摘要:
In a supercritical fluid method a supercritical fluid is supplied into a process chamber. The supercritical fluid is discharged from the process chamber as a supercritical fluid process proceeds. A concentration of a target material included in the supercritical fluid discharged from the process chamber is detected during the supercritical fluid process. An end point of the supercritical fluid process may be determined based on a detected concentration of the target material.
摘要:
Methods for forming a mold for a storage electrode in a semiconductor device include forming an interlayer dielectric layer including a contact plug on a substrate. A first mold dielectric layer is formed of a first material on the interlayer dielectric layer. A second mold dielectric layer is formed of a second material on the first mold dielectric layer. The second material has a different etch selectivity than the first material. A first opening is formed that penetrates the first and second mold dielectric layers. The first opening is dry etched to define a second opening having a larger width in the first mold dielectric layer than in the second mold dielectric layer based on the different etch selectivity of the first and second mold dielectric layers to define the mold for the storage electrode.
摘要:
In a method of forming an isolation layer, first and second trenches are formed on a substrate. The first and the second trenches have first and second widths, respectively, and the second width is greater than the first width. A second isolation layer pattern partially fills the second trench. A first isolation layer pattern and the third isolation layer pattern are formed. The first isolation layer pattern fills the first trench, and the third isolation layer pattern is formed on the second isolation layer pattern and fills a remaining portion of the second trench.
摘要:
In a method of forming an isolation layer, first and second trenches are formed on a substrate. The first and the second trenches have first and second widths, respectively, and the second width is greater than the first width. A second isolation layer pattern partially fills the second trench. A first isolation layer pattern and the third isolation layer pattern are formed. The first isolation layer pattern fills the first trench, and the third isolation layer pattern is formed on the second isolation layer pattern and fills a remaining portion of the second trench.
摘要:
A flat panel display includes a plurality of pixel anode electrodes arranged in a display area. A plurality of anode electrode lines for supplying a driving current to the pixel anode electrodes are connected at one end to pixel anode electrodes, and at the other to one or more current supply lines of a current supply line assembly. The current supply lines, in turn, are connected to first and second terminals to which the driving current is applied. The current supply line assembly also includes an impedance adjusting means for adjusting impedance of at least one of the first and second supply lines. The impedance adjusting means may be configured as a third separate supply line connected to at least one of the first and second supply lines, and the impedance of the current supply line is adjusted by varying the length or width of the third current supply line.
摘要:
Methods, a Base Station (BS), and a User Equipment (UE) in a wireless communication system for transmitting and receiving control information are provided. The method for transmitting control information by a BS in a wireless communication system includes receiving information related to a signal transmitted by a second BS that the second BS which is a neighboring BS of the first BS, determining whether a second UE using an identical resource to that used by a first UE included in a cell of the first BS exists within a cell of the second BS based on the received information, when the second UE exists, generating control information for controlling a signal transmitted to the second UE by the second BS based on the received information, and transmitting the generated control information to the first UE through a control channel.
摘要:
Disclosed are an embedded capacitor and a printed circuit board including the same that can minimize the oxidization of a metal layer. A thin-film capacitor can include a first metal electrode film; a barrier layer, formed on the first metal electrode film to include a conductive oxide; a dielectric film, formed on the barrier layer; and a second metal electrode film, formed on the dielectric film. With the present invention, the outstanding characteristic of a ferroelectric thin film can be provided by minimizing the oxidization of a copper film in the heat treatment after forming the ferroelectric thin film on the copper film.
摘要:
Methods, a Base Station (BS), and a User Equipment (UE) in a wireless communication system for transmitting and receiving a signal are provided. The method for transmitting a signal by a first BS in a wireless communication system includes receiving control information including information related to transmission of a Reference Signal (RS) by one or more second BSs, from the one or more second BSs which are neighboring BSs of the first BS, and transmitting signals to a UE based on information as to a second resource identified in the received control information, wherein the second resource corresponds to an identical resource to that used by the one or more second BSs for transmitting the RS.
摘要:
A flat panel display includes a plurality of pixel anode electrodes arranged in a display area. A plurality of anode electrode lines for supplying a driving current to the pixel anode electrodes are connected at one end to pixel anode electrodes, and at the other to one or more current supply lines of a current supply line assembly. The current supply lines, in turn, are connected to first and second terminals to which the driving current is applied. The current supply line assembly also includes an impedance adjusting means for adjusting impedance of at least one of the first and second supply lines. The impedance adjusting means may be configured as a third separate supply line connected to at least one of the first and second supply lines, and the impedance of the current supply line is adjusted by varying the length or width of the third current supply line.
摘要:
An image sensor package is provided. The image sensor package may include a semiconductor substrate, an image sensor stacked over an upper surface of the semiconductor substrate, a pad formed on a lower surface of the semiconductor substrate and electrically connected with the image sensor, and a passive component formed by a thin film process on a lower surface of the semiconductor substrate and electrically connected with the pad.