2 or CF2H; and either of: (B) at least one kind of gas selected from the group consisting of O2, O3, CO, CO2, COCl2 and COF2; (C) at least one kind of gas selected from the group consisting of F2, NF3, Cl2, Br2, I2 and YFn where Y is Cl, Br or I; and n is an integer of 1 to 5; and (D) at least one kind of gas selected from the group consisting of CF4, CHF3, C2F6, C2F5H, C2F4H2, C3F8, C3F4H2, C3ClF3H and C4F8. This dry etching agent has a small environmental load and a wide process window and can be applied for high-aspect-ratio processing without special operations such as substrate excitation.

    摘要翻译: 根据本发明的干蚀刻剂包含(A)由化学式CF 3C≡CX表示的氟化丙炔,其中X为H,F,Cl,Br,I,CH 3,CFH 2或CF 2 H; 和(B)选自O 2,O 3,CO,CO 2,COCl 2和COF 2中的至少一种气体; (C)选自由F2,NF3,Cl2,Br2,I2和YFn组成的组中的至少一种气体,其中Y是Cl,Br或I; n为1〜5的整数。 和(D)选自CF4,CHF3,C2F6,C2F5H,C2F4H2,C3F8,C3F4H2,C3ClF3H和C4F8中的至少一种气体。 这种干蚀刻剂具有小的环境负荷和宽的工艺窗口,并且可以应用于高纵横比处理,而不需要诸如基板激励的特殊操作。

    Solvent Composition for Silicone Compound
    4.
    发明申请
    Solvent Composition for Silicone Compound 有权
    硅氧烷化合物的溶剂组成

    公开(公告)号:US20120107513A1

    公开(公告)日:2012-05-03

    申请号:US13378553

    申请日:2010-07-09

    CPC分类号: C07C21/18 C09D183/04

    摘要: Disclosed is a solvent composition for silicone compounds, containing 1-chloro-3,3,3-trifluoropropene, or a solvent composition for silicone compounds, containing (A) 1-chloro-3,3,3-trifluoropropene and (B) a compound made up of at least one selected from the group consisting of 1,1,2,2-tetrafluoro-1-methoxyethane, 1,1,1,3,3-pentafluorobutane, and 1,1,2,2-tetrafluoro-1-(2,2,2-trifluoroethoxy)ethane. This solvent composition has characteristics of nonflammability and low toxicity, and handling is extremely easy. Coating properties of the silicone compound become good by mixing this solvent composition and the silicone compound.

    摘要翻译: 本发明公开了含有(A)1-氯-3,3,3-三氟丙烯和(B)a)的硅氧烷化合物的含硅化合物的溶剂组合物,其含有1-氯-3,3,3-三氟丙烯或用于硅氧烷化合物的溶剂组合物 由选自1,1,2,2-四氟-1-甲氧基乙烷,1,1,1,3,3-五氟丁烷和1,1,2,2-四氟-1-甲氧基乙烷中的至少一种化合物组成的化合物, 1-(2,2,2-三氟乙氧基)乙烷。 该溶剂组合物具有不燃性和低毒性的特征,处理极为容易。 通过混合该溶剂组合物和硅氧烷化合物,硅氧烷化合物的涂层性能变好。

    Method for producing 1,1,1,3,3-pentafluoropropane

    公开(公告)号:US06316681B1

    公开(公告)日:2001-11-13

    申请号:US08982803

    申请日:1996-12-04

    IPC分类号: C07C1708

    摘要: The present invention relates to a method for producing 1,1,1,3,3-pentafluoropropane. This method includes a first step of fluorinating 1-chloro-3,3,3-trifluoropropene in a liquid phase by hydrogen fluoride in the presence of an antimony compound as a catalyst, or a second step of fluorinating 1-chloro-3,3,3-trifluoropropene in a gas phase by hydrogen fluoride in the presence of a fluorination catalyst. If the first step is taken, 1,1,1,3,3-pentafluoropropane can be produced with a high yield. If the second step is taken, 1,1,1,3,3-pentafluoropropane can continuously be easily produced. Therefore, the second step is useful for an industrial scale production thereof. According to the invention, 1-chloro-3,3,3-trifluoropropene may be produced by a method including a step of reacting 1,1,1,3,3-pentachloropropane with hydrogen fluoride in a gas phase in the presence of a fluorination catalyst. This method is useful, because yield of 1-chloro-3,3,3-trifluoropropene is high.

    Process for producing 1,3,3,3-tetrafluoropropene
    8.
    发明授权
    Process for producing 1,3,3,3-tetrafluoropropene 有权
    制备1,3,3,3-四氟丙烯的方法

    公开(公告)号:US09051231B2

    公开(公告)日:2015-06-09

    申请号:US13119658

    申请日:2009-09-24

    IPC分类号: C07C17/20 C07C17/38

    摘要: According to the first characteristic of the present invention, there is provided a production process for 1,3,3,3-tetrafluoropropene including: the first step of reacting 1,1,1,3,3-pentachloropropane with hydrogen fluoride thereby obtaining 1-chloro-3,3,3-trifluoropropene; and the second step of reacting 1-chloro-3,3,3-trifluoropropene obtained in the first step with hydrogen fluoride in a gaseous phase in the presence of a fluorination catalyst. According to the second characteristic of the present invention, there is provided a dehydration process including bringing 1,3,3,3-tetrafluoropropene containing at least water into contact with zeolite.

    摘要翻译: 根据本发明的第一特征,提供了一种1,3,3,3-四氟丙烯的制备方法,包括:使1,1,1,3,3-五氯丙烷与氟化氢反应的第一步骤,从而得到1 - 氯-3,3,3-三氟丙烯; 在氟化催化剂存在下,将第一步得到的1-氯-3,3,3-三氟丙烯与氟化氢反应的气相的第二步。 根据本发明的第二特征,提供了使至少含有水的1,3,3,3-四氟丙烯与沸石接触的脱水方法。

    Process for production of 2-chloro-3,3,3-trifluoropropene
    9.
    发明授权
    Process for production of 2-chloro-3,3,3-trifluoropropene 失效
    2-氯-3,3,3-三氟丙烯的制备方法

    公开(公告)号:US08563790B2

    公开(公告)日:2013-10-22

    申请号:US13383708

    申请日:2010-07-16

    IPC分类号: C07C19/08

    摘要: There is provided according the present invention a process for producing 2-chloro-3,3,3-trifluoropropene, comprising: hydrogenating 1,2-dichloro-3,3,3-trifluoropropene with hydrogen (H2) in the presence of a catalyst having a transition metal and a poisoning substance supported on a support. The present production process is industrially advantageous as the target 2-chloro-3,3,3-trifluoropropene can be obtained with high selectivity and high yield under moderate reaction conditions and with easy waste treatment.

    摘要翻译: 根据本发明提供了一种2-氯-3,3,3-三氟丙烯的制备方法,包括:在催化剂存在下用氢气(H 2)氢化1,2-二氯-3,3,3-三氟丙烯 具有负载在载体上的过渡金属和中毒物质。 本发明的制备方法在工业上是有利的,因为在中等反应条件下容易的废物处理可以以高选择性和高收率获得目标2-氯-3,3,3-三氟丙烯。

    Production Method Of Trans-1,3,3,3-Tetrafluoropropene
    10.
    发明申请
    Production Method Of Trans-1,3,3,3-Tetrafluoropropene 审中-公开
    反式1,3,3,3-四氟丙烯的制备方法

    公开(公告)号:US20120123172A1

    公开(公告)日:2012-05-17

    申请号:US13273985

    申请日:2011-10-14

    IPC分类号: C07C17/20

    摘要: Production of trans-1,3,3,3-tetrafluoropropene by reacting 1-chloro-3,3,3-trifluoropropene with hydrogen fluoride to obtain a reaction product A containing formed trans-1,3,3,3-tetrafluoropropene, unreacted 1-chloro-3,3,3-trifloropropene and hydrogen fluoride, and by-product cis-1,3,3,3-tetrafluoropropene, 1,1,1,3,3-pentafluoropropane and hydrogen chloride; distilling reaction product A to recover a distillation bottom product containing 1-chloro-3,3,3-trifloropropene and hydrogen fluoride and supplying recovered distillation bottom product to the reacting step; recovering hydrogen fluoride from a residue B remaining after recovery of the distillation bottom product and supplying recovered hydrogen fluoride to the reacting step; contacting a residue C remaining after recovery of hydrogen fluoride with water or aqueous sodium hydroxide solution to separate hydrogen chloride; dehydrating a residue D remaining after separation of hydrogen chloride; and distilling a residue E remaining after the dehydration to obtain trans-1,3,3,3-tetrafluoropropene. The method reuses unreacted reactants and produces the target compound efficiently.

    摘要翻译: 通过使1-氯-3,3,3-三氟丙烯与氟化氢反应制备反式-1,3,3,3-四氟丙烯,得到含有形成的反式-1,3,3,3-四氟丙烯的反应产物A,未反应 1-氯-3,3,3-三氟丙烯和氟化氢,以及副产物顺式-1,3,3,3-四氟丙烯,1,1,1,3,3-五氟丙烷和氯化氢; 蒸馏反应产物A以回收含有1-氯-3,3,3-三氯丙烯和氟化氢的蒸馏塔底产物,并将回收的蒸馏塔底产物供应至反应步骤; 从蒸馏塔底产物回收剩余的残渣B回收氟化氢,并将回收的氟化氢供应到反应步骤; 使氟化氢与水或氢氧化钠水溶液回收后残留的C残留物与氯化氢分离; 使氯化氢分离后剩余的残渣D脱水; 并蒸馏出脱水后残留的E,得到反式-1,3,3,3-四氟丙烯。 该方法重新使用未反应的反应物并有效地产生目标化合物。