公开(公告)号：EP1668313B1

公开(公告)日：2018-01-31

申请号：EP04784260.4

申请日：2004-09-15

Applicant: Cymer, LLC

Inventor： RAO, Rajasekhar, M. ,  MELCHIOR, John, T. ,  GLATZEL, Hoger, K.

IPC: G01B9/02 ,  G01J3/02 ,  G01J3/26 ,  G01J9/02

CPC classification number: G01J3/26 ,  G01J3/02 ,  G01J3/027 ,  G01J9/0246

Abstract: A wavemeter and method for measuring bandwidth for a high repetition rate gas discharge laser having an output laser bean comprising a pulsed output of greater than or equal to 15 mJ per pulse, sub-nanometer bandwidth tuning range pulses having a femptometer bandwidth precision and tens of femptometers bandwidth accuracy range, for measuring bandwidth on a pulse to pulse basis at pulse repetition rates of 4000Hz and above, is disclosed which may comprise a focusing lens having a focal length; an optical interferometer creating an interference fringe pattern; an optical detection means positioned at the focal length from the focusing lens; and a bandwidth calculator calculating bandwidth from the position of interference fringes in the interference fringe pattern incident on the optical detection means, defining a DID and a DOD, the respective distances between a pair of first fringe borders and between a pair of second fringe borders in the interference pattern on an axis of the interference pattern, and according to the formula Deltalambda= lambda0 [DOD DID2] / [8f -D0 ] where lambda0 is an assumed constant wavelength and D0 = (DOD - DID)2, and f is the focal length.

公开(公告)号：EP3152624A4

公开(公告)日：2018-01-24

申请号：EP15802551

申请日：2015-06-03

Applicant: CYMER LLC ,  ASML NETHERLANDS BV

Inventor： DUFFEY THOMAS PATRICK ,  GODFRIED HERMAN PHILIP

IPC: G01J3/14 ,  G01J3/02 ,  G01J3/26 ,  G01J3/28 ,  G03F7/00 ,  G03F7/20

CPC classification number: G01J3/28 ,  G01J3/027 ,  G01J3/14 ,  G01J3/26 ,  G01J9/00 ,  G01J11/00 ,  G01J2003/2853 ,  G03F7/70041 ,  G03F7/70058 ,  G03F7/70575

Abstract: A method is described for estimating a spectral feature of a pulsed light beam produced by an optical source and directed toward a wafer of a lithography apparatus. The method includes receiving a set of N optical spectra of pulses of the light beam; saving the received N optical spectra to a saved set; transforming the optical spectra in the saved set to form a set of transformed optical spectra; averaging the transformed optical spectra to form an averaged spectrum; and estimating a spectral feature of the pulsed light beam based on the averaged spectrum.

公开(公告)号：EP3268707A1

公开(公告)日：2018-01-17

申请号：EP16710612.9

申请日：2016-03-08

Applicant: Corning Incorporated

Inventor： ERTEL, John Phillip ,  KING, Jeffrey Stapleton

IPC: G01J3/02 ,  G01J3/18

CPC classification number: G01J3/427 ,  G01J3/0205 ,  G01J3/0237 ,  G01J3/0256 ,  G01J3/0259 ,  G01J3/0264 ,  G01J3/0272 ,  G01J3/0291 ,  G01J3/18 ,  G01J3/1895 ,  G01J3/26 ,  G01N21/31 ,  G01N21/43 ,  G01N21/552 ,  G01N21/648 ,  G01N2201/0221 ,  G01N2201/024

Abstract: A spectrophotometer optics system is provided. The spectrophotometer optics system includes an optical sensing array and an optical waveguide including an input side and an output side. The input side of the optical waveguide receives input light and the optical sensing array is located at the output side of optical waveguide. The optical waveguide is configured to carry light to be analyzed by total internal reflection to the output side of the optical waveguide and to direct the light to be analyzed toward the optical sensing array. The spectrophotometer optics system includes an optical dispersive element configured to separate the light to be analyzed into separate wavelength components, and the optical dispersive element is supported by the optical waveguide.

公开(公告)号：EP3241002A4

公开(公告)日：2018-01-10

申请号：EP15875303

申请日：2015-12-18

Applicant: TEKNOLOGIAN TUTKIMUSKESKUS VTT OY

Inventor： VARPULA AAPO ,  HOLMLUND CHRISTER ,  RISSANEN ANNA

IPC: G01J3/26 ,  B81B7/00 ,  G02B5/08 ,  G02B5/28 ,  G02B26/00

CPC classification number: G01J3/26 ,  B81B7/00 ,  G01J3/0286 ,  G01J3/0297 ,  G02B5/0825 ,  G02B5/284 ,  G02B27/142

Abstract: A mirror plate (100) for a Fabry-Perot interferometer (300) comprises: - a substrate (50), which comprises silicon (Si), - a semi-transparent reflective coating (110) implemented on the substrate (50), - a de-coupling structure (DC1) formed on the substrate (50), - a first sensor electrode (G1a) formed on top of the de-coupling structure (DC1), and - a second sensor electrode (G1b), wherein the de-coupling structure (DC1) comprises an electrically insulating layer (60a), and a first stabilizing electrode (G0a), which is located between the first sensor electrode (G1a) and the substrate (50).

公开(公告)号：EP3092468A4

公开(公告)日：2017-12-13

申请号：EP15799973

申请日：2015-05-01

Applicant: GHGSAT INC

Inventor： SLOAN JAMES J ,  DURAK BERKÉ ,  GAINS DAVID ,  RICCI FRANCESCO ,  MCKEEVER JASON ,  LAMORIE JOSHUA ,  SDAO MARK ,  LATENDRESSE VINCENT ,  LAVOIE JONATHAN ,  KRUZELECKY ROMAN

IPC: G01J3/45 ,  G01B9/02 ,  G01J3/26 ,  G01J3/42 ,  G01J3/443

CPC classification number: G01J3/26 ,  G01J3/28 ,  G01J3/2823 ,  G01J3/42 ,  G01N2021/1793 ,  G01N2021/3531

Abstract: Systems, methods, and devices relating to optical imaging systems for gathering data on atmospheric trace gas emissions from a satellite. An optical system used in the satellite has a Fabry-Perot interferometer coupled to a suitable telescope. The interferometer is a wide angle Fabry-Perot interferometer which creates a fringing pattern in concentric circles with each fringe being a different wavelength on the imaging system. A filter is used with the optical system and allows multiple adjacent modes in a selected spectral range to pass through the interferometer to the imaging system. Each pixel in the imaging system collects light at multiple wavelengths within the selected spectral range. The optical system gathers multiple images of the target area allowing light from the target area to be collected at multiple different wavelengths. Different absorption data for different atmospheric trace gases can be gathered in a single satellite pass over the target area.

公开(公告)号：EP3060890A4

公开(公告)日：2017-11-22

申请号：EP14855616

申请日：2014-10-21

Applicant: TEKNOLOGIAN TUTKIMUSKESKUS VTT OY

Inventor： ANTILA JARKKO ,  TENHUNEN JUSSI

IPC: G01J3/26 ,  G01J3/44 ,  G01J3/45 ,  G01N21/65 ,  G02B5/28 ,  G02B26/00

CPC classification number: G01J3/26 ,  G01J3/44 ,  G01N21/65 ,  G02B5/28 ,  G02B26/00

Abstract: A device and a method for optical measurement of a target, wherein the target is irradiated with radiation beam (15) and a measurement beam (27) is received from the target and detected. Commonly used absorbance, reflectance and fluorescence measurements do not provide adequate information in e.g. measuring small contents of sulphur compounds. The present solution provides a new Raman spectrometer which is suitable for mass applications. A target is activated with pulses of a laser diode (12). The Raman signatures are measured and integrated successively with a point detector (44). A Fabry-Perot interferometer (42) on the measurement path is successively controlled into corresponding pass bands. While high spectral resolution or range is not required it is possible to use small-sized and low cost components.

公开(公告)号：EP3190394A3

公开(公告)日：2017-11-15

申请号：EP16204270.9

申请日：2016-12-15

Applicant: Applied Spectral Imaging Ltd.

Inventor： KATZIR, Nir

IPC: G01J3/51 ,  G01J3/26 ,  G01J3/28 ,  G01J3/453 ,  G02B26/00 ,  G01B9/02 ,  G06T5/00 ,  H01L27/146 ,  H04N5/33 ,  H04N9/04

CPC classification number: H04N5/332 ,  G01B11/24 ,  G01B11/2441 ,  G01J3/0229 ,  G01J3/26 ,  G01J3/2823 ,  G01J3/45 ,  G01J3/453 ,  G01J3/513 ,  G01J2003/2826 ,  G02B26/001 ,  G06T5/002 ,  H01L27/14621 ,  H04N9/045

Abstract: A spectral imaging system comprises: a sequential optical system providing a temporal sequence of output light beams describing the scene; a color imager receiving the output light beams and responsively generating, for each output light beam, an image signal that is spatially resolved into a plurality of color channels. The system can also comprise an image processor that collectively process the image signals to construct a spectral image of the scene.

公开(公告)号：EP2399098A4

公开(公告)日：2017-11-15

申请号：EP09840534

申请日：2009-02-23

Applicant: DIMENSIONAL PHOTONICS INT INC

Inventor： DILLON ROBERT F ,  JUDELL NEIL H K ,  FILLION TIMOTHY I ,  SINGH GURPREET ,  WALLACE NATHAN E

IPC: G01B11/25 ,  G01B11/24 ,  G01J3/02 ,  G01J3/26 ,  G01J3/45 ,  G02B5/32 ,  G02B21/36 ,  G02B26/06 ,  G02B27/00

CPC classification number: G02B26/06 ,  G01B11/2441 ,  G01B11/2527 ,  G01J3/0229 ,  G01J3/26 ,  G01J3/45 ,  G02B5/32 ,  G02B21/361 ,  G02B27/0068 ,  G02B27/0087 ,  G02B2207/117 ,  G06T2200/04 ,  G06T2200/08

Abstract: Described are a method and apparatus for high-speed phase shifting of an optical beam. A transparent plate having regions of different optical thickness is illuminated by an optical beam along a path of incidence that extends through the regions. The transparent plate can be moved or the optical beam can be steered to generate the path of incidence. The optical beam exiting the transparent plate has an instantaneous phase value according to the region in which the optical beam is incident. Advantageously, the phase values are repeatable and stable regardless of the location of incidence of the optical beam within the respective regions, and phase changes at high modulation rates are possible. The method and apparatus can be used to modulate a phase difference of a pair of coherent optical beams such as in an interferometric fringe projection system.

公开(公告)号：EP3218669A1

公开(公告)日：2017-09-20

申请号：EP15859931.6

申请日：2015-11-11

Applicant: ABDULHALIM, Ibrahim

Inventor： ABDULHALIM, Ibrahim

IPC: G01B9/02 ,  G01N21/21 ,  G02F1/133 ,  G02B5/30 ,  A61B5/00

CPC classification number: G01J3/447 ,  G01B2210/56 ,  G01J3/26 ,  G01J3/2823 ,  G01J3/4412 ,  G01J3/45 ,  G01J4/00 ,  G01J2003/1269 ,  G01J2003/2826 ,  G01J2003/451 ,  G01N21/21 ,  G01N21/4738 ,  G01N21/64 ,  G01N21/65 ,  G01N21/8422 ,  G02B27/286 ,  G02F1/13471 ,  G02F1/1393 ,  G02F2203/055 ,  G02F2203/12

Abstract: A system is described that combines spectropolarimetry with scatterometry. The system uses an annular mirror and liquid crystal devices to control the angle of the incident light cone, the polarization and wavelength, an imaging setup and one or more video cameras so that spectroseopic-polarimetric-scatterometric images can be grabbed rapidly. The system is also designed to incorporate additional imaging modes such as interference, phase contrast, fluorescence and Raman spectropolarimetric imaging.

Abstract translation: 描述了一种将光谱测量与散射测量相结合的系统。 该系统使用环形镜和液晶设备来控制入射光锥的角度，偏振和波长，成像设置以及一个或多个视频摄像机，从而可以快速获取分光镜偏振散射图像。 该系统还设计用于结合额外的成像模式，如干涉，相衬，荧光和拉曼光谱偏振成像。

公开(公告)号：EP3215818A1

公开(公告)日：2017-09-13

申请号：EP15857933.4

申请日：2015-11-05

Applicant: Ramot at Tel-Aviv University Ltd.

Inventor： SCHLEYEN, Ran ,  RAZ, Ariel ,  MENDLOVIC, David

IPC: G01J3/28

CPC classification number: G01J3/0229 ,  G01J3/26 ,  G01J2003/1243

Abstract: An imaging system and method are presents for use in reconstructing spectral data of an object. The imaging system comprises: an optical unit; a pixel array of a detector; and a data processor for receiving and processing image data indicative of light detected by the pixel array and generating reconstructed spectral data of the object being imaged. The optical unit is configured and operable for applying a predetermined coding to an input light field while creating an optical image thereof on a detection plane defined by the pixel array. Therefore, the image data is a function of the predetermined coding and a spectrum of the object to be determined.

Abstract translation: 呈现用于重建物体的光谱数据的成像系统和方法。 成像系统包括：光学单元; 检测器的像素阵列; 以及数据处理器，用于接收和处理表示由所述像素阵列检测到的光的图像数据并且生成被成像的对象的重建光谱数据。 光学单元被配置并可操作用于将预定编码应用于输入光场，同时在由像素阵列限定的检测平面上产生其光学图像。 因此，图像数据是预定编码和要确定的对象的光谱的函数。