Novel epoxy compound having alicyclic structure, polymer, resist composition and patterning process
    4.
    发明申请
    Novel epoxy compound having alicyclic structure, polymer, resist composition and patterning process 失效
    具有脂环结构的新型环氧化合物,聚合物,抗蚀剂组合物和图案化工艺

    公开(公告)号:US20030036603A1

    公开(公告)日:2003-02-20

    申请号:US10167393

    申请日:2002-06-13

    Abstract: Epoxy compounds of formula (1) are provided wherein W is CH2, O or S, X and Y are nullCR1R2null or nullC(nullO)null, k is 0 or 1, R1 and R2 are H or alkyl, or R1 and R2, taken together, may form an aliphatic hydrocarbon ring with the carbon atom to which they are connected. A resist composition comprising a polymer having recurring units of the epoxy compound as a base resin is sensitive to high-energy radiation, has excellent sensitivity, resolution, etching resistance, and minimized swell and lends itself to micropatterning with electron beams or deep-UV. 1

    Abstract translation: 提供式(1)的环氧化合物,其中W是CH 2,O或S,X和Y是-CR 1 R 2 - 或-C(= O) - ,k是0或1,R 1和R 2是H或烷基或R 1 并且R 2一起可以与它们连接的碳原子形成脂族烃环。 包含具有作为基础树脂的环氧化合物的重复单元的聚合物的抗蚀剂组合物对高能量辐射敏感,具有优异的灵敏度,分辨率,耐腐蚀性和最小化的溶胀,并且使其自身具有电子束或深UV的微图形化。

    Method for obtaining taxanes
    10.
    发明授权
    Method for obtaining taxanes 失效
    获得紫杉烷的方法

    公开(公告)号:US07687086B1

    公开(公告)日:2010-03-30

    申请号:US11519310

    申请日:2006-09-11

    Abstract: A method for obtaining a taxane by which a taxane is isolated from a growth medium, such as soil, pumice, perlite, rocks, and/or gravel in which a taxane-producing plant has grown. A method for obtaining a taxane by which a taxane is isolated from water effluent from plantings of living plants (e.g. a yew tree) that produce a taxane have grown in a growth medium, such as soil, pumice, perlite, rocks, and/or gravel.

    Abstract translation: 一种获得紫杉烷的方法,其中紫杉烷从其中生产紫杉烷的植物生长的生长培养基如土壤,浮石,珍珠岩,岩石和/或砾石中分离出来。 一种获得紫杉烷的方法,其生产紫杉烷的活的植物(例如,紫杉树)的种植中的水流出物中分离出紫杉烷,其生长培养基如土壤,浮石,珍珠岩,岩石和/或 碎石。

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