公开(公告)号：US20100096393A1

公开(公告)日：2010-04-22

申请号：US12524784

申请日：2007-11-22

申请人： Yuji Asahara ,  Hideo Yamakoshi ,  Minoru Danno ,  Seiji Goto ,  Akira Shirakura ,  Masaki Nakaya ,  Kiyoshi Hiroya

发明人： Yuji Asahara ,  Hideo Yamakoshi ,  Minoru Danno ,  Seiji Goto ,  Akira Shirakura ,  Masaki Nakaya ,  Kiyoshi Hiroya

IPC分类号： B65D23/02 ,  B65D25/14 ,  C23C16/50 ,  C23C16/00

CPC分类号： C23C16/503 ,  B65D23/02 ,  B65D25/14 ,  C23C16/045 ,  C23C16/509 ,  H01J37/32348 ,  H01J37/32623 ,  H05H1/24 ,  H05H1/2406 ,  H05H2001/2412

摘要： A barrier-film forming apparatus that forms a barrier film on an inner face of a container (12) having a concave or convex portion (12a) as a processing target, including: a dielectric member (50) having a cavity sized to enclose the container (12), an external electrode (13) covering an outer circumference of the dielectric member (50), an exhaust unit installed on an end face of the external electrode (13) on a side where a mouth (11) of the container (12) is located, with an insulating member (26) interposed therebetween, and depressurizing inside of the container (12) through an exhaust pipe (14), an internal electrode (17) inserted from a side of the exhaust pipe (14) and also serving as a gas blowout unit that blows out medium gas (19) for generating a barrier film into the container (12), and an electric-field applying unit that applies an electric field for generating exhaust between the external electrode (13) and a ground electrode.

摘要翻译： 一种在具有作为加工对象的凹部或凸部（12a）的容器（12）的内面上形成阻挡膜的阻隔膜形成装置，包括：电介质部件（50），其具有被设定为包围 容器（12），覆盖电介质构件（50）的外周的外部电极（13），安装在外部电极（13）的端面上的容器（12）的侧面上的排气单元 （12），其间插入有绝缘构件（26），并且通过排气管（14）向容器（12）的内部减压，从排气管（14）侧插入的内部电极（17） 并且还用作将用于产生阻挡膜的介质气体（19）吹出到容器（12）中的气体吹出单元;以及电场施加单元，其在外部电极（13）之间施加用于产生排气的电场， 和接地电极。

公开(公告)号：US08950356B2

公开(公告)日：2015-02-10

申请号：US12524784

申请日：2007-11-22

申请人： Yuji Asahara ,  Hideo Yamakoshi ,  Minoru Danno ,  Seiji Goto ,  Akira Shirakura ,  Masaki Nakaya ,  Kiyoshi Hiroya

发明人： Yuji Asahara ,  Hideo Yamakoshi ,  Minoru Danno ,  Seiji Goto ,  Akira Shirakura ,  Masaki Nakaya ,  Kiyoshi Hiroya

IPC分类号： C23C16/00 ,  H05H1/24 ,  B65D23/02 ,  C23C16/04 ,  C23C16/509 ,  H01J37/32

CPC分类号： C23C16/503 ,  B65D23/02 ,  B65D25/14 ,  C23C16/045 ,  C23C16/509 ,  H01J37/32348 ,  H01J37/32623 ,  H05H1/24 ,  H05H1/2406 ,  H05H2001/2412

摘要： A barrier-film forming apparatus that forms a barrier film on an inner face of a container having a concave or convex portion as a processing target, including: a dielectric member having a cavity sized to enclose the container, an external electrode covering an outer circumference of the dielectric member, an exhaust unit installed on an end face of the external electrode on a side where a mouth of the container is located, with an insulating member interposed therebetween, and depressurizing inside of the container through an exhaust pipe, an internal electrode inserted from a side of the exhaust pipe and also serving as a gas blowout unit that blows out medium gas for generating a barrier film into the container, and an electric-field applying unit that applies an electric field for generating exhaust between the external electrode and a ground electrode.

摘要翻译： 一种阻隔膜形成装置，其在具有凹部或凸部的容器的内表面上形成阻挡膜作为加工对象，所述阻挡膜形成装置包括：电介质构件，其具有用于封闭所述容器的尺寸的空腔，覆盖外周的外部电极 所述绝缘构件安装在所述外部电极的位于所述容器的口侧的端面上的排气单元，其间具有绝缘构件，并且通过排气管对所述容器的内部进行减压，所述内部电极 从排气管的一侧插入并且还用作将用于产生阻挡膜的介质气体吹出到容器中的气体吹出单元，以及电场施加单元，其在外部电极和外部电极之间施加用于产生排气的电场 接地电极。

公开(公告)号：US08034177B2

公开(公告)日：2011-10-11

申请号：US11660201

申请日：2005-10-17

申请人： Seiji Goto ,  Hideo Yamakoshi ,  Atsushi Ueda ,  Kenichi Okamoto ,  Yuji Asahara ,  Minoru Danno

发明人： Seiji Goto ,  Hideo Yamakoshi ,  Atsushi Ueda ,  Kenichi Okamoto ,  Yuji Asahara ,  Minoru Danno

IPC分类号： C23C16/00 ,  C23C16/50 ,  C23F1/00 ,  H01L21/306

CPC分类号： C23C16/26 ,  C23C16/045 ,  C23C16/505

摘要： An inner electrode for barrier film formation is an inner electrode for barrier film formation that is inserted inside a plastic container having an opening, supplies a medium gas to the inside of the plastic container, and supplies high frequency power to an outer electrode arranged outside the plastic container, thereby generating discharge plasma on the inner surface of the plastic container to form a barrier film on the inner surface of the plastic container, and that is provided with a gas supply pipe (101) having a gas flow path (101a) to supply a medium gas (G) and an insulating member (103) screwed into an end portion of the gas supply pipe (101) to be flush therewith and having a gas outlet (102) communicated with the gas flow path (101a).

摘要翻译： 用于形成阻挡膜的内部电极是插入到具有开口的塑料容器内的用于阻挡膜形成的内部电极，将中等气体供应到塑料容器的内部，并将高频电力提供给布置在外部的外部电极 塑料容器，从而在塑料容器的内表面上产生放电等离子体，以在塑料容器的内表面上形成阻挡膜，并且设置有气体供给管（101），该气体供给管具有气体流路（101a） 供给与气体供给管（101）的端部螺纹连接的中间气体（G）和绝缘构件（103），与该气体供给管（101）齐平并具有与气体流路（101a）连通的气体出口（102）。

公开(公告)号：US20080017113A1

公开(公告)日：2008-01-24

申请号：US11660201

申请日：2005-10-17

申请人： Seiji Goto ,  Hideo Yamakoshi ,  Atsushi Ueda ,  Kenichi Okamoto ,  Yuji Asahara ,  Minoru Danno

发明人： Seiji Goto ,  Hideo Yamakoshi ,  Atsushi Ueda ,  Kenichi Okamoto ,  Yuji Asahara ,  Minoru Danno

IPC分类号： C23C16/513

CPC分类号： C23C16/26 ,  C23C16/045 ,  C23C16/505

摘要： An inner electrode for barrier film formation is an inner electrode for barrier film formation that is inserted inside a plastic container having an opening, supplies a medium gas to the inside of the plastic container, and supplies high frequency power to an outer electrode arranged outside the plastic container, thereby generating discharge plasma on the inner surface of the plastic container to form a barrier film on the inner surface of the plastic container, and that is provided with a gas supply pipe (101) having a gas flow path (101a) to supply a medium gas (G) and an insulating member (103) screwed into an end portion of the gas supply pipe (101) to be flush therewith and having a gas outlet (102) communicated with the gas flow path (101a).

摘要翻译： 用于形成阻挡膜的内部电极是插入到具有开口的塑料容器内的用于阻挡膜形成的内部电极，将中等气体供应到塑料容器的内部，并将高频电力提供给布置在外部的外部电极 塑料容器，从而在塑料容器的内表面上产生放电等离子体，在塑料容器的内表面上形成阻挡膜，并且设置有具有气体流路（101a）的气体供给管（101） 供给与气体供给管（101）的端部螺纹连接的中间气体（G）和绝缘部件（103），与该气体流通通路（101a）连通的气体出口（102） 。

公开(公告)号：US08418650B2

公开(公告)日：2013-04-16

申请号：US13229393

申请日：2011-09-09

申请人： Seiji Goto ,  Hideo Yamakoshi ,  Atsushi Ueda ,  Kenichi Okamoto ,  Yuji Asahara ,  Minoru Danno

发明人： Seiji Goto ,  Hideo Yamakoshi ,  Atsushi Ueda ,  Kenichi Okamoto ,  Yuji Asahara ,  Minoru Danno

IPC分类号： C23C16/00 ,  C23C16/50 ,  C23F1/00 ,  H01L21/306

CPC分类号： C23C16/26 ,  C23C16/045 ,  C23C16/505

摘要： An inner electrode for barrier film formation is an inner electrode for barrier film formation that is inserted inside a plastic container having an opening, supplies a medium gas to the inside of the plastic container, and supplies high frequency power to an outer electrode arranged outside the plastic container, thereby generating discharge plasma on the inner surface of the plastic container to form a barrier film on the inner surface of the plastic container, and that is provided with a gas supply pipe having a gas flow path to supply a medium gas and an insulating member screwed into an end portion of the gas supply pipe to be flush therewith and having a gas outlet communicated with the gas flow path.

摘要翻译： 用于形成阻挡膜的内部电极是插入到具有开口的塑料容器内的用于阻挡膜形成的内部电极，将中等气体供应到塑料容器的内部，并将高频电力提供给布置在外部的外部电极 塑料容器，从而在塑料容器的内表面上产生放电等离子体，以在塑料容器的内表面上形成阻挡膜，并且设置有气体供给管，该气体供给管具有供给中等气体的气体流路， 绝缘构件螺纹连接到气体供给管的与其齐平的端部并且具有与气体流路连通的气体出口。

公开(公告)号：US20120000771A1

公开(公告)日：2012-01-05

申请号：US13229393

申请日：2011-09-09

申请人： Seiji GOTO ,  Hideo Yamakoshi ,  Atsushi Ueda ,  Kenichi Okamoto ,  Yuji Asahara ,  Minoru Danno

发明人： Seiji GOTO ,  Hideo Yamakoshi ,  Atsushi Ueda ,  Kenichi Okamoto ,  Yuji Asahara ,  Minoru Danno

IPC分类号： C23C14/34

CPC分类号： C23C16/26 ,  C23C16/045 ,  C23C16/505

摘要： An inner electrode for barrier film formation is an inner electrode for barrier film formation that is inserted inside a plastic container having an opening, supplies a medium gas to the inside of the plastic container, and supplies high frequency power to an outer electrode arranged outside the plastic container, thereby generating discharge plasma on the inner surface of the plastic container to form a barrier film on the inner surface of the plastic container, and that is provided with a gas supply pipe having a gas flow path to supply a medium gas and an insulating member screwed into an end portion of the gas supply pipe to be flush therewith and having a gas outlet communicated with the gas flow path.

摘要翻译： 用于形成阻挡膜的内部电极是插入到具有开口的塑料容器内的用于阻挡膜形成的内部电极，将中等气体供应到塑料容器的内部，并将高频电力提供给布置在外部的外部电极 塑料容器，从而在塑料容器的内表面上产生放电等离子体，以在塑料容器的内表面上形成阻挡膜，并且设置有气体供给管，该气体供给管具有供给中等气体的气体流路， 绝缘构件螺纹连接到气体供给管的与其齐平的端部并且具有与气体流路连通的气体出口。

公开(公告)号：US07733563B2

公开(公告)日：2010-06-08

申请号：US11682794

申请日：2007-03-06

申请人： Satoshi Sakai ,  Shigenori Tsuruga ,  Hideo Yamakoshi ,  Shizuma Kuribayashi ,  Minoru Danno ,  Hiroshi Futami ,  Noriko Yamazaki

发明人： Satoshi Sakai ,  Shigenori Tsuruga ,  Hideo Yamakoshi ,  Shizuma Kuribayashi ,  Minoru Danno ,  Hiroshi Futami ,  Noriko Yamazaki

IPC分类号： G02B5/20

CPC分类号： G02B27/0006 ,  B08B7/0035 ,  B08B17/00 ,  G02B1/14

摘要： An optical system has fluoride compounds provided in an environment exposed by vacuum ultraviolet light or plasma light, which has higher photon energy than an absorption wavelength of a base stock of the optical system. 1-layer of a protective film of SiO2 or metal oxides having a film thickness of 2-20 nm is formed at least on the light irradiation side (inner side) of the optical system to prevent the stripping of the fluorine atoms from the surface of the optical system. In addition, the protective film is a 1-layer film selected from one of SiO2, MgO, TiO2, or ZrO2.

摘要翻译： 光学系统具有在由真空紫外线或等离子体光暴露的环境中提供的氟化合物，其具有比光学系统的基础材料的吸收波长更高的光子能量。 至少在光学系统的光照射侧（内侧）形成有SiO 2的保护膜或膜厚度为2-20nm的金属氧化物的1层，以防止氟原子从表面剥离 光学系统。 此外，保护膜是选自SiO 2，MgO，TiO 2或ZrO 2中的一层膜。

公开(公告)号：US20050242379A1

公开(公告)日：2005-11-03

申请号：US10833998

申请日：2004-04-29

申请人： Satoshi Sakai ,  Shigenori Tsuruga ,  Hideo Yamakoshi ,  Shizuma Kuribayashi ,  Minoru Danno ,  Hiroshi Futami ,  Noriko Yamazaki

发明人： Satoshi Sakai ,  Shigenori Tsuruga ,  Hideo Yamakoshi ,  Shizuma Kuribayashi ,  Minoru Danno ,  Hiroshi Futami ,  Noriko Yamazaki

IPC分类号： B08B7/00 ,  B08B17/00 ,  G02B27/00 ,  H01L29/76

CPC分类号： G02B27/0006 ,  B08B7/0035 ,  B08B17/00 ,  G02B1/14

摘要： The objectives of the present invention are to prevent or inhibit the deterioration of optical systems that determine the longevity of an optical apparatus which delivers effects such as light transmission, diffraction, reflection, spectrum generation, and interference, and these combinations, and by so doing, decrease the frequency of maintenance operations such as window replacement and to reduce the costs for such operations. This invention is characterized by steps of creating a near vacuum zone with a presence of active energy to excite an oxidation reaction of carbon wherein the near vacuum zone faces the lighting surfaces of the optical system; generating negative ions or radicals in the near vacuum zone such as unstable chemical seeds containing oxygen atoms, such as OH radicals, OH− ions, ozone, O2− ions, O-radicals; and removing or reducing the accumulated carbon which deposits on the lighting surface, by reacting the deposited carbon with the negative ions or radicals. More specifically, the method according to this invention is characterized by the step of supplying active energy while supplying a flow of gases containing oxygen atoms such as water gas or oxidizing gas (for example, water vapor, oxygen, hydrogen peroxide, ozone or mixtures of said gases with inactive gases (including air)) into the near vacuum zone, thereby removing or reducing the accumulated carbon which deposits on the lighting surface by exciting the oxidation reaction of the accumulated carbon with the supplied active energy.

摘要翻译： 本发明的目的是防止或抑制光学系统的劣化，这些光学系统确定了传递诸如光透射，衍射，反射，光谱产生和干扰的效果的光学装置的寿命，以及这些组合。 ，减少窗户更换等维护操作的频率，降低这种操作的成本。 本发明的特征在于产生具有活性能量的近真空区以激发碳的氧化反应的步骤，其中近真空区面向光学系统的照明表面; 在近真空区域产生负离子或自由基，例如含有氧原子的不稳定的化学种子，例如OH基，OH - ，O 2 - ， - O - 离子，O-自由基; 以及通过使沉积的碳与负离子或自由基反应来除去或减少沉积在照明表面上的积累的碳。 更具体地说，根据本发明的方法的特征在于，在供给含有氧原子的气体流（例如水气或氧化气体（例如水蒸气，氧气，过氧化氢，臭氧或混合气体 所述具有惰性气体（包括空气）的气体）进入近真空区域，从而通过激发累积的碳与所提供的活性能的氧化反应去除或减少沉积在照明表面上的积聚的碳。

公开(公告)号：US20070158598A1

公开(公告)日：2007-07-12

申请号：US11682776

申请日：2007-03-06

申请人： Satoshi Sakai ,  Shigenori Tsuruga ,  Hideo Yamakoshi ,  Shizuma Kuribayashi ,  Minoru Danno ,  Hiroshi Futami ,  Noriko Yamazaki

发明人： Satoshi Sakai ,  Shigenori Tsuruga ,  Hideo Yamakoshi ,  Shizuma Kuribayashi ,  Minoru Danno ,  Hiroshi Futami ,  Noriko Yamazaki

IPC分类号： G01J3/10

CPC分类号： G02B27/0006 ,  B08B7/0035 ,  B08B17/00 ,  G02B1/14

摘要： The objectives of the present invention are to prevent or inhibit the deterioration of optical systems that determine the longevity of an optical apparatus which delivers effects such as light transmission, diffraction, reflection, spectrum generation, and interference, and these combinations, and by so doing, decrease the frequency of maintenance operations such as window replacement and to reduce the costs for such operations. This invention is characterized by steps of creating a near vacuum zone with a presence of active energy to excite an oxidation reaction of carbon wherein the near vacuum zone faces the lighting surfaces of the optical system; generating negative ions or radicals in the near vacuum zone such as unstable chemical seeds containing oxygen atoms, such as OH radicals, OH− ions, ozone, O2− ions, O-radicals; and removing or reducing the accumulated carbon which deposits on the lighting surface, by reacting the deposited carbon with the negative ions or radicals. More specifically, the method according to this invention is characterized by the step of supplying active energy while supplying a flow of gases containing oxygen atoms such as water gas or oxidizing gas (for example, water vapor, oxygen, hydrogen peroxide, ozone or mixtures of said gases with inactive gases (including air)) into the near vacuum zone, thereby removing or reducing the accumulated carbon which deposits on the lighting surface by exciting the oxidation reaction of the accumulated carbon with the supplied active energy.

摘要翻译： 本发明的目的是防止或抑制光学系统的劣化，这些光学系统确定了传递诸如光透射，衍射，反射，光谱产生和干扰的效果的光学装置的寿命，以及这些组合。 ，减少窗户更换等维护操作的频率，降低这种操作的成本。 本发明的特征在于产生具有活性能量的近真空区以激发碳的氧化反应的步骤，其中近真空区面向光学系统的照明表面; 在近真空区域产生负离子或自由基，例如含有氧原子的不稳定的化学种子，例如OH基，OH - ，O 2 - ， - O - 离子，O-自由基; 以及通过使沉积的碳与负离子或自由基反应来除去或减少沉积在照明表面上的积累的碳。 更具体地说，根据本发明的方法的特征在于，在供给含有氧原子的气体流（例如水气或氧化气体（例如水蒸气，氧气，过氧化氢，臭氧或混合气体 所述具有惰性气体（包括空气）的气体）进入近真空区域，从而通过激发累积的碳与所提供的活性能的氧化反应去除或减少沉积在照明表面上的积聚的碳。

公开(公告)号：US20050009172A1

公开(公告)日：2005-01-13

申请号：US10495044

申请日：2003-06-27

申请人： Hideo Yamakoshi ,  Hiroshi Futami ,  Minoru Danno ,  Shigenori Tsuruga ,  Shizuma Kuribayashi

发明人： Hideo Yamakoshi ,  Hiroshi Futami ,  Minoru Danno ,  Shigenori Tsuruga ,  Shizuma Kuribayashi

IPC分类号： G01N27/62 ,  B01D59/44 ,  C12M1/34 ,  H01J49/00 ,  H01J49/10 ,  H01J49/16 ,  H01J49/40 ,  H01J49/42

CPC分类号： H01J49/162 ,  F23J2215/301 ,  H01J49/0063 ,  H01J49/424 ,  H01J49/428

摘要： A vacuum ultraviolet lamp (3) ionizes a chemical substance contained in exhaust gas Gs. The chemical substance ionized is trapped in an ion trapping apparatus (10) in which a radio frequency electric field is formed. Energy is applied to an ion group in the ion trapping apparatus (10) with a SWIFT waveform comprising a frequency component excluding a frequency corresponding to an orbital resonance frequency of ions of the chemical substance to remove an impurity. Energy is then applied to the ion group with a TICKLE waveform having a frequency component corresponding to the orbital resonance frequency of the ions of the chemical substance to fragmentate the ions of the chemical substance. A mass of the fragment is then measured with a mass spectrometer (4) to identify the chemical substance.

摘要翻译： 真空紫外线灯（3）将废气Gs中含有的化学物质电离。 电离的化学物质被捕获在其中形成射频电场的离子俘获装置（10）中。 利用包括除了与化学物质的离子的轨道共振频率相对应的频率的频率分量的SWIFT波形将能量施加到离子捕获装置（10）中的离子组以除去杂质。 然后用具有对应于化学物质的离子的轨道共振频率的频率分量的TICKLE波形将能量施加到离子组，以使化学物质的离子破碎。 然后用质谱仪（4）测量该片段的质量以鉴定化学物质。