Method of manufacturing semiconductor apparatus and apparatus thereof
    1.
    发明授权
    Method of manufacturing semiconductor apparatus and apparatus thereof 失效
    制造半导体装置的方法及其装置

    公开(公告)号:US06261969B1

    公开(公告)日:2001-07-17

    申请号:US08777380

    申请日:1996-12-27

    IPC分类号: H01L21302

    CPC分类号: H01L21/31111 H01L21/78

    摘要: The method of manufacturing a semiconductor apparatus can solve problems in that a semiconductor film is not separated completely from a substrate and a great quantity of etchant is required. Ammonium fluoride is added to a hydrofluoric acid solution, so as to improve the etching rate and promote separation of the semiconductor film from the substrate. A manufacturing apparatus according to the present invention is provided with a re-liquefying function capable of again liquefying vapor of hydrofluoric acid solution so as to use liquefied vapor as the etchant so that the etchant is saved.

    摘要翻译: 制造半导体装置的方法可以解决半导体膜不完全从基板分离并且需要大量蚀刻剂的问题。 将氟化铵加入到氢氟酸溶液中,以提高蚀刻速率并促进半导体膜与基板的分离。 根据本发明的制造装置具有能够再次液化氢氟酸溶液的蒸气的再液化功能,以便使用液化蒸气作为蚀刻剂,从而节省蚀刻剂。

    Method of and apparatus for manufacturing thin solar battery
    3.
    发明授权
    Method of and apparatus for manufacturing thin solar battery 失效
    薄型太阳能电池的制造方法和装置

    公开(公告)号:US06096569A

    公开(公告)日:2000-08-01

    申请号:US201660

    申请日:1998-12-01

    摘要: A process of forming electrodes is simplified during modularizing of a solar battery. According to the manufacturing method and the manufacturing apparatus, a thin solar battery is manufactured at a reduced cost and with a better yield. Using a robot which includes a suction chip which can handle a semiconductor film 2 without any damage which is separated from a particular substrate 1, the semiconductor films 2 are each accurately placed through a transparent resin 3 onto a glass substrate 7 which serves as a window of a solar battery, and p-type and n-type electrodes are printed at a time on the semiconductor films 2 which are arranged. Further, since a monolithic tab electrode is soldered to connect the electrodes, the manufacturing processes of the solar battery are simplified.

    摘要翻译: 在太阳能电池的模块化期间简化了形成电极的工艺。 根据制造方法和制造装置,以更低的成本和更好的产量制造薄的太阳能电池。 使用包括能够处理半导体膜2而不会从特定基板1分离的任何损伤的吸引芯片的机器人,将半导体膜2分别通过透明树脂3准确地放置在作为窗口的玻璃基板7上 的太阳能电池,并且在配置的半导体膜2上一次印刷p型和n型电极。 此外,由于整体式接片电极被焊接以连接电极,所以太阳能电池的制造工艺被简化。

    Method of producing thin film solar cell
    4.
    发明授权
    Method of producing thin film solar cell 失效
    制造薄膜太阳能电池的方法

    公开(公告)号:US5963790A

    公开(公告)日:1999-10-05

    申请号:US879367

    申请日:1997-06-20

    摘要: A method for producing a thin film solar cell includes preparing a substrate of a low purity material and having opposed front and rear surfaces; forming an insulating film on the front surface of the substrate; forming a second conductivity type active layer of a high purity material on the insulating film with a front surface exposed; forming a second conductivity type semiconductor region within the active layer, reaching the front surface, to produce a p-n junction for light-to-electricity conversion; forming an anti-reflection film on the front surface of the active layer, the anti-reflection film reducing reflection of incident light; forming a surface electrode in contact with the front surface of the active layer; adhering the front surface side of the active layer to a supporting plate and selectively etching the low purity substrate from the rear surface to form a supporting substrate supporting the active layer; and forming a rear electrode on the rear surface of the supporting substrate contacting the active layer.

    摘要翻译: 一种制造薄膜太阳能电池的方法包括制备低纯度材料的基片并具有相对的前表面和后表面; 在所述基板的前表面上形成绝缘膜; 在绝缘膜上形成具有暴露的前表面的高纯度材料的第二导电型有源层; 在有源层内形成第二导电类型的半导体区域,到达前表面,以产生用于光电转换的p-n结; 在有源层的正面上形成防反射膜,防反射膜减少入射光的反射; 形成与所述有源层的前表面接触的表面电极; 将有源层的前表面侧粘附到支撑板上,并从后表面选择性地蚀刻低纯度基板以形成支撑有源层的支撑基板; 以及在与有源层接触的支撑基板的后表面上形成后电极。

    Thin-film solar cell
    5.
    发明授权
    Thin-film solar cell 失效
    薄膜太阳能电池

    公开(公告)号:US5397400A

    公开(公告)日:1995-03-14

    申请号:US94304

    申请日:1993-07-21

    摘要: A thin-film solar cell includes a thin active layer of high purity material having opposed front and rear surfaces for light-to-electricity conversion, a structure for supporting the thin active layer, and a rear electrode in contact with the rear surface of the active layer. The supporting structure includes a supporting substrate of a low purity material having opposed front and rear surfaces, on the front surface of which the rear surface of the active layer is disposed, and an insulating barrier layer interposed between the front surface of the supporting substrate and the rear surface of the active layer. The barrier layer prevents impurities in the supporting substrate from diffusing into the active layer. Since the supporting substrate comprises a low purity material, the quantity of the expensive high purity material can be reduced by reducing the thickness of the active layer, resulting in low production costs. Since the supporting substrate is present on the rear surface of the active layer, a surface electrode disposed on the front surface of the active layer is exposed. Therefore, when a solar cell module is fabricated using a plurality of the solar cells, a wire bonding process for connecting adjacent solar cells is easily carried out.

    摘要翻译: 薄膜太阳能电池包括具有相对的用于光电转换的相对的前表面和后表面的高纯度材料的薄活性层,用于支撑薄活性层的结构和与所述薄电极的背面接触的后电极 活动层 支撑结构包括具有相对的前表面和后表面的低纯度材料的支撑衬底,其前表面上设置有源层的后表面,以及绝缘阻挡层,介于支撑衬底的前表面和 活性层的后表面。 阻挡层防止支撑衬底中的杂质扩散到有源层中。 由于支撑基板包括低纯度材料,所以通过减小活性层的厚度可以降低昂贵的高纯度材料的量,导致生产成本低。 由于支撑衬底存在于有源层的后表面上,所以露出有源层前表面上的表面电极。 因此,当使用多个太阳能电池制造太阳能电池模块时,容易进行用于连接相邻太阳能电池的引线接合工艺。

    Powder removing apparatus, molding system, and method of manufacturing molded object
    7.
    发明授权
    Powder removing apparatus, molding system, and method of manufacturing molded object 有权
    除粉装置,成型系统及成形体的制造方法

    公开(公告)号:US09475234B2

    公开(公告)日:2016-10-25

    申请号:US13590689

    申请日:2012-08-21

    申请人: Hiroaki Morikawa

    发明人: Hiroaki Morikawa

    IPC分类号: B29C67/00

    摘要: A powder removing apparatus includes a box, a stage moving mechanism, and a powder removing processing mechanism. The box has a main body with an opening and a stage movably provided in the main body. The box is capable of accommodating a molded object and non-bonding powder so as to arrange the molded object, which is formed using powder according to a rapid prototyping technique, on the stage together with the non-bonding powder. The stage moving mechanism is capable of moving the stage upward relative to the main body inside the main body. The powder removing processing mechanism is configured to remove the non-bonding powder existing around the molded object extruded by a driving operation of the stage moving mechanism via the opening.

    摘要翻译: 粉末去除装置包括盒,台移动机构和粉末去除处理机构。 该盒具有主体,其具有可移动地设置在主体中的开口和台。 该盒能够容纳模制物体和非粘合粉末,以便将与根据快速成型技术的粉末形成的成型物体一起,与非粘合粉末一起在舞台上布置。 舞台移动机构能够相对于主体内的主体向上移动舞台。 粉末去除处理机构被构造成通过该开口移除通过台架移动机构的驱动操作而挤出的成型体上存在的非粘结粉末。

    Trajectory interpolation apparatus and method
    8.
    发明授权
    Trajectory interpolation apparatus and method 有权
    轨迹插值装置及方法

    公开(公告)号:US08873805B2

    公开(公告)日:2014-10-28

    申请号:US13590277

    申请日:2012-08-21

    IPC分类号: G06K9/00 G08G1/00 G08G1/01

    摘要: A trajectory interpolation apparatus is disclosed. The first storage part stores first time and first location information of a movable body at the first time. The second storage stores second time and second location information of the movable body at the second time. The calculation part calculates a first moving distance from the first time and a second moving distance from the second time based on a relationship between the time and the speed stored in the second storage part, regarding third time between the first time and the second time. The determination part determines, as the interpolation point, one of intersection points for a circle in which the first location is set as its center and the first moving distance is set as its radius, and another circle in which the second location is set as its center and the second moving distance is set as its radius.

    摘要翻译: 公开了一种轨迹插值装置。 第一存储部件在第一时间存储可移动体的第一时间和第一位置信息。 第二存储器第二次存储可移动体的第二和第二位置信息。 计算部分基于第一时间和第二时间之间的第三时间,基于存储在第二存储部分中的时间和速度之间的关系,从第一次计算第一移动距离和第二移动距离。 确定部分确定作为内插点的一个圆的第一位置被设置为其中心并且将第一移动距离设置为其半径的圆的交点,并且将另一个圆设置为第二位置 中心,第二移动距离设为其半径。

    APPARATUS AND METHOD FOR COORDINATE CODING, AND METHOD AND APPARATUS FOR DISTANCE CALCULATION
    10.
    发明申请
    APPARATUS AND METHOD FOR COORDINATE CODING, AND METHOD AND APPARATUS FOR DISTANCE CALCULATION 有权
    用于坐标编码的装置和方法,以及用于距离计算的方法和装置

    公开(公告)号:US20130013661A1

    公开(公告)日:2013-01-10

    申请号:US13541376

    申请日:2012-07-03

    IPC分类号: G06F7/38

    CPC分类号: G01C21/20

    摘要: An apparatus includes a unit dividing a region into blocks having a predetermined bit length and generating addition data having the predetermined bit length corresponding to coordinate data, a unit storing storage data having the predetermined bit length, a unit generating composite data having a bit length twice the length of the predetermined bit length by connecting the addition data to the storage data, and storing the composite data, and a unit repeating an operation of designating the bit length of the composite data as the predetermined bit length, instructing to generate the addition data, and instructing to generate and store the composite data. The number of different bits between a bit string of a location corresponding to the input coordinate data and a bit string of a reference location tends to increase as a distance between the location corresponding to the coordinate data and the reference location increases.

    摘要翻译: 一种装置包括将区域划分成具有预定位长度的块并产生具有与坐标数据相对应的预定位长度的附加数据的单元,存储具有预定位长度的存储数据的单元,具有位长度两倍的单位生成单元 通过将加法数据连接到存储数据,并存储合成数据的预定位长度的长度,以及重复指定复合数据的位长度的操作的单元作为预定位长度,指示生成相加数据 并指示生成和存储复合数据。 对应于输入坐标数据的位置的位串与参考位置的位串之间的不同位的数目趋向于随着对应于坐标数据的位置和参考位置之间的距离增加而增加。