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1.发明授权Specimen or substrate cutting method using focused charged particle beam and secondary ion spectroscopic analysis method utilizing the cutting method 失效使用聚焦带电粒子束的样品或基板切割方法和利用切割方法的二次离子光谱分析方法
公开(公告)号：US4939364A
公开(公告)日：1990-07-03
申请号：US253558
申请日：1988-10-05
IPC分类号： H01J37/08 , C23F4/00 , G01Q30/10 , H01J37/305 , H01L21/30 , H01L21/302 , H01L21/3065
CPC分类号： H01J37/3056
摘要： A specimen or substrate cutting method of cutting or processing a predetermined portion of a specimen or substrate in a direction of depth thereof by generating a focused charged particle beam from a particle beam source and irradiating the predetermined portion of the specimen or substrate with the focused charged particle beam is disclosed in which a particle species of the charged particle beam is selected such that each of the melting point of the particle species itself and the melting point of an alloy or compound of the particle species and constituent atoms of the specimen or substrate is not lower than 3/2 times of the temperature of the specimen or substrate in units of absolute temperature. A secondary ion mass-spectroscopic analysis method is also disclosed in which the charged particle beam is used as a probe to mass-analyze secondary charged ion successively generated from the cut portion of the specimen or substrate.
摘要翻译： 一种样品或基材切割方法，其通过从粒子束源产生聚焦的带电粒子束来在其深度方向上切割或加工样品或基底的预定部分，并用聚焦的带电量照射样品或基底的预定部分 公开了粒子束，其中选择带电粒子束的粒子种类，使得颗粒物质本身的熔点和样品或基底的颗粒物质的合金或化合物的熔点和成分原子的熔点为 不低于样品或基材温度的绝对温度的3/2倍。 还公开了二次离子质谱分析方法，其中使用带电粒子束作为探针，对从样品或基底的切割部分连续产生的二次带电离子进行质量分析。
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公开(公告)号：US5532494A
公开(公告)日：1996-07-02
申请号：US222945
申请日：1994-04-05
申请人： Yoshimi Kawanami , Tsuyoshi Ohnishi
发明人： Yoshimi Kawanami , Tsuyoshi Ohnishi
IPC分类号： H01J37/22 , G01N23/22 , G01Q10/00 , G01Q30/04 , G01Q30/20 , H01J37/28 , H01J37/30 , H01J37/305 , G01N23/225 , H01J37/252
CPC分类号： G01N23/22 , H01J37/3005 , B82Y35/00 , H01J2237/22 , H01J2237/31742
摘要： A treatment and observation apparatus using a scanning probe observes a desired area of a sample, forms a first image, magnifies a part of the area to be observed of the sample to observe it, forms a second image, and relates addresses of pixels constituting the first image and addresses of pixels constituting the second image to absolute addresses on the sample. The pixels constituting the images correspond to the addresses on the sample, respectively, and accordingly the second image can be used to designate the area to be treated with the resolution of the second image. In another embodiment, a desired area of the sample is observed with the maximum magnification and its image data are stored. The image data are compressed and displayed on a display screen of the observed area. The stored image data are read out freely with reference to the display picture to form a display picture for designating the area to be treated.
摘要翻译： 使用扫描探针的处理和观察装置观察样品的期望区域，形成第一图像，放大要观察的样品的观察区域的一部分以观察它，形成第二图像，并且涉及构成 构成第二图像的像素的第一图像和地址到样本上的绝对地址。 构成图像的像素分别对应于样本上的地址，因此第二图像可以用于以第二图像的分辨率指定待处理的区域。 在另一个实施例中，以最大放大率观察样品的期望面积并存储其图像数据。 图像数据被压缩并显示在观察区域的显示屏幕上。 存储的图像数据参照显示图像自由地读出，以形成用于指定待处理区域的显示图像。
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公开(公告)号：US4936968A
公开(公告)日：1990-06-26
申请号：US324657
申请日：1989-03-17
IPC分类号： H01J37/305 , H01J37/317 , H01L21/302 , H01L21/3065
CPC分类号： H01J37/3056
摘要： In an ion-beam machining method and apparatus of effecting sputtering by deflecting a focused ion beam and scanning it on a material surface, the relationship between the diameter d of the beam on the material surface and the height h of a stepped portion formed by each beam scan is changed from h.gtoreq.d to h
摘要翻译： 在通过使聚焦离子束偏转并将其扫描在材料表面上来实现溅射的离子束加工方法和装置中，材料表面上的束的直径d与由每个形成的台阶部分的高度h之间的关系 根据正在形成的孔的深度的增加，光束扫描从h> / = d变为h << d，从而控制再次沉积在孔的侧壁上的溅射粒子的数量。 该装置包括用于控制离子束偏转器和消隐电极的偏转控制器，以便改变上述d和h之间的关系。
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公开(公告)号：US5120925A
公开(公告)日：1992-06-09
申请号：US519402
申请日：1990-05-04
IPC分类号： B23K15/00 , B23K26/00 , B23P21/00 , G03F1/72 , G03F1/74 , H01J37/317 , H01L21/00 , H01L21/302 , H01L21/82 , H01L25/04 , H01L25/16 , H01L25/18 , H01L27/01 , H01L41/09 , H05K13/04
CPC分类号： H01L21/67138 , H01L24/24 , H05K13/0486 , H01L2924/12042 , H01L2924/14
摘要： A method for device transplantation includes the conveyance of a microminiature device, which has been premanufactured, to a desired place located on a sample, observation and fabrication of the new device with a focused beam, and repair of passive elements or active elements located on the sample. Additionally, the new microminiature devices may be transplanted based on the observed results.
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公开(公告)号：US5065034A
公开(公告)日：1991-11-12
申请号：US517313
申请日：1990-05-01
CPC分类号： H01J37/09 , H01J2237/0455 , H01J2237/0458
摘要： A charged particle beam apparatus is provided with an aperture device which includes a plurality of slit plates. Each of the slit plates includes a plurality of slits having different widths. The slit plates are superimposed in a direction of the axis of a charged particle beam so that the corresponding slits in the slit plates overlap to define an aperture which controls a beam current.
摘要翻译： 带电粒子束装置设置有包括多个狭缝板的孔装置。 每个狭缝板包括具有不同宽度的多个狭缝。 狭缝板在带电粒子束的轴线的方向上重叠，使得狭缝板中的相应狭缝重叠以限定控制束流的孔。
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公开(公告)号：US20120199758A1
公开(公告)日：2012-08-09
申请号：US13501561
申请日：2010-10-12
申请人： Yoshimi Kawanami , Tohru Ishitani
发明人： Yoshimi Kawanami , Tohru Ishitani
CPC分类号： H01J37/08 , H01J27/26 , H01J37/3056 , H01J2237/002 , H01J2237/006 , H01J2237/0807
摘要： Provided is a gas field ionization ion source capable of emitting heavy ions with high brightness which are suitable for processing a sample. The gas field ionization ion source according to the present invention includes a temperature controller individually controlling the temperature of the tip end of an emitter electrode (1) and the temperature of a gas injection port part (3) of a gas supply unit.
摘要翻译： 提供能够发出适合于处理样品的高亮度的重离子的气体电离离子源。 根据本发明的气体电离离子源包括温度控制器，其分别控制发射极电极（1）的末端的温度和气体供给单元的气体注入口部分（3）的温度。
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公开(公告)号：US20080309237A1
公开(公告)日：2008-12-18
申请号：US12192953
申请日：2008-08-15
申请人： Nobuyuki HORI , Yoshimi Kawanami , Atsuo Ohsawa , Fumihiro Namiki
发明人： Nobuyuki HORI , Yoshimi Kawanami , Atsuo Ohsawa , Fumihiro Namiki
IPC分类号： H01J17/49
CPC分类号： H05K7/20972 , G09G3/2944 , G09G2330/021 , G09G2330/045 , G09G2360/16
摘要： A functional sheet is brought into intimate contact with a front surface of a plasma display panel, and the functional sheet has a structure in which heat diffusion is superior to heat insulation between the plasma display panel and outside air. In addition, a display device includes a controller for controlling a drive voltage pulse train so that power consumption in a unit area in a light emission region within the screen is limited under a set value when one image is displayed.
摘要翻译： 使功能片与等离子体显示面板的前表面紧密接触，并且功能片具有散热优于等离子体显示面板和外部空气之间的隔热的结构。 此外，显示装置包括控制驱动电压脉冲序列的控制器，使得当显示一个图像时，屏幕内的发光区域中的单位区域中的功率消耗被限制在设定值之下。
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公开(公告)号：US20080106200A1
公开(公告)日：2008-05-08
申请号：US12000780
申请日：2007-12-17
申请人： Nobuyuki Hori , Yoshimi Kawanami , Atsuo Ohsawa , Fumihiro Namiki
发明人： Nobuyuki Hori , Yoshimi Kawanami , Atsuo Ohsawa , Fumihiro Namiki
IPC分类号： H01J17/49
CPC分类号： H01J11/44 , H01J11/34 , H01J2211/444 , H01J2211/446 , H01J2329/869 , H01J2329/892
摘要： A display panel device includes a front sheet that is glued on a front face of a plasma display panel. The front sheet includes a mesh made of a light shield member that has a blackened front surface and a plane size larger than a screen. A length between diagonal lattice points of the mesh is shorter than a cell pitch that is longer one of the cell pitches in the vertical direction and the horizontal direction of the screen. An arrangement direction of the mesh is inclined with respect to an arrangement direction of the cells in the screen.
摘要翻译： 显示面板装置包括胶合在等离子体显示面板的正面上的前片。 前片包括由遮光构件制成的网，其具有变黑的前表面和大于屏幕的平面尺寸。 网格的对角网格点之间的长度短于在屏幕的垂直方向和水平方向上的单元间距之一更长的单元间距。 网格的布置方向相对于屏幕中的单元的布置方向倾斜。
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公开(公告)号：US20080055833A1
公开(公告)日：2008-03-06
申请号：US11846545
申请日：2007-08-29
申请人： Nobuyuki Hori , Yoshimi Kawanami
发明人： Nobuyuki Hori , Yoshimi Kawanami
摘要： A display panel module includes a display panel and a function film adhered onto the front surface of the display panel. The function film includes at least one transparent substrate and an adhesive layer which adheres the display panel and the function film together. A thickness of the at least one transparent substrate and a thickness of the adhesive layer have a predetermined relation so as to substantially prevent occurrence of a concave portion with a depth greater than 3 um on the front surface of the function film, wherein a scratch resistance of the function film is improved.
摘要翻译： 显示面板模块包括显示面板和附着在显示面板的前表面上的功能膜。 功能膜包括至少一个透明基板和将显示面板和功能膜粘合在一起的粘合剂层。 所述至少一个透明基板的厚度和所述粘合剂层的厚度具有预定的关系，从而基本上防止在所述功能膜的前表面上产生深度大于3um的凹部，其中耐擦伤性 的功能膜得到改善。
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公开(公告)号：US20070285348A1
公开(公告)日：2007-12-13
申请号：US11745582
申请日：2007-05-08
IPC分类号： G09G3/10
CPC分类号： H01J11/12 , H01J11/36 , H01J2211/361
摘要： A plasma display panel is provided in which discharge connection in the column direction is prevented without increasing the number of man-hours in a formation process of a partition and without deteriorating ventilation for an exhaust process. A pattern in a plan view of a partition is made a mesh pattern in which vertical patterns are included at inter-row positions in each column. Each of first vertical walls is positioned at a boundary between columns, each of second vertical walls is arranged at a position away from a boundary between columns for each boundary between rows and each of horizontal walls is positioned at a boundary between rows. In the partition, a height of portions where the first vertical wall crosses the horizontal wall and a height of portions where the second vertical wall crosses the horizontal wall are smaller than a height of the other portions of the partition.
摘要翻译： 提供了一种等离子体显示面板，其中防止排列连接在列方向上，而不增加在隔板的形成过程中的工时数，并且不会使排气过程的通风恶化。 分区的平面视图中的图案被制成网格图案，其中在每列中的行间位置包括垂直图案。 每个第一垂直壁位于柱之间的边界处，每个第二垂直壁布置在离行之间的边界处的位置之间，并且每个水平壁位于行之间的边界处。 在隔壁中，第一垂直壁与水平壁交叉的部分的高度和第二垂直壁与水平壁交叉的部分的高度小于隔板的其他部分的高度。
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