MEASUREMENT METHOD, SHAPING DEVICE, SIMULATOR, MEASUREMENT DEVICE, AND STORAGE MEDIUM

    公开(公告)号:US20240262021A1

    公开(公告)日:2024-08-08

    申请号:US18423426

    申请日:2024-01-26

    发明人: YOSHIHIRO SHIODE

    IPC分类号: B29C43/58 B29C43/44

    摘要: A measurement method of measuring deflection of a mold by measuring Newton's rings obtained by pressing the mold on a substrate with a resist interposed therebetween and irradiating the substrate with light via the mold includes: performing the pressing through the resist having a height less than an optical distance λ/4, λ being a wavelength of the light; measuring peak positions of the Newton's rings in a contact boundary portion between the mold and the substrate in a region in which a gap between the mold and the substrate is less than the optical distance λ/4; and calculating the deflection of the mold based on the peak positions.

    IMPRINT APPARATUS, IMPRINT METHOD AND ARTICLE MANUFACTURING METHOD

    公开(公告)号:US20240210820A1

    公开(公告)日:2024-06-27

    申请号:US18535137

    申请日:2023-12-11

    发明人: Keisuke KIMURA

    IPC分类号: G03F7/00 B29C43/58 B29C59/00

    摘要: An imprint apparatus including a mold holding unit configured to hold a mold, an adjusting unit configured to adjust a pressure difference between a first pressure on a second surface on an opposite side of a first surface on which a pattern of the mold held by the mold holding unit is formed and a second pressure in a first space between a substrate and the first surface of the mold, and a control unit configured to control an imprint process, wherein the imprint process includes a separation process of separating the mold from a pattern made of a cured product of an imprint material on the substrate, and the control unit controls, in the separation process, the adjustment of the pressure difference by the adjusting unit so that the first pressure is smaller than the second pressure.

    Molding method, molding apparatus, molding system, and article manufacturing method

    公开(公告)号:US11787092B2

    公开(公告)日:2023-10-17

    申请号:US17487307

    申请日:2021-09-28

    发明人: Hiroshi Sato

    IPC分类号: C23F1/00 B29C43/58 B29C43/20

    摘要: The present invention provides a molding method of molding, using a mold, an uncured composition arranged on a substrate as a film continuously covering a surface of the substrate, including obtaining unevenness information concerning an unevenness of a surface of an uncured first composition arranged as the film on the substrate, arranging a droplet of an uncured second composition on a concave portion of the surface of the first composition based on the unevenness information obtained in the obtaining, and after the arranging the droplet is performed, molding a composition including the film of the first composition and the droplet of the second composition by the mold.

    MULTILAYER CORE MOLDING METHOD
    10.
    发明公开

    公开(公告)号:US20230182353A1

    公开(公告)日:2023-06-15

    申请号:US18164614

    申请日:2023-02-06

    IPC分类号: B29C43/18 B29C43/20 B29C43/58

    摘要: A multilayer core molding method includes: an upstream process of obtaining an intermediate molded body 33; and a downstream process of performing molding using a downstream process molding apparatus 2, and wherein the downstream process includes: an intermediate molded body arrangement step of arranging the intermediate molded body on the intermediate plate cavity surface or the first downstream process mold cavity surface; and a first vulcanization step, performed after the intermediate molded body arrangement step, of vulcanization-molding the intermediate molded body until it is substantially or completely vulcanized, in a state in which at least the first downstream process mold and the intermediate plate are closed against each other.