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公开(公告)号：US20240291226A1
公开(公告)日：2024-08-29
申请号：US18571826
申请日：2022-06-02
申请人： Cymer, LLC
发明人： Siyu Chen , Spencer Ryan Williams
CPC分类号： H01S3/134 , H01S3/036 , H01S3/1305 , H01S3/225 , H01S3/2308 , H01S3/2366 , G03F7/2004 , G03F7/70025
摘要： A gas control apparatus includes a control system in communication with a gas discharge chamber. The control system includes a performance monitoring module configured to, during standard mode of operation of the gas discharge chamber and in between performance of gas recovery schemes on the gas discharge chamber that use a gas recovery setting: compare one or more performance parameters of the gas discharge chamber to respective thresholds; determine whether the gas recovery setting needs to be adjusted based on the comparison; and adjust the value for the gas recovery setting based on the determination. The control system includes a gas recovery module configured to perform the gas recovery scheme, the gas recovery module being configured to access the most recently adjusted value for the gas recovery setting from the performance monitoring module when performing the current gas recovery scheme.
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公开(公告)号：US11988966B2
公开(公告)日：2024-05-21
申请号：US15734359
申请日：2019-05-16
申请人： Cymer, LLC
发明人： Andrei Dorobantu , Shreyas Bhaban
CPC分类号： G03F7/70025 , G03F7/70483 , H01S3/036 , H01S3/097 , H01S3/10069 , H01S3/134 , H01S3/225 , H01S3/2308
摘要： A system includes an optical source configured to emit a pulsed light beam, the optical source comprising one or more chambers, each of the one or more chambers configured to hold a gaseous gain medium, the gaseous gain medium being associated with an assumed gas life; at least one detection module configured to: receive and analyze data related to the pulsed light beam, and produce a beam quality metric based on the data related to the pulsed light beam; and a monitoring module configured to: analyze the beam quality metric, determine a health status of the gaseous gain medium based on the analysis of the beam quality metric, and produce a status signal based on the determined health status, the status signal indicating whether to extend use of the gaseous gain medium beyond the assumed gas life or to end use of the gaseous gain medium.
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公开(公告)号：US11695248B2
公开(公告)日：2023-07-04
申请号：US17665087
申请日：2022-02-04
申请人： Gigaphoton Inc.
发明人： Keisuke Ishida
CPC分类号： H01S3/1024 , H01S3/094076 , H01S3/10015
摘要： A laser device may include a laser resonator; a chamber arranged on an optical path of the laser resonator; a pair of electrodes arranged in the chamber; a power source applying a voltage to the electrodes; a storage unit storing a voltage value; and a control unit configured to set an application voltage value of the voltage applied to the electrodes as setting the application voltage value for outputting a pulse whose pulse number is equal to or larger than 1 and smaller than i based on the voltage command value and the voltage value stored in the storage unit, and setting the application voltage for outputting a pulse whose pulse number is equal to or larger than i and smaller than j based on the voltage command value and an offset value corresponding to the voltage command value, where i>1 and j>i.
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4.发明授权公开(公告)号：US11502478B2
公开(公告)日：2022-11-15
申请号：US16674918
申请日：2019-11-05
申请人： Gigaphoton Inc.
发明人： Hiroyuki Masuda , Osamu Wakabayashi
摘要： A laser apparatus according to the present disclosure includes: a laser output unit configured to perform laser oscillation; and a control unit configured to acquire first laser performance data obtained when the laser output unit performs laser oscillation based on a first laser control parameter, and second laser performance data obtained when the laser output unit performs laser oscillation based on a second laser control parameter, while laser output from the laser output unit to an external device is stopped, and determine whether the second laser performance data has been improved as compared to the first laser performance data.
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公开(公告)号：US20220255288A1
公开(公告)日：2022-08-11
申请号：US17612035
申请日：2020-05-15
申请人： Cymer, LLC
发明人： Walter Dale Gillespie , Joshua Jon Thornes , Thomas Patrick Duffey , Eric Anders Mason , Rabin Paudel
摘要： Apparatus for and method of generating multiple laser beams using multiple laser chambers. The relative timing of the beams is controllable so they may, for example, be interleaved, may overlap, or be prevented from overlapping, or may occur in rapid sequence. The beams may have different spectral and power characteristics such as different wavelengths. Also disclosed is a system in which at least one of the multiple laser chambers is configured to generate radiation of two different wavelengths.
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公开(公告)号：US11289874B2
公开(公告)日：2022-03-29
申请号：US16929340
申请日：2020-07-15
申请人： Fanuc Corporation
发明人： Satoshi Kagiwada
摘要： A control device that can apply a laser oscillator control device to various types of systems. The control device includes an analog signal input unit configured to receive an output control signal for controlling a laser output of the laser oscillator or a mode control signal for controlling an operation mode of the laser oscillator as an analog signal; a digital signal input unit configured to receive the output control signal or the mode control signal as a digital signal; and a controller configured to transmit a laser command for controlling the laser output to the laser oscillator in response to the output control signal received by the analog signal input unit or the digital signal input unit, and transmit an operation command for operating the laser oscillator to the laser oscillator in the operation mode in response to the mode control signal received by the analog signal input unit or the digital signal input unit.
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公开(公告)号：US11050210B2
公开(公告)日：2021-06-29
申请号：US16730065
申请日：2019-12-30
申请人： Gigaphoton Inc.
IPC分类号： H01S3/04 , H01S3/041 , H01G2/08 , H01S3/034 , H01S3/038 , H01S3/097 , H01S3/0975 , H01S3/032 , G03F7/20 , H01S3/134 , H01S3/036 , H01S3/0971
摘要： To cool a capacitor including a first electrode and a second electrode, a capacitor cooling structure includes: a conducting part electrically connected with the first electrode; an insulating part that has a first surface including a first position and a second surface including a second position, and is connected with the conducting part at the first position; a first fastening part configured to fasten the conducting part and the insulating part to each other; and a cooling part connected with the second position facing the first position, the conducting part and the cooling part being electrically insulated from each other by the insulating part.
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公开(公告)号：US11043788B2
公开(公告)日：2021-06-22
申请号：US16579653
申请日：2019-09-23
发明人： Jingbiao Chen , Tiantian Shi
摘要： The present disclosure provides a dark cavity laser, including: a frequency stabilized laser output device configured to generate a laser light, and perform a frequency stabilized processing on the generated laser light to output it to the dark cavity laser device as a pump light of a gain medium of a dark cavity; and a dark cavity laser device including a main cavity, and a cavity of the main cavity is provided inside with a gas chamber of a gain medium of a dark cavity laser light, where the gain medium of the dark cavity laser light is alkali metal atoms; the dark cavity laser device is configured to receive the pump light, and form a polyatomic coherent stimulated radiation between transition levels of the alkali metal atoms in the gas chamber by a weak feedback of the main cavity to generate the dark cavity laser light.
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公开(公告)号：US10897118B2
公开(公告)日：2021-01-19
申请号：US16052658
申请日：2018-08-02
申请人： Gigaphoton Inc.
发明人： Yoshiaki Kurosawa
IPC分类号： H01S3/23 , H01S3/104 , H01S3/10 , H01S5/0683 , H01S3/00 , H01S5/34 , H01S3/223 , H01S5/40 , H01S3/134 , H05G2/00 , G03F7/20
摘要： The laser apparatus includes a master oscillator, an amplifier, a power source, and a controller to control the power source. The controller controls the power source such that an excitation intensity of the amplifier in a burst oscillation period performing the burst oscillation is a first excitation intensity, controls the power source such that, if the predetermined repetition frequency is a first repetition frequency, an excitation intensity of the amplifier in a suspension period suspending the burst oscillation is a second excitation intensity equal to or lower than the first excitation intensity, and controls the power source such that, if the predetermined repetition frequency is a second repetition frequency higher than the first repetition frequency, the excitation intensity of the amplifier in the suspension period is a third excitation intensity lower than the second excitation intensity.
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公开(公告)号：US10777961B2
公开(公告)日：2020-09-15
申请号：US15950267
申请日：2018-04-11
发明人： Robert Schulz , Torsten Beck
摘要： Methods, devices, and apparatus for generating plasma or laser pulses by radio frequency (RF) excitation pulses are provided. In one aspect, a method includes specifying radio frequency (RF) excitation pulses at least partially as a function of a preceding RF excitation of a medium and outputting a signal to a RF pulse generator, the signal configured to cause the RF pulse generator to generate the specified RF excitation pulses for exciting the medium to generate plasma or laser pulses. The RF excitation pulses is specified to become more strongly reduced in energy when a remaining excitation of the medium by the preceding RF excitation is higher.
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