Method for Fabricating Semiconductor Device
    2.
    发明申请
    Method for Fabricating Semiconductor Device 审中-公开
    半导体器件制造方法

    公开(公告)号:US20110306208A1

    公开(公告)日:2011-12-15

    申请号:US13157393

    申请日:2011-06-10

    IPC分类号: H01L21/28

    CPC分类号: H01L28/91

    摘要: Methods for forming a mold for a storage electrode in a semiconductor device include forming an interlayer dielectric layer including a contact plug on a substrate. A first mold dielectric layer is formed of a first material on the interlayer dielectric layer. A second mold dielectric layer is formed of a second material on the first mold dielectric layer. The second material has a different etch selectivity than the first material. A first opening is formed that penetrates the first and second mold dielectric layers. The first opening is dry etched to define a second opening having a larger width in the first mold dielectric layer than in the second mold dielectric layer based on the different etch selectivity of the first and second mold dielectric layers to define the mold for the storage electrode.

    摘要翻译: 在半导体器件中形成用于存储电极的模具的方法包括在衬底上形成包括接触插塞的层间介电层。 第一模具电介质层由层间电介质层上的第一材料形成。 第二模具电介质层由第一模具电介质层上的第二材料形成。 第二种材料具有与第一种材料不同的蚀刻选择性。 形成穿过第一和第二模具电介质层的第一开口。 基于第一和第二模具电介质层的不同蚀刻选择性来限定用于存储电极的模具,第一开口被干蚀刻以限定在第一模具电介质层中具有比在第二模具电介质层中更大的宽度的第二开口 。

    METHODS OF FORMING AN ISOLATION LAYER AND METHODS OF MANUFACTURING SEMICONDUCTOR DEVICES HAVING AN ISOLATION LAYER
    3.
    发明申请
    METHODS OF FORMING AN ISOLATION LAYER AND METHODS OF MANUFACTURING SEMICONDUCTOR DEVICES HAVING AN ISOLATION LAYER 失效
    形成隔离层的方法和制造具有隔离层的半导体器件的方法

    公开(公告)号:US20110281415A1

    公开(公告)日:2011-11-17

    申请号:US13109527

    申请日:2011-05-17

    IPC分类号: H01L21/31

    摘要: In a method of forming an isolation layer, first and second trenches are formed on a substrate. The first and the second trenches have first and second widths, respectively, and the second width is greater than the first width. A second isolation layer pattern partially fills the second trench. A first isolation layer pattern and the third isolation layer pattern are formed. The first isolation layer pattern fills the first trench, and the third isolation layer pattern is formed on the second isolation layer pattern and fills a remaining portion of the second trench.

    摘要翻译: 在形成隔离层的方法中,在衬底上形成第一和第二沟槽。 第一和第二沟槽分别具有第一宽度和第二宽度,第二宽度大于第一宽度。 第二隔离层图案部分地填充第二沟槽。 形成第一隔离层图案和第三隔离层图案。 第一隔离层图案填充第一沟槽,并且第三隔离层图案形成在第二隔离层图案上并且填充第二沟槽的剩余部分。

    Methods of forming an isolation layer and methods of manufacturing semiconductor devices having an isolation layer
    4.
    发明授权
    Methods of forming an isolation layer and methods of manufacturing semiconductor devices having an isolation layer 失效
    形成隔离层的方法和制造具有隔离层的半导体器件的方法

    公开(公告)号:US08524569B2

    公开(公告)日:2013-09-03

    申请号:US13109527

    申请日:2011-05-17

    摘要: In a method of forming an isolation layer, first and second trenches are formed on a substrate. The first and the second trenches have first and second widths, respectively, and the second width is greater than the first width. A second isolation layer pattern partially fills the second trench. A first isolation layer pattern and the third isolation layer pattern are formed. The first isolation layer pattern fills the first trench, and the third isolation layer pattern is formed on the second isolation layer pattern and fills a remaining portion of the second trench.

    摘要翻译: 在形成隔离层的方法中,在衬底上形成第一和第二沟槽。 第一和第二沟槽分别具有第一宽度和第二宽度,第二宽度大于第一宽度。 第二隔离层图案部分地填充第二沟槽。 形成第一隔离层图案和第三隔离层图案。 第一隔离层图案填充第一沟槽,并且第三隔离层图案形成在第二隔离层图案上并且填充第二沟槽的剩余部分。

    Apparatus for improving uniformity of luminosity in flat panel display
    5.
    发明申请
    Apparatus for improving uniformity of luminosity in flat panel display 有权
    用于提高平板显示器的亮度均匀性的装置

    公开(公告)号:US20050035718A1

    公开(公告)日:2005-02-17

    申请号:US10916552

    申请日:2004-08-12

    摘要: A flat panel display includes a plurality of pixel anode electrodes arranged in a display area. A plurality of anode electrode lines for supplying a driving current to the pixel anode electrodes are connected at one end to pixel anode electrodes, and at the other to one or more current supply lines of a current supply line assembly. The current supply lines, in turn, are connected to first and second terminals to which the driving current is applied. The current supply line assembly also includes an impedance adjusting means for adjusting impedance of at least one of the first and second supply lines. The impedance adjusting means may be configured as a third separate supply line connected to at least one of the first and second supply lines, and the impedance of the current supply line is adjusted by varying the length or width of the third current supply line.

    摘要翻译: 平板显示器包括布置在显示区域中的多个像素阳极电极。 用于向像素阳极电极提供驱动电流的多个阳极电极线在一端连接到像素阳极电极,另一端连接到电流供应线组件的一个或多个电源线。 电流供应线又连接到施加驱动电流的第一和第二端子。 当前的电源线组件还包括用于调节第一和第二电源线中的至少一个的阻抗的阻抗调节装置。 阻抗调节装置可以被配置为连接到第一和第二电源线中的至少一个的第三独立电源线,并且通过改变第三电流供应线的长度或宽度来调整电流供应线的阻抗。

    Thin-film capacitor, laminated structure and methods of manufacturing the same
    7.
    发明申请
    Thin-film capacitor, laminated structure and methods of manufacturing the same 审中-公开
    薄膜电容器,层压结构及其制造方法

    公开(公告)号:US20080307620A1

    公开(公告)日:2008-12-18

    申请号:US12213366

    申请日:2008-06-18

    IPC分类号: H01G4/008 H01G9/04

    摘要: Disclosed are an embedded capacitor and a printed circuit board including the same that can minimize the oxidization of a metal layer. A thin-film capacitor can include a first metal electrode film; a barrier layer, formed on the first metal electrode film to include a conductive oxide; a dielectric film, formed on the barrier layer; and a second metal electrode film, formed on the dielectric film. With the present invention, the outstanding characteristic of a ferroelectric thin film can be provided by minimizing the oxidization of a copper film in the heat treatment after forming the ferroelectric thin film on the copper film.

    摘要翻译: 公开了一种嵌入式电容器和包括能够最小化金属层的氧化的印刷电​​路板。 薄膜电容器可以包括第一金属电极膜; 阻挡层,形成在所述第一金属电极膜上,以包括导电氧化物; 形成在阻挡层上的电介质膜; 以及形成在电介质膜上的第二金属电极膜。 通过本发明,可以通过在铜膜上形成铁电薄膜后的热处理中使铜膜的氧化最小化来提供铁电薄膜的突出特性。

    Apparatus for improving uniformity of luminosity in flat panel display
    9.
    发明授权
    Apparatus for improving uniformity of luminosity in flat panel display 有权
    用于提高平板显示器的亮度均匀性的装置

    公开(公告)号:US07580034B2

    公开(公告)日:2009-08-25

    申请号:US10916552

    申请日:2004-08-12

    IPC分类号: G06F3/038

    摘要: A flat panel display includes a plurality of pixel anode electrodes arranged in a display area. A plurality of anode electrode lines for supplying a driving current to the pixel anode electrodes are connected at one end to pixel anode electrodes, and at the other to one or more current supply lines of a current supply line assembly. The current supply lines, in turn, are connected to first and second terminals to which the driving current is applied. The current supply line assembly also includes an impedance adjusting means for adjusting impedance of at least one of the first and second supply lines. The impedance adjusting means may be configured as a third separate supply line connected to at least one of the first and second supply lines, and the impedance of the current supply line is adjusted by varying the length or width of the third current supply line.

    摘要翻译: 平板显示器包括布置在显示区域中的多个像素阳极电极。 用于向像素阳极电极提供驱动电流的多个阳极电极线在一端连接到像素阳极电极,另一端连接到电流供应线组件的一个或多个电源线。 电流供应线又连接到施加驱动电流的第一和第二端子。 当前的电源线组件还包括用于调节第一和第二电源线中的至少一个的阻抗的阻抗调节装置。 阻抗调节装置可以被配置为连接到第一和第二电源线中的至少一个的第三独立电源线,并且通过改变第三电流供应线的长度或宽度来调整电流供应线的阻抗。