Apparatus and method for focusing and selecting ions and charged particles at or near atmospheric pressure
    3.
    发明授权
    Apparatus and method for focusing and selecting ions and charged particles at or near atmospheric pressure 失效
    在大气压或接近大气压下聚焦和选择离子和带电粒子的装置和方法

    公开(公告)号:US06784424B1

    公开(公告)日:2004-08-31

    申请号:US10155151

    申请日:2002-05-25

    CPC classification number: H01J49/4215

    Abstract: The present invention relates to an apparatus and method for focusing, separating, and detecting gas-phase ions using the principles of quadrupole fields, substantially at or near atmospheric pressure. Ions are entrained in a concentric flow of gas and travel through a high-transmission element into a RF/DC quadrupole, through a second high-transmission element, and then impact on an ion detector, such as a faraday plate; or through an aperture with subsequent identification by a mass spectrometer. Ions with stable trajectories pass through the RF/DC quadrupole while ions with unstable trajectories drift off-axis collide with the rods and are lost. Embodiments of this invention are devices and methods for focusing, separating and detecting gas-phase ions without the need for a vacuum chamber when coupled to atmospheric ionization sources.

    Abstract translation: 本发明涉及一种基本上在大气压或接近大气压的四极场的原理聚焦,分离和检测气相离子的装置和方法。 离子被夹带在同心圆的气体中,并通过第二高传导元件穿过高传输元件进入RF / DC四极杆,然后冲击到诸如法拉第板的离子检测器; 或通过孔径随后通过质谱仪进行识别。 具有稳定轨迹的离子通过RF / DC四极杆,而具有不稳定轨迹的离子偏离轴与棒碰撞并丢失。 本发明的实施例是用于在与大气电离源耦合时不需要真空室的情况下聚焦,分离和检测气相离子的装置和方法。

    Mass spectrometer with a plurality of ionization probes
    4.
    发明授权
    Mass spectrometer with a plurality of ionization probes 有权
    具有多个电离探针的质谱仪

    公开(公告)号:US06501073B1

    公开(公告)日:2002-12-31

    申请号:US09684744

    申请日:2000-10-04

    CPC classification number: H01J49/107 H01J49/04

    Abstract: A multiple sample mass spectrometer having multiple atmospheric pressure ionization probes, each forming an ion spray with passages associated with each of said ion sprays for introducing sample ions into the mass spectrometer for analysis. The flow of ions through selected passages is selectively blocked whereby to permit analysis of ions from selected ionization probes.

    Abstract translation: 具有多个大气压电离探针的多重样品质谱仪,每个形成离子喷雾,其中每个所述离子喷雾与每个离子喷雾相关联,将样品离子引入质谱仪进行分析。 通过选择的通道的离子流被选择性地阻断,从而允许从选定的电离探针分析离子。

    Gas cluster ion beam low mass ion filter
    6.
    发明授权
    Gas cluster ion beam low mass ion filter 有权
    气体簇离子束低质量离子过滤器

    公开(公告)号:US06635883B2

    公开(公告)日:2003-10-21

    申请号:US09727810

    申请日:2000-12-01

    Abstract: Incorporating the use of a permanent magnet within a GCIB apparatus to separate undesirable monomer ions from a gas cluster ion beam to facilitate improved processing of workpieces. In an alternate embodiment, the effect of the permanent magnet may be controlled by the use of an electrical coil. The above system eliminates problems related to power consumption and heat generation.

    Abstract translation: 在GCIB装置中结合使用永磁体,以将不期望的单体离子与气体团簇离子束分离,以促进工件的改进处理。 在替代实施例中,永磁体的作用可以通过使用电线圈来控制。 上述系统消除了与功耗和发热有关的问题。

    Calibration method for quantitative elemental analysis
    7.
    发明授权
    Calibration method for quantitative elemental analysis 有权
    定量元素分析校正方法

    公开(公告)号:US06603119B1

    公开(公告)日:2003-08-05

    申请号:US09567675

    申请日:2000-05-09

    CPC classification number: G01N23/2255

    Abstract: The present invention provides a method of calibrating an analytical tool. The method, in a illustrative embodiment, includes preparing a calibration standard having a known concentration of an element and obtaining a portion of the calibration standard with a focused beam, wherein the calibration standard is representative of the concentration. The portion of the calibration standard is then used to calibrate an analytical tool.

    Abstract translation: 本发明提供一种校准分析工具的方法。 在说明性实施例中,该方法包括制备具有已知浓度的元件并且用聚焦光束获得校准标准的一部分的校准标准,其中校准标准代表浓度。 然后将校准标准品的一部分用于校准分析工具。

    Multi-inlet mass spectrometer for analysis of liquid samples by electrospray or atmospheric pressure ionization
    8.
    发明授权
    Multi-inlet mass spectrometer for analysis of liquid samples by electrospray or atmospheric pressure ionization 有权
    用于通过电喷雾或大气压电离分析液体样品的多入口质谱仪

    公开(公告)号:US06410915B1

    公开(公告)日:2002-06-25

    申请号:US09335116

    申请日:1999-06-17

    Abstract: An electrospray and/or atmospheric pressure ionization mass spectrometer includes an evacuated chamber, a sampling region within which is maintained a pressure greater than in the evacuation chamber, a sampling orifice that communicates between the sampling region and the evacuation chamber, and a mass analyzer that receives charged particles along a first axis through the sampling orifice from the sampling region into the evacuated chamber. A plurality of charged-particle jet generators, each having an associated jet axis, are adapted to be alternatively, selectively aligned such that a respective jet axis intersects with the first axis associated with the mass analyzer. This alignment is performed through the use of a hollow member which functions to guide charged particles through the sampling orifice to the evacuated chamber and, subsequently, to the mass analyzer.

    Abstract translation: 电喷雾和/或大气压电离质谱仪包括抽真空室,其中保持比抽真空室大的压力的采样区域,在取样区域和排气室之间连通的采样孔,以及质量分析器, 沿着第一轴将带电粒子从采样区域接收到抽真空室中。 多个带有相关联的射流轴的带电粒子射流发生器适于可选择地对准,使得相应的射流轴线与与质量分析器相关联的第一轴线相交。 该对准是通过使用中空构件进行的,中空构件用于将带电粒子引导通过采样孔到达真空室,随后引导到质量分析器。

    Ion implantation process
    9.
    发明授权
    Ion implantation process 失效
    离子注入工艺

    公开(公告)号:US06184536B2

    公开(公告)日:2001-02-06

    申请号:US09208507

    申请日:1998-12-09

    CPC classification number: H01L21/26513 H01L21/2658 H01L29/66757

    Abstract: An ion implantation process comprises performing mass separation of ions from an ionised source of phosphorus so as to select the P2 ions and reject phosphorus hydride ion species. The P2 ions are injected into a semiconductor substrate. The rejection of phosphorus hydride ions species is facilitated because there are no such species adjacent (in terms of effective mass) the P2 ion species. The use of the P2 ion species also improves the implantation process for shallow implantation depths.

    Abstract translation: 离子注入工艺包括从离子化的磷源中进行离子的质量分离,以便选择P2离子并排除磷氢离子物质。 将P2离子注入半导体衬底。 磷氢化物离子种类的排斥是有利的,因为没有这样的物质邻近(有效质量)P2离子种类。 P2离子种类的使用也改善了浅埋植深度的植入过程。

    Mass spectrometer system
    10.
    发明授权

    公开(公告)号:US06828551B2

    公开(公告)日:2004-12-07

    申请号:US10679454

    申请日:2003-10-07

    Applicant: Yoshiaki Kato

    Inventor: Yoshiaki Kato

    CPC classification number: H01J49/107 H01J49/0095 H01J49/061

    Abstract: There is provided an analyzer system capable of easily improving the efficiency of a charge reduction due to ion/ion reactions. A mass spectrometer system includes: a first ion source for ionizing a sample to be measured; a second ion source for producing ions of a polarity reversed from that of the ions produced in said first ion source; an ion deflector for introducing and deflecting the ions of said first and second ion sources; an ion-trap mass spectrometer including a ring electrode and a pair of endcap electrodes; and a detector for detecting the ions ejected from the mass spectrometer, wherein the ions from said first and second ion sources are introduced together through the ion deflector into the ion-trap mass spectrometer; the ions from the two ion sources are mixed in the ion-trap mass spectrometer; and in that the ions are then detected in the detector. Reactant ions can be sufficiently supplied to improve the efficiency of the charge reduction due to the ion/ion reactions

Patent Agency Ranking