Multi-layered semi-conductor photodetector
    3.
    发明授权
    Multi-layered semi-conductor photodetector 失效
    多层半导体光电探测器

    公开(公告)号:US4682196A

    公开(公告)日:1987-07-21

    申请号:US806746

    申请日:1985-12-09

    摘要: A semiconductor device, which is formed by a sequential lamination of a first semiconductor layer having a carrier concentration more than 10.sup.17 cm.sup.-3, a second semiconductor layer having a carrier concentration less than 10.sup.16 cm.sup.-3, a third semiconductor layer having a carrier concentration more than 10.sup.17 cm.sup.-3 and a thickness less than 300 .ANG., a fourth semiconductor layer having a carrier concentration less than 10.sup.16 cm.sup.-3, and a fifth semiconductor layer having a carrier concentration more than 10.sup.17 cm.sup.-3 and, in which the first and fifth semiconductor layers are the same in conductivity type and the third semiconductor layer is different in conductivity type from the fifth semiconductor layer. In accordance with the present invention, the energy gap of the third semiconductor layer is larger than the energy gaps of the second and fourth semiconductor layers. An annular region of a semi-insulating material or of the same conductivity type as that of the third semiconductor layer may be formed around an active region to extend from the fifth semiconductor layer to the second semiconductor layer.

    摘要翻译: 一种半导体器件,其通过顺次层叠具有载流子浓度大于1017cm -3的第一半导体层,载流子浓度小于1016cm-3的第二半导体层,具有载流子浓度的第三半导体层 大于1017cm-3,厚度小于300,载流子浓度小于1016cm-3的第四半导体层和载流子浓度大于1017cm-3的第五半导体层,其中第一 并且第五半导体层的导电类型相同,并且第三半导体层的导电类型与第五半导体层不同。 根据本发明,第三半导体层的能隙大于第二和第四半导体层的能隙。 可以在有源区周围形成半绝缘材料或与第三半导体层相同的导电类型的环形区域,以从第五半导体层延伸到第二半导体层。

    Method for manufacturing diffraction grating
    4.
    发明授权
    Method for manufacturing diffraction grating 失效
    衍射光栅的制造方法

    公开(公告)号:US4660934A

    公开(公告)日:1987-04-28

    申请号:US710984

    申请日:1985-03-12

    IPC分类号: G02B5/18 G03F7/00 G03F7/095

    摘要: A method for manufacturing diffraction grating, in which after forming, on a substrate, one of a negative type photoresist film (an N film) and a positive type photoresist film (a P film) to cover a first region A and the other of the negative type photoresist film and the positive type photoresist film, or the latter film on the former one to cover a second region B, the first region and the second region are subjected to two-beam interference exposure, thereby forming a diffraction grating in which corrugations in the first region and the second region are reverse in phase to each other, through utilization of characteristics of the negative type photoresist film and the positive type photoresist film. Another feature of the present invention resides in that after forming, on a substrate, a structure in which a negative type photoresist film (an N film) is formed to cover only a first region A and the negative type photoresist film is formed on a positive type photoresist film (a P film) to cover a second region B, the first region and the second region of the substrate are subjected to two-beam interference exposure, thereby forming a diffraction grating in which corrugations in the first region and the second region are reverse in phase to each other, through utilization of characteristics of the negative type photoresist film and the positive type photoresist film.

    摘要翻译: 制造衍射光栅的方法,其中在基板上形成负型光致抗蚀剂膜(N膜)和正型光致抗蚀剂膜(P膜)之一以覆盖第一区域A和另一个 负型光致抗蚀剂膜和正型光致抗蚀剂膜,或者在前者的后者膜覆盖第二区域B,第一区域和第二区域受到双光束干涉曝光,从而形成衍射光栅,其中波纹 通过利用负型光致抗蚀剂膜和正型光致抗蚀剂膜的特性,在第一区域和第二区域中的相位彼此相反。 本发明的另一个特征在于,在基板上形成后,形成负型光致抗蚀剂膜(N膜)仅覆盖第一区域A并且负型光致抗蚀剂膜形成为阳性的结构 (P膜)覆盖第二区域B,对基板的第一区域和第二区域进行双光束干涉曝光,从而形成衍射光栅,其中第一区域和第二区域中的波纹 通过利用负型光致抗蚀剂膜和正型光致抗蚀剂膜的特性,彼此相反。

    Distributed feedback semiconductor laser
    8.
    发明授权
    Distributed feedback semiconductor laser 失效
    分布式反馈半导体激光器

    公开(公告)号:US4653059A

    公开(公告)日:1987-03-24

    申请号:US688566

    申请日:1985-01-03

    CPC分类号: H01S5/12 H01S5/164

    摘要: A distributed feedback semiconductor laser which has periodic corrugations formed in a light emitting layer or an adjoining layer to extend in the direction of travel of light. A window region formed by a semiconductor layer larger in energy gap than the light emitting layer is provided on the extension line of one end of a laser region formed in the light emitting layer. The length of the window region is so limited as to prevent substantial reflection of laser output light in the window region. The end face of the laser on the opposite side from the window region is coated with a film for increasing reflectivity.

    摘要翻译: 一种分布式反馈半导体激光器,其具有在发光层或相邻层中形成的周期性波纹,以在光的行进方向上延伸。 由形成在发光层的激光区域的一端的延长线上设置由能隙比发光层大的半导体层形成的窗口区域。 窗口区域的长度被限制以防止激光输出光在窗口区域中的实质反射。 在与窗口区域相反的一侧上的激光器的端面涂覆有用于增加反射率的膜。

    Distributed feedback semiconductor laser
    9.
    发明授权
    Distributed feedback semiconductor laser 失效
    分布式反馈半导体激光器

    公开(公告)号:US4648096A

    公开(公告)日:1987-03-03

    申请号:US660934

    申请日:1984-10-15

    CPC分类号: H01S5/164 H01S5/12 H01S5/124

    摘要: A distributed feedback semiconductor laser which has periodic corrugations in a light emitting layer or an adjoining layer in the direction of travel of light and performs laser oscillation by the injection of carriers into said light emitting layer. In accordance with the present invention, there are provided, in the neighborhood of the center of a laser region, a region for changing the phase of the periodic corrugations by about 180 degrees, and, on the extension of the laser oscillation region at both sides thereof, a window region formed of a semiconductor larger in energy gap but smaller in refractive index than the light emitting layer, the length of the window region being so limited as to prevent substantial reflection of laser output light in the window region.

    摘要翻译: 一种分布式反馈半导体激光器,其在光的行进方向上在发光层或邻接层中具有周期性波纹,并通过将载流子注入所述发光层来执行激光振荡。 根据本发明,在激光区域的中心附近设置用于将周期性波纹的相位改变约180度的区域,并且在两侧的激光振荡区域的延伸上 由能隙较大且折射率小于发光层的半导体形成的窗口区域,窗口区域的长度受到限制,以防止激光输出光在窗口区域中的实质反射。

    Distributed feedback semiconductor laser
    10.
    发明授权
    Distributed feedback semiconductor laser 失效
    分布式反馈半导体激光器

    公开(公告)号:US4633474A

    公开(公告)日:1986-12-30

    申请号:US678244

    申请日:1984-12-05

    摘要: A distributed feedback semiconductor laser which has periodic corrugations formed in a layer adjoining a light emitting layer so as to extend in the direction of travel of light and performs laser oscillation by the injection of current into the light emitting layer, in which a part of at least one metal electrode has a TM mode suppressing region disposed at a position where light is essentially distributed in the thickwise direction of the laser. A window region formed of a semiconductor larger in energy gap than the light emitting layer is disposed at both ends of the laser oscillation region in the direction of travel of light, the length of the window region being limited so that no substantial reflection occurs therein.

    摘要翻译: 一种分布式反馈半导体激光器,其具有在与发光层相邻的层中形成的周期性波纹,以沿着光的行进方向延伸,并且通过向发光层注入电流并执行激光振荡,其中, 至少一个金属电极具有设置在光在激光的厚度方向上基本分布的位置的TM模式抑制区域。 在光的行进方向上,在激光振荡区域的两端配置由能量差大于发光层的半导体形成的窗口区域,限制窗口区域的长度,使得不发生实质的反射。