利索-全球专利检索

  1. 登录
  2. 注册

搜索结果

99 条记录 (耗时 0.028 秒)

    Method for using apparatus configured to form germanium-containing film
    1.
    发明授权
    Method for using apparatus configured to form germanium-containing film 有权
    使用配置成形成含锗膜的装置的方法

    公开(公告)号：US08518488B2

    公开(公告)日：2013-08-27

    申请号：US12707193

    申请日：2010-02-17

    申请人： Yoshikazu Furusawa ,  Mitsuhiro Okada

    发明人： Yoshikazu Furusawa ,  Mitsuhiro Okada

    IPC分类号： C23C16/00 ,  H01L21/205

    CPC分类号： C23C16/4405 ,  C23C16/24 ,  C23C16/28 ,  Y02C20/30 ,  Y02P70/605

    摘要： A method for using an apparatus configured to form a germanium-containing film includes performing a first film formation process for forming a first product film containing germanium by CVD on a product target object placed inside a reaction container, a first cleaning process for etching the film formation by-product, a second cleaning process for removing residual germanium from inside the reaction container, and a second film formation process for forming a second product film containing no germanium by CVD on a product target object placed inside the reaction container, in this order. The second cleaning process is performed by exhausting gas from inside the reaction container with no product target object placed therein, supplying a second cleaning gas containing an oxidizing gas and hydrogen gas into the reaction container, and heating an interior of the reaction container thereby activating the second cleaning gas.

    摘要翻译： 使用被配置为形成含锗膜的装置的方法包括：在反应容器内部的产品目标物体上进行用于通过CVD形成含有锗的第一产品膜的第一成膜工艺，用于蚀刻该膜的第一清洁工艺 形成副产物，用于从反应容器内部除去残留的锗的第二清洗方法，以及第二成膜方法，用于在反应容器内放置的产品目标物体上通过CVD形成不含锗的第二产品膜，按顺序 。 第二清洗处理是通过从反应容器内部排出不产生目标物的气体，向反应容器供给含有氧化性气体和氢气的第二清洗气体，加热反应容器的内部，从而使 第二次清洗气体。

    METHOD FOR USING APPARATUS CONFIGURED TO FORM GERMANIUM-CONTAINING FILM
    2.
    发明申请
    METHOD FOR USING APPARATUS CONFIGURED TO FORM GERMANIUM-CONTAINING FILM 有权
    使用配置形成含锗片的设备的方法

    公开(公告)号：US20100210094A1

    公开(公告)日：2010-08-19

    申请号：US12707193

    申请日：2010-02-17

    申请人： Yoshikazu FURUSAWA ,  Mitsuhiro Okada

    发明人： Yoshikazu FURUSAWA ,  Mitsuhiro Okada

    IPC分类号： H01L21/205

    CPC分类号： C23C16/4405 ,  C23C16/24 ,  C23C16/28 ,  Y02C20/30 ,  Y02P70/605

    摘要： A method for using an apparatus configured to form a germanium-containing film includes performing a first film formation process for forming a first product film containing germanium by CVD on a product target object placed inside a reaction container, a first cleaning process for etching the film formation by-product, a second cleaning process for removing residual germanium from inside the reaction container, and a second film formation process for forming a second product film containing no germanium by CVD on a product target object placed inside the reaction container, in this order. The second cleaning process is performed by exhausting gas from inside the reaction container with no product target object placed therein, supplying a second cleaning gas containing an oxidizing gas and hydrogen gas into the reaction container, and heating an interior of the reaction container thereby activating the second cleaning gas.

    摘要翻译： 使用被配置为形成含锗膜的装置的方法包括：在反应容器内部的产品目标物体上进行用于通过CVD形成含有锗的第一产品膜的第一成膜工艺，用于蚀刻该膜的第一清洁工艺 形成副产物，用于从反应容器内部除去残留的锗的第二清洗方法，以及第二成膜方法，用于在反应容器内放置的产品目标物体上通过CVD形成不含锗的第二产品膜，按顺序 。 第二清洗处理是通过从反应容器内部排出不产生目标物的气体，向反应容器供给含有氧化性气体和氢气的第二清洗气体，加热反应容器的内部，从而使 第二次清洗气体。

    Processing method for forming structure including amorphous carbon film
    6.
    发明授权
    Processing method for forming structure including amorphous carbon film 有权
    用于形成包括无定形碳膜的结构的加工方法

    公开(公告)号：US08652973B2

    公开(公告)日：2014-02-18

    申请号：US13485424

    申请日：2012-05-31

    申请人： Mitsuhiro Okada ,  Yukio Tojo

    发明人： Mitsuhiro Okada ,  Yukio Tojo

    IPC分类号： H01L21/31 ,  H01L21/469

    CPC分类号： H01L21/3146 ,  C23C16/0209 ,  C23C16/0272 ,  C23C16/26 ,  H01L21/02115 ,  H01L21/02271 ,  H01L21/02304 ,  H01L21/02312

    摘要： A processing method for forming a structure including an amorphous carbon film includes performing a preliminary treatment of removing water from a surface of the underlying layer by heating the inside of the reaction chamber at a preliminary treatment temperature of 800 to 950° C. and supplying a preliminary treatment gas selected from the group consisting of nitrogen gas and ammonia gas into the reaction chamber while exhausting gas from inside the reaction chamber; and, then performing main CVD of forming an amorphous carbon film on the underlying layer by heating the inside of the reaction chamber at a main process temperature and supplying a hydrocarbon gas into the reaction chamber while exhausting gas from inside the reaction chamber.

    摘要翻译： 用于形成包括非晶碳膜的结构的加工方法包括通过在800-950℃的预处理温度下加热反应室的内部，进行从下层的表面除去水的预处理， 在从反应室内排出气体的同时，从氮气和氨气中选出的预处理气体进入反应室; 然后通过在主处理温度下加热反应室的内部并在从反应室内排出气体的同时将烃气体供给到反应室中，进行下层形成非晶质碳膜的主要CVD。

    DRIVING APPARATUS FOR OPENING AND CLOSING BODY FOR VEHICLE
    7.
    发明申请
    DRIVING APPARATUS FOR OPENING AND CLOSING BODY FOR VEHICLE 有权
    用于车辆开启和关闭机构的驾驶装置

    公开(公告)号：US20130160581A1

    公开(公告)日：2013-06-27

    申请号：US13702326

    申请日：2011-06-03

    申请人： Mitsuhiro Okada ,  Ryuichi Nakajima ,  Tatsuyuki Saito ,  Zentaro Yamaguchi

    发明人： Mitsuhiro Okada ,  Ryuichi Nakajima ,  Tatsuyuki Saito ,  Zentaro Yamaguchi

    IPC分类号： B60J5/04 ,  E05F15/14

    CPC分类号： B60J5/047 ,  E05F15/145 ,  E05F15/146 ,  E05F15/643 ,  E05F15/646 ,  E05Y2900/531 ,  H02K1/2733 ,  H02K1/30 ,  H02K5/24 ,  H02K7/1004 ,  H02K7/116

    摘要： A hypocycloid reducer 70 for reducing rotation of a flat motor 60 to output the speed-reduced rotation to a drum is provided between the drum and the flat motor 60, a rotor shalt member 65 which is rotated with the same rotation number as the flat motor 60 is axially aligned with the drum is provided on the same side as the flat motor 60. An output rotation body 74 for outputting the speed-reduced rotation is axially aligned with the drum and provided on the same side as the drum. Since the rotor shaft member 65 and the output rotation body 74 are axially aligned with the drum, turning force can be transmitted bi-directionally between the rotor shaft member 65 and the output rotation body 74. Therefore, it is possible to eliminate an electromagnetic clutch to reduce the driving apparatus in size and weight, and since wires and control logic of the electromagnetic clutch are not needed for the driving apparatus, the driving apparatus can be reduced in production cost.

    摘要翻译： 在鼓和平面电动机60之间设置有用于减小平面电动机60的旋转以将减速旋转输出到鼓的低音圈减速器70，以与平面电动机相同的转数旋转的转子轴部件65 60与滚筒轴向对齐设置在与平坦马达60相同的一侧上。用于输出减速旋转的输出旋转体74与滚筒轴向对齐并设置在与滚筒相同的一侧。 由于转子轴构件65和输出旋转体74与滚筒轴向对准，因此转动力可以在转子轴构件65和输出旋转体74之间双向传递。因此，可以消除电磁离合器 以减小驱动装置的尺寸和重量，并且由于驱动装置不需要电磁离合器的电线和控制逻辑，所以可以降低驱动装置的生产成本。

    IMAGE CODING APPARATUS
    9.
    发明申请
    IMAGE CODING APPARATUS 有权
    图像编码设备

    公开(公告)号：US20110243468A1

    公开(公告)日：2011-10-06

    申请号：US12952875

    申请日：2010-11-23

    申请人： Yusuke Yatabe ,  Hironori Komi ,  Mitsuhiro Okada ,  Tomoyuki Myojin ,  Hiroki Mizosoe

    发明人： Yusuke Yatabe ,  Hironori Komi ,  Mitsuhiro Okada ,  Tomoyuki Myojin ,  Hiroki Mizosoe

    IPC分类号： G06K9/36

    CPC分类号： H04N19/895 ,  H04N19/107 ,  H04N19/174 ,  H04N19/61

    摘要： A refresh area is taken advantage of when a series of images are coded using Intra-frame coding and Inter-frame coding, a partial area of an image being forcefully Intra-frame coded (Intra MBs) in the refresh area. As the prediction mode for prediction of the Intra MBs inside the refresh area, a prediction mode is selected where the prediction is executable based on only the image that exists inside the refresh area.

    摘要翻译： 当使用帧内编码和帧间编码对一系列图像进行编码时，利用刷新区域，图像的局部区域在刷新区域中强制地进行帧内编码（帧内MB）。 作为用于预测刷新区域内的MB内的预测模式，选择仅基于存在于刷新区域内的图像进行预测的预测模式。

    MICRO MECHANICAL RESONATOR
    10.
    发明申请
    MICRO MECHANICAL RESONATOR 审中-公开
    微机械谐振器

    公开(公告)号：US20100327993A1

    公开(公告)日：2010-12-30

    申请号：US12918236

    申请日：2009-02-16

    申请人： Akimasa Tamano ,  Mitsuhiro Okada ,  Kenichiro Suzuki

    发明人： Akimasa Tamano ,  Mitsuhiro Okada ,  Kenichiro Suzuki

    IPC分类号： H03H9/125

    CPC分类号： H03H9/2436 ,  H03H3/0072 ,  H03H2009/02519

    摘要： A micro mechanical resonator includes a high dielectric substrate, and a torsional vibrator having one end that is a fixed end fixed to high dielectric substrate, and having the other end that is a free end. The torsional vibrator has a substantially circular plate-like shape, has a lower surface serving as the fixed end fixed to the substrate, and has an upper surface serving as the free end that is not fixed. The torsional vibrator torsionally vibrates relative to an axis (torsional vibration axis) connecting the center of the circle of the end surface of the fixed end to the center of the circle of the end surface of the free end. In this way, a micro mechanical resonator can be implemented which can be manufactured readily and achieves a high Q factor.

    摘要翻译： 微机械谐振器包括高电介质基片和扭转振动器，其一端是固定在高介电基片上的固定端，另一端是自由端。 扭转振动器具有大致圆形的板状形状，具有固定在基板上的固定端部的下表面，并且具有作为未固定的自由端的上表面。 扭转振动器相对于将固定端的端面的圆的中心与自由端的端面的圆的中心连接的轴（扭转振动轴）扭转振动。 以这种方式，可以实现可以容易地制造并实现高Q因子的微机械谐振器。