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    Pyrolyzed-parylene based sensors and method of manufacture
    1.
    发明授权
    Pyrolyzed-parylene based sensors and method of manufacture 失效
    基于热解 - 聚对二甲苯的传感器和制造方法

    公开(公告)号：US07238941B2

    公开(公告)日：2007-07-03

    申请号：US10973938

    申请日：2004-10-25

    申请人： Yu-Chong Tai ,  Matthieu Liger ,  Scott Miserendino ,  Satoshi Konishi

    发明人： Yu-Chong Tai ,  Matthieu Liger ,  Scott Miserendino ,  Satoshi Konishi

    IPC分类号： G01J5/00

    CPC分类号： G01J5/20

    摘要： A method (and resulting structure) for fabricating a sensing device. The method includes providing a substrate comprising a surface region and forming an insulating material overlying the surface region. The method also includes forming a film of carbon based material overlying the insulating material and treating to the film of carbon based material to pyrolyzed the carbon based material to cause formation of a film of substantially carbon based material having a resistivity ranging within a predetermined range. The method also provides at least a portion of the pyrolyzed carbon based material in a sensor application and uses the portion of the pyrolyzed carbon based material in the sensing application. In a specific embodiment, the sensing application is selected from chemical, humidity, piezoelectric, radiation, mechanical strain or temperature.

    摘要翻译： 一种用于制造感测装置的方法（和结果）。 该方法包括提供包括表面区域并形成覆盖表面区域的绝缘材料的基板。 该方法还包括形成覆盖绝缘材料的碳基材料薄膜，并处理碳基材料薄膜以热解碳基材料，以形成电阻率范围在预定范围内的基本上碳基材料的薄膜。 该方法还在传感器应用中提供热解碳基材料的至少一部分，并且在感测应用中使用部分热解碳基材料。 在具体实施例中，感测应用选自化学，湿度，压电，辐射，机械应变或温度。

    Electromagnetic radiation sensor and method of manufacture
    2.
    发明授权
    Electromagnetic radiation sensor and method of manufacture 有权
    电磁辐射传感器及其制造方法

    公开(公告)号：US07842533B2

    公开(公告)日：2010-11-30

    申请号：US12349860

    申请日：2009-01-07

    申请人： Matthieu Liger

    发明人： Matthieu Liger

    IPC分类号： H01L21/00

    CPC分类号： H01L27/14669 ,  G01J5/02 ,  G01J5/023 ,  G01J5/20 ,  H01L27/14683

    摘要： A method of forming a semiconductor sensor in one embodiment includes providing a substrate, forming a reflective layer on the substrate, forming a sacrificial layer on the reflective layer, forming an absorber layer with a thickness of less than about 50 nm on the sacrificial layer, forming an absorber in the absorber layer integrally with at least one suspension leg, and removing the sacrificial layer.

    摘要翻译： 在一个实施例中形成半导体传感器的方法包括提供衬底，在衬底上形成反射层，在反射层上形成牺牲层，在牺牲层上形成厚度小于约50nm的吸收层， 在吸收层中与至少一个悬挂腿一体地形成吸收体，并且去除牺牲层。

    IC-processed polymer nano-liquid chromatoraphy system on-a-chip and method of making it
    4.
    发明授权
    IC-processed polymer nano-liquid chromatoraphy system on-a-chip and method of making it 有权
    IC加工聚合物纳米液体色谱体系及其制备方法

    公开(公告)号：US08323488B2

    公开(公告)日：2012-12-04

    申请号：US13037192

    申请日：2011-02-28

    申请人： Yu-Chong Tai ,  Qing He ,  Jun Xie ,  Changlin Pang ,  Terry D. Lee ,  Damien Rodger ,  Matthieu Liger

    发明人： Yu-Chong Tai ,  Qing He ,  Jun Xie ,  Changlin Pang ,  Terry D. Lee ,  Damien Rodger ,  Matthieu Liger

    IPC分类号： B01D15/08 ,  B01D15/10 ,  B01D15/00

    CPC分类号： H05K3/284 ,  G01N30/6047 ,  G01N30/6095 ,  G01N2030/645 ,  G03F1/80 ,  G01N2030/625

    摘要： Embodiments in accordance with the present invention relate to packed-column nano-liquid chromatography (nano-LC) systems integrated on-chip, and methods for producing and using same. The microfabricated chip includes a column, flits/filters, an injector, and a detector, fabricated in a process compatible with those conventionally utilized to form integrated circuits. The column can be packed with supports for various different stationary phases to allow performance of different forms of nano-LC, including but not limited to reversed-phase, normal-phase, adsorption, size-exclusion, affinity, and ion chromatography. A cross-channel injector injects a nanolitre/picolitre-volume sample plug at the column inlet. An electrochemical/conductivity sensor integrated at the column outlet measures separation signals. A self-aligned channel-strengthening technique increases pressure rating of the microfluidic system, allowing it to withstand the high pressure normally used in high performance liquid chromatography (HPLC). On-chip sample injection, separation, and detection of mixture of anions in water is successfully demonstrated using ion-exchange nano-LC.

    摘要翻译： 根据本发明的实施方案涉及集成在片上的填充柱纳米液相色谱（nano-LC）系统及其制造和使用方法。 微制造的芯片包括以常规用于形成集成电路的方法兼容的工艺制造的柱，过滤器，注射器和检测器。 该柱可以填充有用于各种不同固定相的载体，以允许不同形式的纳米LC的性能，包括但不限于反相，正相，吸附，尺寸排阻，亲和力和离子色谱。 交叉通道注射器在柱入口处注入纳升/皮升体积的样品塞。 集成在色谱柱出口处的电化学/电导率传感器测量分离信号。 自对准的通道加强技术提高了微流体系统的压力等级，使其能够承受通常用于高效液相色谱（HPLC）的高压。 使用离子交换纳米LC成功地证明了在水中阴离子的混合物的片上样品注入，分离和检测。

    METHOD OF MANUFACTURING A PLANAR ELECTRODE WITH LARGE SURFACE AREA
    5.
    发明申请
    METHOD OF MANUFACTURING A PLANAR ELECTRODE WITH LARGE SURFACE AREA 有权
    具有大面积面积的平面电极的制造方法

    公开(公告)号：US20110019337A1

    公开(公告)日：2011-01-27

    申请号：US12508894

    申请日：2009-07-24

    申请人： Po-Jui Chen ,  Gary Yama ,  Matthieu Liger ,  Matthias Illing

    发明人： Po-Jui Chen ,  Gary Yama ,  Matthieu Liger ,  Matthias Illing

    IPC分类号： H01G9/00 ,  B05D5/12

    CPC分类号： H01G11/26 ,  H01G11/46 ,  H01G11/86 ,  H01M4/02 ,  Y02E60/13 ,  Y10T29/417

    摘要： A method for fabricating a pair of large surface area planar electrodes. The method includes forming a first template above a first substrate, the first template having a first plurality of pores, coating the first plurality of pores of the first template with a first layer of conducting material to form a first electrode, placing the first plurality of pores of the first electrode in proximity to a second electrode, thereby forming a gap between the first plurality of pores and the second electrode, and filling the gap with an electrolyte material.

    摘要翻译： 一种制造一对大面积平面电极的方法。 该方法包括在第一基板上形成第一模板，第一模板具有第一多个孔，用第一导电材料层涂覆第一模板的第一多个孔以形成第一电极，将第一多个 在第二电极附近形成第一电极的孔，从而在第一多个孔和第二电极之间形成间隙，并用电解质材料填充间隙。

    Method of manufacturing a planar electrode with large surface area
    7.
    发明授权
    Method of manufacturing a planar electrode with large surface area 有权
    制造具有大表面积的平面电极的方法

    公开(公告)号：US08317882B2

    公开(公告)日：2012-11-27

    申请号：US12508894

    申请日：2009-07-24

    申请人： Po-Jui Chen ,  Gary Yama ,  Matthieu Liger ,  Matthias Illing

    发明人： Po-Jui Chen ,  Gary Yama ,  Matthieu Liger ,  Matthias Illing

    IPC分类号： H01G9/00

    CPC分类号： H01G11/26 ,  H01G11/46 ,  H01G11/86 ,  H01M4/02 ,  Y02E60/13 ,  Y10T29/417

    摘要： A method for fabricating a pair of large surface area planar electrodes. The method includes forming a first template above a first substrate, the first template having a first plurality of pores, coating the first plurality of pores of the first template with a first layer of conducting material to form a first electrode, placing the first plurality of pores of the first electrode in proximity to a second electrode, thereby forming a gap between the first plurality of pores and the second electrode, and filling the gap with an electrolyte material.

    摘要翻译： 一种制造一对大面积平面电极的方法。 该方法包括在第一基板上形成第一模板，第一模板具有第一多个孔，用第一导电材料层涂覆第一模板的第一多个孔以形成第一电极，将第一多个 在第二电极附近形成第一电极的孔，从而在第一多个孔和第二电极之间形成间隙，并用电解质材料填充间隙。

    Pyrolyzed thin film carbon
    8.
    发明申请
    Pyrolyzed thin film carbon 有权
    热解薄膜碳

    公开(公告)号：US20060007983A1

    公开(公告)日：2006-01-12

    申请号：US11040116

    申请日：2005-01-24

    申请人： Yu-Chong Tai ,  Matthieu Liger ,  Theodore Harder ,  Satoshi Konishi ,  Scott Miserendino

    发明人： Yu-Chong Tai ,  Matthieu Liger ,  Theodore Harder ,  Satoshi Konishi ,  Scott Miserendino

    IPC分类号： G01J5/00

    CPC分类号： C23C18/02

    摘要： A method of making carbon thin films comprises depositing a catalyst on a substrate, depositing a hydrocarbon in contact with the catalyst and pyrolyzing the hydrocarbon. A method of controlling a carbon thin film density comprises etching a cavity into a substrate, depositing a hydrocarbon into the cavity, and pyrolyzing the hydrocarbon while in the cavity to form a carbon thin film. Controlling a carbon thin film density is achieved by changing the volume of the cavity. Methods of making carbon containing patterned structures are also provided. Carbon thin films and carbon containing patterned structures can be used in NEMS, MEMS, liquid chromatography, and sensor devices.

    摘要翻译： 制造碳薄膜的方法包括在基材上沉积催化剂，沉积与催化剂接触的烃并热解烃。 控制碳薄膜密度的方法包括将空腔蚀刻到基底中，将烃沉积到空腔中，并在空腔中热解烃以形成碳薄膜。 通过改变空腔的体积来实现碳薄膜密度的控制。 还提供了制备含碳图案结构的方法。 碳薄膜和含碳图案结构可用于NEMS，MEMS，液相色谱和传感器装置。

    Method for selectively treating surfaces
    10.
    发明授权
    Method for selectively treating surfaces 有权
    选择性处理表面的方法

    公开(公告)号：US09046684B1

    公开(公告)日：2015-06-02

    申请号：US13548061

    申请日：2012-07-12

    申请人： Casey Feinstein ,  Matthieu Liger ,  Chia-Jean Wang

    发明人： Casey Feinstein ,  Matthieu Liger ,  Chia-Jean Wang

    IPC分类号： G02B1/10 ,  G02B27/01 ,  G03F7/00 ,  C03C17/00 ,  C03C15/00

    CPC分类号： G02B27/01 ,  C03C15/00 ,  C03C17/00 ,  G02B1/10 ,  G02B27/017 ,  G02B27/0172 ,  G03F7/0002 ,  G03F7/0005

    摘要： A method of treating a surface includes providing an object and applying a masking layer to a target surface area of the object. A sacrificial material is applied to a non-target surface area of the object. The method also includes removing the masking layer from the target surface area. The target surface area is exposed to a substance that etches or coats the target surface area. The sacrificial material from the non-target surface area of the object is removed, leaving the target surface area of the object etched or coated by the substance while the non-target surface area is not etched or coated by the substance.

    摘要翻译： 处理表面的方法包括提供物体并将掩模层施加到物体的目标表面区域。 将牺牲材料施加到物体的非目标表面区域。 该方法还包括从目标表面区域去除掩模层。 目标表面积暴露于蚀刻或涂覆目标表面积的物质。 除去物体的非目标表面区域的牺牲材料，留下被物体蚀刻或涂覆的物体的目标表面积，同时非目标表面积未被物质蚀刻或涂覆。